DE69830153D1 - Optische schaltvorrichtung und bildanzeigevorrichtung - Google Patents

Optische schaltvorrichtung und bildanzeigevorrichtung

Info

Publication number
DE69830153D1
DE69830153D1 DE69830153T DE69830153T DE69830153D1 DE 69830153 D1 DE69830153 D1 DE 69830153D1 DE 69830153 T DE69830153 T DE 69830153T DE 69830153 T DE69830153 T DE 69830153T DE 69830153 D1 DE69830153 D1 DE 69830153D1
Authority
DE
Germany
Prior art keywords
switching device
picture display
optical switching
optical
picture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69830153T
Other languages
English (en)
Other versions
DE69830153T2 (de
Inventor
Takashi Takeda
Masatoshi Yonekubo
Hirokazu Ito
Shunji Kamijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP914898A external-priority patent/JP3658965B2/ja
Priority claimed from JP13077698A external-priority patent/JP3855454B2/ja
Priority claimed from JP24383498A external-priority patent/JP4029489B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69830153D1 publication Critical patent/DE69830153D1/de
Publication of DE69830153T2 publication Critical patent/DE69830153T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/56Optics using evanescent waves, i.e. inhomogeneous waves
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3473Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on light coupled out of a light guide, e.g. due to scattering, by contracting the light guide with external means
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/06Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00Command of the display device
    • G09G2310/06Details of flat display driving waveforms
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S385/00Optical waveguides
    • Y10S385/901Illuminating or display apparatus
DE69830153T 1998-01-20 1998-11-27 Optische schaltvorrichtung und bildanzeigevorrichtung Expired - Lifetime DE69830153T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP914898 1998-01-20
JP914898A JP3658965B2 (ja) 1998-01-20 1998-01-20 光スイッチング素子及び画像表示装置
JP13077698A JP3855454B2 (ja) 1998-05-13 1998-05-13 空間光変調装置および空間光変調装置の制御方法
JP13077698 1998-05-13
JP24383498 1998-08-28
JP24383498A JP4029489B2 (ja) 1998-08-28 1998-08-28 空間光変調装置およびその制御方法
PCT/JP1998/005366 WO1999036824A1 (fr) 1998-01-20 1998-11-27 Dispositif de commutation optique et dispositif d'affichage d'images

Publications (2)

Publication Number Publication Date
DE69830153D1 true DE69830153D1 (de) 2005-06-16
DE69830153T2 DE69830153T2 (de) 2005-10-13

Family

ID=27278351

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69830153T Expired - Lifetime DE69830153T2 (de) 1998-01-20 1998-11-27 Optische schaltvorrichtung und bildanzeigevorrichtung

Country Status (5)

Country Link
US (2) US6381381B1 (de)
EP (1) EP0969306B1 (de)
KR (1) KR100604621B1 (de)
DE (1) DE69830153T2 (de)
WO (1) WO1999036824A1 (de)

