DE69904647D1 - Baukastensystem poliermaschine und substrat planarisierung - Google Patents

Baukastensystem poliermaschine und substrat planarisierung

Info

Publication number
DE69904647D1
DE69904647D1 DE69904647T DE69904647T DE69904647D1 DE 69904647 D1 DE69904647 D1 DE 69904647D1 DE 69904647 T DE69904647 T DE 69904647T DE 69904647 T DE69904647 T DE 69904647T DE 69904647 D1 DE69904647 D1 DE 69904647D1
Authority
DE
Germany
Prior art keywords
polishing machine
unloading
loading
modular system
substrate planarization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69904647T
Other languages
English (en)
Inventor
Marc Peltier
Lucien Grisel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steag Electronic Systems AG
Original Assignee
Steag Electronic Systems AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Electronic Systems AG filed Critical Steag Electronic Systems AG
Application granted granted Critical
Publication of DE69904647D1 publication Critical patent/DE69904647D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Multi-Process Working Machines And Systems (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
DE69904647T 1998-03-31 1999-03-30 Baukastensystem poliermaschine und substrat planarisierung Expired - Lifetime DE69904647D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9804202A FR2776552B1 (fr) 1998-03-31 1998-03-31 Machine modulaire de polissage et de planarisation de substrats
PCT/FR1999/000739 WO1999050023A1 (fr) 1998-03-31 1999-03-30 Machine modulaire de polissage et de planarisation de substrats

Publications (1)

Publication Number Publication Date
DE69904647D1 true DE69904647D1 (de) 2003-01-30

Family

ID=9524860

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69904647T Expired - Lifetime DE69904647D1 (de) 1998-03-31 1999-03-30 Baukastensystem poliermaschine und substrat planarisierung

Country Status (9)

Country Link
US (1) US6343979B1 (de)
EP (1) EP1137514B1 (de)
JP (1) JP2002509812A (de)
KR (1) KR100531987B1 (de)
CN (1) CN1134323C (de)
AT (1) ATE229867T1 (de)
DE (1) DE69904647D1 (de)
FR (1) FR2776552B1 (de)
WO (1) WO1999050023A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6575818B2 (en) * 2001-06-27 2003-06-10 Oriol Inc. Apparatus and method for polishing multiple semiconductor wafers in parallel
US7273408B2 (en) * 2005-12-16 2007-09-25 Applied Materials, Inc. Paired pivot arm
KR100899973B1 (ko) * 2006-06-14 2009-05-28 이노플라 아엔씨 반도체 웨이퍼 연마 장치
US9570311B2 (en) * 2012-02-10 2017-02-14 Taiwan Semiconductor Manufacturing Company, Ltd. Modular grinding apparatuses and methods for wafer thinning
FR3054158B1 (fr) * 2016-07-21 2019-06-28 Comau France Machine-outil d’usinage
WO2019186704A1 (ja) * 2018-03-27 2019-10-03 平田機工株式会社 作業装置及び作業システム
US20210323117A1 (en) * 2020-04-16 2021-10-21 Applied Materials, Inc. High throughput polishing modules and modular polishing systems
US11705354B2 (en) 2020-07-10 2023-07-18 Applied Materials, Inc. Substrate handling systems
TWI834448B (zh) * 2021-12-31 2024-03-01 大陸商杭州眾硅電子科技有限公司 一種晶圓拋光系統及晶圓傳輸方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4680893A (en) * 1985-09-23 1987-07-21 Motorola, Inc. Apparatus for polishing semiconductor wafers
JPS63207559A (ja) * 1987-02-19 1988-08-26 Disco Abrasive Syst Ltd ウエ−ハ自動研削装置
US5827110A (en) * 1994-12-28 1998-10-27 Kabushiki Kaisha Toshiba Polishing facility
KR100390293B1 (ko) * 1993-09-21 2003-09-02 가부시끼가이샤 도시바 폴리싱장치
US5562524A (en) * 1994-05-04 1996-10-08 Gill, Jr.; Gerald L. Polishing apparatus
US5655954A (en) * 1994-11-29 1997-08-12 Toshiba Kikai Kabushiki Kaisha Polishing apparatus
US5738574A (en) 1995-10-27 1998-04-14 Applied Materials, Inc. Continuous processing system for chemical mechanical polishing
JP3679871B2 (ja) * 1996-09-04 2005-08-03 株式会社荏原製作所 ポリッシング装置及び搬送ロボット
US5893795A (en) * 1997-07-11 1999-04-13 Applied Materials, Inc. Apparatus for moving a cassette
US6110011A (en) * 1997-11-10 2000-08-29 Applied Materials, Inc. Integrated electrodeposition and chemical-mechanical polishing tool

Also Published As

Publication number Publication date
CN1134323C (zh) 2004-01-14
EP1137514A1 (de) 2001-10-04
EP1137514B1 (de) 2002-12-18
KR100531987B1 (ko) 2005-11-30
US6343979B1 (en) 2002-02-05
WO1999050023A1 (fr) 1999-10-07
FR2776552B1 (fr) 2000-06-16
KR20010078700A (ko) 2001-08-21
CN1296434A (zh) 2001-05-23
JP2002509812A (ja) 2002-04-02
FR2776552A1 (fr) 1999-10-01
ATE229867T1 (de) 2003-01-15

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Legal Events

Date Code Title Description
8332 No legal effect for de