DE69930863T2 - Ladungsgesteuerter spiegel mit membran-ansteuerung - Google Patents
Ladungsgesteuerter spiegel mit membran-ansteuerung Download PDFInfo
- Publication number
- DE69930863T2 DE69930863T2 DE69930863T DE69930863T DE69930863T2 DE 69930863 T2 DE69930863 T2 DE 69930863T2 DE 69930863 T DE69930863 T DE 69930863T DE 69930863 T DE69930863 T DE 69930863T DE 69930863 T2 DE69930863 T2 DE 69930863T2
- Authority
- DE
- Germany
- Prior art keywords
- membrane
- micromirrors
- potential
- mirror
- charge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 126
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 238000009825 accumulation Methods 0.000 claims abstract description 3
- 230000005684 electric field Effects 0.000 claims description 15
- 239000003990 capacitor Substances 0.000 claims description 5
- 230000004044 response Effects 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 abstract description 12
- 230000000149 penetrating effect Effects 0.000 abstract description 3
- 230000003068 static effect Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 12
- 238000013461 design Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000000576 coating method Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000395 magnesium oxide Substances 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 235000004035 Cryptotaenia japonica Nutrition 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 102000007641 Trefoil Factors Human genes 0.000 description 3
- 235000015724 Trifolium pratense Nutrition 0.000 description 3
- 238000005513 bias potential Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 241000219793 Trifolium Species 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000012217 deletion Methods 0.000 description 2
- 230000037430 deletion Effects 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 description 1
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- 235000008098 Oxalis acetosella Nutrition 0.000 description 1
- 244000126309 Trifolium dubium Species 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000005667 attractant Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 201000000760 cerebral cavernous malformation Diseases 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000031902 chemoattractant activity Effects 0.000 description 1
- 239000002772 conduction electron Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003278 mimic effect Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
- Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US172613 | 1988-03-24 | ||
| US09/172,613 US5991066A (en) | 1998-10-15 | 1998-10-15 | Membrane-actuated charge controlled mirror |
| PCT/US1999/021457 WO2000022473A1 (en) | 1998-10-15 | 1999-10-14 | Membrane-actuated charge controlled mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69930863D1 DE69930863D1 (de) | 2006-05-24 |
| DE69930863T2 true DE69930863T2 (de) | 2007-03-01 |
Family
ID=22628443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69930863T Expired - Lifetime DE69930863T2 (de) | 1998-10-15 | 1999-10-14 | Ladungsgesteuerter spiegel mit membran-ansteuerung |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5991066A (https=) |
| EP (1) | EP1121619B1 (https=) |
| JP (1) | JP4394287B2 (https=) |
| KR (1) | KR100585545B1 (https=) |
| AT (1) | ATE323295T1 (https=) |
| AU (1) | AU6498099A (https=) |
| CA (1) | CA2348606C (https=) |
| DE (1) | DE69930863T2 (https=) |
| WO (1) | WO2000022473A1 (https=) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999041007A2 (en) * | 1998-02-11 | 1999-08-19 | University Of Houston | Method and apparatus for chemical and biochemical reactions using photo-generated reagents |
| US6123985A (en) * | 1998-10-28 | 2000-09-26 | Solus Micro Technologies, Inc. | Method of fabricating a membrane-actuated charge controlled mirror (CCM) |
| US6343178B1 (en) | 2000-11-07 | 2002-01-29 | Integrated Micromachines, Inc. | Micromachined voltage controlled optical attenuator |
| JP2003005101A (ja) * | 2001-06-26 | 2003-01-08 | Seiko Epson Corp | 光変調装置及びその製造方法 |
| US6625342B2 (en) * | 2001-07-03 | 2003-09-23 | Network Photonics, Inc. | Systems and methods for overcoming stiction using a lever |
| US6614581B2 (en) * | 2001-07-03 | 2003-09-02 | Network Photonics, Inc. | Methods and apparatus for providing a multi-stop micromirror |
| US6693735B1 (en) * | 2001-07-30 | 2004-02-17 | Glimmerglass Networks, Inc. | MEMS structure with surface potential control |
| US6791742B2 (en) * | 2001-07-30 | 2004-09-14 | Glimmerglass Networks, Inc. | MEMS structure with raised electrodes |
| US6639710B2 (en) * | 2001-09-19 | 2003-10-28 | Lucent Technologies Inc. | Method and apparatus for the correction of optical signal wave front distortion using adaptive optics |
| US6870659B2 (en) * | 2002-10-11 | 2005-03-22 | Exajoule, Llc | Micromirror systems with side-supported mirrors and concealed flexure members |
| US6825968B2 (en) * | 2002-10-11 | 2004-11-30 | Exajoule, Llc | Micromirror systems with electrodes configured for sequential mirror attraction |
| US6798560B2 (en) * | 2002-10-11 | 2004-09-28 | Exajoula, Llc | Micromirror systems with open support structures |
| US6900922B2 (en) * | 2003-02-24 | 2005-05-31 | Exajoule, Llc | Multi-tilt micromirror systems with concealed hinge structures |
| US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
| US6853476B2 (en) * | 2003-04-30 | 2005-02-08 | Hewlett-Packard Development Company, L.P. | Charge control circuit for a micro-electromechanical device |
| JP4852835B2 (ja) * | 2004-09-02 | 2012-01-11 | ソニー株式会社 | 回折格子−光変調装置集合体 |
| US20060189023A1 (en) * | 2005-02-23 | 2006-08-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Three dimensional structure formed by using an adhesive silicon wafer process |
| US20070097476A1 (en) * | 2005-10-28 | 2007-05-03 | Truninger Martha A | Display system having a charge-controlled spatial light-modulator |
| KR100814390B1 (ko) | 2007-02-15 | 2008-03-18 | 삼성전자주식회사 | 메모리 소자 및 그 제조 방법. |
| KR100850273B1 (ko) | 2007-03-08 | 2008-08-04 | 삼성전자주식회사 | 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법 |
| KR100876088B1 (ko) | 2007-05-23 | 2008-12-26 | 삼성전자주식회사 | 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법 |
| KR100876948B1 (ko) | 2007-05-23 | 2009-01-09 | 삼성전자주식회사 | 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법 |
| KR100938994B1 (ko) * | 2007-10-15 | 2010-01-28 | 한국과학기술원 | 마이크로 미러 및 이를 이용한 마이크로 미러 어레이 |
| KR101499231B1 (ko) | 2008-12-10 | 2015-03-05 | 삼성디스플레이 주식회사 | 표시 장치 |
| US9323041B2 (en) | 2011-11-30 | 2016-04-26 | Pixtronix, Inc. | Electromechanical systems display apparatus incorporating charge dissipation surfaces |
| JP6246907B2 (ja) * | 2013-05-22 | 2017-12-13 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 光学素子及び当該光学素子に対する放射の影響を低減する手段を備えた光学コンポーネント |
Family Cites Families (55)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US2733501A (en) * | 1956-02-07 | Electrostatic shutter mosaic and method of manufacture | ||
| US2682010A (en) * | 1951-08-07 | 1954-06-22 | Us Air Force | Cathode-ray projection tube |
| US2681380A (en) * | 1951-09-26 | 1954-06-15 | Us Air Force | Color television projection system |
| US3517126A (en) * | 1966-11-17 | 1970-06-23 | Tokyo Shibaura Electric Co | Light value image projection system with deformable membrane and thin film target electrode |
| US3600798A (en) * | 1969-02-25 | 1971-08-24 | Texas Instruments Inc | Process for fabricating a panel array of electromechanical light valves |
| US3678196A (en) * | 1970-10-20 | 1972-07-18 | Solo S Roth | Means for projecting an enlarged television image |
| US3746911A (en) * | 1971-04-13 | 1973-07-17 | Westinghouse Electric Corp | Electrostatically deflectable light valves for projection displays |
| US3746785A (en) * | 1971-11-26 | 1973-07-17 | Bendix Corp | Deflectable membrane optical modulator |
| US3886310A (en) * | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
| US3896338A (en) * | 1973-11-01 | 1975-07-22 | Westinghouse Electric Corp | Color video display system comprising electrostatically deflectable light valves |
| US4229732A (en) * | 1978-12-11 | 1980-10-21 | International Business Machines Corporation | Micromechanical display logic and array |
| US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| US4387964A (en) * | 1980-10-21 | 1983-06-14 | Mcdonnell Douglas Corporation | Electron addressed liquid crystal light valve |
| US4592628A (en) * | 1981-07-01 | 1986-06-03 | International Business Machines | Mirror array light valve |
| US4680579A (en) * | 1983-09-08 | 1987-07-14 | Texas Instruments Incorporated | Optical system for projection display using spatial light modulator device |
| US4710732A (en) * | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
| US4698602A (en) * | 1985-10-09 | 1987-10-06 | The United States Of America As Represented By The Secretary Of The Air Force | Micromirror spatial light modulator |
| US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| EP0246547A3 (de) * | 1986-05-22 | 1990-06-13 | Siemens Aktiengesellschaft | Anordnung zur optischen Bildverarbeitung |
| US4728174A (en) * | 1986-11-06 | 1988-03-01 | Hughes Aircraft Company | Electron beam addressed liquid crystal light valve |
| US4826293A (en) * | 1987-03-03 | 1989-05-02 | Hughes Aircraft Company | Electron beam addressed liquid crystal light valve with input sheet conductor |
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| US4784883A (en) * | 1987-05-05 | 1988-11-15 | Tektronix, Inc. | Liquid crystal cell and method of assembly of same |
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| US5416514A (en) * | 1990-12-27 | 1995-05-16 | North American Philips Corporation | Single panel color projection video display having control circuitry for synchronizing the color illumination system with reading/writing of the light valve |
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| US5493439A (en) * | 1992-09-29 | 1996-02-20 | Engle; Craig D. | Enhanced surface deformation light modulator |
| US5552925A (en) * | 1993-09-07 | 1996-09-03 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
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| US5636070A (en) * | 1994-04-30 | 1997-06-03 | Daewoo Electronics Co, Ltd. | Thin film actuated mirror array |
| US5442414A (en) * | 1994-05-10 | 1995-08-15 | U. S. Philips Corporation | High contrast illumination system for video projector |
| DE69517985T2 (de) * | 1994-09-02 | 2001-02-22 | Rad Hassan Dabbaj | Reflektiver lichtventilmodulator |
| KR100220675B1 (ko) * | 1994-10-31 | 1999-09-15 | 전주범 | 투사형 화상표시장치 |
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| US5504614A (en) * | 1995-01-31 | 1996-04-02 | Texas Instruments Incorporated | Method for fabricating a DMD spatial light modulator with a hardened hinge |
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| US5567334A (en) * | 1995-02-27 | 1996-10-22 | Texas Instruments Incorporated | Method for creating a digital micromirror device using an aluminum hard mask |
| US5706061A (en) * | 1995-03-31 | 1998-01-06 | Texas Instruments Incorporated | Spatial light image display system with synchronized and modulated light source |
| US5535047A (en) * | 1995-04-18 | 1996-07-09 | Texas Instruments Incorporated | Active yoke hidden hinge digital micromirror device |
| US5677784A (en) * | 1995-07-24 | 1997-10-14 | Ellis D. Harris Sr. Family Trust | Array of pellicle optical gates |
| US5774196A (en) * | 1996-06-13 | 1998-06-30 | Texas Instruments Incorporated | Method and apparatus of aligning color modulation data to color wheel filter segments |
| US5768009A (en) * | 1997-04-18 | 1998-06-16 | E-Beam | Light valve target comprising electrostatically-repelled micro-mirrors |
-
1998
- 1998-10-15 US US09/172,613 patent/US5991066A/en not_active Expired - Lifetime
-
1999
- 1999-10-14 WO PCT/US1999/021457 patent/WO2000022473A1/en not_active Ceased
- 1999-10-14 EP EP99952925A patent/EP1121619B1/en not_active Expired - Lifetime
- 1999-10-14 KR KR1020017004752A patent/KR100585545B1/ko not_active Expired - Fee Related
- 1999-10-14 CA CA002348606A patent/CA2348606C/en not_active Expired - Fee Related
- 1999-10-14 DE DE69930863T patent/DE69930863T2/de not_active Expired - Lifetime
- 1999-10-14 AT AT99952925T patent/ATE323295T1/de not_active IP Right Cessation
- 1999-10-14 AU AU64980/99A patent/AU6498099A/en not_active Abandoned
- 1999-10-14 JP JP2000576313A patent/JP4394287B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1121619B1 (en) | 2006-04-12 |
| CA2348606A1 (en) | 2000-04-20 |
| EP1121619A4 (en) | 2005-05-11 |
| US5991066A (en) | 1999-11-23 |
| EP1121619A1 (en) | 2001-08-08 |
| DE69930863D1 (de) | 2006-05-24 |
| JP4394287B2 (ja) | 2010-01-06 |
| JP2002527791A (ja) | 2002-08-27 |
| KR20010107918A (ko) | 2001-12-07 |
| WO2000022473A1 (en) | 2000-04-20 |
| CA2348606C (en) | 2009-09-08 |
| AU6498099A (en) | 2000-05-01 |
| KR100585545B1 (ko) | 2006-05-30 |
| ATE323295T1 (de) | 2006-04-15 |
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| DE2714150A1 (de) | Bildwiedergabeeinrichtung mit flachem kolben | |
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