DE69910932D1 - Gegen Korrosion durch ein chlorhaltiges Gas beständiges Bauteil - Google Patents

Gegen Korrosion durch ein chlorhaltiges Gas beständiges Bauteil

Info

Publication number
DE69910932D1
DE69910932D1 DE69910932T DE69910932T DE69910932D1 DE 69910932 D1 DE69910932 D1 DE 69910932D1 DE 69910932 T DE69910932 T DE 69910932T DE 69910932 T DE69910932 T DE 69910932T DE 69910932 D1 DE69910932 D1 DE 69910932D1
Authority
DE
Germany
Prior art keywords
corrosion
gas containing
containing chlorine
component resistant
resistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69910932T
Other languages
English (en)
Other versions
DE69910932T2 (de
Inventor
Masao Nishioka
Naotaka Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69910932D1 publication Critical patent/DE69910932D1/de
Publication of DE69910932T2 publication Critical patent/DE69910932T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5057—Carbides
    • C04B41/5059—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/148—Silicon, e.g. silicon carbide, magnesium silicide, heating transistors or diodes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/20—Resistance against chemical, physical or biological attack
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9335—Product by special process
    • Y10S428/938—Vapor deposition or gas diffusion

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Resistance Heating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
DE69910932T 1998-10-07 1999-10-06 Gegen Korrosion durch ein chlorhaltiges Gas beständiges Bauteil Expired - Lifetime DE69910932T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28529098A JP4166345B2 (ja) 1998-10-07 1998-10-07 塩素系ガスに対する耐蝕性部材
JP28529098 1998-10-07

Publications (2)

Publication Number Publication Date
DE69910932D1 true DE69910932D1 (de) 2003-10-09
DE69910932T2 DE69910932T2 (de) 2004-07-22

Family

ID=17689615

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69910932T Expired - Lifetime DE69910932T2 (de) 1998-10-07 1999-10-06 Gegen Korrosion durch ein chlorhaltiges Gas beständiges Bauteil

Country Status (6)

Country Link
US (1) US6207305B1 (de)
EP (1) EP0992472B1 (de)
JP (1) JP4166345B2 (de)
KR (1) KR100361067B1 (de)
DE (1) DE69910932T2 (de)
TW (1) TW446997B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328807B1 (en) * 1999-12-14 2001-12-11 Corning Incorporated Chuck heater for improved planar deposition process
JP4156788B2 (ja) * 2000-10-23 2008-09-24 日本碍子株式会社 半導体製造装置用サセプター
JP3582518B2 (ja) * 2001-04-18 2004-10-27 住友電気工業株式会社 抵抗発熱体回路パターンとそれを用いた基板処理装置
US20030010292A1 (en) * 2001-07-16 2003-01-16 Applied Materials, Inc. Electrostatic chuck with dielectric coating
JP2003317906A (ja) 2002-04-24 2003-11-07 Sumitomo Electric Ind Ltd セラミックスヒータ
JP5160181B2 (ja) * 2006-11-21 2013-03-13 三菱マテリアル株式会社 トリクロロシラン製造装置
CN104619881A (zh) * 2012-08-17 2015-05-13 株式会社Ihi 耐热复合材料的制造方法及制造装置
US10679873B2 (en) * 2016-09-30 2020-06-09 Ngk Spark Plug Co., Ltd. Ceramic heater

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02183718A (ja) 1989-01-09 1990-07-18 Mitsui Eng & Shipbuild Co Ltd グロープラグ
DE69111493T2 (de) * 1990-03-12 1996-03-21 Ngk Insulators Ltd Wafer-Heizgeräte für Apparate, zur Halbleiterherstellung Heizanlage mit diesen Heizgeräten und Herstellung von Heizgeräten.
EP0506391B1 (de) 1991-03-26 2002-02-27 Ngk Insulators, Ltd. Verwendung eines Korrosion beständiger Substratshalter aus Aluminiumnitrid
EP1120817B8 (de) * 1991-03-26 2007-10-10 Ngk Insulators, Ltd. Verwendung eines korrosion beständigen Substratshalters
US5565247A (en) * 1991-08-30 1996-10-15 Canon Kabushiki Kaisha Process for forming a functional deposited film
US5800618A (en) * 1992-11-12 1998-09-01 Ngk Insulators, Ltd. Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
JP3419992B2 (ja) 1996-05-01 2003-06-23 日本碍子株式会社 セラミックス部材
JPH1160356A (ja) 1997-08-08 1999-03-02 Shin Etsu Chem Co Ltd 窒化アルミニウム複合基材及びこれを用いた窒化アルミニウム複合発熱体、窒化アルミニウム複合静電チャック、窒化アルミニウム複合ヒータ付静電チャック
JP4166346B2 (ja) 1997-10-27 2008-10-15 日本碍子株式会社 耐蝕性部材、耐蝕性部材の製造方法および腐食性物質の加熱装置

Also Published As

Publication number Publication date
DE69910932T2 (de) 2004-07-22
KR20000028899A (ko) 2000-05-25
EP0992472A3 (de) 2000-08-23
EP0992472B1 (de) 2003-09-03
KR100361067B1 (ko) 2002-11-18
TW446997B (en) 2001-07-21
JP4166345B2 (ja) 2008-10-15
JP2000109383A (ja) 2000-04-18
EP0992472A2 (de) 2000-04-12
US6207305B1 (en) 2001-03-27

Similar Documents

Publication Publication Date Title
MX9102816A (es) Mejoras en revestimientos de titanato de magnesio resistentes a la corrosion para turbinas de gas.
DK0933414T3 (da) Reduktion af vandmængden produceret fra borehuller
DE69305111T2 (de) Korrosionsbeständige Grundierungzusammensetzung
DE60329545D1 (de) Kontrolle der Gasspülung von Anodenabgas einer Brennstoffzelle
DE60238651D1 (de) Wiederherstellung einer Prozesskassette
ITTO20020671A1 (it) Struttura per l'attacco del serbatoio del carburante di un motociclo
AU2003293169A8 (en) Corrosion resistant pem fuel cell
GB2407850B (en) Metal seal with corrosion resistant alloy overlay
DE69912196D1 (de) Neue Zusammensetzungen enthaltend ein filmbildendes Polymer
NO20032283D0 (no) Belegg for beskyttelse mot korrosjon på borehullskomponenter
DE69910932D1 (de) Gegen Korrosion durch ein chlorhaltiges Gas beständiges Bauteil
DE69941175D1 (de) Fernabtastung durch ein Rechnersystemnetzwerk
ID24567A (id) Proses untuk membuat senyawa kiral
DE60105111D1 (de) Beschichtungszusammensetzung mit verbesserter Beständigkeit gegen Korrosion durch Säuren
FI974318A (fi) Korroosionkestävä päällystekoostumus
DE69921025D1 (de) Reisgen resistent gegen Reisbrand
GB0115711D0 (en) Fuel cell electrolyser construction
DE69806046D1 (de) Chromatfreies, nichthärtendes, korrosionschützendes einkomponetenisoliermittel, widerstandsfähig gegen flugbenzin
IT1315564B1 (it) Guarnizione intumescente rinforzata
DE69828263D1 (de) Durch tazaroten induziertes gen
DE69807232T2 (de) Paneele für eine schwimmbadwand
EP1439135A4 (de) Chemisch widerstandsfähiger folienausgekleideter tank
GB0223046D0 (en) Fuel cell or electrolyser construction
NO20021250L (no) Korrosjonsresistent filterelement
DE60226947D1 (de) Kernbrennstoff aus einer Uran-Molybdän-Legierung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition