DE8902607U1 - Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage - Google Patents

Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage

Info

Publication number
DE8902607U1
DE8902607U1 DE8902607U DE8902607U DE8902607U1 DE 8902607 U1 DE8902607 U1 DE 8902607U1 DE 8902607 U DE8902607 U DE 8902607U DE 8902607 U DE8902607 U DE 8902607U DE 8902607 U1 DE8902607 U1 DE 8902607U1
Authority
DE
Germany
Prior art keywords
axis
paddle
igr
holder
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8902607U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Owis 7813 Staufen De GmbH
Original Assignee
Owis 7813 Staufen De GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Owis 7813 Staufen De GmbH filed Critical Owis 7813 Staufen De GmbH
Priority to DE8902607U priority Critical patent/DE8902607U1/de
Publication of DE8902607U1 publication Critical patent/DE8902607U1/de
Priority to EP19900904235 priority patent/EP0480931A1/de
Priority to PCT/DE1990/000156 priority patent/WO1990010305A1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C30B31/103—Mechanisms for moving either the charge or heater
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Solid Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE8902607U 1989-03-04 1989-03-04 Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage Expired DE8902607U1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE8902607U DE8902607U1 (de) 1989-03-04 1989-03-04 Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage
EP19900904235 EP0480931A1 (de) 1989-03-04 1990-03-05 Vorrichtung an einer oxydations- oder diffusions-ofenanlage
PCT/DE1990/000156 WO1990010305A1 (de) 1989-03-04 1990-03-05 Vorrichtung an einer oxydations- oder diffusions-ofenanlage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE8902607U DE8902607U1 (de) 1989-03-04 1989-03-04 Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage

Publications (1)

Publication Number Publication Date
DE8902607U1 true DE8902607U1 (de) 1989-06-22

Family

ID=6836681

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8902607U Expired DE8902607U1 (de) 1989-03-04 1989-03-04 Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage

Country Status (3)

Country Link
EP (1) EP0480931A1 (ru)
DE (1) DE8902607U1 (ru)
WO (1) WO1990010305A1 (ru)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110164805A (zh) * 2019-06-27 2019-08-23 通威太阳能（合肥）有限公司 一种扩散炉设备保护隔板
CN116331797B (zh) * 2023-05-25 2023-08-01 山东恒信基塑业股份有限公司 一种载物塑料托盘上下翻转机构

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3744650A (en) * 1971-10-26 1973-07-10 Semiconductor Elect Memories Boat mover for semiconductor fusion process
DE8302957U1 (de) * 1983-08-04 Helmut Seier GmbH, 7760 Radolfszell Vorrichtung zur Hitzebehandlung von Halbleitersubstraten und dergleichen
EP0158900A2 (de) * 1984-04-19 1985-10-23 Heraeus Quarzglas GmbH Anlage zum automatischen Beschicken einer Ofenanordnung mit Halbleiterscheiben
US4624638A (en) * 1984-11-29 1986-11-25 Btu Engineering Corporation CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly
DE3539981C1 (de) * 1985-11-11 1987-06-11 Telog Systems Gmbh Verfahren und Vorrichtung zur Behandlung von Halbleitermaterialien
GB2184175A (en) * 1985-09-03 1987-06-17 Cleon R Yates Total encapsulated low pressure door closure apparatus for a silicon chip process tube
US4692115A (en) * 1985-04-03 1987-09-08 Thermco Systems, Inc. Semiconductor wafer furnace door
US4695706A (en) * 1983-12-28 1987-09-22 Denkoh Co. Ltd. Vertical furnace for heat-treating semiconductor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587820A (ja) * 1981-07-07 1983-01-17 Toshiba Corp 拡散炉におけるチユ−ブ入口開閉装置
EP0093504B1 (en) * 1982-04-29 1986-10-15 Heraeus Quarzschmelze Gmbh Apparatus for introducing silicon wafers in magazines into a furnace
US4630379A (en) * 1983-09-02 1986-12-23 Chart Industries Limited Laser gauging system and component parts therefor
US4671726A (en) * 1984-11-07 1987-06-09 Breed Corporation Cantilevered soft landing boat loader for semiconductor processing furnaces
US4767251A (en) * 1986-05-06 1988-08-30 Amtech Systems, Inc. Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8302957U1 (de) * 1983-08-04 Helmut Seier GmbH, 7760 Radolfszell Vorrichtung zur Hitzebehandlung von Halbleitersubstraten und dergleichen
US3744650A (en) * 1971-10-26 1973-07-10 Semiconductor Elect Memories Boat mover for semiconductor fusion process
US4695706A (en) * 1983-12-28 1987-09-22 Denkoh Co. Ltd. Vertical furnace for heat-treating semiconductor
EP0158900A2 (de) * 1984-04-19 1985-10-23 Heraeus Quarzglas GmbH Anlage zum automatischen Beschicken einer Ofenanordnung mit Halbleiterscheiben
US4624638A (en) * 1984-11-29 1986-11-25 Btu Engineering Corporation CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly
US4692115A (en) * 1985-04-03 1987-09-08 Thermco Systems, Inc. Semiconductor wafer furnace door
GB2184175A (en) * 1985-09-03 1987-06-17 Cleon R Yates Total encapsulated low pressure door closure apparatus for a silicon chip process tube
DE3539981C1 (de) * 1985-11-11 1987-06-11 Telog Systems Gmbh Verfahren und Vorrichtung zur Behandlung von Halbleitermaterialien

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
US-Z: Oven Loading and unloading device. In: IBM Technical Disclosure Bulletin, Vol.31, No.2, July 1988, S.449 *

Also Published As

Publication number Publication date
WO1990010305A1 (de) 1990-09-07
EP0480931A1 (de) 1992-04-22

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