IT1259792B - Modulatore spaziale di luce al silicio. - Google Patents

Modulatore spaziale di luce al silicio.

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Publication number
IT1259792B
IT1259792B ITTO920912A IT1259792B IT 1259792 B IT1259792 B IT 1259792B IT TO920912 A ITTO920912 A IT TO920912A IT 1259792 B IT1259792 B IT 1259792B
Authority
IT
Italy
Prior art keywords
electrodes
optical
membrane
deflected
accordance
Prior art date
Application number
Other languages
English (en)
Original Assignee
Northrop Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Corp filed Critical Northrop Corp
Priority to IT000912 priority Critical patent/IT1259792B/it
Publication of ITTO920912A0 publication Critical patent/ITTO920912A0/it
Publication of ITTO920912A1 publication Critical patent/ITTO920912A1/it
Application granted granted Critical
Publication of IT1259792B publication Critical patent/IT1259792B/it

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Abstract

Modulatore di luce spaziale comprendente una piastra posteriore in silicio avente uno strato isolante ed una griglia di supporto di materiale isolanti depositata sulla piastra posteriore per definire una serie di cellule. Un elettrodo viene depositato in ciascuna cellula di detta piastra posteriore. Una sottile membrana di silicio drogato è disposta sulla griglia di supporto e sopra detta serie di cellule ed elettrodi. Sulla membrana vengono depositati degli specchi per creare una serie di pixels riflettenti al di sopra della serie di cellule.
IT000912 1992-11-09 1992-11-09 Modulatore spaziale di luce al silicio. IT1259792B (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT000912 IT1259792B (it) 1992-11-09 1992-11-09 Modulatore spaziale di luce al silicio.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000912 IT1259792B (it) 1992-11-09 1992-11-09 Modulatore spaziale di luce al silicio.

Publications (3)

Publication Number Publication Date
ITTO920912A0 ITTO920912A0 (it) 1992-11-09
ITTO920912A1 ITTO920912A1 (it) 1994-05-09
IT1259792B true IT1259792B (it) 1996-03-26

Family

ID=11410847

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000912 IT1259792B (it) 1992-11-09 1992-11-09 Modulatore spaziale di luce al silicio.

Country Status (1)

Country Link
IT (1) IT1259792B (it)

Also Published As

Publication number Publication date
ITTO920912A0 (it) 1992-11-09
ITTO920912A1 (it) 1994-05-09

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Legal Events

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0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19961127