DE69906067D1 - Modulare blöcke zur zufuhr von chemikalien - Google Patents

Modulare blöcke zur zufuhr von chemikalien

Info

Publication number
DE69906067D1
DE69906067D1 DE69906067T DE69906067T DE69906067D1 DE 69906067 D1 DE69906067 D1 DE 69906067D1 DE 69906067 T DE69906067 T DE 69906067T DE 69906067 T DE69906067 T DE 69906067T DE 69906067 D1 DE69906067 D1 DE 69906067D1
Authority
DE
Germany
Prior art keywords
modular blocks
feeding chemicals
chemicals
feeding
modular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69906067T
Other languages
English (en)
Other versions
DE69906067T2 (de
Inventor
Gregory Hollingshead
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/094,522 external-priority patent/US6260581B1/en
Priority claimed from US09/145,716 external-priority patent/US6085783A/en
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69906067D1 publication Critical patent/DE69906067D1/de
Publication of DE69906067T2 publication Critical patent/DE69906067T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D3/00—Apparatus or devices for controlling flow of liquids under gravity from storage containers for dispensing purposes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE1999606067 1998-06-12 1999-06-11 Modulare blöcke zur zufuhr von chemikalien Expired - Fee Related DE69906067T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/094,522 US6260581B1 (en) 1998-06-12 1998-06-12 Apparatus for assembling modular chemical distribution substrate blocks
US94522 1998-06-12
US09/145,716 US6085783A (en) 1998-09-02 1998-09-02 Unified modular multi-directional flow chemical distribution block
US145716 1998-09-02
PCT/US1999/013147 WO1999064772A1 (en) 1998-06-12 1999-06-11 Modular chemical delivery blocks

Publications (2)

Publication Number Publication Date
DE69906067D1 true DE69906067D1 (de) 2003-04-24
DE69906067T2 DE69906067T2 (de) 2004-03-04

Family

ID=26788978

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1999606067 Expired - Fee Related DE69906067T2 (de) 1998-06-12 1999-06-11 Modulare blöcke zur zufuhr von chemikalien

Country Status (7)

Country Link
US (1) US6415822B1 (de)
EP (2) EP1084359B1 (de)
JP (2) JP2002517698A (de)
KR (2) KR20010083048A (de)
AU (2) AU4557999A (de)
DE (1) DE69906067T2 (de)
WO (2) WO1999064771A1 (de)

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JP2002089798A (ja) * 2000-09-11 2002-03-27 Ulvac Japan Ltd 流体制御装置およびこれを用いたガス処理装置
US7049226B2 (en) * 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
US6634385B2 (en) * 2001-12-21 2003-10-21 Motorola, Inc. Apparatus for conveying fluids and base plate
JP4314425B2 (ja) * 2002-12-02 2009-08-19 株式会社フジキン 流体制御装置
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
JP2006234110A (ja) * 2005-02-25 2006-09-07 Ckd Corp ガス供給ユニット及びガス供給システム
CN101438091B (zh) 2006-06-02 2012-05-23 喜开理株式会社 气体供给单元和气体供给系统
US20070289652A1 (en) * 2006-06-16 2007-12-20 Matheson Tri-Gas High flow surface mount components
JP5037510B2 (ja) 2006-08-23 2012-09-26 株式会社堀場エステック 集積型ガスパネル装置
US8251087B2 (en) * 2007-03-12 2012-08-28 Automatic Bar Controls, Inc. Modular fittings and assemblies for fluid switching
JP5127304B2 (ja) * 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
JP2012037050A (ja) * 2010-07-12 2012-02-23 Ihara Science Corp 流体システム
ITAN20100198A1 (it) * 2010-11-10 2012-05-11 Hambleden Consulting Group Lp Raccordo di derivazione da montare su condutture idrauliche.
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
CN103764529B (zh) * 2011-09-02 2016-02-17 3M创新有限公司 幅材处理加工机架
JP5478666B2 (ja) * 2012-05-21 2014-04-23 株式会社アルバック 流体制御装置およびこれを用いたガス処理装置
DE102014009996A1 (de) * 2014-07-05 2016-01-07 Hydac Fluidtechnik Gmbh Ventil-Baukastensystem
CN105299368B (zh) * 2015-11-19 2017-06-23 艾欧史密斯(中国)热水器有限公司 集成水路模块及软水机
MY194459A (en) * 2016-04-04 2022-11-30 Ichor Systems Inc Fluid delivery system
AU2018336080B2 (en) 2017-09-25 2023-11-02 Meunier Technologies Inc. Apparatus and method for dosage and administration of liquid chemicals
US10982694B2 (en) 2017-12-05 2021-04-20 Siw Engineering Pte. Ltd. Fluid control device and connector for fluid control device

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2927602A (en) * 1957-04-05 1960-03-08 Birmingham Hydraulics Inc Valve supporting panel board
US3234963A (en) * 1962-11-28 1966-02-15 Thomas E Lyon Manifold assembly
US3215158A (en) 1963-10-09 1965-11-02 Perfecting Service Company Stack valve assemblies with interchangeable components
US3407834A (en) 1966-08-05 1968-10-29 Karl A. Brandenberg Fluid logic circuit mechanism
JPS46614Y1 (de) 1966-09-14 1971-01-11
US3504704A (en) 1968-04-29 1970-04-07 Beckett Harcum Co Valve and control assembly
US3654960A (en) 1969-12-31 1972-04-11 Hydro Stack Mfg Corp Modular hydraulic system
CH535900A (de) * 1971-01-12 1973-04-15 Bosch Gmbh Robert Gehäuseblock mit mehreren Druckmittelkanäle aufweisenden Einzelgehäusen
DE2119224B2 (de) * 1971-04-21 1977-09-29 Robert Bosch Gmbh, 7000 Stuttgart Baueinheit zum aufbau einer mit druckmittel fuehrenden kanaelen versehenen grundplatte
US3747623A (en) * 1972-03-01 1973-07-24 Itt Fluid flow control manifolds and devices
DE2302267B1 (de) 1973-01-18 1974-06-12 Abex Gmbh Denison, 4010 Hilden Leitungssäule für hydraulische Ventile
FR2227489B3 (de) * 1973-04-27 1976-10-15 Bosch Gmbh Robert
GB1545488A (en) * 1975-04-01 1979-05-10 B & G Hydraulics Ltd Hydraulic circuit units
SE7604644L (sv) * 1975-05-15 1976-11-16 Fritz Stumpmeier Apparatberare for bildande av ett seriesystem for hydroventiler
US4082324A (en) 1976-10-04 1978-04-04 Obrecht Robert E Connection arrangement for manifold blocks
FR2394703A1 (fr) 1977-06-17 1979-01-12 Climax France Systeme modulaire pour la realisation de circuits logiques pneumatiques
FR2470887A1 (fr) 1979-11-30 1981-06-12 Telemecanique Electrique Dispositif d'association pour des appareils pneumatiques
FR2470886A1 (fr) 1979-11-30 1981-06-12 Telemecanique Electrique Sectionneur pneumatique apte a etre place en amont ou en aval d'un groupe de distributeurs
US4488343A (en) * 1982-05-07 1984-12-18 Jacob Kobelt Mounting assembly for fluid actuated components and method for connecting said components thereto
IT8422711V0 (it) * 1984-07-27 1984-07-27 Migliori Luciano Sottobase per l'alimentazione ed il sostegno di valvole di comando.
IT1222940B (it) 1987-10-19 1990-09-12 Dropsa Spa Distributore idraulico progressivo modulare per impianti di lubrificazione
SE464888B (sv) * 1989-11-24 1991-06-24 Mecman Ab Manuellt paaverkbar vred med vingpartier, avsett foer staelldon till ventil
JPH07122500A (ja) 1993-10-28 1995-05-12 Fujitsu Ltd ガス機器及びこれを利用したガス供給装置
JP3486238B2 (ja) 1994-09-21 2004-01-13 Ｓｍｃ株式会社 切換弁
US5605179A (en) 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
JP3546275B2 (ja) 1995-06-30 2004-07-21 忠弘 大見 流体制御装置
DE29514348U1 (de) * 1995-09-07 1995-11-23 Erwes Pneumatic Gmbh Modularer, quaderförmiger Baustein für eine Aufbereitungsvorrichtung
KR100232112B1 (ko) 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
US5662143A (en) 1996-05-16 1997-09-02 Gasonics International Modular gas box system
TW354821B (en) 1996-10-15 1999-03-21 Tadahiro Omi Fluid coupling
JP3997337B2 (ja) * 1996-11-20 2007-10-24 忠弘 大見 流体制御装置
US6302141B1 (en) * 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
US5836355A (en) 1996-12-03 1998-11-17 Insync Systems, Inc. Building blocks for integrated gas panel
JPH10169818A (ja) 1996-12-05 1998-06-26 Smc Corp 切換弁用マニホールド
US5860676A (en) 1997-06-13 1999-01-19 Swagelok Marketing Co. Modular block assembly using angled fasteners for interconnecting fluid components

Also Published As

Publication number Publication date
KR20010083048A (ko) 2001-08-31
KR20010083047A (ko) 2001-08-31
WO1999064772A1 (en) 1999-12-16
WO1999064771A1 (en) 1999-12-16
EP1084359A1 (de) 2001-03-21
AU4434799A (en) 1999-12-30
AU4557999A (en) 1999-12-30
EP1086327A1 (de) 2001-03-28
DE69906067T2 (de) 2004-03-04
JP2002517698A (ja) 2002-06-18
US6415822B1 (en) 2002-07-09
JP2002517697A (ja) 2002-06-18
EP1084359B1 (de) 2003-03-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee