ATE194725T1 - Reflektiver lichtventilmodulator - Google Patents

Reflektiver lichtventilmodulator

Info

Publication number
ATE194725T1
ATE194725T1 AT95930606T AT95930606T ATE194725T1 AT E194725 T1 ATE194725 T1 AT E194725T1 AT 95930606 T AT95930606 T AT 95930606T AT 95930606 T AT95930606 T AT 95930606T AT E194725 T1 ATE194725 T1 AT E194725T1
Authority
AT
Austria
Prior art keywords
layer
pct
dielectric
date
deformable
Prior art date
Application number
AT95930606T
Other languages
English (en)
Inventor
Rad H Dabbaj
Original Assignee
Rad H Dabbaj
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB9417756A external-priority patent/GB9417756D0/en
Priority claimed from GBGB9507306.0A external-priority patent/GB9507306D0/en
Application filed by Rad H Dabbaj filed Critical Rad H Dabbaj
Application granted granted Critical
Publication of ATE194725T1 publication Critical patent/ATE194725T1/de

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7425—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being a dielectric deformable layer controlled by an electron beam, e.g. eidophor projector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/12—Screens on or from which an image or pattern is formed, picked up, converted or stored acting as light valves by shutter operation, e.g. for eidophor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Liquid Crystal (AREA)
  • Transforming Electric Information Into Light Information (AREA)
AT95930606T 1994-09-02 1995-09-01 Reflektiver lichtventilmodulator ATE194725T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9417756A GB9417756D0 (en) 1994-09-02 1994-09-02 Electronic display devices
GBGB9507306.0A GB9507306D0 (en) 1995-04-07 1995-04-07 Electronic display devices
PCT/GB1995/002061 WO1996008031A1 (en) 1994-09-02 1995-09-01 Reflective light valve modulator

Publications (1)

Publication Number Publication Date
ATE194725T1 true ATE194725T1 (de) 2000-07-15

Family

ID=26305562

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95930606T ATE194725T1 (de) 1994-09-02 1995-09-01 Reflektiver lichtventilmodulator

Country Status (13)

Country Link
US (1) US5822110C1 (de)
EP (1) EP0778982B1 (de)
JP (1) JPH10505193A (de)
CN (1) CN1157668A (de)
AT (1) ATE194725T1 (de)
AU (1) AU686874B2 (de)
CA (1) CA2198105A1 (de)
DE (1) DE69517985T2 (de)
DK (1) DK0778982T3 (de)
ES (1) ES2149373T3 (de)
PT (1) PT778982E (de)
RU (1) RU2143127C1 (de)
WO (1) WO1996008031A1 (de)

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US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
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US5991066A (en) * 1998-10-15 1999-11-23 Memsolutions, Inc. Membrane-actuated charge controlled mirror
US6031657A (en) * 1998-10-15 2000-02-29 Memsolutions, Inc. Membrane-actuated charge controlled mirror (CCM) projection display
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US6268948B1 (en) * 1999-06-11 2001-07-31 Creo Products Inc. Micromachined reflective light valve
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6369498B1 (en) 1999-11-03 2002-04-09 Intel Corporation Electron gun for addressing secondary emission targets
AU2001249289A1 (en) 2000-03-20 2001-10-03 Solus Micro Technologies, Inc. Electrostatically-actuated tunable optical components using entropic materials
US6678084B2 (en) 2000-03-20 2004-01-13 Np Photonics, Inc. Methods of making mechanisms in which relative locations of elements are maintained during manufacturing
US6597461B1 (en) 2000-03-20 2003-07-22 Parvenu, Inc. Tunable fabry-perot interferometer using entropic materials
US6747784B2 (en) 2000-03-20 2004-06-08 Np Photonics, Inc. Compliant mechanism and method of forming same
US6665109B2 (en) 2000-03-20 2003-12-16 Np Photonics, Inc. Compliant mechanism and method of forming same
US6747775B2 (en) * 2000-03-20 2004-06-08 Np Photonics, Inc. Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
US6611377B1 (en) * 2000-07-10 2003-08-26 Intel Corporation Micromechanical diffraction phase grating
US6346776B1 (en) 2000-07-10 2002-02-12 Memsolutions, Inc. Field emission array (FEA) addressed deformable light valve modulator
US6411425B1 (en) * 2000-09-27 2002-06-25 Eastman Kodak Company Electromechanical grating display system with spatially separated light beams
US6531332B1 (en) 2001-01-10 2003-03-11 Parvenu, Inc. Surface micromachining using a thick release process
US6639722B2 (en) 2001-08-15 2003-10-28 Silicon Light Machines Stress tuned blazed grating light valve
US6785001B2 (en) 2001-08-21 2004-08-31 Silicon Light Machines, Inc. Method and apparatus for measuring wavelength jitter of light signal
US6639710B2 (en) * 2001-09-19 2003-10-28 Lucent Technologies Inc. Method and apparatus for the correction of optical signal wave front distortion using adaptive optics
RU2231859C2 (ru) * 2002-02-18 2004-06-27 ООО "Высокие технологии" Электронная пушка
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
RU2230348C1 (ru) * 2002-12-27 2004-06-10 Гущо Юрий Петрович Электрооптический преобразователь, гелеобразный слой для электрооптического преобразователя, способ приготовления гелеобразного слоя (варианты) и композиция для осуществления способа
US6747777B1 (en) 2003-02-24 2004-06-08 Cymscape Incorporated Reflective microfluidics display particularly suited for large format applications
US7075593B2 (en) * 2003-03-26 2006-07-11 Video Display Corporation Electron-beam-addressed active-matrix spatial light modulator
US6956692B2 (en) * 2003-04-24 2005-10-18 Micronic Laser Systems, Ab Method and apparatus for controlling exposure of a surface of a substrate
US6930817B2 (en) * 2003-04-25 2005-08-16 Palo Alto Research Center Incorporated Configurable grating based on surface relief pattern for use as a variable optical attenuator
US6853476B2 (en) * 2003-04-30 2005-02-08 Hewlett-Packard Development Company, L.P. Charge control circuit for a micro-electromechanical device
TW570896B (en) * 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7221495B2 (en) * 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
US7217582B2 (en) * 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US6943933B2 (en) * 2003-12-21 2005-09-13 Hewlett-Packard Development Company, L.P. MEM devices having charge induced via focused beam to enter different states
US7268933B2 (en) 2003-12-21 2007-09-11 Hewlett-Packard Development Company, L.P. Discharge of MEM devices having charge induced via focused beam to enter different states
KR101313117B1 (ko) 2004-07-29 2013-09-30 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
WO2006093425A1 (fr) * 2005-03-03 2006-09-08 Yury Petrovich Guscho Procede de modulation d'un rayonnement optique, modulateur electrooptique (variantes) et dispositif electrooptique (variantes)
US7535619B2 (en) * 2005-04-27 2009-05-19 Hewlett-Packard Development Company, L.P. Discharge of MEM devices having charge induced via focused beam to enter different states
JP2009503565A (ja) 2005-07-22 2009-01-29 クアルコム，インコーポレイテッド Ｍｅｍｓデバイスのための支持構造、およびその方法
EP2495212A3 (de) 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
EP1910218A1 (de) 2005-07-22 2008-04-16 Qualcomm Mems Technologies, Inc. Mem-vorrichtungen mit stützstrukturen und verfahren zu ihrer herstellung
NO326468B1 (no) * 2005-12-06 2008-12-08 Ignis Display As Modulator med innstillbart diffraksjonsgitter (TDG) med total intern refleksjon (TIR), fremgangsmate for fremstilling av en elastomer for anvedelse deri samt anvendelse av elastomeren.
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
JP4327183B2 (ja) * 2006-07-31 2009-09-09 株式会社日立製作所 内燃機関の高圧燃料ポンプ制御装置
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7545552B2 (en) 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7535621B2 (en) 2006-12-27 2009-05-19 Qualcomm Mems Technologies, Inc. Aluminum fluoride films for microelectromechanical system applications
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7625825B2 (en) 2007-06-14 2009-12-01 Qualcomm Mems Technologies, Inc. Method of patterning mechanical layer for MEMS structures
US7569488B2 (en) 2007-06-22 2009-08-04 Qualcomm Mems Technologies, Inc. Methods of making a MEMS device by monitoring a process parameter
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US7851239B2 (en) 2008-06-05 2010-12-14 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US7990604B2 (en) * 2009-06-15 2011-08-02 Qualcomm Mems Technologies, Inc. Analog interferometric modulator
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
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Also Published As

Publication number Publication date
US5822110C1 (en) 2001-06-26
DE69517985D1 (de) 2000-08-17
RU2143127C1 (ru) 1999-12-20
DK0778982T3 (da) 2000-11-06
AU686874B2 (en) 1998-02-12
JPH10505193A (ja) 1998-05-19
EP0778982A1 (de) 1997-06-18
EP0778982B1 (de) 2000-07-12
WO1996008031A1 (en) 1996-03-14
PT778982E (pt) 2000-12-29
ES2149373T3 (es) 2000-11-01
US5822110A (en) 1998-10-13
CN1157668A (zh) 1997-08-20
DE69517985T2 (de) 2001-02-22
AU3392795A (en) 1996-03-27
CA2198105A1 (en) 1996-03-14

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee