KR960702787A - 개선된 연마 패드 및 이의 사용방법(Improved polishing pads and methods for their use) - Google Patents

개선된 연마 패드 및 이의 사용방법(Improved polishing pads and methods for their use)

Info

Publication number
KR960702787A
KR960702787A KR1019950705558A KR19950705558A KR960702787A KR 960702787 A KR960702787 A KR 960702787A KR 1019950705558 A KR1019950705558 A KR 1019950705558A KR 19950705558 A KR19950705558 A KR 19950705558A KR 960702787 A KR960702787 A KR 960702787A
Authority
KR
South Korea
Prior art keywords
methods
polishing pads
improved polishing
improved
pads
Prior art date
Application number
KR1019950705558A
Other languages
English (en)
Other versions
KR100195831B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22842118&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR960702787(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed filed Critical
Publication of KR960702787A publication Critical patent/KR960702787A/ko
Application granted granted Critical
Publication of KR100195831B1 publication Critical patent/KR100195831B1/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L13/00—Implements for cleaning floors, carpets, furniture, walls, or wall coverings
    • A47L13/10—Scrubbing; Scouring; Cleaning; Polishing
    • A47L13/28—Polishing implements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B24D11/005—Making abrasive webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/02—Backings, e.g. foils, webs, mesh fabrics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D2203/00—Tool surfaces formed with a pattern

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
KR1019950705558A 1994-04-08 1995-03-30 개선된 연마패드 및 이의 사용방법 KR100195831B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US8/224768 1994-04-08
US08/224,768 US5489233A (en) 1994-04-08 1994-04-08 Polishing pads and methods for their use
PCT/US1995/004072 WO1995027595A1 (en) 1994-04-08 1995-03-30 Improved polishing pads and methods for their use

Publications (2)

Publication Number Publication Date
KR960702787A true KR960702787A (ko) 1996-05-23
KR100195831B1 KR100195831B1 (ko) 1999-06-15

Family

ID=22842118

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950705558A KR100195831B1 (ko) 1994-04-08 1995-03-30 개선된 연마패드 및 이의 사용방법

Country Status (9)

Country Link
US (1) US5489233A (ko)
EP (1) EP0701499B1 (ko)
JP (1) JP3072526B2 (ko)
KR (1) KR100195831B1 (ko)
CN (1) CN1073912C (ko)
DE (2) DE701499T1 (ko)
MY (1) MY112281A (ko)
TW (1) TW362551U (ko)
WO (1) WO1995027595A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100789068B1 (ko) * 2000-07-25 2007-12-26 가부시키가이샤 로키 테크노 연마 패드 및 그의 제조방법

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* Cited by examiner, † Cited by third party
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EP0701499A4 (en) 1997-08-20
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JPH08511210A (ja) 1996-11-26
MY112281A (en) 2001-05-31
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CN1073912C (zh) 2001-10-31
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US5489233A (en) 1996-02-06
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