DK0722538T3 - Mikromembranpumpe - Google Patents

Mikromembranpumpe

Info

Publication number
DK0722538T3
DK0722538T3 DK94927548.1T DK94927548T DK0722538T3 DK 0722538 T3 DK0722538 T3 DK 0722538T3 DK 94927548 T DK94927548 T DK 94927548T DK 0722538 T3 DK0722538 T3 DK 0722538T3
Authority
DK
Denmark
Prior art keywords
diaphragm pump
micro diaphragm
micro
pump
diaphragm
Prior art date
Application number
DK94927548.1T
Other languages
Danish (da)
English (en)
Inventor
Richard Rapp
Helmut Kalb
Walter Stark
Dieter Seidel
Hans Biedermann
Original Assignee
Forschungszentrum Karlsruhe Ge
Buerkert Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Karlsruhe Ge, Buerkert Gmbh & Co Kg filed Critical Forschungszentrum Karlsruhe Ge
Application granted granted Critical
Publication of DK0722538T3 publication Critical patent/DK0722538T3/da

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DK94927548.1T 1993-09-25 1994-09-02 Mikromembranpumpe DK0722538T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4332720A DE4332720C2 (de) 1993-09-25 1993-09-25 Mikromembranpumpe

Publications (1)

Publication Number Publication Date
DK0722538T3 true DK0722538T3 (da) 1998-05-25

Family

ID=6498644

Family Applications (1)

Application Number Title Priority Date Filing Date
DK94927548.1T DK0722538T3 (da) 1993-09-25 1994-09-02 Mikromembranpumpe

Country Status (6)

Country Link
US (1) US5718567A (de)
EP (1) EP0722538B1 (de)
JP (1) JP2977904B2 (de)
DE (1) DE4332720C2 (de)
DK (1) DK0722538T3 (de)
WO (1) WO1995008711A1 (de)

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DE19720482C5 (de) * 1997-05-16 2006-01-26 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mikromembranpumpe
DE29708678U1 (de) * 1997-05-16 1997-08-07 Inst Mikrotechnik Mainz Gmbh Mikromembranpumpe
DE19844518A1 (de) * 1998-09-28 2000-04-06 Sebastian Pobering Hydraulischer Wegverstärker für Mikrosysteme
US6174136B1 (en) 1998-10-13 2001-01-16 Liquid Metronics Incorporated Pump control and method of operating same
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JP3620316B2 (ja) * 1998-11-16 2005-02-16 株式会社日立製作所 マイクロポンプとその製造方法
US8550119B2 (en) * 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
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US20080277007A1 (en) * 1999-06-28 2008-11-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7144616B1 (en) * 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8052792B2 (en) * 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
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US20040120836A1 (en) * 2002-12-18 2004-06-24 Xunhu Dai Passive membrane microvalves
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US8197231B2 (en) * 2005-07-13 2012-06-12 Purity Solutions Llc Diaphragm pump and related methods
US7717682B2 (en) * 2005-07-13 2010-05-18 Purity Solutions Llc Double diaphragm pump and related methods
US9056291B2 (en) 2005-11-30 2015-06-16 Micronics, Inc. Microfluidic reactor system
WO2008002462A2 (en) * 2006-06-23 2008-01-03 Micronics, Inc. Methods and devices for microfluidic point-of-care immunoassays
US7763453B2 (en) 2005-11-30 2010-07-27 Micronics, Inc. Microfluidic mixing and analytic apparatus
US7815868B1 (en) * 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
DE112007000722B4 (de) * 2006-03-29 2013-07-04 Murata Manufacturing Co., Ltd. Mikropumpe
CN101377192B (zh) * 2007-08-30 2012-06-13 研能科技股份有限公司 流体输送装置
DE102007045637A1 (de) * 2007-09-25 2009-04-02 Robert Bosch Gmbh Mikrodosiervorrichtung zum Dosieren von Kleinstmengen eines Mediums
US8038640B2 (en) * 2007-11-26 2011-10-18 Purity Solutions Llc Diaphragm pump and related systems and methods
US8192401B2 (en) 2009-03-20 2012-06-05 Fresenius Medical Care Holdings, Inc. Medical fluid pump systems and related components and methods
CA2767668C (en) 2009-07-15 2017-03-07 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
US9132423B2 (en) 2010-01-29 2015-09-15 Micronics, Inc. Sample-to-answer microfluidic cartridge
US9624915B2 (en) 2011-03-09 2017-04-18 Fresenius Medical Care Holdings, Inc. Medical fluid delivery sets and related systems and methods
EP2698107B1 (de) * 2011-04-11 2021-07-14 Murata Manufacturing Co., Ltd. Ventil und flüssigkeits-steuervorrichtung
JP6062920B2 (ja) 2011-04-21 2017-01-18 フレセニウス メディカル ケア ホールディングス インコーポレーテッド 医療流体ポンピング・システムならびに関係するデバイスおよび方法
KR102090934B1 (ko) 2012-01-09 2020-03-19 퍼킨엘머 헬스 사이언시즈, 아이엔씨. 마이크로유체 반응기 시스템
KR101959447B1 (ko) * 2012-04-06 2019-03-18 삼성전자주식회사 시료 중의 표적물질을 효율적으로 처리하는 방법
US9610392B2 (en) 2012-06-08 2017-04-04 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
US9500188B2 (en) 2012-06-11 2016-11-22 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
JP6172711B2 (ja) * 2012-07-05 2017-08-02 国立研究開発法人理化学研究所 マイクロチップ用の流体制御デバイスおよびその利用
KR101452050B1 (ko) * 2012-11-12 2014-10-21 삼성전기주식회사 마이크로 펌프
KR20150097764A (ko) 2012-12-21 2015-08-26 마이크로닉스 인코포레이티드. 휴대형 형광 검출 시스템 및 미량분석 카트리지
JP6935167B2 (ja) 2012-12-21 2021-09-15 ペルキネルマー ヘルス サイエンシーズ， インコーポレイテッド マイクロ流体使用のための低弾性フィルム
CN104919191B (zh) 2012-12-21 2019-07-09 精密公司 流体回路及相关的制造方法
US9561323B2 (en) 2013-03-14 2017-02-07 Fresenius Medical Care Holdings, Inc. Medical fluid cassette leak detection methods and devices
WO2014182844A1 (en) 2013-05-07 2014-11-13 Micronics, Inc. Microfluidic devices and methods for performing serum separation and blood cross-matching
EP2994532B1 (de) 2013-05-07 2017-11-15 Micronics, Inc. Verfahren zur herstellung von nukleinsäurehaltigen proben mittels tonmineralien und alkalischen lösungen
EP2994543B1 (de) 2013-05-07 2018-08-15 Micronics, Inc. Vorrichtung zur herstellung und analyse von nukleinsäuren
JP6662776B2 (ja) * 2013-08-12 2020-03-11 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． バルブを用いたマイクロ流体デバイス
US10117985B2 (en) 2013-08-21 2018-11-06 Fresenius Medical Care Holdings, Inc. Determining a volume of medical fluid pumped into or out of a medical fluid cassette
FR3012443B1 (fr) 2013-10-24 2021-04-30 Univ Sciences Technologies Lille Procede pour generer un ecoulement de fluide
JP2019100329A (ja) * 2017-12-08 2019-06-24 日本電産株式会社 ポンプ
US20220260067A1 (en) * 2019-06-03 2022-08-18 Sony Group Corporation Fluid control apparatus and electronic apparatus

