DE8813227U1 - Keramische Verdampfer - Google Patents

Keramische Verdampfer

Info

Publication number
DE8813227U1
DE8813227U1 DE8813227U DE8813227U DE8813227U1 DE 8813227 U1 DE8813227 U1 DE 8813227U1 DE 8813227 U DE8813227 U DE 8813227U DE 8813227 U DE8813227 U DE 8813227U DE 8813227 U1 DE8813227 U1 DE 8813227U1
Authority
DE
Germany
Prior art keywords
evaporators
ceramic
ceramic evaporators
edges
bull
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8813227U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sk-Sonderkeramik & Co KG Ulrich Goetz Dipl Ing (fh) 8959 Buching De GmbH
Original Assignee
Sk-Sonderkeramik & Co KG Ulrich Goetz Dipl Ing (fh) 8959 Buching De GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sk-Sonderkeramik & Co KG Ulrich Goetz Dipl Ing (fh) 8959 Buching De GmbH filed Critical Sk-Sonderkeramik & Co KG Ulrich Goetz Dipl Ing (fh) 8959 Buching De GmbH
Priority to DE8813227U priority Critical patent/DE8813227U1/de
Publication of DE8813227U1 publication Critical patent/DE8813227U1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE8813227U 1988-10-21 1988-10-21 Keramische Verdampfer Expired DE8813227U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8813227U DE8813227U1 (de) 1988-10-21 1988-10-21 Keramische Verdampfer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE8813227U DE8813227U1 (de) 1988-10-21 1988-10-21 Keramische Verdampfer

Publications (1)

Publication Number Publication Date
DE8813227U1 true DE8813227U1 (de) 1989-01-12

Family

ID=6829101

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8813227U Expired DE8813227U1 (de) 1988-10-21 1988-10-21 Keramische Verdampfer

Country Status (1)

Country Link
DE (1) DE8813227U1 (it)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3345448A (en) * 1964-07-28 1967-10-03 Union Carbide Corp High temperature electrical connection
US3986822A (en) * 1975-02-27 1976-10-19 Union Carbide Corporation Boron nitride crucible

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3345448A (en) * 1964-07-28 1967-10-03 Union Carbide Corp High temperature electrical connection
US3986822A (en) * 1975-02-27 1976-10-19 Union Carbide Corporation Boron nitride crucible

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