DE69932558D1 - Monolithische Filter mit Benützung von Dünnfilmvorrichtungen mit akustischen Volumenwellen und mit einem Minimum an passiven Komponenten zur Kontrolle der Form und Breite im Durchlassbereich - Google Patents
Monolithische Filter mit Benützung von Dünnfilmvorrichtungen mit akustischen Volumenwellen und mit einem Minimum an passiven Komponenten zur Kontrolle der Form und Breite im DurchlassbereichInfo
- Publication number
- DE69932558D1 DE69932558D1 DE69932558T DE69932558T DE69932558D1 DE 69932558 D1 DE69932558 D1 DE 69932558D1 DE 69932558 T DE69932558 T DE 69932558T DE 69932558 T DE69932558 T DE 69932558T DE 69932558 D1 DE69932558 D1 DE 69932558D1
- Authority
- DE
- Germany
- Prior art keywords
- passband
- minimum
- thin
- width
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/589—Acoustic mirrors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/0023—Balance-unbalance or balance-balance networks
- H03H9/0095—Balance-unbalance or balance-balance networks using bulk acoustic wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
- H03H9/585—Stacked Crystal Filters [SCF]
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/587—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/588—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57299 | 1998-04-08 | ||
US09/057,299 US6081171A (en) | 1998-04-08 | 1998-04-08 | Monolithic filters utilizing thin film bulk acoustic wave devices and minimum passive components for controlling the shape and width of a passband response |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69932558D1 true DE69932558D1 (de) | 2006-09-14 |
DE69932558T2 DE69932558T2 (de) | 2007-08-09 |
Family
ID=22009749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69932558T Expired - Lifetime DE69932558T2 (de) | 1998-04-08 | 1999-04-08 | Monolithische Filter mit Benützung von Dünnfilmvorrichtungen mit akustischen Volumenwellen und mit einem Minimum an passiven Komponenten zur Kontrolle der Form und Breite im Durchlassbereich |
Country Status (4)
Country | Link |
---|---|
US (1) | US6081171A (de) |
EP (1) | EP0949756B1 (de) |
JP (1) | JP4326063B2 (de) |
DE (1) | DE69932558T2 (de) |
Families Citing this family (126)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000209063A (ja) * | 1998-11-12 | 2000-07-28 | Mitsubishi Electric Corp | 薄膜圧電素子 |
US6262637B1 (en) * | 1999-06-02 | 2001-07-17 | Agilent Technologies, Inc. | Duplexer incorporating thin-film bulk acoustic resonators (FBARs) |
US6501346B1 (en) * | 1999-09-09 | 2002-12-31 | Communications Systems International, Inc. | Ceramic filter for use with a beacon receiver |
US6339276B1 (en) * | 1999-11-01 | 2002-01-15 | Agere Systems Guardian Corp. | Incremental tuning process for electrical resonators based on mechanical motion |
FI107661B (fi) | 1999-11-29 | 2001-09-14 | Nokia Mobile Phones Ltd | Menetelmä balansoidun suotimen keskitaajuuden säätämiseksi ja joukko balansoituja suotimia |
US6746577B1 (en) | 1999-12-16 | 2004-06-08 | Agere Systems, Inc. | Method and apparatus for thickness control and reproducibility of dielectric film deposition |
US6524971B1 (en) | 1999-12-17 | 2003-02-25 | Agere Systems, Inc. | Method of deposition of films |
DE19962028A1 (de) * | 1999-12-22 | 2001-06-28 | Philips Corp Intellectual Pty | Filteranordnung |
JP2001205437A (ja) * | 2000-01-18 | 2001-07-31 | Yaskawa Electric Corp | 溶接部のビード形状計算方法 |
US6441703B1 (en) * | 2000-01-18 | 2002-08-27 | Texas Instruments Incorporated | Multiple frequency acoustic reflector array and monolithic cover for resonators and method |
US7296329B1 (en) | 2000-02-04 | 2007-11-20 | Agere Systems Inc. | Method of isolation for acoustic resonator device |
US6306313B1 (en) | 2000-02-04 | 2001-10-23 | Agere Systems Guardian Corp. | Selective etching of thin films |
US6377136B1 (en) | 2000-02-04 | 2002-04-23 | Agere Systems Guardian Corporation | Thin film resonator filter having at least one component with different resonant frequency sets or electrode capacitance |
US6437667B1 (en) | 2000-02-04 | 2002-08-20 | Agere Systems Guardian Corp. | Method of tuning thin film resonator filters by removing or adding piezoelectric material |
US6323744B1 (en) | 2000-02-04 | 2001-11-27 | Agere Systems Guardian Corp. | Grounding of TFR ladder filters |
DE10007577C1 (de) * | 2000-02-18 | 2001-09-13 | Infineon Technologies Ag | Piezoresonator |
US6968014B1 (en) * | 2000-02-23 | 2005-11-22 | Xg Technology, Llc | Missing cycle based carrier modulation |
US6603241B1 (en) | 2000-05-23 | 2003-08-05 | Agere Systems, Inc. | Acoustic mirror materials for acoustic devices |
GB0012439D0 (en) | 2000-05-24 | 2000-07-12 | Univ Cranfield | Improvements to filters |
DE10035423C1 (de) * | 2000-07-20 | 2001-11-22 | Infineon Technologies Ag | Halbleiterbauelement mit einer Schichtenfolge zum ineinander Umwandeln von akustischen oder thermischen Signalen und elektrischen Spannungsänderungen und Verfahren zu dessen Herstellung |
US6355498B1 (en) | 2000-08-11 | 2002-03-12 | Agere Systems Guartian Corp. | Thin film resonators fabricated on membranes created by front side releasing |
US6486751B1 (en) | 2000-09-26 | 2002-11-26 | Agere Systems Inc. | Increased bandwidth thin film resonator having a columnar structure |
FR2815791B1 (fr) * | 2000-10-24 | 2003-03-07 | France Telecom | Procede de transformation de filtres passe-bandes pour faciliter leur realisation, et dispositifs ainsi obtenus |
US6674291B1 (en) | 2000-10-30 | 2004-01-06 | Agere Systems Guardian Corp. | Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom |
US6587212B1 (en) | 2000-10-31 | 2003-07-01 | Agere Systems Inc. | Method and apparatus for studying vibrational modes of an electro-acoustic device |
US6515558B1 (en) * | 2000-11-06 | 2003-02-04 | Nokia Mobile Phones Ltd | Thin-film bulk acoustic resonator with enhanced power handling capacity |
US6743731B1 (en) * | 2000-11-17 | 2004-06-01 | Agere Systems Inc. | Method for making a radio frequency component and component produced thereby |
DE10058339A1 (de) * | 2000-11-24 | 2002-06-06 | Infineon Technologies Ag | Bulk-Acoustic-Wave-Filter |
GB0029090D0 (en) | 2000-11-29 | 2001-01-10 | Univ Cranfield | Improvements in or relating to filters |
KR100398363B1 (ko) * | 2000-12-05 | 2003-09-19 | 삼성전기주식회사 | Fbar 소자 및 그 제조방법 |
US6550664B2 (en) * | 2000-12-09 | 2003-04-22 | Agilent Technologies, Inc. | Mounting film bulk acoustic resonators in microwave packages using flip chip bonding technology |
US6518860B2 (en) * | 2001-01-05 | 2003-02-11 | Nokia Mobile Phones Ltd | BAW filters having different center frequencies on a single substrate and a method for providing same |
KR100518616B1 (ko) * | 2001-01-18 | 2005-10-04 | 노키아 코포레이션 | 필터디바이스 및 필터디바이스를 제조하는 방법 |
US7435613B2 (en) | 2001-02-12 | 2008-10-14 | Agere Systems Inc. | Methods of fabricating a membrane with improved mechanical integrity |
US6456173B1 (en) | 2001-02-15 | 2002-09-24 | Nokia Mobile Phones Ltd. | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters |
