DE69805399D1 - Integrierte kissen-und bandeinheit für chemisch-mechanisches polieren - Google Patents

Integrierte kissen-und bandeinheit für chemisch-mechanisches polieren

Info

Publication number
DE69805399D1
DE69805399D1 DE69805399T DE69805399T DE69805399D1 DE 69805399 D1 DE69805399 D1 DE 69805399D1 DE 69805399 T DE69805399 T DE 69805399T DE 69805399 T DE69805399 T DE 69805399T DE 69805399 D1 DE69805399 D1 DE 69805399D1
Authority
DE
Germany
Prior art keywords
chemical
mechanical polishing
tape unit
integrated cushion
cushion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69805399T
Other languages
English (en)
Other versions
DE69805399T2 (de
Inventor
K Pant
Rahul Jairath
Kamal Mishra
Saket Chadda
C Krusell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of DE69805399D1 publication Critical patent/DE69805399D1/de
Application granted granted Critical
Publication of DE69805399T2 publication Critical patent/DE69805399T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/06—Connecting the ends of materials, e.g. for making abrasive belts
DE69805399T 1997-02-14 1998-02-11 Integrierte kissen-und bandeinheit für chemisch-mechanisches polieren Expired - Fee Related DE69805399T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/800,373 US6328642B1 (en) 1997-02-14 1997-02-14 Integrated pad and belt for chemical mechanical polishing
PCT/US1998/002690 WO1998035785A1 (en) 1997-02-14 1998-02-11 Integrated pad and belt for chemical mechanical polishing

Publications (2)

Publication Number Publication Date
DE69805399D1 true DE69805399D1 (de) 2002-06-20
DE69805399T2 DE69805399T2 (de) 2002-11-21

Family

ID=25178228

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69805399T Expired - Fee Related DE69805399T2 (de) 1997-02-14 1998-02-11 Integrierte kissen-und bandeinheit für chemisch-mechanisches polieren

Country Status (8)

Country Link
US (3) US6328642B1 (de)
EP (1) EP0966338B1 (de)
JP (1) JP2001511714A (de)
KR (1) KR100506235B1 (de)
AU (3) AU6568098A (de)
DE (1) DE69805399T2 (de)
TW (1) TW363218B (de)
WO (3) WO1998035786A1 (de)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6108091A (en) 1997-05-28 2000-08-22 Lam Research Corporation Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing
US6736714B2 (en) * 1997-07-30 2004-05-18 Praxair S.T. Technology, Inc. Polishing silicon wafers
US6210257B1 (en) * 1998-05-29 2001-04-03 Micron Technology, Inc. Web-format polishing pads and methods for manufacturing and using web-format polishing pads in mechanical and chemical-mechanical planarization of microelectronic substrates
US7718102B2 (en) 1998-06-02 2010-05-18 Praxair S.T. Technology, Inc. Froth and method of producing froth
US6514301B1 (en) 1998-06-02 2003-02-04 Peripheral Products Inc. Foam semiconductor polishing belts and pads
TWI235115B (en) * 1998-10-26 2005-07-01 Scapa Group Plc Seamless, composite belts
US6179709B1 (en) * 1999-02-04 2001-01-30 Applied Materials, Inc. In-situ monitoring of linear substrate polishing operations
US6224461B1 (en) * 1999-03-29 2001-05-01 Lam Research Corporation Method and apparatus for stabilizing the process temperature during chemical mechanical polishing
US6234875B1 (en) 1999-06-09 2001-05-22 3M Innovative Properties Company Method of modifying a surface
AU6620000A (en) * 1999-08-06 2001-03-05 Frank W Sudia Blocked tree authorization and status systems
US6406363B1 (en) 1999-08-31 2002-06-18 Lam Research Corporation Unsupported chemical mechanical polishing belt
US6569004B1 (en) * 1999-12-30 2003-05-27 Lam Research Polishing pad and method of manufacture
US6533645B2 (en) 2000-01-18 2003-03-18 Applied Materials, Inc. Substrate polishing article
US6607428B2 (en) 2000-01-18 2003-08-19 Applied Materials, Inc. Material for use in carrier and polishing pads
US7670468B2 (en) 2000-02-17 2010-03-02 Applied Materials, Inc. Contact assembly and method for electrochemical mechanical processing
US6884153B2 (en) * 2000-02-17 2005-04-26 Applied Materials, Inc. Apparatus for electrochemical processing
US6962524B2 (en) 2000-02-17 2005-11-08 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US20030213703A1 (en) * 2002-05-16 2003-11-20 Applied Materials, Inc. Method and apparatus for substrate polishing
US6848970B2 (en) 2002-09-16 2005-02-01 Applied Materials, Inc. Process control in electrochemically assisted planarization
US7678245B2 (en) 2000-02-17 2010-03-16 Applied Materials, Inc. Method and apparatus for electrochemical mechanical processing
US6706139B1 (en) * 2000-04-19 2004-03-16 Micron Technology, Inc. Method and apparatus for cleaning a web-based chemical mechanical planarization system
US6495464B1 (en) 2000-06-30 2002-12-17 Lam Research Corporation Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool
US6503129B1 (en) 2000-10-06 2003-01-07 Lam Research Corporation Activated slurry CMP system and methods for implementing the same
CN1209229C (zh) * 2000-12-27 2005-07-06 拉姆研究公司 用于化学机械研磨的无缝研磨装置和生成研磨垫的方法
US6572463B1 (en) 2000-12-27 2003-06-03 Lam Research Corp. Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same
US6561889B1 (en) * 2000-12-27 2003-05-13 Lam Research Corporation Methods for making reinforced wafer polishing pads and apparatuses implementing the same
US6609961B2 (en) 2001-01-09 2003-08-26 Lam Research Corporation Chemical mechanical planarization belt assembly and method of assembly
US6991512B2 (en) * 2001-03-30 2006-01-31 Lam Research Corporation Apparatus for edge polishing uniformity control
US8602851B2 (en) * 2003-06-09 2013-12-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Controlled penetration subpad
US6887338B1 (en) * 2002-06-28 2005-05-03 Lam Research Corporation 300 mm platen and belt configuration
US6752898B1 (en) * 2002-12-20 2004-06-22 Lam Research Corporation Method and apparatus for an air bearing platen with raised topography
US6843444B2 (en) * 2002-12-24 2005-01-18 The Goodyear Tire & Rubber Company Tracking means for precision cord length on two drums
US6884156B2 (en) * 2003-06-17 2005-04-26 Cabot Microelectronics Corporation Multi-layer polishing pad material for CMP
US7435161B2 (en) * 2003-06-17 2008-10-14 Cabot Microelectronics Corporation Multi-layer polishing pad material for CMP
US7018273B1 (en) 2003-06-27 2006-03-28 Lam Research Corporation Platen with diaphragm and method for optimizing wafer polishing
US20050173259A1 (en) * 2004-02-06 2005-08-11 Applied Materials, Inc. Endpoint system for electro-chemical mechanical polishing
US7654885B2 (en) * 2003-10-03 2010-02-02 Applied Materials, Inc. Multi-layer polishing pad
US8066552B2 (en) 2003-10-03 2011-11-29 Applied Materials, Inc. Multi-layer polishing pad for low-pressure polishing
US7186164B2 (en) 2003-12-03 2007-03-06 Applied Materials, Inc. Processing pad assembly with zone control
US7419421B2 (en) * 2004-05-04 2008-09-02 Seagate Technology Llc Slider having rounded corners and edges, and method for producing the same
US8075372B2 (en) * 2004-09-01 2011-12-13 Cabot Microelectronics Corporation Polishing pad with microporous regions
US20070197145A1 (en) * 2006-02-15 2007-08-23 Applied Materials, Inc. Polishing article with window stripe
US9108293B2 (en) * 2012-07-30 2015-08-18 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method for chemical mechanical polishing layer pretexturing
JP7317532B2 (ja) * 2019-03-19 2023-07-31 キオクシア株式会社 研磨装置及び研磨方法
KR20210047999A (ko) 2019-10-22 2021-05-03 삼성디스플레이 주식회사 연마 헤드 유닛, 이를 포함하는 기판 처리 장치, 그리고 이를 이용하는 기판 처리 방법

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2590697A (en) * 1949-04-08 1952-03-25 Don S Grove Endless abrasive belt and method of manufacturing same
US4018574A (en) * 1970-12-16 1977-04-19 Norton Compay Process for the manufacture of endless coated abrasive articles
US4576612A (en) 1984-06-01 1986-03-18 Ferro Corporation Fixed ophthalmic lens polishing pad
US4589233A (en) 1984-06-25 1986-05-20 Carborundum Abrasives Company Sectional abrasive belt
US4728552A (en) 1984-07-06 1988-03-01 Rodel, Inc. Substrate containing fibers of predetermined orientation and process of making the same
US4927432A (en) 1986-03-25 1990-05-22 Rodel, Inc. Pad material for grinding, lapping and polishing
US4753838A (en) 1986-06-16 1988-06-28 Tsuguji Kimura Polishing sheet material and method for its production
US4841684A (en) 1986-08-05 1989-06-27 Hall Jr E Winthrop Surface-finishing member
US4841680A (en) 1987-08-25 1989-06-27 Rodel, Inc. Inverted cell pad material for grinding, lapping, shaping and polishing
JPH01193166A (ja) 1988-01-28 1989-08-03 Showa Denko Kk 半導体ウェハ鏡面研磨用パッド
US4962562A (en) 1989-01-18 1990-10-16 Minnesota Mining And Manufacturing Company Compounding, glazing or polishing pad
JP2978180B2 (ja) 1989-07-23 1999-11-15 北村 篤識 研磨ベルトおよび研磨機
US5177908A (en) 1990-01-22 1993-01-12 Micron Technology, Inc. Polishing pad
US5020283A (en) 1990-01-22 1991-06-04 Micron Technology, Inc. Polishing pad with uniform abrasion
US5234867A (en) 1992-05-27 1993-08-10 Micron Technology, Inc. Method for planarizing semiconductor wafers with a non-circular polishing pad
US5257478A (en) 1990-03-22 1993-11-02 Rodel, Inc. Apparatus for interlayer planarization of semiconductor material
US5341609A (en) 1992-01-28 1994-08-30 Minnesota Mining And Manufacturing Company Abrasive belts and their manufacture
US5256227A (en) 1991-05-09 1993-10-26 Minnesota Mining And Manufacturing Company Method of splicing endless abrasive belts and cones
US5212910A (en) 1991-07-09 1993-05-25 Intel Corporation Composite polishing pad for semiconductor process
US5197999A (en) 1991-09-30 1993-03-30 National Semiconductor Corporation Polishing pad for planarization
WO1993012911A1 (en) * 1991-12-20 1993-07-08 Minnesota Mining And Manufacturing Company A coated abrasive belt with an endless, seamless backing and method of preparation
US6406576B1 (en) * 1991-12-20 2002-06-18 3M Innovative Properties Company Method of making coated abrasive belt with an endless, seamless backing
US5287663A (en) 1992-01-21 1994-02-22 National Semiconductor Corporation Polishing pad and method for polishing semiconductor wafers
JPH0647678A (ja) 1992-06-25 1994-02-22 Kawasaki Steel Corp 湿式研磨用エンドレスベルト
IT226758Z2 (it) * 1992-07-09 1997-07-01 Norton Utensile abrasivo quale disco striscia e simili per una macchina per la carteggiatura e la levigatura
MY114512A (en) 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US5487697A (en) 1993-02-09 1996-01-30 Rodel, Inc. Polishing apparatus and method using a rotary work holder travelling down a rail for polishing a workpiece with linear pads
US5329734A (en) 1993-04-30 1994-07-19 Motorola, Inc. Polishing pads used to chemical-mechanical polish a semiconductor substrate
US5441598A (en) 1993-12-16 1995-08-15 Motorola, Inc. Polishing pad for chemical-mechanical polishing of a semiconductor substrate
US5433651A (en) 1993-12-22 1995-07-18 International Business Machines Corporation In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing
AU1735295A (en) * 1994-02-22 1995-09-04 Minnesota Mining And Manufacturing Company Method for making an endless coated abrasive article and the product thereof
US5650039A (en) 1994-03-02 1997-07-22 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved slurry distribution
US5489233A (en) 1994-04-08 1996-02-06 Rodel, Inc. Polishing pads and methods for their use
US5534106A (en) 1994-07-26 1996-07-09 Kabushiki Kaisha Toshiba Apparatus for processing semiconductor wafers
ATE186001T1 (de) * 1994-08-09 1999-11-15 Ontrak Systems Inc Linear poliergerät und wafer planarisierungsverfahren
US5593344A (en) 1994-10-11 1997-01-14 Ontrak Systems, Inc. Wafer polishing machine with fluid bearings and drive systems
US5575707A (en) 1994-10-11 1996-11-19 Ontrak Systems, Inc. Polishing pad cluster for polishing a semiconductor wafer
US5573844A (en) 1995-01-06 1996-11-12 Minnesota Mining And Manufacturing Company Conformable surface finishing article and method for manufacture of same
DE69618698T2 (de) 1995-03-28 2002-08-14 Applied Materials Inc Verfahren und Vorrichtung zur In-Situ-Kontroll und Bestimmung des Endes von chemisch-mechanischen Planiervorgänge
US5893796A (en) 1995-03-28 1999-04-13 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
US5605760A (en) 1995-08-21 1997-02-25 Rodel, Inc. Polishing pads
US5690540A (en) 1996-02-23 1997-11-25 Micron Technology, Inc. Spiral grooved polishing pad for chemical-mechanical planarization of semiconductor wafers
US5916012A (en) 1996-04-26 1999-06-29 Lam Research Corporation Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher
US5762536A (en) 1996-04-26 1998-06-09 Lam Research Corporation Sensors for a linear polisher
US5800248A (en) 1996-04-26 1998-09-01 Ontrak Systems Inc. Control of chemical-mechanical polishing rate across a substrate surface
US5722877A (en) 1996-10-11 1998-03-03 Lam Research Corporation Technique for improving within-wafer non-uniformity of material removal for performing CMP
US5871390A (en) 1997-02-06 1999-02-16 Lam Research Corporation Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing

Also Published As

Publication number Publication date
EP0966338B1 (de) 2002-05-15
WO1998035786A1 (en) 1998-08-20
KR100506235B1 (ko) 2005-08-05
AU6568098A (en) 1998-09-08
US20050118936A1 (en) 2005-06-02
US6656025B2 (en) 2003-12-02
WO1998035785A1 (en) 1998-08-20
US20020031988A1 (en) 2002-03-14
EP0966338A1 (de) 1999-12-29
WO1998036442A2 (en) 1998-08-20
AU6159198A (en) 1998-09-08
AU6472498A (en) 1998-09-08
TW363218B (en) 1999-07-01
DE69805399T2 (de) 2002-11-21
US6328642B1 (en) 2001-12-11
KR20000071015A (ko) 2000-11-25
JP2001511714A (ja) 2001-08-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee