DE69938269D1 - Behälter zum Transportieren von Präzisionssubstraten - Google Patents
Behälter zum Transportieren von PräzisionssubstratenInfo
- Publication number
- DE69938269D1 DE69938269D1 DE69938269T DE69938269T DE69938269D1 DE 69938269 D1 DE69938269 D1 DE 69938269D1 DE 69938269 T DE69938269 T DE 69938269T DE 69938269 T DE69938269 T DE 69938269T DE 69938269 D1 DE69938269 D1 DE 69938269D1
- Authority
- DE
- Germany
- Prior art keywords
- container
- precision substrates
- transporting precision
- transporting
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D7/00—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of metal
- B65D7/02—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of metal characterised by shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11785998A JP3280305B2 (ja) | 1998-04-13 | 1998-04-13 | 精密基板輸送容器 |
JP11785998 | 1998-04-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69938269D1 true DE69938269D1 (de) | 2008-04-17 |
DE69938269T2 DE69938269T2 (de) | 2009-04-30 |
Family
ID=14722073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69938269T Expired - Fee Related DE69938269T2 (de) | 1998-04-13 | 1999-04-09 | Behälter zum Transportieren von Präzisionssubstraten |
Country Status (6)
Country | Link |
---|---|
US (2) | US6220438B1 (de) |
EP (2) | EP1801868B1 (de) |
JP (1) | JP3280305B2 (de) |
KR (1) | KR100607184B1 (de) |
DE (1) | DE69938269T2 (de) |
TW (1) | TW412824B (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3280305B2 (ja) * | 1998-04-13 | 2002-05-13 | 信越半導体株式会社 | 精密基板輸送容器 |
US6669253B2 (en) * | 2000-12-18 | 2003-12-30 | David W. Benzing | Wafer boat and boat holder |
TWI290352B (en) * | 2001-11-14 | 2007-11-21 | Entegris Inc | Wafer carrier with wafer retaining system |
US6749067B2 (en) * | 2002-01-16 | 2004-06-15 | Entegris, Inc. | Wafer carrier door with form fitting mechanism cover |
JP4218260B2 (ja) * | 2002-06-06 | 2009-02-04 | 東京エレクトロン株式会社 | 被処理体の収納容器体及びこれを用いた処理システム |
JP4174557B2 (ja) * | 2002-10-17 | 2008-11-05 | ゴールド工業株式会社 | ウエハ等精密基板収容容器 |
US7463338B2 (en) | 2003-07-08 | 2008-12-09 | Hoya Corporation | Container for housing a mask blank, method of housing a mask blank, and mask blank package |
US7523830B2 (en) * | 2004-11-23 | 2009-04-28 | Entegris, Inc. | Wafer container with secondary wafer restraint system |
US8231005B2 (en) * | 2005-09-27 | 2012-07-31 | Entegris, Inc. | Reticle pod |
US8292081B2 (en) | 2006-05-29 | 2012-10-23 | Shin-Etsu Polymer Co., Ltd. | Substrate storage container |
JP2008294274A (ja) * | 2007-05-25 | 2008-12-04 | Nec Electronics Corp | ウェハ移送容器、その緩衝支持部材 |
US7971722B2 (en) * | 2008-08-08 | 2011-07-05 | Gudeng Precision Industral Co, Ltd | Wafer container with restrainer |
US8453841B1 (en) | 2009-04-23 | 2013-06-04 | Western Digital Technologies, Inc. | Disk placement and storage assembly with disk cassette and disk slotter |
TWI501910B (zh) * | 2011-11-17 | 2015-10-01 | Gudeng Prec Ind Co Ltd | 具有排水結構之極紫外光光罩儲存傳送盒 |
