DE112008001459A5 - Vakuummesszellenanordnung mit Heizung - Google Patents

Vakuummesszellenanordnung mit Heizung Download PDF

Info

Publication number
DE112008001459A5
DE112008001459A5 DE112008001459T DE112008001459T DE112008001459A5 DE 112008001459 A5 DE112008001459 A5 DE 112008001459A5 DE 112008001459 T DE112008001459 T DE 112008001459T DE 112008001459 T DE112008001459 T DE 112008001459T DE 112008001459 A5 DE112008001459 A5 DE 112008001459A5
Authority
DE
Germany
Prior art keywords
heating
measuring cell
cell arrangement
vacuum measuring
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112008001459T
Other languages
English (en)
Inventor
Hansjakob Hanselmann
Claudio Christoffel
Stanislav Duris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon Holding AG
Original Assignee
Inficon GmbH Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Switzerland filed Critical Inficon GmbH Switzerland
Publication of DE112008001459A5 publication Critical patent/DE112008001459A5/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DE112008001459T 2007-06-19 2008-06-09 Vakuummesszellenanordnung mit Heizung Withdrawn DE112008001459A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH985/07 2007-06-19
CH9852007 2007-06-19
PCT/CH2008/000257 WO2008154760A1 (de) 2007-06-19 2008-06-09 Vakuummesszellenanordnung mit heizung

Publications (1)

Publication Number Publication Date
DE112008001459A5 true DE112008001459A5 (de) 2010-05-12

Family

ID=38324007

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112008001459T Withdrawn DE112008001459A5 (de) 2007-06-19 2008-06-09 Vakuummesszellenanordnung mit Heizung

Country Status (4)

Country Link
US (1) US7946178B2 (de)
DE (1) DE112008001459A5 (de)
TW (1) TW200912269A (de)
WO (1) WO2008154760A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2088413A1 (de) * 2008-02-08 2009-08-12 Paul Scherrer Institut Sensor und Verfahren zur Druckbestimmung in einer Flüssigkeit
US20100233353A1 (en) * 2009-03-16 2010-09-16 Applied Materials, Inc. Evaporator, coating installation, and method for use thereof
US8201456B2 (en) * 2009-11-02 2012-06-19 Vega Grieshaber Kg Measuring cell and a method of use therefor
DE202013100793U1 (de) * 2013-02-22 2013-03-05 Bürkert Werke GmbH Sensorgehäuse und Sensoreinheit
US9927315B2 (en) 2013-07-05 2018-03-27 Inficon Gmbh Sensor unit including a measuring cell, a housing and at least one access channel
TR201821326T4 (tr) * 2014-10-03 2019-01-21 Tlv Co Ltd Sensör cihazı.
US10996124B2 (en) * 2016-12-28 2021-05-04 Tubitak High accuracy pressure transducer with improved temperature stability
JP6748006B2 (ja) * 2017-03-09 2020-08-26 アズビル株式会社 圧力センサ
JP6843708B2 (ja) * 2017-06-28 2021-03-17 アズビル株式会社 静電容量型圧力センサ
KR101886732B1 (ko) 2017-08-03 2018-08-08 박경은 다중접합 압력 트랜스듀서 조립체
DE102017122605A1 (de) * 2017-09-28 2019-03-28 Tdk Electronics Ag Drucksensor auf keramischen Substrat
DE102017122631A1 (de) * 2017-09-28 2019-03-28 Tdk Electronics Ag Drucksensor auf keramischen Druckstutzen
DE102017122607A1 (de) 2017-09-28 2019-03-28 Tdk Electronics Ag Mediengetrennter Drucktransmitter
US10782200B2 (en) * 2018-06-27 2020-09-22 Mks Instruments, Inc. Apparatus and method for thermal insulation of high-temperature pressure sensors
EP3931541A4 (de) * 2019-02-26 2022-11-23 Sumitomo (Shi) Cryogenics of America, Inc. Thermische barriere zwischen hochtemperatursensor und elektronik in einem kapazitätsmembranmessgerät
JP7444628B2 (ja) * 2020-02-19 2024-03-06 アズビル株式会社 圧力センサ
JP7418248B2 (ja) * 2020-03-05 2024-01-19 株式会社堀場エステック 真空計
DE102021110919A1 (de) 2021-04-28 2022-11-03 Heinz Plöchinger Sensor-Anordnung mit Schutz- und Heizfunktion
CN114486062B (zh) * 2022-03-31 2022-07-15 季华实验室 一种消除薄膜应力的电容薄膜真空计

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5625152A (en) * 1996-01-16 1997-04-29 Mks Instruments, Inc. Heated pressure transducer assembly
WO1999034184A1 (de) * 1997-12-23 1999-07-08 Unaxis Trading Ag Kapazitive vakuummesszelle
JP4334139B2 (ja) * 1997-12-23 2009-09-30 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 容量式の真空測定セルのためのダイヤフラム
US6612176B2 (en) * 2000-12-28 2003-09-02 Mks Instruments, Inc. Pressure transducer assembly with thermal shield
US7124640B1 (en) * 2005-07-13 2006-10-24 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
WO2007019714A1 (de) * 2005-08-12 2007-02-22 Inficon Gmbh Optischer interferometrische drucksensor
CH697766B1 (de) * 2005-11-25 2009-02-13 Inficon Gmbh Blendenanordnung für eine Vakuummesszelle.
JP4989659B2 (ja) * 2006-01-18 2012-08-01 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング ダイヤフラムを備える真空測定セル
WO2008058406A1 (de) * 2006-11-13 2008-05-22 Inficon Gmbh Vakuummembranmesszelle und verfahren zur herstellung einer derartigen messzelle
DE112008000346B4 (de) * 2007-04-07 2022-03-17 Inficon Holding Ag Verfahren zur Herstellung einer Vakuummembranmesszelle
JP5546460B2 (ja) * 2007-12-20 2014-07-09 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 隔膜圧力測定セルの構造
US7707891B2 (en) * 2008-06-27 2010-05-04 Inficon Gmbh Optical interferometric pressure sensor

Also Published As

Publication number Publication date
WO2008154760A1 (de) 2008-12-24
TW200912269A (en) 2009-03-16
US7946178B2 (en) 2011-05-24
US20100186516A1 (en) 2010-07-29

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R120 Application withdrawn or ip right abandoned