Families Citing this family (146)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100604621B1 (ko) * 1998-01-20 2006-07-28 세이코 엡슨 가부시키가이샤 광 스위칭 소자, 그의 제어 방법 및 화상 표시 장치
KR100703140B1 (ko) * 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6643426B1 (en) * 1999-10-19 2003-11-04 Corning Incorporated Mechanically assisted release for MEMS optical switch
EP1158332A1 (de) * 1999-12-27 2001-11-28 Ngk Insulators, Ltd. ANZEIGEVORRICHTUNG UND DAZUGEHöRIGES HERSTELLUNGSVERFAHREN
WO2001048535A1 (fr) 1999-12-27 2001-07-05 Ngk Insulators, Ltd. Dispositif d'affichage et procede de fabrication correspondant
EP1185972A1 (de) * 2000-02-24 2002-03-13 Koninklijke Philips Electronics N.V. Anzeigevorrichtung mit lichtleiter
JP4404174B2 (ja) * 2000-04-19 2010-01-27 ソニー株式会社 光スイッチング素子およびこれを用いたスイッチング装置並びに画像表示装置
US6917373B2 (en) * 2000-12-28 2005-07-12 Microsoft Corporation Context sensitive labels for an electronic device
US7030837B1 (en) 2000-04-24 2006-04-18 Microsoft Corporation Auxiliary display unit for a computer system
US7227511B2 (en) * 2000-04-24 2007-06-05 Microsoft Corporation Method for activating an application in context on a remote input/output device
JP4343393B2 (ja) * 2000-04-26 2009-10-14 キヤノン株式会社 光変調素子、および該光変調素子を用いたプロジェクション光学系
US7003187B2 (en) 2000-08-07 2006-02-21 Rosemount Inc. Optical switch with moveable holographic optical element
US6810176B2 (en) 2000-08-07 2004-10-26 Rosemount Inc. Integrated transparent substrate and diffractive optical element
US7405884B2 (en) * 2000-12-21 2008-07-29 Olympus Corporation Optical apparatus
TW548437B (en) * 2001-03-02 2003-08-21 Unaxis Balzers Ag Optical component and its production method as well as optical switch
US6542653B2 (en) * 2001-03-12 2003-04-01 Integrated Micromachines, Inc. Latching mechanism for optical switches
JP3724432B2 (ja) * 2001-04-19 2005-12-07 株式会社ニコン 薄膜弾性構造体及びその製造方法並びにこれを用いたミラーデバイス及び光スイッチ
US6879753B2 (en) 2001-06-15 2005-04-12 Ngk Insulators, Ltd. Display device
DE60214031T2 (de) * 2001-07-13 2007-03-15 Rosemount Inc., Eden Prairie Optischer schalter mit einem beweglichen holographischen optischen element
JP3909812B2 (ja) * 2001-07-19 2007-04-25 富士フイルム株式会社 表示素子及び露光素子
US6798959B2 (en) 2001-09-03 2004-09-28 Ngk Insulators, Ltd. Display device and method for producing the same
JP4089215B2 (ja) * 2001-09-17 2008-05-28 株式会社ニコン マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー
JP4036643B2 (ja) * 2001-12-21 2008-01-23 オリンパス株式会社 光偏向器及び光偏向器アレイ
US6791735B2 (en) * 2002-01-09 2004-09-14 The Regents Of The University Of California Differentially-driven MEMS spatial light modulator
KR100982535B1 (ko) * 2002-02-26 2010-09-16 유니-픽셀 디스플레이스, 인코포레이티드 가시 및 비-가시 필드 순차 컬러
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
CN1316271C (zh) 2002-03-01 2007-05-16 柔斯芒特公司 带有三维波导的光学开关
US6909824B1 (en) * 2002-03-05 2005-06-21 Avi Messica Mechanically actuated evanescent-wave coupled optical devices
FI117453B (sv) * 2002-07-05 2006-10-13 Runar Olof Ivar Toernqvist Displaymodul
JP4025990B2 (ja) * 2002-09-26 2007-12-26 セイコーエプソン株式会社 ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法
TW200413776A (en) * 2002-11-05 2004-08-01 Matsushita Electric Ind Co Ltd Display element and display using the same
WO2004107015A1 (en) * 2003-06-03 2004-12-09 Koninklijke Philips Electronics N.V. Display device with multiple channel wave guide
WO2004114004A1 (ja) * 2003-06-20 2004-12-29 Sharp Kabushiki Kaisha 表示装置
WO2005008783A1 (ja) * 2003-07-18 2005-01-27 Nec Corporation スイッチング素子、スイッチング素子の駆動方法、書き換え可能な論理集積回路およびメモリ素子
US7126254B2 (en) * 2003-07-22 2006-10-24 Ngk Insulators, Ltd. Actuator element and device including the actuator element
US7141915B2 (en) * 2003-07-22 2006-11-28 Ngk Insulators, Ltd. Actuator device
JP2005092174A (ja) * 2003-08-12 2005-04-07 Fujitsu Ltd マイクロ揺動素子
US7760415B2 (en) * 2003-11-01 2010-07-20 Silicon Quest Kabushiki-Kaisha Micro mirror device
US6876485B1 (en) * 2003-11-07 2005-04-05 Reflectivity, Inc Micromirrors with asymmetric stopping mechanisms
JP2005189681A (ja) * 2003-12-26 2005-07-14 Fuji Photo Film Co Ltd 画像表示装置および画像表示制御装置
