DE69730953D1 - Diffraktionsführung für schrägeinfallinterferometer - Google Patents
Diffraktionsführung für schrägeinfallinterferometerInfo
- Publication number
- DE69730953D1 DE69730953D1 DE69730953T DE69730953T DE69730953D1 DE 69730953 D1 DE69730953 D1 DE 69730953D1 DE 69730953 T DE69730953 T DE 69730953T DE 69730953 T DE69730953 T DE 69730953T DE 69730953 D1 DE69730953 D1 DE 69730953D1
- Authority
- DE
- Germany
- Prior art keywords
- test
- interferometer
- beams
- differential guide
- diffractive optic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
- G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02059—Reducing effect of parasitic reflections, e.g. cyclic errors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/30—Grating as beam-splitter
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US631071 | 1996-04-12 | ||
US08/631,071 US5719676A (en) | 1996-04-12 | 1996-04-12 | Diffraction management for grazing incidence interferometer |
PCT/US1997/005658 WO1997039307A1 (en) | 1996-04-12 | 1997-04-07 | Diffraction management for grazing incidence interferometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69730953D1 true DE69730953D1 (de) | 2004-11-04 |
DE69730953T2 DE69730953T2 (de) | 2006-02-23 |
Family
ID=24529659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69730953T Expired - Fee Related DE69730953T2 (de) | 1996-04-12 | 1997-04-07 | Diffraktionsführung für schrägeinfallinterferometer |
Country Status (6)
Country | Link |
---|---|
US (1) | US5719676A (de) |
EP (1) | EP0892909B1 (de) |
JP (1) | JP2997551B2 (de) |
AT (1) | ATE278177T1 (de) |
DE (1) | DE69730953T2 (de) |
WO (1) | WO1997039307A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5889591A (en) * | 1996-10-17 | 1999-03-30 | Tropel Corporation | Interferometric measurement of toric surfaces at grazing incidence |
JP4200545B2 (ja) * | 1998-06-08 | 2008-12-24 | ソニー株式会社 | 固体撮像素子およびその駆動方法、並びにカメラシステム |
US7057741B1 (en) | 1999-06-18 | 2006-06-06 | Kla-Tencor Corporation | Reduced coherence symmetric grazing incidence differential interferometer |
JP4588361B2 (ja) * | 2004-05-19 | 2010-12-01 | 日本電産トーソク株式会社 | 外側面検査装置 |
US9651358B2 (en) * | 2013-08-19 | 2017-05-16 | Corning Incorporated | Grazing-incidence interferometer with dual-side measurement capability using a common image plane |
JP6341883B2 (ja) * | 2014-06-27 | 2018-06-13 | キヤノン株式会社 | 位置検出装置、位置検出方法、インプリント装置及び物品の製造方法 |
JP6839916B2 (ja) * | 2015-10-30 | 2021-03-10 | リコーエレメックス株式会社 | 内面検査システムおよびその光学系 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE106769C (de) * | ||||
DE233644C (de) * | ||||
DE215388C (de) * | ||||
DD106769A3 (de) * | 1972-01-04 | 1974-07-05 | Verfahren und anordnung zur pr]fung beliebiger mantelfl[chen rotationssymmetrischer festk\rper mittels synthetischer hologramme | |
US3907438A (en) * | 1973-06-22 | 1975-09-23 | Gen Electric | Contour measuring system for cylinders |
US4436424A (en) * | 1981-07-27 | 1984-03-13 | Gca Corporation | Interferometer using transverse deviation of test beam |
US4391526A (en) * | 1981-08-24 | 1983-07-05 | Itek Corporation | Interferometric surface contour measuring arrangement |
US4606640A (en) * | 1984-04-02 | 1986-08-19 | The Perkin-Elmer Corporation | Method and apparatus for optically testing cylindrical surfaces |
DE3471368D1 (en) * | 1984-10-31 | 1988-06-23 | Ibm Deutschland | Interferometric thickness analyzer and measuring method |
US4678333A (en) * | 1985-05-10 | 1987-07-07 | Nicolet Instrument Corporation | Double-pass optical interferometer |
JPS62177421A (ja) * | 1986-01-31 | 1987-08-04 | Fuji Photo Optical Co Ltd | 斜入射干渉計装置 |
US4791584A (en) * | 1986-10-15 | 1988-12-13 | Eastman Kodak Company | Sub-nyquist interferometry |
US4898470A (en) * | 1988-07-12 | 1990-02-06 | Eastman Kodak Company | Apparatus and method for testing circular cylindrical or conical surfaces |
US5041726A (en) * | 1990-06-11 | 1991-08-20 | Hughes Aircraft Company | Infrared holographic defect detector |
JP2619566B2 (ja) * | 1990-11-20 | 1997-06-11 | オ−クマ株式会社 | 光学式位置検出器 |
JPH04221704A (ja) * | 1990-12-25 | 1992-08-12 | Matsushita Electric Works Ltd | 位相シフト斜入射干渉計 |
US5220403A (en) * | 1991-03-11 | 1993-06-15 | International Business Machines Corporation | Apparatus and a method for high numerical aperture microscopic examination of materials |
JP2823707B2 (ja) * | 1991-03-15 | 1998-11-11 | 松下電工株式会社 | 位相シフト斜入射干渉計 |
US5210591A (en) * | 1991-08-02 | 1993-05-11 | Hughes Aircraft Company | Interferometric ball bearing test station |
US5268742A (en) * | 1992-06-15 | 1993-12-07 | Hughes Aircraft Company | Full aperture interferometry for grazing incidence optics |
US5654798A (en) * | 1995-01-19 | 1997-08-05 | Tropel Corporation | Interferometric measurement of surfaces with diffractive optics at grazing incidence |
US5793488A (en) * | 1995-07-31 | 1998-08-11 | Tropel Corporation | Interferometer with compound optics for measuring cylindrical objects at oblique incidence |
-
1996
- 1996-04-12 US US08/631,071 patent/US5719676A/en not_active Expired - Fee Related
-
1997
- 1997-04-07 WO PCT/US1997/005658 patent/WO1997039307A1/en active IP Right Grant
- 1997-04-07 JP JP9537154A patent/JP2997551B2/ja not_active Expired - Fee Related
- 1997-04-07 DE DE69730953T patent/DE69730953T2/de not_active Expired - Fee Related
- 1997-04-07 AT AT97917873T patent/ATE278177T1/de not_active IP Right Cessation
- 1997-04-07 EP EP97917873A patent/EP0892909B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2997551B2 (ja) | 2000-01-11 |
WO1997039307A1 (en) | 1997-10-23 |
US5719676A (en) | 1998-02-17 |
ATE278177T1 (de) | 2004-10-15 |
EP0892909A1 (de) | 1999-01-27 |
JPH11509002A (ja) | 1999-08-03 |
EP0892909B1 (de) | 2004-09-29 |
DE69730953T2 (de) | 2006-02-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |