DE69914674D1 - Gaslaseroszillator - Google Patents

Gaslaseroszillator

Info

Publication number
DE69914674D1
DE69914674D1 DE69914674T DE69914674T DE69914674D1 DE 69914674 D1 DE69914674 D1 DE 69914674D1 DE 69914674 T DE69914674 T DE 69914674T DE 69914674 T DE69914674 T DE 69914674T DE 69914674 D1 DE69914674 D1 DE 69914674D1
Authority
DE
Germany
Prior art keywords
laser oscillator
gas laser
gas
oscillator
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69914674T
Other languages
English (en)
Other versions
DE69914674T2 (de
Inventor
Hitoshi Hongu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69914674D1 publication Critical patent/DE69914674D1/de
Publication of DE69914674T2 publication Critical patent/DE69914674T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
    • H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
DE69914674T 1998-06-26 1999-06-28 Gaslaseroszillator Expired - Lifetime DE69914674T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10180268A JP3036514B2 (ja) 1998-06-26 1998-06-26 ガスレーザ発振装置
JP18026898 1998-06-26

Publications (2)

Publication Number Publication Date
DE69914674D1 true DE69914674D1 (de) 2004-03-18
DE69914674T2 DE69914674T2 (de) 2004-07-15

Family

ID=16080273

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69914674T Expired - Lifetime DE69914674T2 (de) 1998-06-26 1999-06-28 Gaslaseroszillator

Country Status (4)

Country Link
US (1) US6208676B1 (de)
EP (1) EP0967697B1 (de)
JP (1) JP3036514B2 (de)
DE (1) DE69914674T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6895030B1 (en) * 2000-05-30 2005-05-17 Matsushita Electric Industrial Co., Ltd. Laser oscillating device
US6931046B1 (en) * 2000-09-14 2005-08-16 The Regents Of The University Of California High power laser having a trivalent liquid host
JP4877692B2 (ja) * 2001-03-21 2012-02-15 株式会社小松製作所 注入同期式又はｍｏｐａ方式のレーザ装置
DE102004015090A1 (de) 2004-03-25 2005-11-03 Hüttinger Elektronik Gmbh + Co. Kg Bogenentladungserkennungseinrichtung
JP4012216B2 (ja) * 2005-06-08 2007-11-21 ファナック株式会社 レーザ発振器
EP1801946B1 (de) 2005-12-22 2009-01-21 HÜTTINGER Elektronik GmbH + Co. KG Verfahren und Vorrichtung zur Arcerkennung in einem Plasmaprozess
DE502006005363D1 (de) 2006-11-23 2009-12-24 Huettinger Elektronik Gmbh Verfahren zum Erkennen einer Bogenentladung in einem Plasmaprozess und Bogenentladungserkennungsvorrichtung
US7795817B2 (en) 2006-11-24 2010-09-14 Huettinger Elektronik Gmbh + Co. Kg Controlled plasma power supply
EP1928009B1 (de) 2006-11-28 2013-04-10 HÜTTINGER Elektronik GmbH + Co. KG Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
DE502006009308D1 (de) 2006-12-14 2011-05-26 Huettinger Elektronik Gmbh Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
EP1978542B1 (de) 2007-03-08 2010-12-29 HÜTTINGER Elektronik GmbH + Co. KG Verfahren und Vorrichtung zum Unterdrücken von Bogenentladungen beim Betreiben eines Plasmaprozesses

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2108832B1 (de) 1970-10-09 1973-11-23 Comp Generale Electricite
JPS55113391A (en) * 1979-02-21 1980-09-01 Hitachi Ltd Gas flow type laser device
DE3323954A1 (de) * 1983-07-02 1985-01-10 Messer Griesheim Gmbh, 6000 Frankfurt Gaslaser, insbesondere schnellstroemender axialstrom-gastransportlaser
JPS6095984A (ja) 1983-10-31 1985-05-29 Asahi Optical Co Ltd レ−ザ−発振管
JPS60171777A (ja) 1984-02-16 1985-09-05 Mitsubishi Electric Corp レ−ザ用光センサ
DE3541876A1 (de) 1985-11-27 1987-06-04 Messer Griesheim Gmbh Co(pfeil abwaerts)2(pfeil abwaerts)-laser, insbesondere schnellstroemender hochleistungsaxialstrom-co(pfeil abwaerts)2(pfeil abwaerts)-transportlaser mit einem geschlossenen gaskreislauf zur materialbearbeitung
JPS62242377A (ja) 1986-04-15 1987-10-22 Nec Corp レ−ザ−用光学素子の保護方法
JP2644315B2 (ja) 1989-01-23 1997-08-25 ファナック株式会社 高周波放電励起レーザ装置
JPH06164042A (ja) * 1992-09-14 1994-06-10 Matsushita Electric Ind Co Ltd ガスレーザ発振装置
JP3022016B2 (ja) * 1992-12-28 2000-03-15 松下電器産業株式会社 軸流形レーザ発振器

Also Published As

Publication number Publication date
EP0967697B1 (de) 2004-02-11
EP0967697A1 (de) 1999-12-29
US6208676B1 (en) 2001-03-27
DE69914674T2 (de) 2004-07-15
JP3036514B2 (ja) 2000-04-24
JP2000012925A (ja) 2000-01-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8320 Willingness to grant licences declared (paragraph 23)