ATE323295T1 - Ladungsgesteuerter spiegel mit membran- ansteuerung - Google Patents

Ladungsgesteuerter spiegel mit membran- ansteuerung

Info

Publication number
ATE323295T1
ATE323295T1 AT99952925T AT99952925T ATE323295T1 AT E323295 T1 ATE323295 T1 AT E323295T1 AT 99952925 T AT99952925 T AT 99952925T AT 99952925 T AT99952925 T AT 99952925T AT E323295 T1 ATE323295 T1 AT E323295T1
Authority
AT
Austria
Prior art keywords
mirror
light modulator
membrane
charge
micromirror
Prior art date
Application number
AT99952925T
Other languages
German (de)
English (en)
Inventor
William P Robinson
Michael J Little
Eric A Gifford
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of ATE323295T1 publication Critical patent/ATE323295T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Micromachines (AREA)
AT99952925T 1998-10-15 1999-10-14 Ladungsgesteuerter spiegel mit membran- ansteuerung ATE323295T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/172,613 US5991066A (en) 1998-10-15 1998-10-15 Membrane-actuated charge controlled mirror

Publications (1)

Publication Number Publication Date
ATE323295T1 true ATE323295T1 (de) 2006-04-15

Family

ID=22628443

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99952925T ATE323295T1 (de) 1998-10-15 1999-10-14 Ladungsgesteuerter spiegel mit membran- ansteuerung

Country Status (9)

Country Link
US (1) US5991066A (https=)
EP (1) EP1121619B1 (https=)
JP (1) JP4394287B2 (https=)
KR (1) KR100585545B1 (https=)
AT (1) ATE323295T1 (https=)
AU (1) AU6498099A (https=)
CA (1) CA2348606C (https=)
DE (1) DE69930863T2 (https=)
WO (1) WO2000022473A1 (https=)

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KR100850273B1 (ko) 2007-03-08 2008-08-04 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100876088B1 (ko) 2007-05-23 2008-12-26 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100876948B1 (ko) 2007-05-23 2009-01-09 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100938994B1 (ko) * 2007-10-15 2010-01-28 한국과학기술원 마이크로 미러 및 이를 이용한 마이크로 미러 어레이
KR101499231B1 (ko) 2008-12-10 2015-03-05 삼성디스플레이 주식회사 표시 장치
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JP6246907B2 (ja) * 2013-05-22 2017-12-13 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学素子及び当該光学素子に対する放射の影響を低減する手段を備えた光学コンポーネント

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Also Published As

Publication number Publication date
EP1121619B1 (en) 2006-04-12
CA2348606A1 (en) 2000-04-20
EP1121619A4 (en) 2005-05-11
US5991066A (en) 1999-11-23
EP1121619A1 (en) 2001-08-08
DE69930863D1 (de) 2006-05-24
JP4394287B2 (ja) 2010-01-06
JP2002527791A (ja) 2002-08-27
KR20010107918A (ko) 2001-12-07
WO2000022473A1 (en) 2000-04-20
CA2348606C (en) 2009-09-08
AU6498099A (en) 2000-05-01
DE69930863T2 (de) 2007-03-01
KR100585545B1 (ko) 2006-05-30

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Legal Events

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