DE69739349D1 - Gas für trocknerätzung - Google Patents
Gas für trocknerätzungInfo
- Publication number
- DE69739349D1 DE69739349D1 DE69739349T DE69739349T DE69739349D1 DE 69739349 D1 DE69739349 D1 DE 69739349D1 DE 69739349 T DE69739349 T DE 69739349T DE 69739349 T DE69739349 T DE 69739349T DE 69739349 D1 DE69739349 D1 DE 69739349D1
- Authority
- DE
- Germany
- Prior art keywords
- drying
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8308742A JP2972786B2 (ja) | 1996-11-05 | 1996-11-05 | ドライエッチング用ガス |
PCT/JP1997/004028 WO1998020526A1 (fr) | 1996-11-05 | 1997-11-05 | Gaz d'attaque chimique a sec |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69739349D1 true DE69739349D1 (de) | 2009-05-20 |
Family
ID=17984747
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69739349T Expired - Lifetime DE69739349D1 (de) | 1996-11-05 | 1997-11-05 | Gas für trocknerätzung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6514425B1 (de) |
EP (1) | EP1014433B1 (de) |
JP (1) | JP2972786B2 (de) |
KR (1) | KR100563796B1 (de) |
DE (1) | DE69739349D1 (de) |
WO (1) | WO1998020526A1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4112198B2 (ja) * | 2000-09-11 | 2008-07-02 | 財団法人地球環境産業技術研究機構 | クリーニングガス及びエッチングガス、並びにチャンバークリーニング方法及びエッチング方法 |
KR100451656B1 (ko) * | 2000-12-02 | 2004-10-08 | 정성도 | 식초콩의 제조방법 |
KR20020045898A (ko) * | 2000-12-11 | 2002-06-20 | 박종섭 | 불화 에테르 계 식각가스를 이용한 식각방법 |
US8691372B2 (en) * | 2007-02-15 | 2014-04-08 | E I Du Pont De Nemours And Company | Articles comprising high melt flow ionomeric compositions |
US20080196760A1 (en) | 2007-02-15 | 2008-08-21 | Richard Allen Hayes | Articles such as safety laminates and solar cell modules containing high melt flow acid copolymer compositions |
EP2286465B1 (de) | 2008-06-02 | 2019-08-14 | E. I. du Pont de Nemours and Company | Solarzellenmodul mit einer einkapselungsschicht von geringer opazität |
US20100154867A1 (en) * | 2008-12-19 | 2010-06-24 | E. I. Du Pont De Nemours And Company | Mechanically reliable solar cell modules |
CN102741987B (zh) | 2010-02-01 | 2016-03-02 | 中央硝子株式会社 | 干蚀刻剂以及使用其的干蚀刻方法 |
JP5434970B2 (ja) | 2010-07-12 | 2014-03-05 | セントラル硝子株式会社 | ドライエッチング剤 |
JP2013030531A (ja) | 2011-07-27 | 2013-02-07 | Central Glass Co Ltd | ドライエッチング剤 |
TWI670768B (zh) * | 2014-10-30 | 2019-09-01 | 日商日本瑞翁股份有限公司 | 電漿蝕刻方法 |
JP6788176B2 (ja) * | 2015-04-06 | 2020-11-25 | セントラル硝子株式会社 | ドライエッチングガスおよびドライエッチング方法 |
CN108780749B (zh) * | 2016-03-16 | 2022-10-14 | 日本瑞翁株式会社 | 等离子体蚀刻方法 |
WO2018159368A1 (ja) | 2017-02-28 | 2018-09-07 | セントラル硝子株式会社 | ドライエッチング剤、ドライエッチング方法及び半導体装置の製造方法 |
US10304692B1 (en) * | 2017-11-28 | 2019-05-28 | International Business Machines Corporation | Method of forming field effect transistor (FET) circuits, and forming integrated circuit (IC) chips with the FET circuits |
KR102104240B1 (ko) * | 2018-08-13 | 2020-04-24 | 아주대학교 산학협력단 | 플라즈마 식각 방법 |
KR102327416B1 (ko) * | 2019-08-20 | 2021-11-16 | 아주대학교산학협력단 | 플라즈마 식각 방법 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3000954C2 (de) * | 1980-01-12 | 1982-04-22 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Verfahren zum Ätzen von Glasoberflächen, insbesondere bei der Glasfaser-Lichtleiter-Herstellung |
JPS6077429A (ja) * | 1983-10-04 | 1985-05-02 | Asahi Glass Co Ltd | ドライエツチング方法 |
US5213621A (en) | 1991-10-11 | 1993-05-25 | Air Products And Chemicals, Inc. | Halogenated carboxylic acid cleaning agents for fabricating integrated circuits and a process for using the same |
JP3256707B2 (ja) * | 1992-12-28 | 2002-02-12 | 川崎マイクロエレクトロニクス株式会社 | 銅薄膜のドライエッチング方法 |
US5368687A (en) | 1993-03-15 | 1994-11-29 | Micron Technology, Inc. | Semiconductor processing method of etching insulating inorganic metal oxide materials and method of cleaning metals from the surface of semiconductor wafers |
JP3329038B2 (ja) * | 1993-12-13 | 2002-09-30 | ソニー株式会社 | ドライエッチング方法 |
JP2904723B2 (ja) * | 1995-04-21 | 1999-06-14 | セントラル硝子株式会社 | クリーニングガス |
IL119598A0 (en) | 1995-11-17 | 1997-02-18 | Air Prod & Chem | Plasma etch with trifluoroacetic acid or its derivatives |
US5626775A (en) * | 1996-05-13 | 1997-05-06 | Air Products And Chemicals, Inc. | Plasma etch with trifluoroacetic acid and derivatives |
US6149828A (en) * | 1997-05-05 | 2000-11-21 | Micron Technology, Inc. | Supercritical etching compositions and method of using same |
US6159859A (en) * | 1998-06-09 | 2000-12-12 | Air Products And Chemicals, Inc. | Gas phase removal of SiO2 /metals from silicon |
-
1996
- 1996-11-05 JP JP8308742A patent/JP2972786B2/ja not_active Expired - Lifetime
-
1997
- 1997-11-05 EP EP97911455A patent/EP1014433B1/de not_active Expired - Lifetime
- 1997-11-05 US US09/297,320 patent/US6514425B1/en not_active Expired - Lifetime
- 1997-11-05 DE DE69739349T patent/DE69739349D1/de not_active Expired - Lifetime
- 1997-11-05 KR KR1019997003982A patent/KR100563796B1/ko not_active IP Right Cessation
- 1997-11-05 WO PCT/JP1997/004028 patent/WO1998020526A1/ja active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2972786B2 (ja) | 1999-11-08 |
KR20000053068A (ko) | 2000-08-25 |
JPH10140151A (ja) | 1998-05-26 |
EP1014433A4 (de) | 2000-07-12 |
KR100563796B1 (ko) | 2006-03-28 |
WO1998020526A1 (fr) | 1998-05-14 |
EP1014433B1 (de) | 2009-04-08 |
EP1014433A1 (de) | 2000-06-28 |
US6514425B1 (en) | 2003-02-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |