JP6828446B2 - バルブ制御装置 - Google Patents
バルブ制御装置 Download PDFInfo
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- JP6828446B2 JP6828446B2 JP2017003447A JP2017003447A JP6828446B2 JP 6828446 B2 JP6828446 B2 JP 6828446B2 JP 2017003447 A JP2017003447 A JP 2017003447A JP 2017003447 A JP2017003447 A JP 2017003447A JP 6828446 B2 JP6828446 B2 JP 6828446B2
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/202—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means actuated by an electric motor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0227—Packings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/005—Electrical or magnetic means for measuring fluid parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/024—Controlling the inlet pressure, e.g. back-pressure regulator
Description
本発明の好ましい実施形態によるバルブ制御装置は、真空バルブが接続されたチャンバの圧力計測値と前記チャンバの圧力目標値と前記真空バルブの開度計測値が入力され、前記圧力計測値と前記圧力目標値との偏差に基づいて前記真空バルブの開度を制御するバルブ制御装置において、前記真空バルブの開度と前記真空バルブを含む系のコンダクタンスとの相関が記憶されている記憶部と、前記入力された開度計測値における前記コンダクタンスの開度変化に対する変化率を前記相関に基づいて求め、その変化率の逆数と前記圧力計測値の逆数と前記開度計測値における前記コンダクタンスとの積を補正ゲインとして設定する補正ゲイン設定部と、を備え、前記偏差と前記補正ゲインとに基づいて前記真空バルブの開度を制御する。
さらに好ましい実施形態では、前記補正ゲイン設定部は、所定の開度範囲では前記補正ゲインを設定し、前記開度範囲の上限を超える開度においては、前記補正ゲインにおける前記変化率の逆数と前記コンダクタンスとの積を第1の定数値で置き換え、前記開度範囲の下限を下回る開度においては、前記補正ゲインにおける前記変化率の逆数と前記コンダクタンスとの積を第2の定数値で置き換える。
さらに好ましい実施形態では、前記コンダクタンスは、前記真空バルブ、前記真空バルブが装着されるチャンバおよび前記真空バルブに装着される真空ポンプを含む系のコンダクタンスである。
さらに好ましい実施形態では、前記記憶部には、異なるガス流量毎の前記相関が複数記憶されており、前記補正ゲイン設定部は、前記系に流れているガス流量に基づいて前記記憶部に記憶されている複数の相関から一つの相関を選択し、選択された相関に基づいて前記補正ゲインを設定する。
Q=V・(dP/dt)+P・S(Q,θ) …(1)
式(1)の両辺を時間微分すると、
dQ/dt=V・(dP2/dt2)
+(dP/dt)・S(Q,θ)+P・(dS/dt)
2次微分の項は無視し、dQ/dt=0とすると、
(dP/dt)・S+P・(dS/dθ)(dθ/dt)=0
dθ=−{(1/P)・S/(dS/dθ)}・dP …(2)
G=(1/P)・S/(dS/dθ) …(3)
Claims (5)
- 真空バルブが接続されたチャンバの圧力計測値と前記チャンバの圧力目標値と前記真空バルブの開度計測値が入力され、前記圧力計測値と前記圧力目標値との偏差に基づいて前記真空バルブの開度を制御するバルブ制御装置において、
前記真空バルブの開度と前記真空バルブを含む系のコンダクタンスとの相関が記憶されている記憶部と、
前記入力された開度計測値における前記コンダクタンスの開度変化に対する変化率を前記相関に基づいて求め、その変化率の逆数を補正ゲインとして設定する補正ゲイン設定部と、を備え、
前記偏差と前記補正ゲインとに基づいて前記真空バルブの開度を制御するバルブ制御装置。 - 真空バルブが接続されたチャンバの圧力計測値と前記チャンバの圧力目標値と前記真空バルブの開度計測値が入力され、前記圧力計測値と前記圧力目標値との偏差に基づいて前記真空バルブの開度を制御するバルブ制御装置において、
前記真空バルブの開度と前記真空バルブを含む系のコンダクタンスとの相関が記憶されている記憶部と、
前記入力された開度計測値における前記コンダクタンスの開度変化に対する変化率を前記相関に基づいて求め、その変化率の逆数と前記圧力計測値の逆数と前記開度計測値における前記コンダクタンスとの積を補正ゲインとして設定する補正ゲイン設定部と、を備え、
前記偏差と前記補正ゲインとに基づいて前記真空バルブの開度を制御するバルブ制御装置。 - 請求項2に記載のバルブ制御装置において、
前記補正ゲイン設定部は、
所定の開度範囲では前記補正ゲインを設定し、
前記開度範囲の上限を超える開度においては、前記補正ゲインにおける前記変化率の逆数と前記コンダクタンスとの積を第1の定数値で置き換え、
前記開度範囲の下限を下回る開度においては、前記補正ゲインにおける前記変化率の逆数と前記コンダクタンスとの積を第2の定数値で置き換える、バルブ制御装置。 - 請求項1乃至3のいずれか一項に記載のバルブ制御装置において、
前記コンダクタンスは、前記真空バルブ、前記真空バルブが装着されるチャンバおよび前記真空バルブに装着される真空ポンプを含む系のコンダクタンスである、バルブ制御装置。 - 請求項1乃至4のいずれか一項に記載のバルブ制御装置において、
前記記憶部には、異なるガス流量毎の前記相関が複数記憶されており、
前記補正ゲイン設定部は、前記系に流れているガス流量に基づいて前記記憶部に記憶されている複数の相関から一つの相関を選択し、選択された相関に基づいて前記補正ゲインを設定する、バルブ制御装置。
Priority Applications (3)
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JP2017003447A JP6828446B2 (ja) | 2017-01-12 | 2017-01-12 | バルブ制御装置 |
CN201711167307.0A CN108304005B (zh) | 2017-01-12 | 2017-11-21 | 阀控制装置 |
US15/863,883 US10599166B2 (en) | 2017-01-12 | 2018-01-06 | Valve control device |
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JP2017003447A JP6828446B2 (ja) | 2017-01-12 | 2017-01-12 | バルブ制御装置 |
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JP6828446B2 true JP6828446B2 (ja) | 2021-02-10 |
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EP3372881A1 (de) * | 2017-03-07 | 2018-09-12 | VAT Holding AG | Optimierte druckregelung für und mit einem vakuumventil |
JP2020024638A (ja) | 2018-08-08 | 2020-02-13 | 株式会社島津製作所 | 真空バルブ、バルブシステム、バルブシステムの制御装置および校正装置 |
JP7014123B2 (ja) * | 2018-10-05 | 2022-02-01 | 株式会社島津製作所 | 推定装置およびバルブ制御装置 |
JP7238461B2 (ja) | 2019-02-25 | 2023-03-14 | 株式会社島津製作所 | バルブ制御装置および真空バルブ |
JP7434717B2 (ja) * | 2019-03-27 | 2024-02-21 | 株式会社島津製作所 | バルブ制御装置および真空バルブ |
CN111831022B (zh) * | 2019-04-18 | 2022-03-18 | 北京七星华创流量计有限公司 | 腔室压力控制方法及装置、半导体设备 |
JP7306300B2 (ja) * | 2020-03-13 | 2023-07-11 | 株式会社島津製作所 | 推定器および真空バルブ |
CN114484039A (zh) * | 2020-10-27 | 2022-05-13 | 株式会社岛津制作所 | 阀控制装置、真空阀以及阀控制方法 |
JP2022084409A (ja) * | 2020-11-26 | 2022-06-07 | 株式会社島津製作所 | 真空バルブおよび推定装置 |
CN112879654B (zh) * | 2021-01-27 | 2023-03-17 | 中国汽车工程研究院股份有限公司 | 一种车内大面积泄压阀自动打开系统 |
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JPS4630994Y1 (ja) | 1967-11-20 | 1971-10-26 | ||
US6142163A (en) * | 1996-03-29 | 2000-11-07 | Lam Research Corporation | Method and apparatus for pressure control in vacuum processors |
US5944049A (en) * | 1997-07-15 | 1999-08-31 | Applied Materials, Inc. | Apparatus and method for regulating a pressure in a chamber |
US6022483A (en) * | 1998-03-10 | 2000-02-08 | Intergrated Systems, Inc. | System and method for controlling pressure |
CN100498628C (zh) * | 2005-12-02 | 2009-06-10 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种抽真空阀门控制装置 |
TWI376581B (en) * | 2007-06-05 | 2012-11-11 | Ckd Corp | Vacuum pressure control system |
JP5322254B2 (ja) * | 2007-06-29 | 2013-10-23 | 東京エレクトロン株式会社 | 真空処理装置及び真空処理方法並びに記憶媒体 |
JP5111519B2 (ja) * | 2007-12-05 | 2013-01-09 | 日立造船株式会社 | 真空容器の圧力制御方法および圧力制御装置 |
JP5237220B2 (ja) * | 2009-08-12 | 2013-07-17 | 株式会社キッツエスシーティー | 真空圧力制御システム |
JP4630994B1 (ja) | 2009-12-01 | 2011-02-09 | プログレッシオ合同会社 | 真空用ゲートバルブ |
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US10599166B2 (en) | 2020-03-24 |
JP2018112933A (ja) | 2018-07-19 |
CN108304005B (zh) | 2021-06-18 |
US20180196449A1 (en) | 2018-07-12 |
CN108304005A (zh) | 2018-07-20 |
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