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7893919B2 (en) * 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7373026B2 (en) 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US7405861B2 (en) 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7327510B2 (en) * 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7612932B2 (en) * 2004-09-27 2009-11-03 Idc, Llc Microelectromechanical device with optical function separated from mechanical and electrical function
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7092143B2 (en) * 2004-10-19 2006-08-15 Reflectivity, Inc Micromirror array device and a method for making the same
US7158279B2 (en) * 2004-10-19 2007-01-02 Texas Instruments Incorporated Spatial light modulators with non-uniform pixels
US7320899B2 (en) * 2004-10-21 2008-01-22 Hewlett-Packard Development Company, L.P. Micro-displays and their manufacture
US20080068697A1 (en) * 2004-10-29 2008-03-20 Haluzak Charles C Micro-Displays and Their Manufacture
WO2006123299A2 (en) * 2005-05-18 2006-11-23 Kolo Technologies, Inc. Methods for fabricating micro-electro-mechanical devices
US8105941B2 (en) 2005-05-18 2012-01-31 Kolo Technologies, Inc. Through-wafer interconnection
US7884989B2 (en) 2005-05-27 2011-02-08 Qualcomm Mems Technologies, Inc. White interferometric modulators and methods for forming the same
US20060291769A1 (en) * 2005-05-27 2006-12-28 Eastman Kodak Company Light emitting source incorporating vertical cavity lasers and other MEMS devices within an electro-optical addressing architecture
US7460292B2 (en) * 2005-06-03 2008-12-02 Qualcomm Mems Technologies, Inc. Interferometric modulator with internal polarization and drive method
CN101558552B (zh) * 2005-06-17 2017-05-31 科隆科技公司 具有绝缘延伸部的微机电换能器
US7880565B2 (en) 2005-08-03 2011-02-01 Kolo Technologies, Inc. Micro-electro-mechanical transducer having a surface plate
US20070052671A1 (en) * 2005-09-02 2007-03-08 Hewlett-Packard Development Company Lp Pixel element actuation
EP1928780A2 (de) 2005-09-30 2008-06-11 Qualcomm Mems Technologies, Inc. Mems-vorrichtung und verbindungen dafür
US7499206B1 (en) * 2005-12-09 2009-03-03 Brian Edward Richardson TIR light valve
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7486854B2 (en) 2006-01-24 2009-02-03 Uni-Pixel Displays, Inc. Optical microstructures for light extraction and control
US7652814B2 (en) 2006-01-27 2010-01-26 Qualcomm Mems Technologies, Inc. MEMS device with integrated optical element
JP2007225910A (ja) * 2006-02-23 2007-09-06 Tsumura Sogo Kenkyusho:Kk 画像投影装置
US7450295B2 (en) * 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US20070268201A1 (en) * 2006-05-22 2007-11-22 Sampsell Jeffrey B Back-to-back displays
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
JP2008070863A (ja) * 2006-08-14 2008-03-27 Ricoh Co Ltd 振動ミラー、光書込装置および画像形成装置
US7751663B2 (en) * 2006-09-21 2010-07-06 Uni-Pixel Displays, Inc. Backside reflection optical display
US7629197B2 (en) 2006-10-18 2009-12-08 Qualcomm Mems Technologies, Inc. Spatial light modulator
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8115987B2 (en) 2007-02-01 2012-02-14 Qualcomm Mems Technologies, Inc. Modulating the intensity of light from an interferometric reflector
US7742220B2 (en) 2007-03-28 2010-06-22 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing conducting layers separated by stops
US7715085B2 (en) 2007-05-09 2010-05-11 Qualcomm Mems Technologies, Inc. Electromechanical system having a dielectric movable membrane and a mirror
US7643202B2 (en) 2007-05-09 2010-01-05 Qualcomm Mems Technologies, Inc. Microelectromechanical system having a dielectric movable membrane and a mirror
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7643199B2 (en) * 2007-06-19 2010-01-05 Qualcomm Mems Technologies, Inc. High aperture-ratio top-reflective AM-iMod displays
US7782517B2 (en) 2007-06-21 2010-08-24 Qualcomm Mems Technologies, Inc. Infrared and dual mode displays
US7630121B2 (en) 2007-07-02 2009-12-08 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7434482B1 (en) * 2007-07-25 2008-10-14 Applied Technologies Associates, Inc. Feedback-controlled piezoelectric force measuring apparatus
KR20100066452A (ko) 2007-07-31 2010-06-17 퀄컴 엠이엠스 테크놀로지스, 인크. 간섭계 변조기의 색 변이를 증강시키는 장치