US8857619B1 (en) | 2013-09-30 | 2014-10-14 | Taiwan Semiconductor Manufacturing Co., Ltd | Mechanisms for wafer pod and pod door |
US9184077B2 (en) | 2013-09-30 | 2015-11-10 | Taiwan Semiconductor Manufacturing Co., Ltd | Wafer pod and wafer positioning mechanism thereof |
WO2016179151A1 (en) * | 2015-05-04 | 2016-11-10 | Case Medical, Inc. | Detection method |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3865239A (en) * | 1973-05-08 | 1975-02-11 | Vanguard Industries | Container assembly |
US4582219A (en) * | 1985-02-20 | 1986-04-15 | Empak, Inc. | Storage box having resilient fastening means |
US4743156A (en) * | 1986-05-09 | 1988-05-10 | Motorola, Inc. | Dump transfer wafer carrier |
US4880116A (en) * | 1988-03-04 | 1989-11-14 | Fluoroware, Inc. | Robotic accessible wafer shipper assembly |
US5228568A (en) * | 1991-08-30 | 1993-07-20 | Shin-Etsu Handotai Co., Ltd. | Semiconductor wafer basket |
US5555981A (en) * | 1992-05-26 | 1996-09-17 | Empak, Inc. | Wafer suspension box |
JP3177003B2 (ja) * | 1992-07-31 | 2001-06-18 | 住友金属工業株式会社 | 半導体ウェーハの輸送用容器 |
US5482161A (en) * | 1994-05-24 | 1996-01-09 | Fluoroware, Inc. | Mechanical interface wafer container |
US5575394A (en) * | 1994-07-15 | 1996-11-19 | Fluoroware, Inc. | Wafer shipper and package |
EP0854829B1 (de) * | 1995-10-13 | 2002-09-11 | Empak, Inc. | 300mm versandbehälter |
US5803269A (en) * | 1995-10-13 | 1998-09-08 | Empak, Inc. | 300mm shipping container |
US5873468A (en) * | 1995-11-16 | 1999-02-23 | Sumitomo Sitix Corporation | Thin-plate supporting container with filter means |
JP3280305B2 (ja) * | 1998-04-13 | 2002-05-13 | 信越半導体株式会社 | 精密基板輸送容器 |
KR100412824B1 (ko) * | 2001-05-03 | 2003-12-31 | 현대자동차주식회사 | 차량용 자동변속기의 잔압 배출구조 |
-
1998
- 1998-04-13 JP JP11785998A patent/JP3280305B2/ja not_active Expired - Lifetime
-
1999
- 1999-04-06 TW TW088105442A patent/TW412824B/zh not_active IP Right Cessation
- 1999-04-07 US US09/287,712 patent/US6220438B1/en not_active Expired - Lifetime
- 1999-04-09 EP EP07007532.0A patent/EP1801868B1/de not_active Expired - Lifetime
- 1999-04-09 DE DE69938269T patent/DE69938269T2/de not_active Expired - Fee Related
- 1999-04-09 EP EP99107027A patent/EP0951050B1/de not_active Expired - Lifetime
- 1999-04-12 KR KR1019990012736A patent/KR100607184B1/ko not_active IP Right Cessation
-
2000
- 2000-10-05 US US09/684,562 patent/US6315124B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
TW412824B (en) | 2000-11-21 |
US6220438B1 (en) | 2001-04-24 |
EP1801868A3 (de) | 2008-11-12 |
JPH11297807A (ja) | 1999-10-29 |
KR19990083126A (ko) | 1999-11-25 |
DE69938269T2 (de) | 2009-04-30 |
EP0951050A2 (de) | 1999-10-20 |
EP0951050A3 (de) | 2004-08-11 |
EP0951050B1 (de) | 2008-03-05 |
JP3280305B2 (ja) | 2002-05-13 |
KR100607184B1 (ko) | 2006-08-01 |
US6315124B1 (en) | 2001-11-13 |
EP1801868B1 (de) | 2013-12-25 |
EP1801868A2 (de) | 2007-06-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: SHIN-ETSU POLYMER CO., LTD., TOKIO/TOKYO, JP |
|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |