DE60133959D1 - Gaslaseroszillator - Google Patents

Gaslaseroszillator

Info

Publication number
DE60133959D1
DE60133959D1 DE60133959T DE60133959T DE60133959D1 DE 60133959 D1 DE60133959 D1 DE 60133959D1 DE 60133959 T DE60133959 T DE 60133959T DE 60133959 T DE60133959 T DE 60133959T DE 60133959 D1 DE60133959 D1 DE 60133959D1
Authority
DE
Germany
Prior art keywords
laser oscillator
gas laser
gas
oscillator
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60133959T
Other languages
English (en)
Inventor
Hitoshi Hongu
Hiroyuki Hayashikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE60133959D1 publication Critical patent/DE60133959D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE60133959T 2000-03-02 2001-03-01 Gaslaseroszillator Expired - Lifetime DE60133959D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000056805A JP3985416B2 (ja) 2000-03-02 2000-03-02 ガスレーザ発振装置

Publications (1)

Publication Number Publication Date
DE60133959D1 true DE60133959D1 (de) 2008-06-26

Family

ID=18577692

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60133959T Expired - Lifetime DE60133959D1 (de) 2000-03-02 2001-03-01 Gaslaseroszillator

Country Status (4)

Country Link
US (1) US6768761B2 (de)
EP (1) EP1130700B1 (de)
JP (1) JP3985416B2 (de)
DE (1) DE60133959D1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5855689B2 (ja) * 2014-02-20 2016-02-09 ファナック株式会社 起動工程を効率化したガスレーザ装置
JP5927261B2 (ja) * 2014-10-03 2016-06-01 ファナック株式会社 アラームの種類を判別する機能を備えたガスレーザ装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2162207B (en) * 1984-07-26 1989-05-10 Japan Res Dev Corp Semiconductor crystal growth apparatus
US4589123A (en) * 1985-02-27 1986-05-13 Maxwell Laboratories, Inc. System for generating soft X rays
US5315610A (en) * 1986-09-22 1994-05-24 The United States Of America As Represented The The Unites States Department Of Energy System for controlling the flow of gas into and out of a gas laser
JPS63229793A (ja) * 1987-03-19 1988-09-26 Fanuc Ltd レ−ザ発振器配管系の異常検出装置
JP2706485B2 (ja) * 1988-10-07 1998-01-28 ファナック株式会社 レーザガス置換量制御方法
JPH02112292A (ja) * 1988-10-20 1990-04-24 Mitsubishi Electric Corp ハロゲンガスレーザのガス制御装置
JPH02280391A (ja) * 1989-04-21 1990-11-16 Matsushita Electric Ind Co Ltd ガスレーザ発振器
JP3300773B2 (ja) * 1995-02-23 2002-07-08 ミヤチテクノス株式会社 レーザ装置
JPH09260749A (ja) * 1996-03-22 1997-10-03 Komatsu Ltd ガスレーザ装置
JP3694359B2 (ja) * 1996-03-27 2005-09-14 株式会社ダイヘン ガスレ−ザ発振器
JPH1187809A (ja) * 1997-09-12 1999-03-30 Amada Eng Center:Kk ガスレーザ発振器

Also Published As

Publication number Publication date
EP1130700B1 (de) 2008-05-14
US6768761B2 (en) 2004-07-27
JP2001244524A (ja) 2001-09-07
EP1130700A2 (de) 2001-09-05
EP1130700A3 (de) 2004-06-30
US20010022797A1 (en) 2001-09-20
JP3985416B2 (ja) 2007-10-03

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)