DK1085327T3 - Flerpunktsprobe - Google Patents

Flerpunktsprobe

Info

Publication number
DK1085327T3
DK1085327T3 DK99610052T DK99610052T DK1085327T3 DK 1085327 T3 DK1085327 T3 DK 1085327T3 DK 99610052 T DK99610052 T DK 99610052T DK 99610052 T DK99610052 T DK 99610052T DK 1085327 T3 DK1085327 T3 DK 1085327T3
Authority
DK
Denmark
Prior art keywords
conductive
multitude
probe
probe arms
point
Prior art date
Application number
DK99610052T
Other languages
Danish (da)
English (en)
Inventor
Francois Grey
Christian Leth Petersen
Ulrich Quaade
Peter Folmer Nielsen
Peter Boggild
Original Assignee
Capres As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8242558&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DK1085327(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Capres As filed Critical Capres As
Application granted granted Critical
Publication of DK1085327T3 publication Critical patent/DK1085327T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
DK99610052T 1999-09-15 1999-09-15 Flerpunktsprobe DK1085327T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99610052A EP1085327B1 (fr) 1999-09-15 1999-09-15 Sonde à points multiples

Publications (1)

Publication Number Publication Date
DK1085327T3 true DK1085327T3 (da) 2006-10-09

Family

ID=8242558

Family Applications (1)

Application Number Title Priority Date Filing Date
DK99610052T DK1085327T3 (da) 1999-09-15 1999-09-15 Flerpunktsprobe

Country Status (7)

Country Link
EP (2) EP1085327B1 (fr)
JP (1) JP4685309B2 (fr)
AT (2) ATE329272T1 (fr)
CA (1) CA2381803A1 (fr)
DE (1) DE69931778T2 (fr)
DK (1) DK1085327T3 (fr)
WO (1) WO2001020347A1 (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002063272A2 (fr) * 2001-02-06 2002-08-15 Parallel Synthesis Technologies Dispositif de depot microfabrique destine a former des jeux ordonnes de microdepots de faible cout
ATE519119T1 (de) 2002-01-07 2011-08-15 Capres As Elektrisches rückkopplungs-detektionssystem für mehrpunktsonden
US6924653B2 (en) 2002-08-26 2005-08-02 Micron Technology, Inc. Selectively configurable microelectronic probes
EP1780550A1 (fr) * 2005-10-31 2007-05-02 Capres A/S Sonde pour tester les propiétés électriques d'échantillons de test
US7511510B2 (en) * 2005-11-30 2009-03-31 International Business Machines Corporation Nanoscale fault isolation and measurement system
JP5030624B2 (ja) * 2007-03-13 2012-09-19 株式会社ヒューモラボラトリー 回転式電極子装置
US20100176396A1 (en) 2007-07-03 2010-07-15 Advantest Corporation Probe, probe card, and method of production of probe
JP5100751B2 (ja) * 2007-07-03 2012-12-19 株式会社アドバンテスト プローブおよびプローブカード
EP2237052A1 (fr) 2009-03-31 2010-10-06 Capres A/S Manipulation de sonde automatique multipoints
TWI497084B (zh) * 2010-09-30 2015-08-21 Ismeca Semiconductor Holding 電性接點及測試平台
EP2677324A1 (fr) 2012-06-20 2013-12-25 Capres A/S Sonde multipoint à gravure profonde
WO2016138398A1 (fr) 2015-02-26 2016-09-01 Xallent, LLC Systèmes et procédés de fabrication de sondes de système nano-électromécanique
JP2018510364A (ja) * 2015-02-26 2018-04-12 クサレント リミテッド ライアビリティー カンパニー 集積マルチチップ走査型プローブ顕微鏡
US10866273B2 (en) 2016-03-09 2020-12-15 Xallent, LLC Functional prober chip
CN105785083B (zh) * 2016-04-12 2019-01-15 义乌臻格科技有限公司 一种耙状悬臂梁结构的微探针及其制备方法
WO2018187525A1 (fr) 2017-04-06 2018-10-11 Kwame Amponsah Dispositifs nanoélectromécaniques à contacts métal-métal
US10663484B2 (en) 2018-02-14 2020-05-26 Xallent, LLC Multiple integrated tips scanning probe microscope with pre-alignment components
US11740279B2 (en) 2020-04-24 2023-08-29 Kla Corporation Measuring temperature-modulated properties of a test sample
CN114387902B (zh) * 2022-01-05 2024-01-12 蚌埠高华电子股份有限公司 一种lcd电阻标识测试配合装置及使用方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0078339B1 (fr) * 1981-10-30 1986-07-30 Ibm Deutschland Gmbh Dispositif de test pour pistes de circuit imprimé ayant au moins une tête comportant une multitude de contacts flexibles
GB8511169D0 (en) * 1985-05-02 1985-06-12 Plessey Co Plc Probes
US6127681A (en) * 1987-08-12 2000-10-03 Olympus Optical Co., Ltd. Scanning tunnel microscope
JPH081382B2 (ja) * 1990-10-31 1996-01-10 インターナショナル・ビジネス・マシーンズ・コーポレイション ナノメートル・スケールのプローブ及びその製造方法
US5172050A (en) * 1991-02-15 1992-12-15 Motorola, Inc. Micromachined semiconductor probe card
US5347226A (en) * 1992-11-16 1994-09-13 National Semiconductor Corporation Array spreading resistance probe (ASRP) method for profile extraction from semiconductor chips of cellular construction
US5321977A (en) * 1992-12-31 1994-06-21 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
JP2875128B2 (ja) * 1993-01-22 1999-03-24 シャープ株式会社 梁およびその製造方法
US5475318A (en) * 1993-10-29 1995-12-12 Robert B. Marcus Microprobe
JP2599895B2 (ja) * 1994-06-23 1997-04-16 山一電機株式会社 プローブユニットとその製法
DE4440758A1 (de) * 1994-11-15 1996-05-23 Klocke Volker Elektromechanische Positioniereinheit
JPH08330369A (ja) * 1995-05-31 1996-12-13 Hewlett Packard Japan Ltd プローバ用インターフェースカード
KR100202998B1 (ko) * 1995-12-02 1999-06-15 남재우 마이크로 팁을 갖는 웨이퍼 프로브 카드 및 그 제조방법
JP3022312B2 (ja) * 1996-04-15 2000-03-21 日本電気株式会社 プローブカードの製造方法
JPH1019971A (ja) * 1996-07-04 1998-01-23 Mitsubishi Electric Corp ロードプル測定システム，ソースプル測定システム，及びインピーダンスチューナ

Also Published As

Publication number Publication date
WO2001020347A1 (fr) 2001-03-22
DE69931778T2 (de) 2007-06-14
ATE329272T1 (de) 2006-06-15
EP1698905B9 (fr) 2012-01-18
EP1698905B1 (fr) 2011-07-20
EP1085327B1 (fr) 2006-06-07
CA2381803A1 (fr) 2001-03-22
EP1698905A2 (fr) 2006-09-06
EP1085327A1 (fr) 2001-03-21
EP1698905A3 (fr) 2007-07-18
JP2003509695A (ja) 2003-03-11
JP4685309B2 (ja) 2011-05-18
ATE517352T1 (de) 2011-08-15
DE69931778D1 (de) 2006-07-20

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