US6483229B2 (en) * | 2001-03-05 | 2002-11-19 | Agilent Technologies, Inc. | Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method |
US6548943B2 (en) | 2001-04-12 | 2003-04-15 | Nokia Mobile Phones Ltd. | Method of producing thin-film bulk acoustic wave devices |
US6441702B1 (en) | 2001-04-27 | 2002-08-27 | Nokia Mobile Phones Ltd. | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters |
US6480074B1 (en) | 2001-04-27 | 2002-11-12 | Nokia Mobile Phones Ltd. | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters by reducing thickness non-uniformity |
US6476536B1 (en) | 2001-04-27 | 2002-11-05 | Nokia Corporation | Method of tuning BAW resonators |
US6462460B1 (en) | 2001-04-27 | 2002-10-08 | Nokia Corporation | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters |
WO2002093763A1 (fr) * | 2001-05-11 | 2002-11-21 | Ube Electronics, Ltd. | Filtre utilisant un resonateur acoustique en volume a bande plastique et un commutateur transmission/reception |
US6936837B2 (en) * | 2001-05-11 | 2005-08-30 | Ube Industries, Ltd. | Film bulk acoustic resonator |
US6710681B2 (en) * | 2001-07-13 | 2004-03-23 | Agilent Technologies, Inc. | Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same |
JP3939939B2 (ja) * | 2001-07-17 | 2007-07-04 | 富士通株式会社 | 圧電薄膜共振素子の製造方法 |
DE10147075A1 (de) * | 2001-09-25 | 2003-04-30 | Infineon Technologies Ag | Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung |
US7194247B2 (en) | 2001-09-26 | 2007-03-20 | Nokia Corporation | Dual-channel passband filtering system using acoustic resonators in lattice topology |
US6710508B2 (en) * | 2001-11-27 | 2004-03-23 | Agilent Technologies, Inc. | Method for adjusting and stabilizing the frequency of an acoustic resonator |
US7277403B2 (en) * | 2001-12-13 | 2007-10-02 | Avago Technologies Wireless Ip (Singapore) Pte Ltd | Duplexer with a differential receiver port implemented using acoustic resonator elements |
US7948769B2 (en) | 2007-09-27 | 2011-05-24 | Hemisphere Gps Llc | Tightly-coupled PCB GNSS circuit and manufacturing method |
KR100460216B1 (ko) * | 2002-04-23 | 2004-12-08 | 학교법인 인하학원 | 브래그 반사층 구조와 멤브레인 구조의 스택결정필터의변형된 등가회로 구성 방법 |
JP2004072715A (ja) * | 2002-06-11 | 2004-03-04 | Murata Mfg Co Ltd | 圧電薄膜共振子、圧電フィルタ、およびそれを有する電子部品 |
US7276994B2 (en) * | 2002-05-23 | 2007-10-02 | Murata Manufacturing Co., Ltd. | Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter |
DE10225202B4 (de) * | 2002-06-06 | 2017-06-01 | Epcos Ag | Mit akustischen Wellen arbeitendes Bauelement mit einem Anpassnetzwerk |
DE10228328A1 (de) * | 2002-06-25 | 2004-01-22 | Epcos Ag | Elektronisches Bauelement mit einem Mehrlagensubstrat und Herstellungsverfahren |
US20040007940A1 (en) * | 2002-07-15 | 2004-01-15 | Asia Pacific Microsystems, Inc. | Thin film acoustic wave device and the manufacturing method thereof |
US7030718B1 (en) * | 2002-08-09 | 2006-04-18 | National Semiconductor Corporation | Apparatus and method for extending tuning range of electro-acoustic film resonators |
JP2004120016A (ja) * | 2002-09-20 | 2004-04-15 | Fujitsu Media Device Kk | フィルタ装置 |
DE10246791B4 (de) | 2002-10-08 | 2017-10-19 | Snaptrack, Inc. | Mit akustischen Volumenwellen arbeitender Resonator und Schaltung mit dem Resonator |
WO2004047290A1 (en) * | 2002-11-19 | 2004-06-03 | Koninklijke Philips Electronics N.V. | Duplexer and method of isolating an rx-band and a tx-band |
US7885745B2 (en) | 2002-12-11 | 2011-02-08 | Hemisphere Gps Llc | GNSS control system and method |
