DE69832360D1 - N- oder P-getriebener VCSEL Vielfachlaser - Google Patents
N- oder P-getriebener VCSEL VielfachlaserInfo
- Publication number
- DE69832360D1 DE69832360D1 DE69832360T DE69832360T DE69832360D1 DE 69832360 D1 DE69832360 D1 DE 69832360D1 DE 69832360 T DE69832360 T DE 69832360T DE 69832360 T DE69832360 T DE 69832360T DE 69832360 D1 DE69832360 D1 DE 69832360D1
- Authority
- DE
- Germany
- Prior art keywords
- multiple laser
- vcsel
- driven
- driven vcsel
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/42—Arrays of surface emitting lasers
- H01S5/423—Arrays of surface emitting lasers having a vertical cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
- H01S5/0208—Semi-insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
- H01S5/0422—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers with n- and p-contacts on the same side of the active layer
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US20724 | 1998-02-09 | ||
US09/020,724 US6069908A (en) | 1998-02-09 | 1998-02-09 | N-drive or P-drive VCSEL array |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69832360D1 true DE69832360D1 (de) | 2005-12-22 |
DE69832360T2 DE69832360T2 (de) | 2006-08-03 |
Family
ID=21800203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69832360T Expired - Lifetime DE69832360T2 (de) | 1998-02-09 | 1998-09-10 | N- oder P-getriebener VCSEL Vielfachlaser |
Country Status (4)
Country | Link |
---|---|
US (1) | US6069908A (de) |
EP (1) | EP0935322B1 (de) |
JP (1) | JP4643776B2 (de) |
DE (1) | DE69832360T2 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5719891A (en) * | 1995-12-18 | 1998-02-17 | Picolight Incorporated | Conductive element with lateral oxidation barrier |
MY128323A (en) | 1996-09-30 | 2007-01-31 | Otsuka Pharma Co Ltd | Thiazole derivatives for inhibition of cytokine production and of cell adhesion |
US6304588B1 (en) * | 1997-02-07 | 2001-10-16 | Xerox Corporation | Method and structure for eliminating polarization instability in laterally-oxidized VCSELs |
US6339496B1 (en) | 1999-06-22 | 2002-01-15 | University Of Maryland | Cavity-less vertical semiconductor optical amplifier |
KR100618969B1 (ko) | 1999-07-12 | 2006-08-31 | 삼성전자주식회사 | 광송수신 모듈 |
US6936900B1 (en) * | 2000-05-04 | 2005-08-30 | Osemi, Inc. | Integrated transistor devices |
DE10108079A1 (de) * | 2000-05-30 | 2002-09-12 | Osram Opto Semiconductors Gmbh | Optisch gepumpte oberflächenemittierende Halbleiterlaservorrichtung und Verfahren zu deren Herstellung |
US6730990B2 (en) * | 2000-06-30 | 2004-05-04 | Seiko Epson Corporation | Mountable microstructure and optical transmission apparatus |
US6658040B1 (en) * | 2000-07-28 | 2003-12-02 | Agilent Technologies, Inc. | High speed VCSEL |
US6734453B2 (en) | 2000-08-08 | 2004-05-11 | Translucent Photonics, Inc. | Devices with optical gain in silicon |
JP2002280602A (ja) * | 2001-03-21 | 2002-09-27 | Toshiba Corp | 垂直共振器型発光ダイオード及びその発光ダイオードを用いた光送信モジュール |
EP1357648B1 (de) * | 2002-04-25 | 2006-10-11 | Avalon Photonics AG | Hochgeschwindigkeitstauglicher Vertikalresonator-Oberflächenemissionslaser (VCSEL) mit niedriger Parasitärkapazität |
US6989556B2 (en) * | 2002-06-06 | 2006-01-24 | Osemi, Inc. | Metal oxide compound semiconductor integrated transistor devices with a gate insulator structure |
US6901212B2 (en) * | 2002-06-13 | 2005-05-31 | Halliburton Energy Services, Inc. | Digital adaptive sensorless commutational drive controller for a brushless DC motor |
US7187045B2 (en) * | 2002-07-16 | 2007-03-06 | Osemi, Inc. | Junction field effect metal oxide compound semiconductor integrated transistor devices |
US7257141B2 (en) * | 2003-07-23 | 2007-08-14 | Palo Alto Research Center Incorporated | Phase array oxide-confined VCSELs |
