DE69832365D1 - Excimer laser mit erhöhter stabilität der spektralen bandbreite und des laserstrahls - Google Patents

Excimer laser mit erhöhter stabilität der spektralen bandbreite und des laserstrahls

Info

Publication number
DE69832365D1
DE69832365D1 DE69832365T DE69832365T DE69832365D1 DE 69832365 D1 DE69832365 D1 DE 69832365D1 DE 69832365 T DE69832365 T DE 69832365T DE 69832365 T DE69832365 T DE 69832365T DE 69832365 D1 DE69832365 D1 DE 69832365D1
Authority
DE
Germany
Prior art keywords
increased stability
spectral bandwidth
laser beam
laser
excimer laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69832365T
Other languages
English (en)
Other versions
DE69832365T2 (de
Inventor
V Fomenkov
L Sandstrom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Application granted granted Critical
Publication of DE69832365D1 publication Critical patent/DE69832365D1/de
Publication of DE69832365T2 publication Critical patent/DE69832365T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
    • H01S3/08009—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection using a diffraction grating
DE69832365T 1997-01-21 1998-01-14 Excimer laser mit erhöhter stabilität der spektralen bandbreite und des laserstrahls Expired - Lifetime DE69832365T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/786,186 US5898725A (en) 1997-01-21 1997-01-21 Excimer laser with greater spectral bandwidth and beam stability
US786186 1997-01-21
PCT/US1998/001203 WO1998032200A1 (en) 1997-01-21 1998-01-14 Excimer laser with greater spectral bandwidth and beam stability

Publications (2)

Publication Number Publication Date
DE69832365D1 true DE69832365D1 (de) 2005-12-22
DE69832365T2 DE69832365T2 (de) 2006-06-01

Family

ID=25137838

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69832365T Expired - Lifetime DE69832365T2 (de) 1997-01-21 1998-01-14 Excimer laser mit erhöhter stabilität der spektralen bandbreite und des laserstrahls

Country Status (7)

Country Link
US (1) US5898725A (de)
EP (1) EP0954890B1 (de)
JP (2) JP3394176B2 (de)
AU (1) AU6316698A (de)
DE (1) DE69832365T2 (de)
TW (1) TW366615B (de)
WO (1) WO1998032200A1 (de)

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US6137821A (en) * 1997-06-04 2000-10-24 Cymer, Inc. Durable etalon based output coupler
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US6160832A (en) 1998-06-01 2000-12-12 Lambda Physik Gmbh Method and apparatus for wavelength calibration
US6580517B2 (en) 2000-03-01 2003-06-17 Lambda Physik Ag Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
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US6476987B1 (en) 1999-08-04 2002-11-05 Lambda Physik Ag Excimer laser with line narrowing
US6381256B1 (en) 1999-02-10 2002-04-30 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6424666B1 (en) 1999-06-23 2002-07-23 Lambda Physik Ag Line-narrowing module for high power laser
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
JP2000124531A (ja) * 1998-10-12 2000-04-28 Ushio Sogo Gijutsu Kenkyusho:Kk エキシマレーザ装置
US6678291B2 (en) 1999-12-15 2004-01-13 Lambda Physik Ag Molecular fluorine laser
US6546037B2 (en) 1999-02-10 2003-04-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6965624B2 (en) * 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6463086B1 (en) 1999-02-10 2002-10-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6421365B1 (en) 1999-11-18 2002-07-16 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6393040B1 (en) 1999-02-24 2002-05-21 Lambda Physik Ag Molecular fluorine (F2) excimer laser with reduced coherence length
US6700915B2 (en) 1999-03-12 2004-03-02 Lambda Physik Ag Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
DE29907349U1 (de) 1999-04-26 2000-07-06 Lambda Physik Gmbh Laser zur Erzeugung schmalbandiger Strahlung
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
JP2001144355A (ja) * 1999-11-17 2001-05-25 Ushio Sogo Gijutsu Kenkyusho:Kk 狭帯域化エキシマレーザ装置
US6553050B1 (en) 1999-11-18 2003-04-22 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6603788B1 (en) 1999-11-23 2003-08-05 Lambda Physik Ag Resonator for single line selection
US6834069B1 (en) 1999-12-15 2004-12-21 Lambda Physik Ag Molecular fluorine laser with intracavity polarization enhancer
DE10190427T1 (de) 2000-01-25 2002-06-06 Lambda Physik Ag Energieüberwachungsvorrichtung für einen Fluormolekül-Laser
US6735232B2 (en) 2000-01-27 2004-05-11 Lambda Physik Ag Laser with versatile output energy
US7075963B2 (en) 2000-01-27 2006-07-11 Lambda Physik Ag Tunable laser with stabilized grating
US6542243B2 (en) 2000-01-27 2003-04-01 Lambda Physik Ag Resonator optics monitoring method
US6597462B2 (en) 2000-03-01 2003-07-22 Lambda Physik Ag Laser wavelength and bandwidth monitor
US6941259B2 (en) * 2000-03-01 2005-09-06 Lamda Physik Ag Laser software control system
US6618403B2 (en) 2000-03-16 2003-09-09 Lambda Physik Ag Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser
US20010049618A1 (en) * 2000-03-23 2001-12-06 Rainer Patzel Method for allocating predictable costs for consumable items
WO2001084678A2 (en) 2000-04-18 2001-11-08 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6862307B2 (en) * 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser
US6763048B2 (en) 2000-06-19 2004-07-13 Lambda Physik Ag Line narrowing of molecular fluorine laser emission
US6577663B2 (en) 2000-06-19 2003-06-10 Lambda Physik Ag Narrow bandwidth oscillator-amplifier system
US6603789B1 (en) 2000-07-05 2003-08-05 Lambda Physik Ag Narrow band excimer or molecular fluorine laser with improved beam parameters
US6807205B1 (en) 2000-07-14 2004-10-19 Lambda Physik Ag Precise monitor etalon calibration technique
US6721345B2 (en) 2000-07-14 2004-04-13 Lambda Physik Ag Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
JP2002055212A (ja) * 2000-08-08 2002-02-20 Sumitomo Electric Ind Ltd プリズムとそれを用いた光学装置
US6801561B2 (en) 2000-09-25 2004-10-05 Lambda Physik Ag Laser system and method for spectral narrowing through wavefront correction
US6747741B1 (en) 2000-10-12 2004-06-08 Lambda Physik Ag Multiple-pass interferometric device
US6998620B2 (en) * 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
US7830934B2 (en) * 2001-08-29 2010-11-09 Cymer, Inc. Multi-chamber gas discharge laser bandwidth control through discharge timing
US20060114956A1 (en) * 2004-11-30 2006-06-01 Sandstrom Richard L High power high pulse repetition rate gas discharge laser system bandwidth management
US7643522B2 (en) * 2004-11-30 2010-01-05 Cymer, Inc. Method and apparatus for gas discharge laser bandwidth and center wavelength control
US7366219B2 (en) * 2004-11-30 2008-04-29 Cymer, Inc. Line narrowing module
US8379687B2 (en) 2005-06-30 2013-02-19 Cymer, Inc. Gas discharge laser line narrowing module
JP5202315B2 (ja) * 2005-08-09 2013-06-05 サイマー インコーポレイテッド 放電タイミングによる多室ガス放電レーザの帯域幅制御
US7321607B2 (en) * 2005-11-01 2008-01-22 Cymer, Inc. External optics and chamber support system
DE102009039957A1 (de) * 2009-08-28 2010-10-14 Carl Zeiss Laser Optics Gmbh Vorrichtung zur variablen Einstellung der spektralen Bandbreite
JP6182988B2 (ja) * 2013-06-12 2017-08-23 住友電気工業株式会社 分光デバイス及び波長選択スイッチ
JP6585174B2 (ja) * 2015-08-07 2019-10-02 ギガフォトン株式会社 狭帯域化レーザ装置
WO2019079448A1 (en) 2017-10-17 2019-04-25 Bridger Photonics, Inc. ROTARY OPTICAL REFLECTOR APPARATUSES AND METHODS
DE102018209602B4 (de) * 2018-06-14 2022-05-12 Carl Zeiss Smt Gmbh Optische Baugruppe zur Verringerung einer spektralen Bandbreite eines Ausgabestrahls eines Lasers

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JPH02113203A (ja) * 1988-10-21 1990-04-25 Canon Inc 光束分解プリズム
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US5095492A (en) * 1990-07-17 1992-03-10 Cymer Laser Technologies Spectral narrowing technique
US5243614A (en) * 1990-11-28 1993-09-07 Mitsubishi Denki Kabushiki Kaisha Wavelength stabilizer for narrow bandwidth laser
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DE19603637C1 (de) * 1996-02-01 1997-07-31 Lambda Physik Gmbh Laser zur Erzeugung schmalbandiger Strahlung

Also Published As

Publication number Publication date
DE69832365T2 (de) 2006-06-01
JP3394176B2 (ja) 2003-04-07
EP0954890B1 (de) 2005-11-16
AU6316698A (en) 1998-08-07
JP2003069117A (ja) 2003-03-07
US5898725A (en) 1999-04-27
TW366615B (en) 1999-08-11
EP0954890A1 (de) 1999-11-10
WO1998032200A1 (en) 1998-07-23
JPH10209548A (ja) 1998-08-07
EP0954890A4 (de) 2002-05-29

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Legal Events

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