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DE887429C (de) * 1951-07-03 1953-08-24 Volkswagenwerk G M B H Membranpumpe mit zwischen zwei Gehaeuseteilen eingespannter Membran, insbesondere Kraftstoffpumpe fuer Brennkraftmaschinen
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US3145659A (en) * 1962-08-31 1964-08-25 Briggs & Stratton Corp Suction actuated fuel pump
GB1263057A (en) * 1968-02-22 1972-02-09 Timothy James Francis Roach Improvements in or relating to diaphragm pumps
JPS5677581A (en) * 1979-11-29 1981-06-25 Hitachi Metals Ltd Diaphragm pump
NL8302860A (nl) * 1983-08-15 1985-03-01 Stichting Ct Voor Micro Elektr Piezo-elektrische micropomp.
SE8801299L (sv) * 1988-04-08 1989-10-09 Bertil Hoeoek Mikromekanisk envaegsventil
CH679555A5 (de) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
EP0424087A1 (de) * 1989-10-17 1991-04-24 Seiko Epson Corporation Mikropumpe oder Mikrodurchflussmenge
US5171132A (en) * 1989-12-27 1992-12-15 Seiko Epson Corporation Two-valve thin plate micropump
JPH0466784A (ja) * 1990-07-06 1992-03-03 Seiko Epson Corp マイクロポンプおよびその製造方法
DE4143343C2 (de) * 1991-09-11 1994-09-22 Fraunhofer Ges Forschung Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe
DE4139668A1 (de) * 1991-12-02 1993-06-03 Kernforschungsz Karlsruhe Mikroventil und verfahren zu dessen herstellung
US5344292A (en) * 1992-08-20 1994-09-06 Ryder International Corporation Fluid pumping system and apparatus

Also Published As

Publication number Publication date
US5718567A (en) 1998-02-17
EP0722538A1 (de) 1996-07-24
DE4332720C2 (de) 1997-02-13
EP0722538B1 (de) 1997-10-22
JP2977904B2 (ja) 1999-11-15
JPH09500945A (ja) 1997-01-28
WO1995008711A1 (de) 1995-03-30
DE4332720A1 (de) 1995-03-30

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