DE69942327D1 - Siliziumeinkristall-integrierte Schaltkreise auf polykristallinem Silizium - Google Patents
Siliziumeinkristall-integrierte Schaltkreise auf polykristallinem SiliziumInfo
- Publication number
- DE69942327D1 DE69942327D1 DE69942327T DE69942327T DE69942327D1 DE 69942327 D1 DE69942327 D1 DE 69942327D1 DE 69942327 T DE69942327 T DE 69942327T DE 69942327 T DE69942327 T DE 69942327T DE 69942327 D1 DE69942327 D1 DE 69942327D1
- Authority
- DE
- Germany
- Prior art keywords
- silicon
- single crystal
- integrated circuits
- crystal integrated
- polycrystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 239000013078 crystal Substances 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
- H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/102—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including bipolar components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/763—Polycrystalline semiconductor regions
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
- Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/095,468 US6388290B1 (en) | 1998-06-10 | 1998-06-10 | Single crystal silicon on polycrystalline silicon integrated circuits |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69942327D1 true DE69942327D1 (de) | 2010-06-17 |
Family
ID=22252171
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69942327T Expired - Lifetime DE69942327D1 (de) | 1998-06-10 | 1999-05-26 | Siliziumeinkristall-integrierte Schaltkreise auf polykristallinem Silizium |
Country Status (5)
Country | Link |
---|---|
US (1) | US6388290B1 (de) |
EP (1) | EP0969500B1 (de) |
JP (1) | JP3655497B2 (de) |
KR (1) | KR20000005952A (de) |
DE (1) | DE69942327D1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6482725B1 (en) * | 1999-08-18 | 2002-11-19 | Advanced Micro Devices, Inc. | Gate formation method for reduced poly-depletion and boron penetration |
US6743697B2 (en) | 2000-06-30 | 2004-06-01 | Intel Corporation | Thin silicon circuits and method for making the same |
US20030234438A1 (en) * | 2002-06-24 | 2003-12-25 | Motorola, Inc. | Integrated circuit structure for mixed-signal RF applications and circuits |
US6743662B2 (en) * | 2002-07-01 | 2004-06-01 | Honeywell International, Inc. | Silicon-on-insulator wafer for RF integrated circuit |
US20040187767A1 (en) * | 2002-10-24 | 2004-09-30 | Intel Corporation | Device and method for multicrystalline silicon wafers |
US9741881B2 (en) * | 2003-04-14 | 2017-08-22 | S'tile | Photovoltaic module including integrated photovoltaic cells |
US7235461B2 (en) * | 2003-04-29 | 2007-06-26 | S.O.I.Tec Silicon On Insulator Technologies | Method for bonding semiconductor structures together |
FR2854493B1 (fr) * | 2003-04-29 | 2005-08-19 | Soitec Silicon On Insulator | Traitement par brossage d'une plaquette semiconductrice avant collage |
US20050045992A1 (en) * | 2003-08-27 | 2005-03-03 | Turley Alfred P. | Bipolar/thin film SOI CMOS structure and method of making same |
JP4497093B2 (ja) * | 2003-08-28 | 2010-07-07 | 株式会社日立製作所 | 半導体装置及びその製造方法 |
US7259077B2 (en) * | 2004-04-29 | 2007-08-21 | Sychip Inc. | Integrated passive devices |
US7382056B2 (en) * | 2004-04-29 | 2008-06-03 | Sychip Inc. | Integrated passive devices |
US7560322B2 (en) * | 2004-10-27 | 2009-07-14 | Northrop Grumman Systems Corporation | Method of making a semiconductor structure for high power semiconductor devices |
US20070065964A1 (en) * | 2005-09-22 | 2007-03-22 | Yinon Degani | Integrated passive devices |
US7601271B2 (en) | 2005-11-28 | 2009-10-13 | S.O.I.Tec Silicon On Insulator Technologies | Process and equipment for bonding by molecular adhesion |
JP2007173354A (ja) * | 2005-12-20 | 2007-07-05 | Shin Etsu Chem Co Ltd | Soi基板およびsoi基板の製造方法 |
US20080122042A1 (en) * | 2006-11-27 | 2008-05-29 | Michael Goldstein | Applications of polycrystalline wafers |