US7570415B2 (en) 2007-08-07 2009-08-04 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8072402B2 (en) 2007-08-29 2011-12-06 Qualcomm Mems Technologies, Inc. Interferometric optical modulator with broadband reflection characteristics
US7847999B2 (en) 2007-09-14 2010-12-07 Qualcomm Mems Technologies, Inc. Interferometric modulator display devices
US7773286B2 (en) 2007-09-14 2010-08-10 Qualcomm Mems Technologies, Inc. Periodic dimple array
CN101896814A (zh) 2007-10-12 2010-11-24 Nxp股份有限公司 传感器、传感器阵列以及操作传感器的方法
US8058549B2 (en) 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
KR20100090257A (ko) 2007-10-19 2010-08-13 퀄컴 엠이엠스 테크놀로지스, 인크. 광기전력 소자가 통합된 디스플레이
WO2009055393A1 (en) 2007-10-23 2009-04-30 Qualcomm Mems Technologies, Inc. Adjustably transmissive mems-based devices
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US20090141336A1 (en) * 2007-11-30 2009-06-04 Lumination Llc Projection display devices employing frustrated total internal reflection
US7715079B2 (en) 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
KR20110027637A (ko) * 2007-12-14 2011-03-16 램버스 인코포레이티드 마이크로 전기 기계 시스템(mems)-기반 광학 디스플레이에서 화소 작동 전압을 감소시키는 장치 및 방법
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US7612933B2 (en) 2008-03-27 2009-11-03 Qualcomm Mems Technologies, Inc. Microelectromechanical device with spacing layer
US7898723B2 (en) 2008-04-02 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical systems display element with photovoltaic structure
US7969638B2 (en) 2008-04-10 2011-06-28 Qualcomm Mems Technologies, Inc. Device having thin black mask and method of fabricating the same
US7746539B2 (en) 2008-06-25 2010-06-29 Qualcomm Mems Technologies, Inc. Method for packing a display device and the device obtained thereof
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US7859740B2 (en) 2008-07-11 2010-12-28 Qualcomm Mems Technologies, Inc. Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
US7855826B2 (en) 2008-08-12 2010-12-21 Qualcomm Mems Technologies, Inc. Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
US8358266B2 (en) 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
US8152352B2 (en) 2009-01-02 2012-04-10 Rambus International Ltd. Optic system for light guide with controlled output
US8272770B2 (en) 2009-01-02 2012-09-25 Rambus International Ltd. TIR switched flat panel display
WO2010077367A2 (en) * 2009-01-02 2010-07-08 Brian Edward Richardson Optic system for light guide with controlled output
US8270056B2 (en) 2009-03-23 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with openings between sub-pixels and method of making same
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
CN102449511A (zh) 2009-05-29 2012-05-09 高通Mems科技公司 照明装置及其制造方法
US20100315836A1 (en) * 2009-06-11 2010-12-16 Brian Edward Richardson Flat panel optical display system with highly controlled output
US8152318B2 (en) 2009-06-11 2012-04-10 Rambus International Ltd. Optical system for a light emitting diode with collection, conduction, phosphor directing, and output means
US8297818B2 (en) 2009-06-11 2012-10-30 Rambus International Ltd. Optical system with reflectors and light pipes
US8416224B2 (en) * 2009-07-31 2013-04-09 Edward Pakhchyan Method of operating an array of electromechanical pixels resulting in efficient and reliable operation of light modulating elements
US8270062B2 (en) * 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
US8488228B2 (en) 2009-09-28 2013-07-16 Qualcomm Mems Technologies, Inc. Interferometric display with interferometric reflector
US8733982B2 (en) * 2009-11-18 2014-05-27 Rambus Delaware Llc Internal collecting reflector optics for LEDs
JP2013524287A (ja) 2010-04-09 2013-06-17 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 電気機械デバイスの機械層及びその形成方法
WO2012024238A1 (en) 2010-08-17 2012-02-23 Qualcomm Mems Technologies, Inc. Actuation and calibration of a charge neutral electrode in an interferometric display device
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
TW201300702A (zh) 2011-05-13 2013-01-01 Rambus Inc 照明組件
US9551837B2 (en) * 2011-11-01 2017-01-24 Infineon Technologies Ag Silicon optical line multiplexer devices
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
US9291340B2 (en) 2013-10-23 2016-03-22 Rambus Delaware Llc Lighting assembly having n-fold rotational symmetry

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4113360A (en) 1977-03-28 1978-09-12 Siemens Aktiengesellschaft Indicating device for illustrating symbols of all kinds
DE3018099A1 (de) * 1980-05-12 1981-11-19 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur mehrfarbigen optischen darstellung von informationen
JPH02254405A (ja) 1989-03-28 1990-10-15 Matsushita Electric Ind Co Ltd 空間光変調器
US4954789A (en) 1989-09-28 1990-09-04 Texas Instruments Incorporated Spatial light modulator
JP3187669B2 (ja) * 1994-04-01 2001-07-11 日本碍子株式会社 ディスプレイ素子及びディスプレイ装置
US5771321A (en) * 1996-01-04 1998-06-23 Massachusetts Institute Of Technology Micromechanical optical switch and flat panel display
JP3517535B2 (ja) * 1996-07-10 2004-04-12 日本碍子株式会社 表示装置
US6028978A (en) * 1996-12-16 2000-02-22 Ngk Insulators, Ltd. Display device having a colored layer disposed between a displacement transmitting section and an optical waveguide plate
US5808780A (en) * 1997-06-09 1998-09-15 Texas Instruments Incorporated Non-contacting micromechanical optical switch
KR100604621B1 (ko) * 1998-01-20 2006-07-28 세이코 엡슨 가부시키가이샤 광 스위칭 소자, 그의 제어 방법 및 화상 표시 장치
JP3209208B2 (ja) 1999-01-27 2001-09-17 日本電気株式会社 半導体装置及び半導体装置の製造方法

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WO1999036824A1 (fr) 1999-07-22
DE69830153T2 (de) 2005-10-13
US6438282B1 (en) 2002-08-20
EP0969306A4 (de) 2003-06-25
KR20010005526A (ko) 2001-01-15
EP0969306B1 (de) 2005-05-11
KR100604621B1 (ko) 2006-07-28
US20020031294A1 (en) 2002-03-14
US6381381B1 (en) 2002-04-30

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