DE69734025D1 - Beheizte Druckwandler-Anordnung - Google Patents

Beheizte Druckwandler-Anordnung

Info

Publication number
DE69734025D1
DE69734025D1 DE69734025T DE69734025T DE69734025D1 DE 69734025 D1 DE69734025 D1 DE 69734025D1 DE 69734025 T DE69734025 T DE 69734025T DE 69734025 T DE69734025 T DE 69734025T DE 69734025 D1 DE69734025 D1 DE 69734025D1
Authority
DE
Germany
Prior art keywords
pressure transducer
transducer assembly
heated pressure
heated
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69734025T
Other languages
English (en)
Other versions
DE69734025T2 (de
Inventor
Robert C Pandorf
Archibald J Demone
Frank W Thomas
Steven D Blankenship
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE69734025D1 publication Critical patent/DE69734025D1/de
Application granted granted Critical
Publication of DE69734025T2 publication Critical patent/DE69734025T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Control Of Resistance Heating (AREA)
DE69734025T 1996-01-16 1997-01-13 Beheizte Druckwandler-Anordnung Expired - Lifetime DE69734025T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/585,535 US5625152A (en) 1996-01-16 1996-01-16 Heated pressure transducer assembly

Publications (2)

Publication Number Publication Date
DE69734025D1 true DE69734025D1 (de) 2005-09-22
DE69734025T2 DE69734025T2 (de) 2006-06-14

Family

ID=24341867

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69720874T Expired - Lifetime DE69720874T2 (de) 1996-01-16 1997-01-13 Beheizte druckwandleranordnung
DE69734025T Expired - Lifetime DE69734025T2 (de) 1996-01-16 1997-01-13 Beheizte Druckwandler-Anordnung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69720874T Expired - Lifetime DE69720874T2 (de) 1996-01-16 1997-01-13 Beheizte druckwandleranordnung

Country Status (7)

Country Link
US (1) US5625152A (de)
EP (2) EP1316785B1 (de)
JP (1) JP3100986B2 (de)
KR (1) KR19980702989A (de)
CN (2) CN1241002C (de)
DE (2) DE69720874T2 (de)
WO (1) WO1997026518A1 (de)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5808206A (en) * 1996-01-16 1998-09-15 Mks Instruments, Inc. Heated pressure transducer assembly
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6185992B1 (en) * 1999-07-15 2001-02-13 Veeco Instruments Inc. Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
US6772640B1 (en) * 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US6612176B2 (en) * 2000-12-28 2003-09-02 Mks Instruments, Inc. Pressure transducer assembly with thermal shield
US6588280B1 (en) * 2002-04-22 2003-07-08 Mks Instruments, Inc. Pressure transducer with compensation for thermal transients
US6701790B2 (en) * 2002-06-13 2004-03-09 Mykrolis Corporation Temperature regulator for use with a pressure sensing device
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
DE10349008A1 (de) * 2003-10-17 2005-05-25 Gneuß Kunststofftechnik GmbH Sensor
US7628860B2 (en) * 2004-04-12 2009-12-08 Mks Instruments, Inc. Pulsed mass flow delivery system and method
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7980481B2 (en) * 2004-12-08 2011-07-19 Rosemount Inc. Thermally controlled process interface
US7000479B1 (en) 2005-05-02 2006-02-21 Mks Instruments, Inc. Heated pressure transducer
US7124640B1 (en) 2005-07-13 2006-10-24 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
EP1917510B1 (de) * 2005-08-12 2012-12-05 Inficon GmbH Optischer interferometrische drucksensor
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
US8584416B2 (en) * 2005-12-02 2013-11-19 Alabama Metal Industries Corporation Movement control screed
JP2008047766A (ja) * 2006-08-18 2008-02-28 Npc Inc ラミネート装置
JP2008047765A (ja) * 2006-08-18 2008-02-28 Npc Inc ラミネート装置
US7784350B2 (en) * 2007-02-07 2010-08-31 Halliburton Energy Services, Inc. Downhole transducer with adjacent heater
DE112008001459A5 (de) * 2007-06-19 2010-05-12 Inficon Gmbh Vakuummesszellenanordnung mit Heizung
US7837827B2 (en) 2007-06-28 2010-11-23 Lam Research Corporation Edge ring arrangements for substrate processing
US7497123B1 (en) * 2007-12-18 2009-03-03 Rosemount Inc. Direct mount for pressure transmitter with thermal management
JP2009243888A (ja) * 2008-03-28 2009-10-22 Yamatake Corp 圧力センサ
DE102008049143B4 (de) * 2008-09-26 2012-08-16 Intelligente Sensorsysteme Dresden Gmbh Drucksensor und Herstellungsverfahren
US8371160B2 (en) * 2009-12-16 2013-02-12 Meggitt (San Juan Capistrano), Inc. Weatherized direct-mount absolute pressure sensor
CN102812342B (zh) 2010-02-02 2014-11-26 Mks仪器公司 电容式压力传感器
WO2012122361A2 (en) * 2011-03-10 2012-09-13 Waters Technologies Corporation System and method of cooling a pump head used in chromatography
JP5576331B2 (ja) * 2011-03-31 2014-08-20 アズビル株式会社 圧力センサ装置
TWI568999B (zh) 2011-09-29 2017-02-01 Ｍｋｓ公司 具有改良的電極結構之電容式壓力感測器
TWI532982B (zh) 2011-10-11 2016-05-11 Ｍｋｓ公司 壓力感測器
JP6063240B2 (ja) * 2012-12-13 2017-01-18 サーパス工業株式会社 アンプ内蔵型圧力センサ
GB2524678B (en) * 2013-04-30 2016-04-20 Kidde Tech Inc Method of manufacturing a pressure sensor
US9097737B2 (en) 2013-11-25 2015-08-04 Oxford Instruments Asylum Research, Inc. Modular atomic force microscope with environmental controls
US10996124B2 (en) * 2016-12-28 2021-05-04 Tubitak High accuracy pressure transducer with improved temperature stability
JP6748006B2 (ja) * 2017-03-09 2020-08-26 アズビル株式会社 圧力センサ
JP6365997B1 (ja) * 2017-07-18 2018-08-01 大学共同利用機関法人 高エネルギー加速器研究機構 超伝導加速装置とその製造方法
DE102017119358A1 (de) * 2017-08-24 2019-02-28 Endress+Hauser SE+Co. KG Modulares Feldgerät
DE102017122605A1 (de) * 2017-09-28 2019-03-28 Tdk Electronics Ag Drucksensor auf keramischen Substrat
DE102017122631A1 (de) * 2017-09-28 2019-03-28 Tdk Electronics Ag Drucksensor auf keramischen Druckstutzen
JP7285621B2 (ja) * 2017-11-29 2023-06-02 株式会社堀場エステック 真空計
US10782200B2 (en) * 2018-06-27 2020-09-22 Mks Instruments, Inc. Apparatus and method for thermal insulation of high-temperature pressure sensors
JP7140925B2 (ja) * 2019-02-26 2022-09-21 スミトモ （エスエイチアイ） クライオジェニックス オブ アメリカ インコーポレイテッド 静電容量型隔膜真空計内の電子機器及び高温度センサ間の熱障壁
US10825560B1 (en) 2020-01-03 2020-11-03 Berenson Consulting Group Inc. Infusion monitoring device and patient compliance system
JP7418248B2 (ja) * 2020-03-05 2024-01-19 株式会社堀場エステック 真空計
JP7365944B2 (ja) * 2020-03-11 2023-10-20 東京エレクトロン株式会社 温度センサと温度測定装置及び温度測定方法
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
CN112284608B (zh) * 2020-09-15 2022-08-02 南京高华科技股份有限公司 电容式微机械气压传感器及其制备方法
CN112378553B (zh) * 2020-11-06 2023-01-17 北京自动化控制设备研究所 一种在线温控标定的硅压阻压力传感器及其温度标定方法
AT524398B1 (de) * 2020-11-11 2022-07-15 Avl List Gmbh Druckmessvorrichtung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3368407A (en) * 1965-05-11 1968-02-13 Georgia Tech Res Inst Pressure gauge
US4084439A (en) * 1975-10-01 1978-04-18 King Radio Corporation Pressure transducer with capacitor pick-up means
US4176557A (en) * 1976-06-07 1979-12-04 Bunker Ramo Corporation Pressure sensor
US4567773A (en) * 1984-01-05 1986-02-04 Energy Utilization Laboratories, Inc. Pressure transducer system
US4738276A (en) * 1986-06-06 1988-04-19 Adams Donald L Modular differential pressure transmitter/manifold for a fluid conveying pipeline
US4783989A (en) * 1987-03-05 1988-11-15 Atlantic Richfield Company Vapor pressure measurement apparatus and method
US5172586A (en) * 1990-10-26 1992-12-22 Atlantic Richfield Company System and method for determining vapor pressure of liquid compositions
US5271277A (en) * 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
US5423479A (en) * 1993-03-29 1995-06-13 Galen E. Nichols Thermoelectric actuator for temperature control systems
US5676205A (en) * 1993-10-29 1997-10-14 Applied Materials, Inc. Quasi-infinite heat source/sink

Also Published As

Publication number Publication date
CN1515886A (zh) 2004-07-28
JP3100986B2 (ja) 2000-10-23
CN1141563C (zh) 2004-03-10
WO1997026518A1 (en) 1997-07-24
EP0820580A4 (de) 2000-01-05
EP0820580A1 (de) 1998-01-28
DE69720874T2 (de) 2004-01-22
DE69734025T2 (de) 2006-06-14
US5625152A (en) 1997-04-29
CN1241002C (zh) 2006-02-08
CN1178005A (zh) 1998-04-01
EP1316785A3 (de) 2003-11-12
KR19980702989A (ko) 1998-09-05
EP1316785A2 (de) 2003-06-04
DE69720874D1 (de) 2003-05-22
EP0820580B1 (de) 2003-04-16
EP1316785B1 (de) 2005-08-17
JPH11502627A (ja) 1999-03-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: EFFERT UND KOLLEGEN, 12487 BERLIN

8328 Change in the person/name/address of the agent

Representative=s name: WABLAT-LANGE-KARTHAUS, 14129 BERLIN