FR2912839B1 (fr) * | 2007-02-16 | 2009-05-15 | Soitec Silicon On Insulator | Amelioration de la qualite de l'interface de collage par nettoyage froid et collage a chaud |
US7935607B2 (en) * | 2007-04-09 | 2011-05-03 | Freescale Semiconductor, Inc. | Integrated passive device with a high resistivity substrate and method for forming the same |
GB0716829D0 (en) * | 2007-08-31 | 2007-10-10 | Seereal Technologies Sa | Holographic display |
US20090236689A1 (en) * | 2008-03-24 | 2009-09-24 | Freescale Semiconductor, Inc. | Integrated passive device and method with low cost substrate |
US20100001355A1 (en) * | 2008-07-07 | 2010-01-07 | Honeywell International Inc. | RF MEMS Switch |
JP6278978B2 (ja) * | 2013-01-23 | 2018-02-14 | シーエスエムシー テクノロジーズ エフエイビー2 カンパニー リミテッド | スクライビングスロットのストリップ幅を検査するための構造及び方法 |
JP2015088698A (ja) * | 2013-11-01 | 2015-05-07 | 信越半導体株式会社 | シリコンウェーハ及びその製造方法 |
FI130149B (en) * | 2013-11-26 | 2023-03-15 | Okmetic Oyj | High Resistive Silicon Substrate with Reduced RF Loss for RF Integrated Passive Device |
FR3029686A1 (fr) * | 2014-12-08 | 2016-06-10 | St Microelectronics Tours Sas | Dispositif radiofrequence protege contre des surtensions |
JP6527423B2 (ja) * | 2015-08-11 | 2019-06-05 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62179110A (ja) | 1986-02-03 | 1987-08-06 | Toshiba Corp | 直接接着型半導体基板の製造方法 |
US5849627A (en) * | 1990-02-07 | 1998-12-15 | Harris Corporation | Bonded wafer processing with oxidative bonding |
CA2048339C (en) | 1990-08-03 | 1997-11-25 | Takao Yonehara | Semiconductor member and process for preparing semiconductor member |
US5449953A (en) * | 1990-09-14 | 1995-09-12 | Westinghouse Electric Corporation | Monolithic microwave integrated circuit on high resistivity silicon |
US5091330A (en) * | 1990-12-28 | 1992-02-25 | Motorola, Inc. | Method of fabricating a dielectric isolated area |
JPH0555359A (ja) | 1991-08-29 | 1993-03-05 | Fujitsu Ltd | Soi型半導体基板およびその製造方法 |
JPH05152180A (ja) * | 1991-11-26 | 1993-06-18 | Hitachi Ltd | 半導体装置及び製造方法 |
JPH0832038A (ja) * | 1994-07-15 | 1996-02-02 | Komatsu Electron Metals Co Ltd | 貼り合わせsoi基板の製造方法および貼り合わせsoi基板 |
US5559359A (en) * | 1994-07-29 | 1996-09-24 | Reyes; Adolfo C. | Microwave integrated circuit passive element structure and method for reducing signal propagation losses |
JP3582890B2 (ja) * | 1995-05-23 | 2004-10-27 | 株式会社日立製作所 | 半導体装置 |
US5773151A (en) | 1995-06-30 | 1998-06-30 | Harris Corporation | Semi-insulating wafer |
US5986331A (en) * | 1996-05-30 | 1999-11-16 | Philips Electronics North America Corp. | Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate |
US5736749A (en) * | 1996-11-19 | 1998-04-07 | Lucent Technologies Inc. | Integrated circuit device with inductor incorporated therein |
TW392392B (en) | 1997-04-03 | 2000-06-01 | Lucent Technologies Inc | High frequency apparatus including a low loss substrate |
US5934312A (en) * | 1997-04-10 | 1999-08-10 | Spillguard Development Llc | Drop chute spill guard |
JPH10335615A (ja) * | 1997-05-22 | 1998-12-18 | Harris Corp | 半導体デバイスに関する改良 |
-
1998
- 1998-06-10 US US09/095,468 patent/US6388290B1/en not_active Expired - Lifetime
-
1999
- 1999-05-26 EP EP99304073A patent/EP0969500B1/de not_active Expired - Lifetime
- 1999-05-26 DE DE69942327T patent/DE69942327D1/de not_active Expired - Lifetime
- 1999-06-05 KR KR1019990020794A patent/KR20000005952A/ko active Search and Examination
- 1999-06-08 JP JP16069699A patent/JP3655497B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0969500B1 (de) | 2010-05-05 |
US6388290B1 (en) | 2002-05-14 |
JP3655497B2 (ja) | 2005-06-02 |
EP0969500A2 (de) | 2000-01-05 |
JP2000036584A (ja) | 2000-02-02 |
KR20000005952A (ko) | 2000-01-25 |
EP0969500A3 (de) | 2000-10-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |