KR100585545B1 - 막-활성화 전하 제어 미러 - Google Patents

막-활성화 전하 제어 미러 Download PDF

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Publication number
KR100585545B1
KR100585545B1 KR1020017004752A KR20017004752A KR100585545B1 KR 100585545 B1 KR100585545 B1 KR 100585545B1 KR 1020017004752 A KR1020017004752 A KR 1020017004752A KR 20017004752 A KR20017004752 A KR 20017004752A KR 100585545 B1 KR100585545 B1 KR 100585545B1
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South Korea
Prior art keywords
film
mirror
micromirror
potential
array
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Expired - Fee Related
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KR1020017004752A
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English (en)
Korean (ko)
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KR20010107918A (ko
Inventor
윌리엄피. 로빈슨
마이클제이. 리틀
에릭에이. 지포드
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솔루스 마이크로 테크놀로지스 인코포레이티드
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Publication of KR20010107918A publication Critical patent/KR20010107918A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Micromachines (AREA)
KR1020017004752A 1998-10-15 1999-10-14 막-활성화 전하 제어 미러 Expired - Fee Related KR100585545B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/172,613 1998-10-15
US09/172,613 US5991066A (en) 1998-10-15 1998-10-15 Membrane-actuated charge controlled mirror

Publications (2)

Publication Number Publication Date
KR20010107918A KR20010107918A (ko) 2001-12-07
KR100585545B1 true KR100585545B1 (ko) 2006-05-30

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KR1020017004752A Expired - Fee Related KR100585545B1 (ko) 1998-10-15 1999-10-14 막-활성화 전하 제어 미러

Country Status (9)

Country Link
US (1) US5991066A (https=)
EP (1) EP1121619B1 (https=)
JP (1) JP4394287B2 (https=)
KR (1) KR100585545B1 (https=)
AT (1) ATE323295T1 (https=)
AU (1) AU6498099A (https=)
CA (1) CA2348606C (https=)
DE (1) DE69930863T2 (https=)
WO (1) WO2000022473A1 (https=)

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US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
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US6853476B2 (en) * 2003-04-30 2005-02-08 Hewlett-Packard Development Company, L.P. Charge control circuit for a micro-electromechanical device
JP4852835B2 (ja) * 2004-09-02 2012-01-11 ソニー株式会社 回折格子−光変調装置集合体
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KR100814390B1 (ko) 2007-02-15 2008-03-18 삼성전자주식회사 메모리 소자 및 그 제조 방법.
KR100850273B1 (ko) 2007-03-08 2008-08-04 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100876088B1 (ko) 2007-05-23 2008-12-26 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100876948B1 (ko) 2007-05-23 2009-01-09 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100938994B1 (ko) * 2007-10-15 2010-01-28 한국과학기술원 마이크로 미러 및 이를 이용한 마이크로 미러 어레이
KR101499231B1 (ko) 2008-12-10 2015-03-05 삼성디스플레이 주식회사 표시 장치
US9323041B2 (en) 2011-11-30 2016-04-26 Pixtronix, Inc. Electromechanical systems display apparatus incorporating charge dissipation surfaces
JP6246907B2 (ja) * 2013-05-22 2017-12-13 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学素子及び当該光学素子に対する放射の影響を低減する手段を備えた光学コンポーネント

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Also Published As

Publication number Publication date
EP1121619B1 (en) 2006-04-12
CA2348606A1 (en) 2000-04-20
EP1121619A4 (en) 2005-05-11
US5991066A (en) 1999-11-23
EP1121619A1 (en) 2001-08-08
DE69930863D1 (de) 2006-05-24
JP4394287B2 (ja) 2010-01-06
JP2002527791A (ja) 2002-08-27
KR20010107918A (ko) 2001-12-07
WO2000022473A1 (en) 2000-04-20
CA2348606C (en) 2009-09-08
AU6498099A (en) 2000-05-01
DE69930863T2 (de) 2007-03-01
ATE323295T1 (de) 2006-04-15

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