DE69926551D1 - Verfahren und vorrichtung zur Regelung des Druckes in Vakuumprozessoren - Google Patents

Verfahren und vorrichtung zur Regelung des Druckes in Vakuumprozessoren

Info

Publication number
DE69926551D1
DE69926551D1 DE69926551T DE69926551T DE69926551D1 DE 69926551 D1 DE69926551 D1 DE 69926551D1 DE 69926551 T DE69926551 T DE 69926551T DE 69926551 T DE69926551 T DE 69926551T DE 69926551 D1 DE69926551 D1 DE 69926551D1
Authority
DE
Germany
Prior art keywords
pressure
reaction chamber
disclosed apparatus
disclosed
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69926551T
Other languages
English (en)
Other versions
DE69926551T2 (de
Inventor
Brian K Mcmillan
Michael Barnes
Farro F Kaveh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Application granted granted Critical
Publication of DE69926551D1 publication Critical patent/DE69926551D1/de
Publication of DE69926551T2 publication Critical patent/DE69926551T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P.I., P.I.D.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2559—Self-controlled branched flow systems
    • Y10T137/2564—Plural inflows
    • Y10T137/2572—One inflow supplements another
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
DE69926551T 1998-03-31 1999-03-30 Verfahren und Vorrichtung zur Regelung des Druckes in Vakuumprozessoren Expired - Lifetime DE69926551T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US53530 1998-03-31
US09/053,530 US6142163A (en) 1996-03-29 1998-03-31 Method and apparatus for pressure control in vacuum processors

Publications (2)

Publication Number Publication Date
DE69926551D1 true DE69926551D1 (de) 2005-09-08
DE69926551T2 DE69926551T2 (de) 2006-06-08

Family

ID=21984910

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69907890T Expired - Lifetime DE69907890T2 (de) 1998-03-31 1999-03-30 Verfahren und vorrichtung zur druckregelung in vakuumanlagen
DE69926551T Expired - Lifetime DE69926551T2 (de) 1998-03-31 1999-03-30 Verfahren und Vorrichtung zur Regelung des Druckes in Vakuumprozessoren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69907890T Expired - Lifetime DE69907890T2 (de) 1998-03-31 1999-03-30 Verfahren und vorrichtung zur druckregelung in vakuumanlagen

Country Status (9)

Country Link
US (1) US6142163A (de)
EP (2) EP1066550B1 (de)
JP (1) JP4382984B2 (de)
KR (1) KR100528229B1 (de)
AT (2) ATE240544T1 (de)
DE (2) DE69907890T2 (de)
ES (2) ES2197633T3 (de)
TW (1) TW425592B (de)
WO (1) WO1999050730A1 (de)

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WO2014153201A1 (en) 2013-03-14 2014-09-25 Alterg, Inc. Method of gait evaluation and training with differential pressure system
US10342461B2 (en) 2007-10-15 2019-07-09 Alterg, Inc. Method of gait evaluation and training with differential pressure system
JP5111519B2 (ja) * 2007-12-05 2013-01-09 日立造船株式会社 真空容器の圧力制御方法および圧力制御装置
US20110087378A1 (en) * 2008-03-26 2011-04-14 Tokyo Electron Limited Control method and processor of exhaust gas flow rate of processing chamber
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US9267605B2 (en) 2011-11-07 2016-02-23 Lam Research Corporation Pressure control valve assembly of plasma processing chamber and rapid alternating process
JP5881467B2 (ja) * 2012-02-29 2016-03-09 株式会社フジキン ガス分流供給装置及びこれを用いたガス分流供給方法
JP6061545B2 (ja) * 2012-08-10 2017-01-18 株式会社日立国際電気 半導体装置の製造方法、基板処理方法および基板処理装置
KR101620395B1 (ko) 2014-03-19 2016-05-23 아이케이씨코리아 주식회사 복수의 진자식 자동압력제어밸브의 압력제어방법
JP6996289B2 (ja) * 2016-12-26 2022-01-17 株式会社島津製作所 バルブ装置
JP6828446B2 (ja) * 2017-01-12 2021-02-10 株式会社島津製作所 バルブ制御装置
JP6375486B1 (ja) * 2017-09-27 2018-08-22 イノビータ ピーティーイー リミテッド 処理チャンバの圧力制御方法及び処理チャンバの圧力制御装置
WO2019079655A1 (en) 2017-10-18 2019-04-25 Alterg, Inc. SYSTEM FOR COLLECTING AND ANALYZING APPROPRIATE DATA AND METHODS OF OPERATING DRIVING SYSTEMS WITH RELIEF
US11654327B2 (en) 2017-10-31 2023-05-23 Alterg, Inc. System for unweighting a user and related methods of exercise
JP6969465B2 (ja) * 2018-03-20 2021-11-24 株式会社島津製作所 目標開度推定器および圧力調整真空バルブ

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Also Published As

Publication number Publication date
DE69926551T2 (de) 2006-06-08
TW425592B (en) 2001-03-11
EP1306737A3 (de) 2003-05-28
JP2002510083A (ja) 2002-04-02
JP4382984B2 (ja) 2009-12-16
ATE301303T1 (de) 2005-08-15
KR100528229B1 (ko) 2005-11-15
EP1306737B1 (de) 2005-08-03
DE69907890T2 (de) 2004-02-19
EP1306737A2 (de) 2003-05-02
ATE240544T1 (de) 2003-05-15
ES2242820T3 (es) 2005-11-16
ES2197633T3 (es) 2004-01-01
EP1066550A1 (de) 2001-01-10
EP1066550B1 (de) 2003-05-14
US6142163A (en) 2000-11-07
WO1999050730A1 (en) 1999-10-07
DE69907890D1 (de) 2003-06-18
KR20010042381A (ko) 2001-05-25

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Legal Events

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8364 No opposition during term of opposition