CA2348606C - Membrane-actuated charge controlled mirror - Google Patents

Membrane-actuated charge controlled mirror Download PDF

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Publication number
CA2348606C
CA2348606C CA002348606A CA2348606A CA2348606C CA 2348606 C CA2348606 C CA 2348606C CA 002348606 A CA002348606 A CA 002348606A CA 2348606 A CA2348606 A CA 2348606A CA 2348606 C CA2348606 C CA 2348606C
Authority
CA
Canada
Prior art keywords
membrane
micromirrors
potential
array
light modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002348606A
Other languages
English (en)
French (fr)
Other versions
CA2348606A1 (en
Inventor
William P. Robinson
Michael J. Little
Eric A. Gifford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of CA2348606A1 publication Critical patent/CA2348606A1/en
Application granted granted Critical
Publication of CA2348606C publication Critical patent/CA2348606C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Micromachines (AREA)
CA002348606A 1998-10-15 1999-10-14 Membrane-actuated charge controlled mirror Expired - Fee Related CA2348606C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/172,613 1998-10-15
US09/172,613 US5991066A (en) 1998-10-15 1998-10-15 Membrane-actuated charge controlled mirror
PCT/US1999/021457 WO2000022473A1 (en) 1998-10-15 1999-10-14 Membrane-actuated charge controlled mirror

Publications (2)

Publication Number Publication Date
CA2348606A1 CA2348606A1 (en) 2000-04-20
CA2348606C true CA2348606C (en) 2009-09-08

Family

ID=22628443

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002348606A Expired - Fee Related CA2348606C (en) 1998-10-15 1999-10-14 Membrane-actuated charge controlled mirror

Country Status (9)

Country Link
US (1) US5991066A (https=)
EP (1) EP1121619B1 (https=)
JP (1) JP4394287B2 (https=)
KR (1) KR100585545B1 (https=)
AT (1) ATE323295T1 (https=)
AU (1) AU6498099A (https=)
CA (1) CA2348606C (https=)
DE (1) DE69930863T2 (https=)
WO (1) WO2000022473A1 (https=)

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KR100850273B1 (ko) 2007-03-08 2008-08-04 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100876088B1 (ko) 2007-05-23 2008-12-26 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100876948B1 (ko) 2007-05-23 2009-01-09 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100938994B1 (ko) * 2007-10-15 2010-01-28 한국과학기술원 마이크로 미러 및 이를 이용한 마이크로 미러 어레이
KR101499231B1 (ko) 2008-12-10 2015-03-05 삼성디스플레이 주식회사 표시 장치
US9323041B2 (en) 2011-11-30 2016-04-26 Pixtronix, Inc. Electromechanical systems display apparatus incorporating charge dissipation surfaces
JP6246907B2 (ja) * 2013-05-22 2017-12-13 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学素子及び当該光学素子に対する放射の影響を低減する手段を備えた光学コンポーネント

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Also Published As

Publication number Publication date
EP1121619B1 (en) 2006-04-12
CA2348606A1 (en) 2000-04-20
EP1121619A4 (en) 2005-05-11
US5991066A (en) 1999-11-23
EP1121619A1 (en) 2001-08-08
DE69930863D1 (de) 2006-05-24
JP4394287B2 (ja) 2010-01-06
JP2002527791A (ja) 2002-08-27
KR20010107918A (ko) 2001-12-07
WO2000022473A1 (en) 2000-04-20
AU6498099A (en) 2000-05-01
DE69930863T2 (de) 2007-03-01
KR100585545B1 (ko) 2006-05-30
ATE323295T1 (de) 2006-04-15

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