ES2149373T3 - Valvula moduladora de la luz por reflexion. - Google Patents

Valvula moduladora de la luz por reflexion.

Info

Publication number
ES2149373T3
ES2149373T3 ES95930606T ES95930606T ES2149373T3 ES 2149373 T3 ES2149373 T3 ES 2149373T3 ES 95930606 T ES95930606 T ES 95930606T ES 95930606 T ES95930606 T ES 95930606T ES 2149373 T3 ES2149373 T3 ES 2149373T3
Authority
ES
Spain
Prior art keywords
layer
pct
dielectric
date
deformable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95930606T
Other languages
English (en)
Inventor
Rad H Dabbaj
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB9417756A external-priority patent/GB9417756D0/en
Priority claimed from GBGB9507306.0A external-priority patent/GB9507306D0/en
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of ES2149373T3 publication Critical patent/ES2149373T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7425—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being a dielectric deformable layer controlled by an electron beam, e.g. eidophor projector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/12—Screens on or from which an image or pattern is formed, picked up, converted or stored acting as light valves by shutter operation, e.g. for eidophor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Liquid Crystal (AREA)
  • Transforming Electric Information Into Light Information (AREA)

Abstract

UN MODULADOR DE FOTOVALVULA DE OPERACION REFLECTOR QUE INCLUYE UNA ESTRUCTURA MULTICAPA QUE ESTA CONTROLADA ELECTROSTATICAMENTE, COMPRENDE UN SUSTRATO TRANSPARENTE QUE SOPORTA UNA PRIMERA CAPA DEFORMABLE TRANSPARENTE Y UNA SEGUNDA CAPA DEFORMABLE DIELECTRICA AISLANTE, CON UNA CAPA DE ESPEJO INTERCALADA ENTRE ELLAS, Y UNA TERCERA, CAPA AISLANTE DIELECTRICA EN EL EXTERIOR DE LA SEGUNDA CAPA, AL MENOS UNA DE LAS CAPAS ENTRE LA SEGUNDA CAPA Y EL SUSTRATO SIENDO CONDUCTORA ELECTRICAMENTE, Y LA TERCERA CAPA DIELECTRICA SIENDO CAPAZ DE RECIBIR UN PATRON DE CARGA ELECTRICA POR MEDIO DE UNO O MAS HACES ELECTRONICOS, POR MEDIO DE LOS CUALES LA CAPA DE ESPEJO ES LOCALMENTE DEFORMADA POR FUERZAS ELECTROSTATICAS SE PRODUCEN ENTRE LA TERCERA CAPA Y LA CAPA CONDUCTORA. LAS CAPAS DEFORMABLES DOBLES PERMITEN BUENA SENSIBILIDAD, MIENTRAS QUE LA CAPA DIELECTRICA EXTERIOR QUE RECIBE CARGA DESDE UNA HAZ ELECTRONICO QUE PROTEGE A LAS CAPAS DEFORMABLES DEL BOMBARDEO ELECTRONICO Y CATODO DE LA FUGA DE GASES. EL MODULADOR ES USADO EN TUBOS DE VISUALIZADOR, PARTICULARMENTE PARA TV DE PROYECCION.
ES95930606T 1994-09-02 1995-09-01 Valvula moduladora de la luz por reflexion. Expired - Lifetime ES2149373T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9417756A GB9417756D0 (en) 1994-09-02 1994-09-02 Electronic display devices
GBGB9507306.0A GB9507306D0 (en) 1995-04-07 1995-04-07 Electronic display devices

Publications (1)

Publication Number Publication Date
ES2149373T3 true ES2149373T3 (es) 2000-11-01

Family

ID=26305562

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95930606T Expired - Lifetime ES2149373T3 (es) 1994-09-02 1995-09-01 Valvula moduladora de la luz por reflexion.

Country Status (13)

Country Link
US (1) US5822110C1 (es)
EP (1) EP0778982B1 (es)
JP (1) JPH10505193A (es)
CN (1) CN1157668A (es)
AT (1) ATE194725T1 (es)
AU (1) AU686874B2 (es)
CA (1) CA2198105A1 (es)
DE (1) DE69517985T2 (es)
DK (1) DK0778982T3 (es)
ES (1) ES2149373T3 (es)
PT (1) PT778982E (es)
RU (1) RU2143127C1 (es)
WO (1) WO1996008031A1 (es)

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US5991066A (en) * 1998-10-15 1999-11-23 Memsolutions, Inc. Membrane-actuated charge controlled mirror
US6031657A (en) * 1998-10-15 2000-02-29 Memsolutions, Inc. Membrane-actuated charge controlled mirror (CCM) projection display
FR2794251B1 (fr) * 1999-05-27 2002-08-02 Sfim Ind Miroir a membrane deformable
US6268948B1 (en) * 1999-06-11 2001-07-31 Creo Products Inc. Micromachined reflective light valve
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US6369498B1 (en) 1999-11-03 2002-04-09 Intel Corporation Electron gun for addressing secondary emission targets
US6678084B2 (en) 2000-03-20 2004-01-13 Np Photonics, Inc. Methods of making mechanisms in which relative locations of elements are maintained during manufacturing
US6665109B2 (en) 2000-03-20 2003-12-16 Np Photonics, Inc. Compliant mechanism and method of forming same
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US6747784B2 (en) 2000-03-20 2004-06-08 Np Photonics, Inc. Compliant mechanism and method of forming same
AU2001249289A1 (en) 2000-03-20 2001-10-03 Solus Micro Technologies, Inc. Electrostatically-actuated tunable optical components using entropic materials
US6747775B2 (en) * 2000-03-20 2004-06-08 Np Photonics, Inc. Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
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US6346776B1 (en) 2000-07-10 2002-02-12 Memsolutions, Inc. Field emission array (FEA) addressed deformable light valve modulator
US6411425B1 (en) * 2000-09-27 2002-06-25 Eastman Kodak Company Electromechanical grating display system with spatially separated light beams
US6531332B1 (en) 2001-01-10 2003-03-11 Parvenu, Inc. Surface micromachining using a thick release process
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US6639710B2 (en) * 2001-09-19 2003-10-28 Lucent Technologies Inc. Method and apparatus for the correction of optical signal wave front distortion using adaptive optics
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US7075593B2 (en) * 2003-03-26 2006-07-11 Video Display Corporation Electron-beam-addressed active-matrix spatial light modulator
US6956692B2 (en) * 2003-04-24 2005-10-18 Micronic Laser Systems, Ab Method and apparatus for controlling exposure of a surface of a substrate
US6930817B2 (en) * 2003-04-25 2005-08-16 Palo Alto Research Center Incorporated Configurable grating based on surface relief pattern for use as a variable optical attenuator
US6853476B2 (en) * 2003-04-30 2005-02-08 Hewlett-Packard Development Company, L.P. Charge control circuit for a micro-electromechanical device
TW570896B (en) * 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7221495B2 (en) * 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
US7217582B2 (en) * 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US7268933B2 (en) 2003-12-21 2007-09-11 Hewlett-Packard Development Company, L.P. Discharge of MEM devices having charge induced via focused beam to enter different states
US6943933B2 (en) * 2003-12-21 2005-09-13 Hewlett-Packard Development Company, L.P. MEM devices having charge induced via focused beam to enter different states
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US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
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US7535619B2 (en) * 2005-04-27 2009-05-19 Hewlett-Packard Development Company, L.P. Discharge of MEM devices having charge induced via focused beam to enter different states
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US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
JP4327183B2 (ja) * 2006-07-31 2009-09-09 株式会社日立製作所 内燃機関の高圧燃料ポンプ制御装置
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7545552B2 (en) 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7535621B2 (en) 2006-12-27 2009-05-19 Qualcomm Mems Technologies, Inc. Aluminum fluoride films for microelectromechanical system applications
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
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US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
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Also Published As

Publication number Publication date
EP0778982A1 (en) 1997-06-18
AU3392795A (en) 1996-03-27
WO1996008031A1 (en) 1996-03-14
EP0778982B1 (en) 2000-07-12
DK0778982T3 (da) 2000-11-06
RU2143127C1 (ru) 1999-12-20
US5822110A (en) 1998-10-13
CN1157668A (zh) 1997-08-20
JPH10505193A (ja) 1998-05-19
CA2198105A1 (en) 1996-03-14
ATE194725T1 (de) 2000-07-15
US5822110C1 (en) 2001-06-26
PT778982E (pt) 2000-12-29
DE69517985T2 (de) 2001-02-22
AU686874B2 (en) 1998-02-12
DE69517985D1 (de) 2000-08-17

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