DE69909544D1 - Verfahren zur Herstellung eines Silizium-Einkristalls mittels Czochralski-Verfahren - Google Patents
Verfahren zur Herstellung eines Silizium-Einkristalls mittels Czochralski-VerfahrenInfo
- Publication number
- DE69909544D1 DE69909544D1 DE69909544T DE69909544T DE69909544D1 DE 69909544 D1 DE69909544 D1 DE 69909544D1 DE 69909544 T DE69909544 T DE 69909544T DE 69909544 T DE69909544 T DE 69909544T DE 69909544 D1 DE69909544 D1 DE 69909544D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- single crystal
- silicon single
- czochralski
- czochralski process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/36—Single-crystal growth by pulling from a melt, e.g. Czochralski method characterised by the seed, e.g. its crystallographic orientation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11141198 | 1998-04-07 | ||
JP11141198A JP3440819B2 (ja) | 1998-04-07 | 1998-04-07 | シリコン単結晶の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69909544D1 true DE69909544D1 (de) | 2003-08-21 |
DE69909544T2 DE69909544T2 (de) | 2004-06-09 |
Family
ID=14560490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69909544T Expired - Lifetime DE69909544T2 (de) | 1998-04-07 | 1999-03-24 | Verfahren zur Herstellung eines Silizium-Einkristalls mittels Czochralski-Verfahren |
Country Status (6)
Country | Link |
---|---|
US (1) | US6174363B1 (de) |
EP (1) | EP0949359B1 (de) |
JP (1) | JP3440819B2 (de) |
KR (1) | KR100578163B1 (de) |
DE (1) | DE69909544T2 (de) |
TW (1) | TW403935B (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6869477B2 (en) | 2000-02-22 | 2005-03-22 | Memc Electronic Materials, Inc. | Controlled neck growth process for single crystal silicon |
JP4521933B2 (ja) * | 2000-02-22 | 2010-08-11 | エム・イー・エム・シー株式会社 | シリコン単結晶の成長方法 |
JP4165068B2 (ja) * | 2000-02-25 | 2008-10-15 | 信越半導体株式会社 | シリコン単結晶の製造方法 |
US6866713B2 (en) * | 2001-10-26 | 2005-03-15 | Memc Electronic Materials, Inc. | Seed crystals for pulling single crystal silicon |
KR100848549B1 (ko) * | 2006-12-18 | 2008-07-25 | 주식회사 실트론 | 실리콘 단결정 성장 방법 |
JP4862884B2 (ja) * | 2008-05-21 | 2012-01-25 | 信越半導体株式会社 | シリコン単結晶の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2848067B2 (ja) | 1991-11-12 | 1999-01-20 | 信越半導体株式会社 | シリコン単結晶の種結晶 |
US5501172A (en) * | 1994-03-11 | 1996-03-26 | Shin-Etsu Handotai Co., Ltd. | Method of growing silicon single crystals |
US5578284A (en) * | 1995-06-07 | 1996-11-26 | Memc Electronic Materials, Inc. | Silicon single crystal having eliminated dislocation in its neck |
JPH09255485A (ja) | 1996-03-15 | 1997-09-30 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法および種結晶 |
US5885344A (en) * | 1997-08-08 | 1999-03-23 | Memc Electronic Materials, Inc. | Non-dash neck method for single crystal silicon growth |
JP3440802B2 (ja) * | 1998-01-14 | 2003-08-25 | 信越半導体株式会社 | シリコン単結晶の製造方法 |
-
1998
- 1998-04-07 JP JP11141198A patent/JP3440819B2/ja not_active Expired - Fee Related
-
1999
- 1999-03-22 TW TW088104504A patent/TW403935B/zh active
- 1999-03-24 DE DE69909544T patent/DE69909544T2/de not_active Expired - Lifetime
- 1999-03-24 EP EP99302272A patent/EP0949359B1/de not_active Expired - Lifetime
- 1999-03-30 US US09/281,704 patent/US6174363B1/en not_active Expired - Lifetime
- 1999-04-07 KR KR1019990012077A patent/KR100578163B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US6174363B1 (en) | 2001-01-16 |
JP3440819B2 (ja) | 2003-08-25 |
EP0949359B1 (de) | 2003-07-16 |
EP0949359A1 (de) | 1999-10-13 |
TW403935B (en) | 2000-09-01 |
DE69909544T2 (de) | 2004-06-09 |
JPH11292688A (ja) | 1999-10-26 |
KR19990083016A (ko) | 1999-11-25 |
KR100578163B1 (ko) | 2006-05-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |