DE69801217T2 - Verfahren zur herstellung eines mehrschichtigen optischen gegenstands mit vernetzungs-verdichtung durch belichtung mit uv-strahlung und so erhaltener optischer gegenstand - Google Patents
Verfahren zur herstellung eines mehrschichtigen optischen gegenstands mit vernetzungs-verdichtung durch belichtung mit uv-strahlung und so erhaltener optischer gegenstandInfo
- Publication number
- DE69801217T2 DE69801217T2 DE69801217T DE69801217T DE69801217T2 DE 69801217 T2 DE69801217 T2 DE 69801217T2 DE 69801217 T DE69801217 T DE 69801217T DE 69801217 T DE69801217 T DE 69801217T DE 69801217 T2 DE69801217 T2 DE 69801217T2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- metal
- refractive index
- oxide
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 47
- 230000005855 radiation Effects 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title description 33
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- 239000010410 layer Substances 0.000 claims description 228
- 238000000034 method Methods 0.000 claims description 94
- 239000000758 substrate Substances 0.000 claims description 82
- 239000000463 material Substances 0.000 claims description 79
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 77
- 229910052751 metal Inorganic materials 0.000 claims description 71
- 239000002184 metal Substances 0.000 claims description 71
- 229910052755 nonmetal Inorganic materials 0.000 claims description 62
- 230000008569 process Effects 0.000 claims description 60
- 230000003667 anti-reflective effect Effects 0.000 claims description 37
- 238000000280 densification Methods 0.000 claims description 33
- 239000002243 precursor Substances 0.000 claims description 33
- 238000011282 treatment Methods 0.000 claims description 31
- 239000000377 silicon dioxide Substances 0.000 claims description 29
- 238000004132 cross linking Methods 0.000 claims description 26
- 150000004706 metal oxides Chemical class 0.000 claims description 25
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 claims description 22
- 239000002904 solvent Substances 0.000 claims description 21
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical group [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 16
- 229920000642 polymer Polymers 0.000 claims description 16
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 15
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 15
- 229910052715 tantalum Inorganic materials 0.000 claims description 14
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 13
- -1 saturated aliphatic alcohols Chemical class 0.000 claims description 13
- 235000012239 silicon dioxide Nutrition 0.000 claims description 13
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 13
- 150000002736 metal compounds Chemical class 0.000 claims description 12
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 12
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 10
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 10
- 239000000395 magnesium oxide Substances 0.000 claims description 9
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 8
- 150000004703 alkoxides Chemical class 0.000 claims description 8
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 8
- 229910017604 nitric acid Inorganic materials 0.000 claims description 8
- 238000007669 thermal treatment Methods 0.000 claims description 8
- 150000004756 silanes Chemical class 0.000 claims description 6
- 230000003595 spectral effect Effects 0.000 claims description 6
- 229910052681 coesite Inorganic materials 0.000 claims description 5
- 229910052906 cristobalite Inorganic materials 0.000 claims description 5
- 150000004820 halides Chemical class 0.000 claims description 5
- 150000003839 salts Chemical class 0.000 claims description 5
- 229910052682 stishovite Inorganic materials 0.000 claims description 5
- 229910052905 tridymite Inorganic materials 0.000 claims description 5
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 4
- 238000005496 tempering Methods 0.000 claims description 4
- 229910052794 bromium Inorganic materials 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 229920000592 inorganic polymer Polymers 0.000 claims description 3
- 125000000217 alkyl group Chemical group 0.000 claims description 2
- 125000004432 carbon atom Chemical group C* 0.000 claims description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 2
- 229910052740 iodine Inorganic materials 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 229910000484 niobium oxide Inorganic materials 0.000 claims description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 claims description 2
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 claims description 2
- 229910003452 thorium oxide Inorganic materials 0.000 claims description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims 1
- 239000013047 polymeric layer Substances 0.000 claims 1
- 239000000243 solution Substances 0.000 description 93
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 53
- 238000005299 abrasion Methods 0.000 description 38
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 23
- 229910001868 water Inorganic materials 0.000 description 20
- 239000000499 gel Substances 0.000 description 18
- 238000000151 deposition Methods 0.000 description 16
- 239000006117 anti-reflective coating Substances 0.000 description 15
- 150000001875 compounds Chemical class 0.000 description 15
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 14
- 239000010409 thin film Substances 0.000 description 13
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- 239000000126 substance Substances 0.000 description 12
- 239000002861 polymer material Substances 0.000 description 10
- OEIMLTQPLAGXMX-UHFFFAOYSA-I tantalum(v) chloride Chemical compound Cl[Ta](Cl)(Cl)(Cl)Cl OEIMLTQPLAGXMX-UHFFFAOYSA-I 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 9
- 230000002940 repellent Effects 0.000 description 9
- 239000005871 repellent Substances 0.000 description 9
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- 229910004537 TaCl5 Inorganic materials 0.000 description 8
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- 238000002360 preparation method Methods 0.000 description 8
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- 239000010936 titanium Substances 0.000 description 8
- 238000000137 annealing Methods 0.000 description 7
- 239000011230 binding agent Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 7
- 230000002209 hydrophobic effect Effects 0.000 description 7
- 238000003980 solgel method Methods 0.000 description 7
- 229910052719 titanium Inorganic materials 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 5
- 239000000084 colloidal system Substances 0.000 description 5
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- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 239000008119 colloidal silica Substances 0.000 description 4
- 229920006037 cross link polymer Polymers 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 239000010413 mother solution Substances 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
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- 229910052500 inorganic mineral Inorganic materials 0.000 description 3
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- 239000003960 organic solvent Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
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- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- VWVRASTUFJRTHW-UHFFFAOYSA-N 2-[3-(azetidin-3-yloxy)-4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]pyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound O=C(CN1C=C(C(OC2CNC2)=N1)C1=CN=C(NC2CC3=C(C2)C=CC=C3)N=C1)N1CCC2=C(C1)N=NN2 VWVRASTUFJRTHW-UHFFFAOYSA-N 0.000 description 1
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 101000801643 Homo sapiens Retinal-specific phospholipid-transporting ATPase ABCA4 Proteins 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 102100033617 Retinal-specific phospholipid-transporting ATPase ABCA4 Human genes 0.000 description 1
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- 229910052776 Thorium Inorganic materials 0.000 description 1
- 229910003074 TiCl4 Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000007171 acid catalysis Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000181 anti-adherent effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
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- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
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- 239000007822 coupling agent Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
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- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- XPBBUZJBQWWFFJ-UHFFFAOYSA-N fluorosilane Chemical class [SiH3]F XPBBUZJBQWWFFJ-UHFFFAOYSA-N 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000003760 magnetic stirring Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 150000001282 organosilanes Chemical class 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- JSPLKZUTYZBBKA-UHFFFAOYSA-N trioxidane Chemical compound OOO JSPLKZUTYZBBKA-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Laminated Bodies (AREA)