JP4144509B2 (ja) * | 2003-01-16 | 2008-09-03 | 株式会社村田製作所 | ラダー型フィルタ、分波器、通信装置 |
US9002565B2 (en) | 2003-03-20 | 2015-04-07 | Agjunction Llc | GNSS and optical guidance and machine control |
US8138970B2 (en) | 2003-03-20 | 2012-03-20 | Hemisphere Gps Llc | GNSS-based tracking of fixed or slow-moving structures |
US8271194B2 (en) | 2004-03-19 | 2012-09-18 | Hemisphere Gps Llc | Method and system using GNSS phase measurements for relative positioning |
US8214111B2 (en) | 2005-07-19 | 2012-07-03 | Hemisphere Gps Llc | Adaptive machine control system and method |
US8190337B2 (en) | 2003-03-20 | 2012-05-29 | Hemisphere GPS, LLC | Satellite based vehicle guidance control in straight and contour modes |
US8594879B2 (en) | 2003-03-20 | 2013-11-26 | Agjunction Llc | GNSS guidance and machine control |
US8634993B2 (en) | 2003-03-20 | 2014-01-21 | Agjunction Llc | GNSS based control for dispensing material from vehicle |
US8686900B2 (en) * | 2003-03-20 | 2014-04-01 | Hemisphere GNSS, Inc. | Multi-antenna GNSS positioning method and system |
US8140223B2 (en) | 2003-03-20 | 2012-03-20 | Hemisphere Gps Llc | Multiple-antenna GNSS control system and method |
US8265826B2 (en) | 2003-03-20 | 2012-09-11 | Hemisphere GPS, LLC | Combined GNSS gyroscope control system and method |
JP2004304490A (ja) * | 2003-03-31 | 2004-10-28 | Tdk Corp | 薄膜圧電共振子の製造方法、薄膜圧電共振子の製造装置、薄膜圧電共振子および電子部品 |
DE10317969B4 (de) * | 2003-04-17 | 2005-06-16 | Epcos Ag | Duplexer mit erweiterter Funktionalität |
US6862441B2 (en) * | 2003-06-09 | 2005-03-01 | Nokia Corporation | Transmitter filter arrangement for multiband mobile phone |
US6954121B2 (en) * | 2003-06-09 | 2005-10-11 | Agilent Technologies, Inc. | Method for controlling piezoelectric coupling coefficient in film bulk acoustic resonators and apparatus embodying the method |
US7230511B2 (en) * | 2003-09-12 | 2007-06-12 | Matsushita Electric Industrial Co., Ltd. | Thin film bulk acoustic resonator, method for producing the same, filter, composite electronic component device, and communication device |
JP2005129610A (ja) * | 2003-10-22 | 2005-05-19 | Tdk Corp | 電子部品 |
US6946928B2 (en) * | 2003-10-30 | 2005-09-20 | Agilent Technologies, Inc. | Thin-film acoustically-coupled transformer |
JP2005151287A (ja) * | 2003-11-18 | 2005-06-09 | Tdk Corp | 電子部品 |
KR100565799B1 (ko) * | 2003-12-22 | 2006-03-29 | 삼성전자주식회사 | 일체화된 FBAR 및 Isolation부를 사용하여제조된 듀플렉서 및 그 제조 방법 |
US6992400B2 (en) * | 2004-01-30 | 2006-01-31 | Nokia Corporation | Encapsulated electronics device with improved heat dissipation |
US7038559B2 (en) * | 2004-02-23 | 2006-05-02 | Ruby Richard C | Vertically separated acoustic filters and resonators |
US6963257B2 (en) * | 2004-03-19 | 2005-11-08 | Nokia Corporation | Coupled BAW resonator based duplexers |
US8583315B2 (en) | 2004-03-19 | 2013-11-12 | Agjunction Llc | Multi-antenna GNSS control system and method |
US7227433B2 (en) * | 2004-03-31 | 2007-06-05 | Intel Corporation | Electro mechanical device having a sealed cavity |
KR100750736B1 (ko) * | 2004-11-10 | 2007-08-22 | 삼성전자주식회사 | 하나의 트리밍 인덕터를 사용하는 필터 |
KR100666693B1 (ko) | 2004-11-23 | 2007-01-11 | 삼성전자주식회사 | 모놀리식 듀플렉서 |
DE102005013895B4 (de) | 2005-03-24 | 2019-08-08 | Snaptrack, Inc. | Elektrisches Filter |
JP2007074698A (ja) * | 2005-08-08 | 2007-03-22 | Fujitsu Media Device Kk | 分波器及びラダー型フィルタ |
JP5039290B2 (ja) | 2005-08-25 | 2012-10-03 | 太陽誘電株式会社 | フィルタおよびアンテナ分波器 |
US7694397B2 (en) * | 2006-02-24 | 2010-04-13 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Method of manufacturing an acoustic mirror for piezoelectric resonator |
JP4428354B2 (ja) * | 2006-03-29 | 2010-03-10 | セイコーエプソン株式会社 | 圧電薄膜共振子 |
US20080101263A1 (en) * | 2006-10-30 | 2008-05-01 | Skyworks Solutions, Inc. | Single-ended to differential duplexer filter |
US7835832B2 (en) | 2007-01-05 | 2010-11-16 | Hemisphere Gps Llc | Vehicle control system |
USRE48527E1 (en) | 2007-01-05 | 2021-04-20 | Agjunction Llc | Optical tracking vehicle control system and method |
US8311696B2 (en) | 2009-07-17 | 2012-11-13 | Hemisphere Gps Llc | Optical tracking vehicle control system and method |
US8000381B2 (en) | 2007-02-27 | 2011-08-16 | Hemisphere Gps Llc | Unbiased code phase discriminator |
US7808428B2 (en) | 2007-10-08 | 2010-10-05 | Hemisphere Gps Llc | GNSS receiver and external storage device system and GNSS data processing method |
US8089195B2 (en) * | 2007-12-17 | 2012-01-03 | Resonance Semiconductor Corporation | Integrated acoustic bandgap devices for energy confinement and methods of fabricating same |
US9002566B2 (en) | 2008-02-10 | 2015-04-07 | AgJunction, LLC | Visual, GNSS and gyro autosteering control |
WO2009126587A1 (en) | 2008-04-08 | 2009-10-15 | Hemisphere Gps Llc | Gnss-based mobile communication system and method |
US8217833B2 (en) | 2008-12-11 | 2012-07-10 | Hemisphere Gps Llc | GNSS superband ASIC with simultaneous multi-frequency down conversion |
US8386129B2 (en) | 2009-01-17 | 2013-02-26 | Hemipshere GPS, LLC | Raster-based contour swathing for guidance and variable-rate chemical application |
US8291559B2 (en) * | 2009-02-24 | 2012-10-23 | Epcos Ag | Process for adapting resonance frequency of a BAW resonator |
US8085196B2 (en) | 2009-03-11 | 2011-12-27 | Hemisphere Gps Llc | Removing biases in dual frequency GNSS receivers using SBAS |
US8401704B2 (en) | 2009-07-22 | 2013-03-19 | Hemisphere GPS, LLC | GNSS control system and method for irrigation and related applications |
US8174437B2 (en) | 2009-07-29 | 2012-05-08 | Hemisphere Gps Llc | System and method for augmenting DGNSS with internally-generated differential correction |
US8334804B2 (en) | 2009-09-04 | 2012-12-18 | Hemisphere Gps Llc | Multi-frequency GNSS receiver baseband DSP |
US8649930B2 (en) | 2009-09-17 | 2014-02-11 | Agjunction Llc | GNSS integrated multi-sensor control system and method |
US8548649B2 (en) | 2009-10-19 | 2013-10-01 | Agjunction Llc | GNSS optimized aircraft control system and method |
US8456257B1 (en) | 2009-11-12 | 2013-06-04 | Triquint Semiconductor, Inc. | Bulk acoustic wave devices and method for spurious mode suppression |
US8583326B2 (en) | 2010-02-09 | 2013-11-12 | Agjunction Llc | GNSS contour guidance path selection |
US8479363B2 (en) * | 2010-05-11 | 2013-07-09 | Hao Zhang | Methods for wafer level trimming of acoustically coupled resonator filter |
KR101716335B1 (ko) | 2010-12-03 | 2017-03-15 | 삼성전자주식회사 | Bawr을 이용한 저역 통과 필터 |
US8872604B2 (en) * | 2011-05-05 | 2014-10-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Double film bulk acoustic resonators with electrode layer and piezo-electric layer thicknesses providing improved quality factor |
KR101919115B1 (ko) | 2012-02-29 | 2018-11-15 | 삼성전자주식회사 | Bawr 을 이용한 필터 |
JP6336712B2 (ja) * | 2013-01-28 | 2018-06-06 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
US9281800B2 (en) * | 2014-01-24 | 2016-03-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Resonator filter device having narrow pass-band |
DE102014111901B4 (de) * | 2014-08-20 | 2019-05-23 | Snaptrack, Inc. | Duplexer |
DE102014111909B3 (de) | 2014-08-20 | 2016-02-04 | Epcos Ag | Abstimmbares HF-Filter mit Serienresonatoren |
DE102014111912B4 (de) | 2014-08-20 | 2024-06-13 | Snaptrack, Inc. | HF-Filter |
FR3026582A1 (fr) * | 2014-09-29 | 2016-04-01 | Commissariat Energie Atomique | Circuit resonant a frequence et a impedance variables |
US10218334B2 (en) * | 2015-03-18 | 2019-02-26 | Taiyo Yuden Co., Ltd. | Acoustic wave device |
KR20200060429A (ko) * | 2018-06-04 | 2020-05-29 | 안후이 아누키 테크놀러지 컴퍼니 리미티드 | 밴드패스 필터링 회로 및 멀티플렉서 |
CN114301422B (zh) * | 2021-12-31 | 2023-06-09 | 锐石创芯(重庆)科技有限公司 | 滤波器、多工器、射频前端及制造滤波器的方法 |
Family Cites Families (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL277613A (de) * | 1961-04-26 | 1900-01-01 | ||
US3189851A (en) * | 1962-06-04 | 1965-06-15 | Sonus Corp | Piezoelectric filter |
US3293557A (en) * | 1964-03-19 | 1966-12-20 | Bell Telephone Labor Inc | Elastic wave devices utilizing mixed crystals of potassium tantalatepotassium niobate |
US3422371A (en) * | 1967-07-24 | 1969-01-14 | Sanders Associates Inc | Thin film piezoelectric oscillator |
DE1566009A1 (de) * | 1967-08-26 | 1971-02-18 | Telefunken Patent | Mechanisches Frequenzfilter und Verfahren zu seiner Herstellung |
US3486046A (en) * | 1968-10-17 | 1969-12-23 | Westinghouse Electric Corp | Thin film piezoelectric resonator |
US3696312A (en) * | 1970-06-30 | 1972-10-03 | Ibm | Cyclotron resonance devices controllable by electric fields |
US3686579A (en) * | 1971-06-21 | 1972-08-22 | Zenith Radio Corp | Solid-state, acoustic-wave amplifiers |
US3723920A (en) * | 1971-06-24 | 1973-03-27 | Gte Automatic Electric Lab Inc | Crystal filter assembly |
FR2151727A5 (de) * | 1971-09-10 | 1973-04-20 | Thomson Csf | |
FR2182295A5 (de) * | 1972-04-25 | 1973-12-07 | Thomson Csf | |
SE384958B (sv) * | 1974-07-19 | 1976-05-24 | Philips Svenska Ab | Sett for overforing av information i en transponderanleggning samt anordning for utforande av settet |
AT353506B (de) * | 1976-10-19 | 1979-11-26 | List Hans | Piezoelektrischer resonator |
GB1592010A (en) * | 1977-01-12 | 1981-07-01 | Suwa Seikosha Kk | Contour vibrator |
CH630747A5 (fr) * | 1979-01-18 | 1982-06-30 | Ebauches Sa | Procede d'ajustement de la frequence d'un resonateur et resonateur a frequence ajustee obtenu par la mise en oeuvre de ce procede. |
JPS56100510A (en) * | 1980-01-16 | 1981-08-12 | Clarion Co Ltd | Elastic surface wave device |
US4320365A (en) * | 1980-11-03 | 1982-03-16 | United Technologies Corporation | Fundamental, longitudinal, thickness mode bulk wave resonator |
JPS58137317A (ja) * | 1982-02-09 | 1983-08-15 | Nec Corp | 圧電薄膜複合振動子 |
US4502932A (en) * | 1983-10-13 | 1985-03-05 | The United States Of America As Represented By The United States Department Of Energy | Acoustic resonator and method of making same |
US4556812A (en) * | 1983-10-13 | 1985-12-03 | The United States Of America As Represented By The United States Department Of Energy | Acoustic resonator with Al electrodes on an AlN layer and using a GaAs substrate |
JPS60189307A (ja) * | 1984-03-09 | 1985-09-26 | Toshiba Corp | 圧電薄膜共振器およびその製造方法 |
JPS6276913A (ja) * | 1985-09-30 | 1987-04-09 | Toshiba Corp | 薄膜弾性波装置 |
US4897618A (en) * | 1989-06-05 | 1990-01-30 | The Curran Company | Harmonic frequency selecting circuit |
US5162691A (en) * | 1991-01-22 | 1992-11-10 | The United States Of America As Represented By The Secretary Of The Army | Cantilevered air-gap type thin film piezoelectric resonator |
US5233259A (en) * | 1991-02-19 | 1993-08-03 | Westinghouse Electric Corp. | Lateral field FBAR |
US5153476A (en) * | 1991-03-11 | 1992-10-06 | The United States Of America As Represented By The Secretary Of The Army | Acoustic vibrator with variable sensitivity to external acceleration |
US5185589A (en) * | 1991-05-17 | 1993-02-09 | Westinghouse Electric Corp. | Microwave film bulk acoustic resonator and manifolded filter bank |
US5294898A (en) * | 1992-01-29 | 1994-03-15 | Motorola, Inc. | Wide bandwidth bandpass filter comprising parallel connected piezoelectric resonators |
US5166646A (en) * | 1992-02-07 | 1992-11-24 | Motorola, Inc. | Integrated tunable resonators for use in oscillators and filters |
NO310996B1 (no) * | 1992-10-05 | 2001-09-24 | Matsushita Electric Ind Co Ltd | Elektroakustisk hybrid integrert krets og fremgangsmate til fremstilling av samme |
US5382930A (en) * | 1992-12-21 | 1995-01-17 | Trw Inc. | Monolithic multipole filters made of thin film stacked crystal filters |
US5373268A (en) * | 1993-02-01 | 1994-12-13 | Motorola, Inc. | Thin film resonator having stacked acoustic reflecting impedance matching layers and method |
US5332943A (en) * | 1993-10-21 | 1994-07-26 | Bhardwaj Mahesh C | High temperature ultrasonic transducer device |
US5446306A (en) * | 1993-12-13 | 1995-08-29 | Trw Inc. | Thin film voltage-tuned semiconductor bulk acoustic resonator (SBAR) |
US5587620A (en) * | 1993-12-21 | 1996-12-24 | Hewlett-Packard Company | Tunable thin film acoustic resonators and method for making the same |
US5422533A (en) * | 1994-03-09 | 1995-06-06 | The United States Of America As Represented By The Secretary Of The Army | Piezoelectric resonator |
JP3371050B2 (ja) * | 1995-10-27 | 2003-01-27 | 三菱電機株式会社 | 薄膜圧電素子 |
US5629906A (en) * | 1995-02-15 | 1997-05-13 | Hewlett-Packard Company | Ultrasonic transducer |
US5596239A (en) * | 1995-06-29 | 1997-01-21 | Motorola, Inc. | Enhanced quality factor resonator |
US5692279A (en) * | 1995-08-17 | 1997-12-02 | Motorola | Method of making a monolithic thin film resonator lattice filter |
US5646583A (en) * | 1996-01-04 | 1997-07-08 | Rockwell International Corporation | Acoustic isolator having a high impedance layer of hafnium oxide |
JP2974622B2 (ja) * | 1996-09-20 | 1999-11-10 | 松下電器産業株式会社 | 発振器 |
US5714917A (en) * | 1996-10-02 | 1998-02-03 | Nokia Mobile Phones Limited | Device incorporating a tunable thin film bulk acoustic resonator for performing amplitude and phase modulation |
US5872493A (en) * | 1997-03-13 | 1999-02-16 | Nokia Mobile Phones, Ltd. | Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror |
US5910756A (en) * | 1997-05-21 | 1999-06-08 | Nokia Mobile Phones Limited | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators |
-
1998
- 1998-04-08 US US09/057,299 patent/US6081171A/en not_active Expired - Lifetime
-
1999
- 1999-04-08 EP EP99302736A patent/EP0949756B1/de not_active Expired - Lifetime
- 1999-04-08 JP JP10083299A patent/JP4326063B2/ja not_active Expired - Lifetime
- 1999-04-08 DE DE69932558T patent/DE69932558T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69932558T2 (de) | 2007-08-09 |
US6081171A (en) | 2000-06-27 |
JP4326063B2 (ja) | 2009-09-02 |
JPH11346140A (ja) | 1999-12-14 |
EP0949756B1 (de) | 2006-08-02 |
EP0949756A2 (de) | 1999-10-13 |
EP0949756A3 (de) | 2001-05-09 |
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