DE60041097D1 - Gaslaser - Google Patents

Gaslaser

Info

Publication number
DE60041097D1
DE60041097D1 DE60041097T DE60041097T DE60041097D1 DE 60041097 D1 DE60041097 D1 DE 60041097D1 DE 60041097 T DE60041097 T DE 60041097T DE 60041097 T DE60041097 T DE 60041097T DE 60041097 D1 DE60041097 D1 DE 60041097D1
Authority
DE
Germany
Prior art keywords
gas lasers
lasers
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60041097T
Other languages
English (en)
Inventor
Tadahiro Ohmi
Nobumasa Suzuki
Hiroshi Ohsawa
Nobuyoshi Tanaka
Toshikuni Shinohara
Masaki Hirayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60041097D1 publication Critical patent/DE60041097D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)
DE60041097T 1999-03-26 2000-03-24 Gaslaser Expired - Lifetime DE60041097D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08467599A JP4303350B2 (ja) 1999-03-26 1999-03-26 レーザ発振装置、露光装置及びデバイスの製造方法

Publications (1)

Publication Number Publication Date
DE60041097D1 true DE60041097D1 (de) 2009-01-29

Family

ID=13837291

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60041097T Expired - Lifetime DE60041097D1 (de) 1999-03-26 2000-03-24 Gaslaser

Country Status (4)

Country Link
US (1) US6801554B1 (de)
EP (1) EP1039595B1 (de)
JP (1) JP4303350B2 (de)
DE (1) DE60041097D1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3619141B2 (ja) 2000-11-10 2005-02-09 キヤノン株式会社 投影露光装置及びデバイス製造方法
JP2005033055A (ja) * 2003-07-08 2005-02-03 Canon Inc 放射状スロットに円弧状スロットを併設したマルチスロットアンテナを用いた表面波プラズマ処理装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4513424A (en) 1982-09-21 1985-04-23 Waynant Ronald W Laser pumped by X-band microwaves
DE3855896T2 (de) 1987-01-26 1998-01-02 Mitsubishi Electric Corp Plasmavorrichtung
DE3912568A1 (de) 1989-04-17 1990-10-18 Siemens Ag Gas-laser, insbesondere co(pfeil abwaerts)2(pfeil abwaerts)-laser
US5379317A (en) 1993-05-28 1995-01-03 California Institute Of Technology Microwave-excited slab waveguide laser with all metal sealed cavity
US6331994B1 (en) 1996-07-19 2001-12-18 Canon Kabushiki Kaisha Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube

Also Published As

Publication number Publication date
JP4303350B2 (ja) 2009-07-29
US6801554B1 (en) 2004-10-05
EP1039595A3 (de) 2003-09-10
EP1039595B1 (de) 2008-12-17
JP2000277841A (ja) 2000-10-06
EP1039595A2 (de) 2000-09-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition