DE69919763D1 - Keramisches Heizelement - Google Patents
Keramisches HeizelementInfo
- Publication number
- DE69919763D1 DE69919763D1 DE69919763T DE69919763T DE69919763D1 DE 69919763 D1 DE69919763 D1 DE 69919763D1 DE 69919763 T DE69919763 T DE 69919763T DE 69919763 T DE69919763 T DE 69919763T DE 69919763 D1 DE69919763 D1 DE 69919763D1
- Authority
- DE
- Germany
- Prior art keywords
- heating element
- ceramic heating
- ceramic
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
- H05B3/74—Non-metallic plates, e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/014—Heaters using resistive wires or cables not provided for in H05B3/54
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10002306A JPH11204238A (ja) | 1998-01-08 | 1998-01-08 | セラミックスヒーター |
JP230698 | 1998-01-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69919763D1 true DE69919763D1 (de) | 2004-10-07 |
DE69919763T2 DE69919763T2 (de) | 2005-09-15 |
Family
ID=11525683
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69919763T Expired - Lifetime DE69919763T2 (de) | 1998-01-08 | 1999-01-07 | Keramisches Heizelement |
Country Status (6)
Country | Link |
---|---|
US (1) | US6225606B1 (de) |
EP (1) | EP0929204B1 (de) |
JP (1) | JPH11204238A (de) |
KR (1) | KR100281954B1 (de) |
DE (1) | DE69919763T2 (de) |
TW (1) | TW518906B (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69930641T2 (de) * | 1999-07-16 | 2006-12-14 | Honeywell, Inc., Minneapolis | Hochtemperatur zrn und hfn infrarot-szeneprojektorpixel |
JP2001118664A (ja) * | 1999-08-09 | 2001-04-27 | Ibiden Co Ltd | セラミックヒータ |
JP3381909B2 (ja) * | 1999-08-10 | 2003-03-04 | イビデン株式会社 | 半導体製造・検査装置用セラミックヒータ |
ATE301917T1 (de) * | 1999-09-07 | 2005-08-15 | Ibiden Co Ltd | Keramisches heizelement |
WO2001031978A1 (fr) * | 1999-10-22 | 2001-05-03 | Ibiden Co., Ltd. | Plaque chauffante en ceramique |
EP1124404B1 (de) * | 1999-11-19 | 2005-08-10 | Ibiden Co., Ltd. | Keramisches heizgerät |
JP4028149B2 (ja) * | 2000-02-03 | 2007-12-26 | 日本碍子株式会社 | 加熱装置 |
JP2001302330A (ja) | 2000-04-24 | 2001-10-31 | Ibiden Co Ltd | セラミック基板 |
JP2002008829A (ja) * | 2000-06-26 | 2002-01-11 | Taiheiyo Cement Corp | セラミックスヒーター |
US20040182321A1 (en) * | 2002-03-13 | 2004-09-23 | Akira Kuibira | Holder for semiconductor production system |
JP2003289027A (ja) * | 2002-11-26 | 2003-10-10 | Ibiden Co Ltd | セラミック基板 |
TWI247551B (en) * | 2003-08-12 | 2006-01-11 | Ngk Insulators Ltd | Method of manufacturing electrical resistance heating element |
US20060011139A1 (en) * | 2004-07-16 | 2006-01-19 | Applied Materials, Inc. | Heated substrate support for chemical vapor deposition |
WO2006013931A1 (ja) * | 2004-08-04 | 2006-02-09 | Ibiden Co., Ltd. | 焼成炉及びその焼成炉を用いた多孔質セラミック焼成体の製造方法 |
US8525418B2 (en) * | 2005-03-31 | 2013-09-03 | Ngk Spark Plug Co., Ltd. | Electrostatic chuck |
JP5426892B2 (ja) | 2008-02-08 | 2014-02-26 | 日本碍子株式会社 | 基板加熱装置 |
KR101525634B1 (ko) * | 2009-03-30 | 2015-06-03 | 엔지케이 인슐레이터 엘티디 | 세라믹 히터 및 그 제조 방법 |
US20120085747A1 (en) * | 2010-10-07 | 2012-04-12 | Benson Chao | Heater assembly and wafer processing apparatus using the same |
KR101333227B1 (ko) * | 2012-05-10 | 2013-11-26 | 주식회사 케이에스엠컴포넌트 | 세라믹 히터용 전극 커넥팅 구조. |
CA3205347A1 (en) * | 2014-02-28 | 2015-09-03 | Altria Client Services Llc | Electronic vaping device with induction heating |
EP3140119A2 (de) | 2014-05-07 | 2017-03-15 | Morgan Advanced Ceramics, Inc. | Verbessertes verfahren zur herstellung grosser einbrandartikel |
US10535499B2 (en) * | 2017-11-03 | 2020-01-14 | Varian Semiconductor Equipment Associates, Inc. | Varied component density for thermal isolation |
JP7249805B2 (ja) * | 2019-02-19 | 2023-03-31 | 日本特殊陶業株式会社 | 半導体製造装置用の電極埋設部材およびその製造方法 |
JP7364609B2 (ja) * | 2021-02-10 | 2023-10-18 | 日本碍子株式会社 | セラミックヒータ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59224089A (ja) * | 1983-06-02 | 1984-12-15 | 佐藤 亮拿 | 網状回路による加熱保温器 |
US4888472A (en) * | 1988-05-12 | 1989-12-19 | David G. Stitz | Radiant heating panels |
US5484983A (en) * | 1991-09-11 | 1996-01-16 | Tecnit-Techische Textilien Und Systeme Gmbh | Electric heating element in knitted fabric |
JP3011528B2 (ja) | 1992-03-24 | 2000-02-21 | 日本碍子株式会社 | 半導体加熱用セラミックスヒーター及びその製造方法 |
JP2766443B2 (ja) | 1993-03-08 | 1998-06-18 | 日本碍子株式会社 | セラミックスヒーターの製造方法 |
JP2647799B2 (ja) | 1994-02-04 | 1997-08-27 | 日本碍子株式会社 | セラミックスヒーター及びその製造方法 |
JP2813148B2 (ja) | 1994-03-02 | 1998-10-22 | 日本碍子株式会社 | セラミックス製品 |
US5475203A (en) * | 1994-05-18 | 1995-12-12 | Gas Research Institute | Method and woven mesh heater comprising insulated and noninsulated wire for fusion welding of plastic pieces |
-
1998
- 1998-01-08 JP JP10002306A patent/JPH11204238A/ja active Pending
- 1998-11-25 TW TW087119602A patent/TW518906B/zh not_active IP Right Cessation
- 1998-12-29 US US09/222,223 patent/US6225606B1/en not_active Expired - Lifetime
- 1998-12-29 KR KR1019980060140A patent/KR100281954B1/ko not_active IP Right Cessation
-
1999
- 1999-01-07 DE DE69919763T patent/DE69919763T2/de not_active Expired - Lifetime
- 1999-01-07 EP EP99300119A patent/EP0929204B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH11204238A (ja) | 1999-07-30 |
US6225606B1 (en) | 2001-05-01 |
DE69919763T2 (de) | 2005-09-15 |
EP0929204A3 (de) | 1999-09-01 |
TW518906B (en) | 2003-01-21 |
EP0929204B1 (de) | 2004-09-01 |
EP0929204A2 (de) | 1999-07-14 |
KR100281954B1 (ko) | 2001-02-15 |
KR19990066885A (ko) | 1999-08-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69934049D1 (de) | Keramisches Mehrschichtheizelement | |
DE69831844D1 (de) | Keramisches Heizelement | |
DE69919763D1 (de) | Keramisches Heizelement | |
DE69936200D1 (de) | Induktions heizgerät | |
DE69935525D1 (de) | Heizelement | |
DE69819583D1 (de) | Keramischer Heizer | |
DE69803586D1 (de) | Heizungswiderstände | |
DE69700797D1 (de) | Keramisches Heizelement | |
DE69700796D1 (de) | Keramisches Heizelement | |
DE69928480D1 (de) | Keramischer Heizkörper | |
DE69912211D1 (de) | Heizvorrichtung | |
DK0928932T3 (da) | Rumopvarmningssystem | |
DE69728625D1 (de) | Keramisches Heizelement | |
ATA16298A (de) | Heizelement | |
DE69720387D1 (de) | Keramisches Heizelement | |
ATA164198A (de) | Heizanordnung | |
FI970615A (fi) | Lämmityslaite | |
ATA27298A (de) | Heizgerät | |
DE69924566D1 (de) | Heizungsvorrichtung | |
DE59605941D1 (de) | Heizelement | |
DE69730219D1 (de) | Heizelement | |
ATA177498A (de) | Heizelement | |
ATA50398A (de) | Heizeinrichtung | |
ATA38898A (de) | Heizeinrichtung | |
ATA131298A (de) | Heizeinrichtung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |