DE69919763D1 - Keramisches Heizelement - Google Patents

Keramisches Heizelement

Info

Publication number
DE69919763D1
DE69919763D1 DE69919763T DE69919763T DE69919763D1 DE 69919763 D1 DE69919763 D1 DE 69919763D1 DE 69919763 T DE69919763 T DE 69919763T DE 69919763 T DE69919763 T DE 69919763T DE 69919763 D1 DE69919763 D1 DE 69919763D1
Authority
DE
Germany
Prior art keywords
heating element
ceramic heating
ceramic
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69919763T
Other languages
English (en)
Other versions
DE69919763T2 (de
Inventor
Hideyoshi Tsuruta
Ryusuke Ushikoshi
Kazuaki Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69919763D1 publication Critical patent/DE69919763D1/de
Publication of DE69919763T2 publication Critical patent/DE69919763T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
    • H05B3/74—Non-metallic plates, e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/014—Heaters using resistive wires or cables not provided for in H05B3/54

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
DE69919763T 1998-01-08 1999-01-07 Keramisches Heizelement Expired - Lifetime DE69919763T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10002306A JPH11204238A (ja) 1998-01-08 1998-01-08 セラミックスヒーター
JP230698 1998-01-08

Publications (2)

Publication Number Publication Date
DE69919763D1 true DE69919763D1 (de) 2004-10-07
DE69919763T2 DE69919763T2 (de) 2005-09-15

Family

ID=11525683

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69919763T Expired - Lifetime DE69919763T2 (de) 1998-01-08 1999-01-07 Keramisches Heizelement

Country Status (6)

Country Link
US (1) US6225606B1 (de)
EP (1) EP0929204B1 (de)
JP (1) JPH11204238A (de)
KR (1) KR100281954B1 (de)
DE (1) DE69919763T2 (de)
TW (1) TW518906B (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69930641T2 (de) * 1999-07-16 2006-12-14 Honeywell, Inc., Minneapolis Hochtemperatur zrn und hfn infrarot-szeneprojektorpixel
JP2001118664A (ja) * 1999-08-09 2001-04-27 Ibiden Co Ltd セラミックヒータ
JP3381909B2 (ja) * 1999-08-10 2003-03-04 イビデン株式会社 半導体製造・検査装置用セラミックヒータ
ATE301917T1 (de) * 1999-09-07 2005-08-15 Ibiden Co Ltd Keramisches heizelement
WO2001031978A1 (fr) * 1999-10-22 2001-05-03 Ibiden Co., Ltd. Plaque chauffante en ceramique
EP1124404B1 (de) * 1999-11-19 2005-08-10 Ibiden Co., Ltd. Keramisches heizgerät
JP4028149B2 (ja) * 2000-02-03 2007-12-26 日本碍子株式会社 加熱装置
JP2001302330A (ja) 2000-04-24 2001-10-31 Ibiden Co Ltd セラミック基板
JP2002008829A (ja) * 2000-06-26 2002-01-11 Taiheiyo Cement Corp セラミックスヒーター
US20040182321A1 (en) * 2002-03-13 2004-09-23 Akira Kuibira Holder for semiconductor production system
JP2003289027A (ja) * 2002-11-26 2003-10-10 Ibiden Co Ltd セラミック基板
TWI247551B (en) * 2003-08-12 2006-01-11 Ngk Insulators Ltd Method of manufacturing electrical resistance heating element
US20060011139A1 (en) * 2004-07-16 2006-01-19 Applied Materials, Inc. Heated substrate support for chemical vapor deposition
WO2006013931A1 (ja) * 2004-08-04 2006-02-09 Ibiden Co., Ltd. 焼成炉及びその焼成炉を用いた多孔質セラミック焼成体の製造方法
US8525418B2 (en) * 2005-03-31 2013-09-03 Ngk Spark Plug Co., Ltd. Electrostatic chuck
JP5426892B2 (ja) 2008-02-08 2014-02-26 日本碍子株式会社 基板加熱装置
KR101525634B1 (ko) * 2009-03-30 2015-06-03 엔지케이 인슐레이터 엘티디 세라믹 히터 및 그 제조 방법
US20120085747A1 (en) * 2010-10-07 2012-04-12 Benson Chao Heater assembly and wafer processing apparatus using the same
KR101333227B1 (ko) * 2012-05-10 2013-11-26 주식회사 케이에스엠컴포넌트 세라믹 히터용 전극 커넥팅 구조.
CA3205347A1 (en) * 2014-02-28 2015-09-03 Altria Client Services Llc Electronic vaping device with induction heating
EP3140119A2 (de) 2014-05-07 2017-03-15 Morgan Advanced Ceramics, Inc. Verbessertes verfahren zur herstellung grosser einbrandartikel
US10535499B2 (en) * 2017-11-03 2020-01-14 Varian Semiconductor Equipment Associates, Inc. Varied component density for thermal isolation
JP7249805B2 (ja) * 2019-02-19 2023-03-31 日本特殊陶業株式会社 半導体製造装置用の電極埋設部材およびその製造方法
JP7364609B2 (ja) * 2021-02-10 2023-10-18 日本碍子株式会社 セラミックヒータ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59224089A (ja) * 1983-06-02 1984-12-15 佐藤　亮拿 網状回路による加熱保温器
US4888472A (en) * 1988-05-12 1989-12-19 David G. Stitz Radiant heating panels
US5484983A (en) * 1991-09-11 1996-01-16 Tecnit-Techische Textilien Und Systeme Gmbh Electric heating element in knitted fabric
JP3011528B2 (ja) 1992-03-24 2000-02-21 日本碍子株式会社 半導体加熱用セラミックスヒーター及びその製造方法
JP2766443B2 (ja) 1993-03-08 1998-06-18 日本碍子株式会社 セラミックスヒーターの製造方法
JP2647799B2 (ja) 1994-02-04 1997-08-27 日本碍子株式会社 セラミックスヒーター及びその製造方法
JP2813148B2 (ja) 1994-03-02 1998-10-22 日本碍子株式会社 セラミックス製品
US5475203A (en) * 1994-05-18 1995-12-12 Gas Research Institute Method and woven mesh heater comprising insulated and noninsulated wire for fusion welding of plastic pieces

Also Published As

Publication number Publication date
JPH11204238A (ja) 1999-07-30
US6225606B1 (en) 2001-05-01
DE69919763T2 (de) 2005-09-15
EP0929204A3 (de) 1999-09-01
TW518906B (en) 2003-01-21
EP0929204B1 (de) 2004-09-01
EP0929204A2 (de) 1999-07-14
KR100281954B1 (ko) 2001-02-15
KR19990066885A (ko) 1999-08-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition