JP4394287B2 - 膜起動電荷制御ミラー - Google Patents

膜起動電荷制御ミラー Download PDF

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Publication number
JP4394287B2
JP4394287B2 JP2000576313A JP2000576313A JP4394287B2 JP 4394287 B2 JP4394287 B2 JP 4394287B2 JP 2000576313 A JP2000576313 A JP 2000576313A JP 2000576313 A JP2000576313 A JP 2000576313A JP 4394287 B2 JP4394287 B2 JP 4394287B2
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Japan
Prior art keywords
micromirrors
array
potential
film
membrane
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Expired - Fee Related
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JP2000576313A
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Japanese (ja)
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JP2002527791A5 (https=
JP2002527791A (ja
Inventor
ウイリアム ピー． ロビンソン，
マイケル ジェイ． リトル，
エリック エイ． ギフォード，
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インテル コーポレイション
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Micromachines (AREA)
JP2000576313A 1998-10-15 1999-10-14 膜起動電荷制御ミラー Expired - Fee Related JP4394287B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/172,613 1998-10-15
US09/172,613 US5991066A (en) 1998-10-15 1998-10-15 Membrane-actuated charge controlled mirror
PCT/US1999/021457 WO2000022473A1 (en) 1998-10-15 1999-10-14 Membrane-actuated charge controlled mirror

Publications (3)

Publication Number Publication Date
JP2002527791A JP2002527791A (ja) 2002-08-27
JP2002527791A5 JP2002527791A5 (https=) 2006-10-05
JP4394287B2 true JP4394287B2 (ja) 2010-01-06

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ID=22628443

Family Applications (1)

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JP2000576313A Expired - Fee Related JP4394287B2 (ja) 1998-10-15 1999-10-14 膜起動電荷制御ミラー

Country Status (9)

Country Link
US (1) US5991066A (https=)
EP (1) EP1121619B1 (https=)
JP (1) JP4394287B2 (https=)
KR (1) KR100585545B1 (https=)
AT (1) ATE323295T1 (https=)
AU (1) AU6498099A (https=)
CA (1) CA2348606C (https=)
DE (1) DE69930863T2 (https=)
WO (1) WO2000022473A1 (https=)

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US9323041B2 (en) 2011-11-30 2016-04-26 Pixtronix, Inc. Electromechanical systems display apparatus incorporating charge dissipation surfaces

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KR100850273B1 (ko) 2007-03-08 2008-08-04 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100876088B1 (ko) 2007-05-23 2008-12-26 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100876948B1 (ko) 2007-05-23 2009-01-09 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
KR100938994B1 (ko) * 2007-10-15 2010-01-28 한국과학기술원 마이크로 미러 및 이를 이용한 마이크로 미러 어레이
KR101499231B1 (ko) 2008-12-10 2015-03-05 삼성디스플레이 주식회사 표시 장치
JP6246907B2 (ja) * 2013-05-22 2017-12-13 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学素子及び当該光学素子に対する放射の影響を低減する手段を備えた光学コンポーネント

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9323041B2 (en) 2011-11-30 2016-04-26 Pixtronix, Inc. Electromechanical systems display apparatus incorporating charge dissipation surfaces

Also Published As

Publication number Publication date
EP1121619B1 (en) 2006-04-12
CA2348606A1 (en) 2000-04-20
EP1121619A4 (en) 2005-05-11
US5991066A (en) 1999-11-23
EP1121619A1 (en) 2001-08-08
DE69930863D1 (de) 2006-05-24
JP2002527791A (ja) 2002-08-27
KR20010107918A (ko) 2001-12-07
WO2000022473A1 (en) 2000-04-20
CA2348606C (en) 2009-09-08
AU6498099A (en) 2000-05-01
DE69930863T2 (de) 2007-03-01
KR100585545B1 (ko) 2006-05-30
ATE323295T1 (de) 2006-04-15

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