US20070138506A1 (en) * | 2003-11-17 | 2007-06-21 | Braddock Walter D | Nitride metal oxide semiconductor integrated transistor devices |
US20080282983A1 (en) * | 2003-12-09 | 2008-11-20 | Braddock Iv Walter David | High Temperature Vacuum Evaporation Apparatus |
US7372886B2 (en) * | 2004-06-07 | 2008-05-13 | Avago Technologies Fiber Ip Pte Ltd | High thermal conductivity vertical cavity surface emitting laser (VCSEL) |
JP2006066846A (ja) * | 2004-07-29 | 2006-03-09 | Seiko Epson Corp | 面発光型装置及びその製造方法 |
CN100384040C (zh) * | 2004-07-29 | 2008-04-23 | 精工爱普生株式会社 | 面发光型装置及其制造方法 |
JP2009246291A (ja) | 2008-03-31 | 2009-10-22 | Furukawa Electric Co Ltd:The | 面発光レーザアレイ素子 |
JP2011114146A (ja) * | 2009-11-26 | 2011-06-09 | Hamamatsu Photonics Kk | 半導体発光素子 |
WO2013176201A1 (ja) * | 2012-05-25 | 2013-11-28 | 株式会社村田製作所 | 垂直共振面発光レーザ |
BR112015000331A2 (pt) * | 2012-07-11 | 2017-06-27 | Koninklijke Philips Nv | dispositivo de laser sendo formado de pelo menos um laser de emissão superficial de camada vertical com contatos intracavidade |
WO2015128254A1 (en) | 2014-02-25 | 2015-09-03 | Koninklijke Philips N.V. | Light emitting semiconductor devices with getter layer |
US10199794B1 (en) * | 2017-09-20 | 2019-02-05 | Lumentum Operations Llc | Electrically isolating adjacent vertical-emitting devices |
US10666020B2 (en) * | 2017-09-20 | 2020-05-26 | Lumentum Operations Llc | Reconfigurable emitter array |
US11581705B2 (en) | 2019-04-08 | 2023-02-14 | Lumentum Operations Llc | Vertical-cavity surface-emitting laser with dense epi-side contacts |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2963701B2 (ja) * | 1989-09-20 | 1999-10-18 | 株式会社日立製作所 | 半導体レーザ装置 |
US5146465A (en) * | 1991-02-01 | 1992-09-08 | Apa Optics, Inc. | Aluminum gallium nitride laser |
US5274655A (en) * | 1992-03-26 | 1993-12-28 | Motorola, Inc. | Temperature insensitive vertical cavity surface emitting laser |
US5331658A (en) * | 1992-08-26 | 1994-07-19 | Motorola, Inc. | Vertical cavity surface emitting laser and sensor |
US5475701A (en) * | 1993-12-29 | 1995-12-12 | Honeywell Inc. | Integrated laser power monitor |
JP2618610B2 (ja) * | 1994-02-25 | 1997-06-11 | 松下電器産業株式会社 | 垂直共振器型面発光半導体レーザ |
JPH07297476A (ja) * | 1994-04-21 | 1995-11-10 | Hitachi Ltd | 半導体レーザ装置 |
US5729563A (en) * | 1994-07-07 | 1998-03-17 | Hewlett-Packard Company | Method and apparatus for optically and thermally isolating surface emitting laser diodes |
JP3236774B2 (ja) * | 1996-02-16 | 2001-12-10 | 日本電信電話株式会社 | 半導体集積回路 |
JPH09232667A (ja) * | 1996-02-21 | 1997-09-05 | Sony Corp | 化合物半導体装置とその製造方法 |
JP2761866B2 (ja) * | 1996-03-04 | 1998-06-04 | 東海ゴム工業株式会社 | プリント回路体及びその製造方法 |
US5805624A (en) * | 1996-07-30 | 1998-09-08 | Hewlett-Packard Company | Long-wavelength infra-red vertical cavity surface-emitting laser on a gallium arsenide substrate |
JP3752339B2 (ja) * | 1997-02-04 | 2006-03-08 | ローム株式会社 | 半導体発光素子 |
US5831960A (en) * | 1997-07-17 | 1998-11-03 | Motorola, Inc. | Integrated vertical cavity surface emitting laser pair for high density data storage and method of fabrication |
-
1998
- 1998-02-09 US US09/020,724 patent/US6069908A/en not_active Expired - Lifetime
- 1998-09-10 DE DE69832360T patent/DE69832360T2/de not_active Expired - Lifetime
- 1998-09-10 EP EP98117185A patent/EP0935322B1/de not_active Expired - Lifetime
-
1999
- 1999-01-26 JP JP01703399A patent/JP4643776B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0935322B1 (de) | 2005-11-16 |
EP0935322A1 (de) | 1999-08-11 |
JP4643776B2 (ja) | 2011-03-02 |
DE69832360T2 (de) | 2006-08-03 |
US6069908A (en) | 2000-05-30 |
JPH11261174A (ja) | 1999-09-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD., |
|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER & ZINKLER, 82049 PU |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: DILG HAEUSLER SCHINDELMANN PATENTANWALTSGESELLSCHA |