DE9005786U1 - - Google Patents

Info

Publication number
DE9005786U1
DE9005786U1 DE9005786U DE9005786U DE9005786U1 DE 9005786 U1 DE9005786 U1 DE 9005786U1 DE 9005786 U DE9005786 U DE 9005786U DE 9005786 U DE9005786 U DE 9005786U DE 9005786 U1 DE9005786 U1 DE 9005786U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9005786U
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Forschungszentrum Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH
Priority to DE9005786U priority Critical patent/DE9005786U1/de
Publication of DE9005786U1 publication Critical patent/DE9005786U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/10—Thermal environment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
DE9005786U 1990-05-21 1990-05-21 Expired - Lifetime DE9005786U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9005786U DE9005786U1 (de) 1990-05-21 1990-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9005786U DE9005786U1 (de) 1990-05-21 1990-05-21

Publications (1)

Publication Number Publication Date
DE9005786U1 true DE9005786U1 (de) 1990-08-30

Family

ID=6854001

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9005786U Expired - Lifetime DE9005786U1 (de) 1990-05-21 1990-05-21

Country Status (1)

Country Link
DE (1) DE9005786U1 (de)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2138339B2 (de) * 1970-07-31 1978-07-27 Agence Nationale De Valorisation De La Recherche (Anvar), Courbevoie (Frankreich) Verfahren und Vorrichtung zum Anspitzen und/oder Reinigen einer Spitze
DE3937722A1 (de) * 1988-11-15 1990-05-17 Mitsubishi Electric Corp Abtast-tunnelstrommikroskop

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2138339B2 (de) * 1970-07-31 1978-07-27 Agence Nationale De Valorisation De La Recherche (Anvar), Courbevoie (Frankreich) Verfahren und Vorrichtung zum Anspitzen und/oder Reinigen einer Spitze
DE3937722A1 (de) * 1988-11-15 1990-05-17 Mitsubishi Electric Corp Abtast-tunnelstrommikroskop

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