DE69800280D1 - Abscheidung von Siliziumdioxyd mittels einer von Plasma aktivierten Verdampfungsmethode - Google Patents

Abscheidung von Siliziumdioxyd mittels einer von Plasma aktivierten Verdampfungsmethode

Info

Publication number
DE69800280D1
DE69800280D1 DE69800280T DE69800280T DE69800280D1 DE 69800280 D1 DE69800280 D1 DE 69800280D1 DE 69800280 T DE69800280 T DE 69800280T DE 69800280 T DE69800280 T DE 69800280T DE 69800280 D1 DE69800280 D1 DE 69800280D1
Authority
DE
Germany
Prior art keywords
deposition
plasma
silicon dioxide
evaporation method
activated evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69800280T
Other languages
English (en)
Other versions
DE69800280T2 (de
Inventor
Charles Dominic Iacovangelo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SABIC Global Technologies BV
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of DE69800280D1 publication Critical patent/DE69800280D1/de
Application granted granted Critical
Publication of DE69800280T2 publication Critical patent/DE69800280T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)
  • Silicon Compounds (AREA)
DE69800280T 1997-06-26 1998-06-26 Abscheidung von Siliziumdioxyd mittels einer von Plasma aktivierten Verdampfungsmethode Expired - Fee Related DE69800280T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5082097P 1997-06-26 1997-06-26
US5910998A 1998-04-13 1998-04-13

Publications (2)

Publication Number Publication Date
DE69800280D1 true DE69800280D1 (de) 2000-10-05
DE69800280T2 DE69800280T2 (de) 2001-04-05

Family

ID=26728725

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69800280T Expired - Fee Related DE69800280T2 (de) 1997-06-26 1998-06-26 Abscheidung von Siliziumdioxyd mittels einer von Plasma aktivierten Verdampfungsmethode

Country Status (8)

Country Link
US (1) US6379757B1 (de)
EP (1) EP0887433B1 (de)
JP (1) JPH1171676A (de)
KR (1) KR100571169B1 (de)
CN (1) CN1237200C (de)
CA (1) CA2241678C (de)
DE (1) DE69800280T2 (de)
ES (1) ES2149631T3 (de)

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US8409459B2 (en) * 2008-02-28 2013-04-02 Tokyo Electron Limited Hollow cathode device and method for using the device to control the uniformity of a plasma process
EP2251454B1 (de) 2009-05-13 2014-07-23 SiO2 Medical Products, Inc. Entgasungsverfahren zur Prüfung einer beschichteten Oberfläche
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
JP6095678B2 (ja) 2011-11-11 2017-03-15 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 薬剤パッケージ用の不動態化、ｐＨ保護又は滑性皮膜、被覆プロセス及び装置
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
EP2846755A1 (de) 2012-05-09 2015-03-18 SiO2 Medical Products, Inc. Saccharidschutzschicht für eine arzneimittelverpackung
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
WO2014078666A1 (en) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
CA2892294C (en) 2012-11-30 2021-07-27 Sio2 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US20160015898A1 (en) 2013-03-01 2016-01-21 Sio2 Medical Products, Inc. Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus
EP4234753A3 (de) 2013-03-11 2023-11-01 SiO2 Medical Products, Inc. Beschichtete verpackung
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
CN108138316A (zh) 2015-08-18 2018-06-08 Sio2医药产品公司 具有低氧气传输速率的药物和其他包装
DE102015122024A1 (de) * 2015-12-16 2017-06-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen eines Schichtverbundes bestehend aus einer Kunststofffolie und einer darauf abgeschiedenen Schicht
DE102017003042B3 (de) * 2017-03-29 2018-08-16 Rodenstock Gmbh Gradienten-Hartschicht mit sich änderndem E-Modul
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Also Published As

Publication number Publication date
JPH1171676A (ja) 1999-03-16
EP0887433A1 (de) 1998-12-30
EP0887433B1 (de) 2000-08-30
DE69800280T2 (de) 2001-04-05
ES2149631T3 (es) 2000-11-01
CA2241678C (en) 2007-08-28
CN1237200C (zh) 2006-01-18
US6379757B1 (en) 2002-04-30
CN1210899A (zh) 1999-03-17
KR19990007366A (ko) 1999-01-25
CA2241678A1 (en) 1998-12-26
KR100571169B1 (ko) 2006-06-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SABIC INNOVATIVE PLASTICS IP B.V., BERGEN OP Z, NL

8328 Change in the person/name/address of the agent

Representative=s name: PATENT- UND RECHTSANWAELTE BARDEHLE, PAGENBERG, DO

8339 Ceased/non-payment of the annual fee