- Optical Elements Other Than Lenses (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9701484A FR2759464B1 (fr) | 1997-02-10 | 1997-02-10 | Procede de preparation d'un materiau optique multicouches avec reticulation-densification par insolation aux rayons ultraviolets et materiau optique ainsi prepare |
| PCT/FR1998/000230 WO1998034884A1 (fr) | 1997-02-10 | 1998-02-06 | Procede de preparation d'un materiau optique multicouches avec reticulation-densification par insolation aux rayons ultraviolets et materiau optique ainsi prepare |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69801217D1 DE69801217D1 (de) | 2001-08-30 |
| DE69801217T2 true DE69801217T2 (de) | 2002-05-02 |
Family
ID=9503505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69801217T Expired - Lifetime DE69801217T2 (de) | 1997-02-10 | 1998-02-06 | Verfahren zur herstellung eines mehrschichtigen optischen gegenstands mit vernetzungs-verdichtung durch belichtung mit uv-strahlung und so erhaltener optischer gegenstand |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US6180188B1 (https=) |
| EP (1) | EP0970025B1 (https=) |
| JP (1) | JP4224646B2 (https=) |
| CN (1) | CN1213958C (https=) |
| AU (1) | AU748748B2 (https=) |
| BR (1) | BR9807194A (https=) |
| CA (1) | CA2279908C (https=) |
| DE (1) | DE69801217T2 (https=) |
| ES (1) | ES2161518T3 (https=) |
| FR (1) | FR2759464B1 (https=) |
| WO (1) | WO1998034884A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005007825B4 (de) * | 2005-01-10 | 2015-09-17 | Interpane Entwicklungs-Und Beratungsgesellschaft Mbh | Verfahren zur Herstellung einer reflexionsmindernden Beschichtung, reflexionsmindernde Schicht auf einem transparenten Substrat sowie Verwendung einer derartigen Schicht |
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| FR2759360B1 (fr) * | 1997-02-10 | 1999-03-05 | Commissariat Energie Atomique | Materiau polymerique inorganique a base d'oxyde de tantale notamment a indice de refraction eleve, mecaniquement resistant a l'abrasion, son procede de fabrication et materiau optique comprenant ce materiau |
| DE19823732A1 (de) * | 1998-05-27 | 1999-12-02 | Inst Neue Mat Gemein Gmbh | Verfahren zur Herstellung optischer Mehrschichtsysteme |
| US6542302B2 (en) * | 1999-12-01 | 2003-04-01 | Bushnell Corporation | Lens coating to reduce external fogging of scope lenses |
| JP2001234356A (ja) * | 2000-02-24 | 2001-08-31 | Seiko Epson Corp | 膜の製造方法及びこれにより得られる膜 |
| US6656410B2 (en) | 2001-06-22 | 2003-12-02 | 3D Systems, Inc. | Recoating system for using high viscosity build materials in solid freeform fabrication |
| JP4064130B2 (ja) * | 2002-03-15 | 2008-03-19 | 株式会社きもと | 透明ハードコートフィルム |
| US20050095420A1 (en) * | 2002-03-22 | 2005-05-05 | Institut Fur Neue Materialien Gem. Gmbh | Plastic film with a multilayered interference coating |
| US7081278B2 (en) | 2002-09-25 | 2006-07-25 | Asml Holdings N.V. | Method for protection of adhesives used to secure optics from ultra-violet light |
| KR100509253B1 (ko) * | 2002-12-27 | 2005-08-23 | 한국전자통신연구원 | 매체접근제어 처리장치의 송신제어기 및 그 방법 |
| JP2004287394A (ja) * | 2003-03-03 | 2004-10-14 | Hitachi Printing Solutions Ltd | 静電荷像現像用トナーおよびそれを用いた現像剤、画像形成装置、画像形成方法 |
| US20040175656A1 (en) * | 2003-03-06 | 2004-09-09 | Eric Baer | Photo-patternable nanomaterials |
| US20030157245A1 (en) * | 2003-04-15 | 2003-08-21 | Tatman Sheila May | Method for forming a mirror coating onto an optical article |
| US20050008789A1 (en) * | 2003-06-26 | 2005-01-13 | Rafac Robert J. | Method and apparatus for stabilizing optical dielectric coatings |
| US20060065989A1 (en) * | 2004-09-29 | 2006-03-30 | Thad Druffel | Lens forming systems and methods |
| WO2006134218A1 (en) * | 2005-06-15 | 2006-12-21 | Braggone Oy | Optical device structure |
| JP4275718B2 (ja) | 2006-01-16 | 2009-06-10 | パナソニック株式会社 | 半導体発光装置 |
| FR2908406B1 (fr) * | 2006-11-14 | 2012-08-24 | Saint Gobain | Couche poreuse, son procede de fabrication et ses applications. |
| US9773928B2 (en) * | 2010-09-10 | 2017-09-26 | Tesla, Inc. | Solar cell with electroplated metal grid |
| US20140272217A1 (en) * | 2013-03-18 | 2014-09-18 | Apple Inc. | Methods and structures for thermal management in an electronic device |
| US20150072171A1 (en) * | 2013-09-12 | 2015-03-12 | Sri Lanka Institute of Nanotechnology (Pvt) Ltd. | Hydrophobic surface treatment compositions comprising titanium precursors |
| CN108493341A (zh) * | 2018-03-30 | 2018-09-04 | 苏州大学 | 以五氧化二钽作为电子传输层的钙钛矿太阳能电池的制备 |
| US12281036B2 (en) * | 2019-07-12 | 2025-04-22 | Corning Incorporated | Methods for forming glass ceramic articles |
| CN110357446A (zh) * | 2019-07-15 | 2019-10-22 | 浙江美迪凯现代光电有限公司 | 一种新型贴合镀膜工艺 |
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| DE736411C (de) | 1939-05-28 | 1943-06-19 | Jenaer Glaswerk Schott & Gen | Verfahren zur AEnderung des Reflexionsvermoegens optischer Glaeser |
| DE937913C (de) | 1939-11-18 | 1956-01-19 | Leitz Ernst Gmbh | Verfahren zur Herstellung von UEberzugsschichten auf optisch wirksamen Oberflaechen,insbesondere auf Glas |
| US2432484A (en) | 1943-03-12 | 1947-12-09 | American Optical Corp | Reflection reducing coating having a gradually increasing index of refraction |
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| US4271210A (en) | 1979-10-25 | 1981-06-02 | Westinghouse Electric Corp. | Method of forming transmissive, porous metal oxide optical layer of a vitreous substrate |
| US4328260A (en) | 1981-01-23 | 1982-05-04 | Solarex Corporation | Method for applying antireflective coating on solar cell |
| US4966812A (en) | 1988-01-26 | 1990-10-30 | The United States Of America As Represented By The Department Of Energy | Sol-gel antireflective coating on plastics |
| US4929278A (en) | 1988-01-26 | 1990-05-29 | United States Department Of Energy | Sol-gel antireflective coating on plastics |
| CA2055151A1 (en) * | 1990-12-24 | 1992-06-25 | Mark F. Best | Dual glass sheet non-planar window having an anti-reflective coating and method for making the window |
| JPH0728999Y2 (ja) * | 1991-05-29 | 1995-07-05 | セントラル硝子株式会社 | 多色表示ヘッドアップディスプレイ用ガラス |
| FR2680583B1 (fr) * | 1991-08-22 | 1993-10-08 | Commissariat A Energie Atomique | Materiau presentant des proprietes antireflet, hydrophobes et de resistance a l'abrasion et procede de depot d'une couche antireflet, hydrophobe et resistante a l'abrasion sur un substrat. |
| DE69203056T2 (de) | 1991-09-20 | 1995-10-19 | Hitachi Ltd | Verfahren und Vorrichtung für Herstellung einer Antireflektionsbeschichtung einer Kathodenstrahlröhre. |
| FR2682486B1 (fr) | 1991-10-15 | 1993-11-12 | Commissariat A Energie Atomique | Miroir dielectrique interferentiel et procede de fabrication d'un tel miroir. |
| JP2707016B2 (ja) | 1992-02-27 | 1998-01-28 | 株式会社三社電機製作所 | 直流ｔｉｇアーク溶接機 |
| JP3105340B2 (ja) * | 1992-03-05 | 2000-10-30 | 日本写真印刷株式会社 | 複合金属酸化物皮膜を有する基板の製造法 |
| JPH05270864A (ja) * | 1992-03-25 | 1993-10-19 | Asahi Glass Co Ltd | 低屈折率膜、低反射膜、及び低反射帯電防止膜 |
| US5698266A (en) | 1993-04-05 | 1997-12-16 | Commissariat A L'energie Atomique | Process for the production of thin coatings having optical and abrasion resistance properties |
| JPH0762323A (ja) * | 1993-08-27 | 1995-03-07 | Asahi Glass Co Ltd | 着色膜形成用塗布液、着色膜およびその製造方法 |
| JPH06345488A (ja) * | 1993-06-04 | 1994-12-20 | Asahi Glass Co Ltd | 熱線反射ガラスの製造方法 |
| FR2707763B1 (fr) | 1993-07-16 | 1995-08-11 | Commissariat Energie Atomique | Matériau composite à indice de réfraction élevé, procédé de fabrication de ce matériau composite et matériau optiquement actif comprenant ce matériau composite. |
-
1997
- 1997-02-10 FR FR9701484A patent/FR2759464B1/fr not_active Expired - Fee Related
-
1998
- 1998-02-06 WO PCT/FR1998/000230 patent/WO1998034884A1/fr not_active Ceased
- 1998-02-06 CN CNB988023377A patent/CN1213958C/zh not_active Expired - Lifetime
- 1998-02-06 ES ES98906990T patent/ES2161518T3/es not_active Expired - Lifetime
- 1998-02-06 US US09/355,744 patent/US6180188B1/en not_active Expired - Lifetime
- 1998-02-06 CA CA002279908A patent/CA2279908C/en not_active Expired - Lifetime
- 1998-02-06 JP JP53388898A patent/JP4224646B2/ja not_active Expired - Fee Related
- 1998-02-06 BR BR9807194-7A patent/BR9807194A/pt not_active IP Right Cessation
- 1998-02-06 AU AU62988/98A patent/AU748748B2/en not_active Expired
- 1998-02-06 EP EP98906990A patent/EP0970025B1/fr not_active Expired - Lifetime
- 1998-02-06 DE DE69801217T patent/DE69801217T2/de not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005007825B4 (de) * | 2005-01-10 | 2015-09-17 | Interpane Entwicklungs-Und Beratungsgesellschaft Mbh | Verfahren zur Herstellung einer reflexionsmindernden Beschichtung, reflexionsmindernde Schicht auf einem transparenten Substrat sowie Verwendung einer derartigen Schicht |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1998034884A1 (fr) | 1998-08-13 |
| JP4224646B2 (ja) | 2009-02-18 |
| CN1247522A (zh) | 2000-03-15 |
| ES2161518T3 (es) | 2001-12-01 |
| DE69801217D1 (de) | 2001-08-30 |
| AU6298898A (en) | 1998-08-26 |
| BR9807194A (pt) | 2000-01-25 |
| JP2001511717A (ja) | 2001-08-14 |
| EP0970025B1 (fr) | 2001-07-25 |
| CA2279908A1 (en) | 1998-08-13 |
| CA2279908C (en) | 2007-04-17 |
| EP0970025A1 (fr) | 2000-01-12 |
| CN1213958C (zh) | 2005-08-10 |
| FR2759464B1 (fr) | 1999-03-05 |
| US6180188B1 (en) | 2001-01-30 |
| AU748748B2 (en) | 2002-06-13 |
| FR2759464A1 (fr) | 1998-08-14 |
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