DK0908923T3 - Apparatur til tilvejebringelse af en udbredt induktiv plasma til plasmabearbejdning - Google Patents

Apparatur til tilvejebringelse af en udbredt induktiv plasma til plasmabearbejdning

Info

Publication number
DK0908923T3
DK0908923T3 DK98401199T DK98401199T DK0908923T3 DK 0908923 T3 DK0908923 T3 DK 0908923T3 DK 98401199 T DK98401199 T DK 98401199T DK 98401199 T DK98401199 T DK 98401199T DK 0908923 T3 DK0908923 T3 DK 0908923T3
Authority
DK
Denmark
Prior art keywords
plasma
process chamber
widespread
providing
internal
Prior art date
Application number
DK98401199T
Other languages
English (en)
Inventor
Pascal Colpo
Francois Rossi
Jean Daviet
Roland Ernst
Original Assignee
Europ Economic Community
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Europ Economic Community filed Critical Europ Economic Community
Application granted granted Critical
Publication of DK0908923T3 publication Critical patent/DK0908923T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H01J37/32504—Means for preventing sputtering of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Magnetic Treatment Devices (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Arc Welding In General (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DK98401199T 1997-10-10 1998-05-19 Apparatur til tilvejebringelse af en udbredt induktiv plasma til plasmabearbejdning DK0908923T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP97402395A EP0908921A1 (en) 1997-10-10 1997-10-10 Process chamber for plasma enhanced chemical vapour deposition and apparatus employing said process chamber
EP98400888A EP0908922B1 (en) 1997-10-10 1998-04-10 Process chamber for plasma processing and apparatus employing said process chamber

Publications (1)

Publication Number Publication Date
DK0908923T3 true DK0908923T3 (da) 2003-07-21

Family

ID=8229877

Family Applications (2)

Application Number Title Priority Date Filing Date
DK98400888T DK0908922T3 (da) 1997-10-10 1998-04-10 Proceskammer til plasmabehandling og apparat, der anvender proceskammeret
DK98401199T DK0908923T3 (da) 1997-10-10 1998-05-19 Apparatur til tilvejebringelse af en udbredt induktiv plasma til plasmabearbejdning

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DK98400888T DK0908922T3 (da) 1997-10-10 1998-04-10 Proceskammer til plasmabehandling og apparat, der anvender proceskammeret

Country Status (6)

Country Link
EP (2) EP0908921A1 (da)
AT (2) ATE249098T1 (da)
DE (3) DE69817721T2 (da)
DK (2) DK0908922T3 (da)
ES (2) ES2205398T3 (da)
PT (2) PT908922E (da)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1228810C (zh) * 1997-04-21 2005-11-23 东京电子亚利桑那公司 物理汽相沉积的方法和设备
US6565717B1 (en) 1997-09-15 2003-05-20 Applied Materials, Inc. Apparatus for sputtering ionized material in a medium to high density plasma
US6287435B1 (en) 1998-05-06 2001-09-11 Tokyo Electron Limited Method and apparatus for ionized physical vapor deposition
US6080287A (en) * 1998-05-06 2000-06-27 Tokyo Electron Limited Method and apparatus for ionized physical vapor deposition
US6390019B1 (en) * 1998-06-11 2002-05-21 Applied Materials, Inc. Chamber having improved process monitoring window
GB9812852D0 (en) * 1998-06-16 1998-08-12 Surface Tech Sys Ltd Plasma processing apparatus
DE19923018C2 (de) * 1999-05-19 2001-09-27 Univ Dresden Tech Vorrichtung zur Bearbeitung bandförmiger Werkstücke mit Hilfe resonanter Hochfrequenzplasmen
US20040020432A1 (en) 2000-05-17 2004-02-05 Tomoko Takagi Plasma cvd apparatus and method
US6831742B1 (en) 2000-10-23 2004-12-14 Applied Materials, Inc Monitoring substrate processing using reflected radiation
JP4770029B2 (ja) 2001-01-22 2011-09-07 株式会社Ｉｈｉ プラズマｃｖｄ装置及び太陽電池の製造方法
US6673199B1 (en) 2001-03-07 2004-01-06 Applied Materials, Inc. Shaping a plasma with a magnetic field to control etch rate uniformity
US20040129221A1 (en) * 2003-01-08 2004-07-08 Jozef Brcka Cooled deposition baffle in high density plasma semiconductor processing
DE10358505B4 (de) * 2003-12-13 2007-10-11 Roth & Rau Ag Plasmaquelle zur Erzeugung eines induktiv gekoppelten Plasmas

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3879597A (en) * 1974-08-16 1975-04-22 Int Plasma Corp Plasma etching device and process
AT369927B (de) * 1980-04-15 1983-02-10 Vmei Lenin Nis Baugruppe zum schutz elektrischer isolatoren vor einer glimmentladung
US4795879A (en) * 1987-04-13 1989-01-03 The United States Of America As Represented By The United States Department Of Energy Method of processing materials using an inductively coupled plasma
US4990229A (en) * 1989-06-13 1991-02-05 Plasma & Materials Technologies, Inc. High density plasma deposition and etching apparatus
JPH04350156A (ja) * 1991-05-27 1992-12-04 Ishikawajima Harima Heavy Ind Co Ltd 薄膜形成装置
US5641375A (en) * 1994-08-15 1997-06-24 Applied Materials, Inc. Plasma etching reactor with surface protection means against erosion of walls
US5556521A (en) * 1995-03-24 1996-09-17 Sony Corporation Sputter etching apparatus with plasma source having a dielectric pocket and contoured plasma source
US5763851A (en) * 1995-11-27 1998-06-09 Applied Materials, Inc. Slotted RF coil shield for plasma deposition system
TW327236B (en) * 1996-03-12 1998-02-21 Varian Associates Inductively coupled plasma reactor with faraday-sputter shield
WO1997042648A1 (en) * 1996-05-09 1997-11-13 Applied Materials, Inc. Recessed coil for generating a plasma

Also Published As

Publication number Publication date
ATE236453T1 (de) 2003-04-15
DE69838823T2 (de) 2008-11-13
PT908923E (pt) 2003-08-29
ES2192750T3 (es) 2003-10-16
DE69817721T2 (de) 2004-07-22
EP0908921A1 (en) 1999-04-14
DK0908922T3 (da) 2004-01-19
DE69812830T2 (de) 2003-11-06
DE69817721D1 (de) 2003-10-09
DE69812830D1 (de) 2003-05-08
PT908922E (pt) 2004-01-30
EP0908922B1 (en) 2003-09-03
DE69838823D1 (de) 2008-01-17
ATE249098T1 (de) 2003-09-15
ES2205398T3 (es) 2004-05-01
EP0908922A1 (en) 1999-04-14

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