DE8813227U1 - Ceramic evaporators - Google Patents

Ceramic evaporators

Info

Publication number
DE8813227U1
DE8813227U1 DE8813227U DE8813227U DE8813227U1 DE 8813227 U1 DE8813227 U1 DE 8813227U1 DE 8813227 U DE8813227 U DE 8813227U DE 8813227 U DE8813227 U DE 8813227U DE 8813227 U1 DE8813227 U1 DE 8813227U1
Authority
DE
Germany
Prior art keywords
evaporators
ceramic
ceramic evaporators
edges
bull
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8813227U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sk-Sonderkeramik & Co KG Ulrich Goetz Dipl Ing (fh) 8959 Buching De GmbH
Original Assignee
Sk-Sonderkeramik & Co KG Ulrich Goetz Dipl Ing (fh) 8959 Buching De GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sk-Sonderkeramik & Co KG Ulrich Goetz Dipl Ing (fh) 8959 Buching De GmbH filed Critical Sk-Sonderkeramik & Co KG Ulrich Goetz Dipl Ing (fh) 8959 Buching De GmbH
Priority to DE8813227U priority Critical patent/DE8813227U1/en
Publication of DE8813227U1 publication Critical patent/DE8813227U1/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Description

• I ···• I ···

BeschreibungDescription

Die Erfindung bezieht sich au-f die Gestaltung von keramischen Verdampfern (I).The invention relates to the design of ceramic evaporators (I).

Keramische Verdampfer sind seit mehr als 15 Jahren bekannt. Sie werden aus gesinterten Blöcken mittels Diamantwerkzeugen herausgearbei tet.Ceramic evaporators have been known for more than 15 years. They are machined from sintered blocks using diamond tools.

Der Einsatz dieser Stäbe erfolgt in Vakuum-Metal1i^ierngsanlagen, wo diese im direkten Stromdurchgang erhitzt werden. Dazu ist eine elektrische Kontaktierung notwendig, welche derart erfolgt, daß die keramischen Verdampfer mittels flexibler Graphitfolie (2) in starre Kupferblöcke (3) eingepreßt werden (Zeichnung Nr. 1, Nr.2).These rods are used in vacuum metallization systems, where they are heated by direct current flow. This requires electrical contact, which is achieved by pressing the ceramic evaporators into rigid copper blocks (3) using flexible graphite foil (2) (drawing no. 1, no. 2).

Die Dicke dieser Graphitfolie (2) beträgt typisch 0.25 mm, die Kompressibilität beträgt ca. 20%. Das Problem ist nun, daß diese papierähnliche Graphitfolie beim Einbau der scharf kantigen Ve»— dämpfer in die starren Kupferblöcke an der Scherkante (4) abgeschert wird, weshalb es zu fehlerhaften Ko"'akten mit entsprechend notwendiger Nacharbeit bzw. mit einem Ausfall des Verdampfersystems kommt.The thickness of this graphite foil (2) is typically 0.25 mm, and the compressibility is approximately 20%. The problem is that this paper-like graphite foil is sheared off at the shearing edge (4) when the sharp-edged vaporizers are installed in the rigid copper blocks, which leads to faulty contacts with the corresponding need for rework or a failure of the vaporizer system.

Der Erfindung liegt die Aufgabe zugrunde, die Nachteile zu behebben und einen Verdampfer zu schaffen, welcher eine exakte Kontaktierung sicherstellt.The invention is based on the object of eliminating the disadvantages and creating an evaporator which ensures exact contact.

Die· wird dadurch erreicht, daß die kritischen Kanten (4) am Verdampferschiffchen abgerundet werden (Zeichnung Nr. 4) oder angefast werüem (Zeichnung Nr. S).This is achieved by rounding the critical edges (4) on the evaporator boat (drawing no. 4) or chamfering them (drawing no. 5).

Die neuen keramischen Verdampfer sind «omit dadurch gekennzeichnet, daß wenlguten die Scherkanten (4) nichi scharfkantig« sondern mit einem Radius (5) oder einer Phase (6) gekennzeichnet sind.The new ceramic evaporators are characterized by the fact that the shear edges (4) are not sharp-edged but are marked with a radius (5) or a phase (6).

Der Vorteil lieg! vor allen Dingen dar«n, daß diese Verdampfer eine höhere Betriebssicherheit garantleren. Die einzelnen Punkte sind in beiliegendem Datenblatt aue-f uhr lieh charakterisiert.The main advantage is that these evaporators guarantee greater operational reliability. The individual points are described in detail in the enclosed data sheet.

Claims (3)

SchutzansprächeProtection claims 1.) Keramische Verdampfer dadurch gekennzeichnet, daß die Kanten gebrochen sind.1.) Ceramic evaporators characterized by the fact that the edges are broken. 2.) Keramische Verdampfer nach Anspruch dadurch gekennzeichnet,2.) Ceramic evaporator according to claim characterized in daß die gebrochenen Kanten als Radien von r = bis r = 5 mm gestaltet sind.that the broken edges are designed as radii of r = to r = 5 mm. 3.) Kerafflis-he Verdampfer nach Anspruch dadurch gekennzeichnet,3.) Kerafflis-he evaporator according to claim characterized by daß die gebrochenen Kanten als Phase von großer 2 Grad gestaltet sind.that the broken edges are designed as a phase of large 2 degrees. ««••ti «I Ii I I««••ti «I Ii I I « # · · · Il Il« # · · · The The ·· ti ** · #1 ii'tllll I·· ti ** · #1 ii'tllll I
DE8813227U 1988-10-21 1988-10-21 Ceramic evaporators Expired DE8813227U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8813227U DE8813227U1 (en) 1988-10-21 1988-10-21 Ceramic evaporators

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE8813227U DE8813227U1 (en) 1988-10-21 1988-10-21 Ceramic evaporators

Publications (1)

Publication Number Publication Date
DE8813227U1 true DE8813227U1 (en) 1989-01-12

Family

ID=6829101

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8813227U Expired DE8813227U1 (en) 1988-10-21 1988-10-21 Ceramic evaporators

Country Status (1)

Country Link
DE (1) DE8813227U1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3345448A (en) * 1964-07-28 1967-10-03 Union Carbide Corp High temperature electrical connection
US3986822A (en) * 1975-02-27 1976-10-19 Union Carbide Corporation Boron nitride crucible

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3345448A (en) * 1964-07-28 1967-10-03 Union Carbide Corp High temperature electrical connection
US3986822A (en) * 1975-02-27 1976-10-19 Union Carbide Corporation Boron nitride crucible

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