DK0741839T3 - Mikromembranpumpe - Google Patents

Mikromembranpumpe

Info

Publication number
DK0741839T3
DK0741839T3 DK95903302.8T DK95903302T DK0741839T3 DK 0741839 T3 DK0741839 T3 DK 0741839T3 DK 95903302 T DK95903302 T DK 95903302T DK 0741839 T3 DK0741839 T3 DK 0741839T3
Authority
DK
Denmark
Prior art keywords
diaphragm pump
micro diaphragm
micro
pump
diaphragm
Prior art date
Application number
DK95903302.8T
Other languages
English (en)
Inventor
Dieter Seidel
Burkhard Buestgens
Gerhard Stern
Wolfgang Keller
Dieter Maas
Original Assignee
Karlsruhe Forschzent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Karlsruhe Forschzent filed Critical Karlsruhe Forschzent
Application granted granted Critical
Publication of DK0741839T3 publication Critical patent/DK0741839T3/da

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DK95903302.8T 1994-01-25 1994-11-29 Mikromembranpumpe DK0741839T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4402119A DE4402119C2 (de) 1994-01-25 1994-01-25 Verfahren zur Herstellung von Mikromembranpumpen

Publications (1)

Publication Number Publication Date
DK0741839T3 true DK0741839T3 (da) 1998-05-11

Family

ID=6508647

Family Applications (1)

Application Number Title Priority Date Filing Date
DK95903302.8T DK0741839T3 (da) 1994-01-25 1994-11-29 Mikromembranpumpe

Country Status (6)

Country Link
US (1) US5725363A (da)
EP (1) EP0741839B1 (da)
JP (2) JPH09503569A (da)
DE (1) DE4402119C2 (da)
DK (1) DK0741839T3 (da)
WO (1) WO1995020105A1 (da)

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Also Published As

Publication number Publication date
WO1995020105A1 (de) 1995-07-27
DE4402119C2 (de) 1998-07-23
US5725363A (en) 1998-03-10
EP0741839A1 (de) 1996-11-13
EP0741839B1 (de) 1998-04-15
JPH09503569A (ja) 1997-04-08
JP3066925U (ja) 2000-03-07
DE4402119A1 (de) 1995-07-27

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