DE69734113D1 - Verfahren zur herstellung einer organischen elektrolumineszenten vorrichtung - Google Patents

Verfahren zur herstellung einer organischen elektrolumineszenten vorrichtung

Info

Publication number
DE69734113D1
DE69734113D1 DE69734113T DE69734113T DE69734113D1 DE 69734113 D1 DE69734113 D1 DE 69734113D1 DE 69734113 T DE69734113 T DE 69734113T DE 69734113 T DE69734113 T DE 69734113T DE 69734113 D1 DE69734113 D1 DE 69734113D1
Authority
DE
Germany
Prior art keywords
producing
organic electroluminescent
electroluminescent device
organic
electroluminescent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69734113T
Other languages
English (en)
Other versions
DE69734113T2 (de
Inventor
Yoshio Himeshima
Shigeo Fujimori
Akira Kohama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Publication of DE69734113D1 publication Critical patent/DE69734113D1/de
Application granted granted Critical
Publication of DE69734113T2 publication Critical patent/DE69734113T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
DE69734113T 1997-10-15 1997-10-15 Verfahren zur herstellung einer organischen elektrolumineszenten vorrichtung Expired - Lifetime DE69734113T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1997/003721 WO1999020080A1 (fr) 1997-10-15 1997-10-15 Procede de fabrication d'un dispositif electroluminescent organique

Publications (2)

Publication Number Publication Date
DE69734113D1 true DE69734113D1 (de) 2005-10-06
DE69734113T2 DE69734113T2 (de) 2006-07-13

Family

ID=14181324

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69734113T Expired - Lifetime DE69734113T2 (de) 1997-10-15 1997-10-15 Verfahren zur herstellung einer organischen elektrolumineszenten vorrichtung

Country Status (4)

Country Link
EP (1) EP0955791B1 (de)
KR (2) KR100517851B1 (de)
DE (1) DE69734113T2 (de)
WO (1) WO1999020080A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3206646B2 (ja) 1998-01-22 2001-09-10 日本電気株式会社 多色発光有機ｅｌパネルおよびその製造方法
EP1111967A1 (de) * 1999-04-30 2001-06-27 Idemitsu Kosan Co., Ltd. Organische elektrolumineszente vorrichtung und verfahren zu dessen herstellung
US6469439B2 (en) * 1999-06-15 2002-10-22 Toray Industries, Inc. Process for producing an organic electroluminescent device
TW490714B (en) 1999-12-27 2002-06-11 Semiconductor Energy Lab Film formation apparatus and method for forming a film
JP2001296819A (ja) * 2000-04-17 2001-10-26 Nec Corp 有機薄膜ｅｌデバイス及びその製造方法
US20020011205A1 (en) 2000-05-02 2002-01-31 Shunpei Yamazaki Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
US20030129299A1 (en) 2000-11-16 2003-07-10 Swanson Leland S. Selective deposition of emissive layer in electroluminescent displays
JP2002289347A (ja) * 2001-03-27 2002-10-04 Sanyo Electric Co Ltd エレクトロルミネッセンス表示装置、その製造方法、被着マスク及びその製造方法
JP4078813B2 (ja) * 2001-06-12 2008-04-23 ソニー株式会社 成膜装置および成膜方法
JP4683772B2 (ja) 2001-06-15 2011-05-18 株式会社半導体エネルギー研究所 発光装置の作製方法
KR20030002947A (ko) * 2001-07-03 2003-01-09 엘지전자 주식회사 풀칼라 유기 ｅｌ 표시소자 및 제조방법
DE10133684A1 (de) * 2001-07-11 2003-02-13 Osram Opto Semiconductors Gmbh Organisches, farbiges, elektrolumineszierendes Display und dessen Herstellung
KR100446467B1 (ko) * 2001-09-22 2004-08-30 네오뷰코오롱 주식회사 보조 마스크를 사용한 평판 표시 소자의 제조 방법
US6589382B2 (en) * 2001-11-26 2003-07-08 Eastman Kodak Company Aligning mask segments to provide a stitched mask for producing OLED devices
SG113448A1 (en) 2002-02-25 2005-08-29 Semiconductor Energy Lab Fabrication system and a fabrication method of a light emitting device
KR100469252B1 (ko) 2002-04-12 2005-02-02 엘지전자 주식회사 쉐도우 마스크 및 그를 이용한 풀칼라 유기 ｅｌ 표시소자
US7309269B2 (en) 2002-04-15 2007-12-18 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
US7045955B2 (en) 2002-08-09 2006-05-16 Semiconductor Energy Laboratory Co., Ltd. Electroluminescence element and a light emitting device using the same
US20040123804A1 (en) 2002-09-20 2004-07-01 Semiconductor Energy Laboratory Co., Ltd. Fabrication system and manufacturing method of light emitting device
EP1594347B1 (de) * 2003-02-13 2010-12-08 FUJIFILM Corporation Anzeigevorrichtung und herstellungsverfahren dafür
KR100889764B1 (ko) * 2003-10-04 2009-03-20 삼성모바일디스플레이주식회사 유기 전자 발광 소자의 박막 증착용 마스크 프레임 조립체및, 그것을 이용한 박막 증착 방법
KR100863902B1 (ko) * 2003-12-02 2008-10-16 삼성에스디아이 주식회사 마스크 프레임 조합체, 이를 이용한 기판 및 마스크 정렬방법
KR100713048B1 (ko) * 2005-03-24 2007-05-02 후지필름 가부시키가이샤 표시 장치 및 그 제조 방법
KR101142980B1 (ko) * 2005-07-04 2012-05-15 엘지디스플레이 주식회사 유기 전계발광 표시소자용 모기판 및 이를 이용한 유기전계발광 표시소자의 제조방법
JP2016540075A (ja) 2013-11-27 2016-12-22 ビーエイエスエフ・ソシエタス・エウロパエアＢａｓｆ Ｓｅ 洗濯工程における汚れ遊離剤としてのランダムコポリマー
JP5651763B2 (ja) * 2013-11-28 2015-01-14 株式会社半導体エネルギー研究所 表示装置
CN109182967B (zh) * 2018-10-18 2020-08-11 京东方科技集团股份有限公司 掩模板及蒸镀装置、基板的制备方法
WO2020208052A1 (en) 2019-04-12 2020-10-15 Basf Se Method for providing laundry detergent with control and a laundry apparatus and a laundry detergent kit

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63276035A (ja) * 1987-05-08 1988-11-14 Nikon Corp Ｅｃ素子用電極パタ−ンの製造方法
JPH06124781A (ja) * 1992-10-08 1994-05-06 Futaba Corp 蛍光体層の形成方法
JP3208638B2 (ja) * 1995-01-31 2001-09-17 双葉電子工業株式会社 有機エレクトロルミネセント表示装置およびその製造方法

Also Published As

Publication number Publication date
KR20000069457A (ko) 2000-11-25
EP0955791A4 (de) 2000-02-23
EP0955791B1 (de) 2005-08-31
DE69734113T2 (de) 2006-07-13
KR100517851B1 (ko) 2005-10-04
KR20020073163A (ko) 2002-09-19
KR100517850B1 (ko) 2005-09-30
WO1999020080A1 (fr) 1999-04-22
EP0955791A1 (de) 1999-11-10

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Legal Events

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8364 No opposition during term of opposition