JP2002527791A5 - - Google Patents

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Publication number
JP2002527791A5
JP2002527791A5 JP2000576313A JP2000576313A JP2002527791A5 JP 2002527791 A5 JP2002527791 A5 JP 2002527791A5 JP 2000576313 A JP2000576313 A JP 2000576313A JP 2000576313 A JP2000576313 A JP 2000576313A JP 2002527791 A5 JP2002527791 A5 JP 2002527791A5
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JP
Japan
Prior art keywords
micromirrors
array
film
potential
optical modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000576313A
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English (en)
Japanese (ja)
Other versions
JP4394287B2 (ja
JP2002527791A (ja
Filing date
Publication date
Priority claimed from US09/172,613 external-priority patent/US5991066A/en
Application filed filed Critical
Publication of JP2002527791A publication Critical patent/JP2002527791A/ja
Publication of JP2002527791A5 publication Critical patent/JP2002527791A5/ja
Application granted granted Critical
Publication of JP4394287B2 publication Critical patent/JP4394287B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000576313A 1998-10-15 1999-10-14 膜起動電荷制御ミラー Expired - Fee Related JP4394287B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/172,613 1998-10-15
US09/172,613 US5991066A (en) 1998-10-15 1998-10-15 Membrane-actuated charge controlled mirror
PCT/US1999/021457 WO2000022473A1 (en) 1998-10-15 1999-10-14 Membrane-actuated charge controlled mirror

Publications (3)

Publication Number Publication Date
JP2002527791A JP2002527791A (ja) 2002-08-27
JP2002527791A5 true JP2002527791A5 (https=) 2006-10-05
JP4394287B2 JP4394287B2 (ja) 2010-01-06

Family

ID=22628443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000576313A Expired - Fee Related JP4394287B2 (ja) 1998-10-15 1999-10-14 膜起動電荷制御ミラー

Country Status (9)

Country Link
US (1) US5991066A (https=)
EP (1) EP1121619B1 (https=)
JP (1) JP4394287B2 (https=)
KR (1) KR100585545B1 (https=)
AT (1) ATE323295T1 (https=)
AU (1) AU6498099A (https=)
CA (1) CA2348606C (https=)
DE (1) DE69930863T2 (https=)
WO (1) WO2000022473A1 (https=)

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KR100876948B1 (ko) 2007-05-23 2009-01-09 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
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KR101499231B1 (ko) 2008-12-10 2015-03-05 삼성디스플레이 주식회사 표시 장치
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