DE69730953D1 - Diffraktionsführung für schrägeinfallinterferometer - Google Patents

Diffraktionsführung für schrägeinfallinterferometer

Info

Publication number
DE69730953D1
DE69730953D1 DE69730953T DE69730953T DE69730953D1 DE 69730953 D1 DE69730953 D1 DE 69730953D1 DE 69730953 T DE69730953 T DE 69730953T DE 69730953 T DE69730953 T DE 69730953T DE 69730953 D1 DE69730953 D1 DE 69730953D1
Authority
DE
Germany
Prior art keywords
test
interferometer
beams
differential guide
diffractive optic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69730953T
Other languages
English (en)
Other versions
DE69730953T2 (de
Inventor
W Kulawiec
F Michaloski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tropel Corp
Original Assignee
Tropel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tropel Corp filed Critical Tropel Corp
Application granted granted Critical
Publication of DE69730953D1 publication Critical patent/DE69730953D1/de
Publication of DE69730953T2 publication Critical patent/DE69730953T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02059—Reducing effect of parasitic reflections, e.g. cyclic errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE69730953T 1996-04-12 1997-04-07 Diffraktionsführung für schrägeinfallinterferometer Expired - Fee Related DE69730953T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/631,071 US5719676A (en) 1996-04-12 1996-04-12 Diffraction management for grazing incidence interferometer
US631071 1996-04-12
PCT/US1997/005658 WO1997039307A1 (en) 1996-04-12 1997-04-07 Diffraction management for grazing incidence interferometer

Publications (2)

Publication Number Publication Date
DE69730953D1 true DE69730953D1 (de) 2004-11-04
DE69730953T2 DE69730953T2 (de) 2006-02-23

Family

ID=24529659

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69730953T Expired - Fee Related DE69730953T2 (de) 1996-04-12 1997-04-07 Diffraktionsführung für schrägeinfallinterferometer

Country Status (6)

Country Link
US (1) US5719676A (de)
EP (1) EP0892909B1 (de)
JP (1) JP2997551B2 (de)
AT (1) ATE278177T1 (de)
DE (1) DE69730953T2 (de)
WO (1) WO1997039307A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5889591A (en) * 1996-10-17 1999-03-30 Tropel Corporation Interferometric measurement of toric surfaces at grazing incidence
JP4200545B2 (ja) * 1998-06-08 2008-12-24 ソニー株式会社 固体撮像素子およびその駆動方法、並びにカメラシステム
US7057741B1 (en) 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer
JP4588361B2 (ja) * 2004-05-19 2010-12-01 日本電産トーソク株式会社 外側面検査装置
US9651358B2 (en) * 2013-08-19 2017-05-16 Corning Incorporated Grazing-incidence interferometer with dual-side measurement capability using a common image plane
JP6341883B2 (ja) * 2014-06-27 2018-06-13 キヤノン株式会社 位置検出装置、位置検出方法、インプリント装置及び物品の製造方法
JP6839916B2 (ja) * 2015-10-30 2021-03-10 リコーエレメックス株式会社 内面検査システムおよびその光学系

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE233644C (de) *
DE215388C (de) *
DE106769C (de) *
DD106769A3 (de) * 1972-01-04 1974-07-05 Verfahren und anordnung zur pr]fung beliebiger mantelfl[chen rotationssymmetrischer festk\rper mittels synthetischer hologramme
US3907438A (en) * 1973-06-22 1975-09-23 Gen Electric Contour measuring system for cylinders
US4436424A (en) * 1981-07-27 1984-03-13 Gca Corporation Interferometer using transverse deviation of test beam
US4391526A (en) * 1981-08-24 1983-07-05 Itek Corporation Interferometric surface contour measuring arrangement
US4606640A (en) * 1984-04-02 1986-08-19 The Perkin-Elmer Corporation Method and apparatus for optically testing cylindrical surfaces
DE3471368D1 (en) * 1984-10-31 1988-06-23 Ibm Deutschland Interferometric thickness analyzer and measuring method
US4678333A (en) * 1985-05-10 1987-07-07 Nicolet Instrument Corporation Double-pass optical interferometer
JPS62177421A (ja) * 1986-01-31 1987-08-04 Fuji Photo Optical Co Ltd 斜入射干渉計装置
US4791584A (en) * 1986-10-15 1988-12-13 Eastman Kodak Company Sub-nyquist interferometry
US4898470A (en) * 1988-07-12 1990-02-06 Eastman Kodak Company Apparatus and method for testing circular cylindrical or conical surfaces
US5041726A (en) * 1990-06-11 1991-08-20 Hughes Aircraft Company Infrared holographic defect detector
JP2619566B2 (ja) * 1990-11-20 1997-06-11 オ−クマ株式会社 光学式位置検出器
JPH04221704A (ja) * 1990-12-25 1992-08-12 Matsushita Electric Works Ltd 位相シフト斜入射干渉計
US5220403A (en) * 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
JP2823707B2 (ja) * 1991-03-15 1998-11-11 松下電工株式会社 位相シフト斜入射干渉計
US5210591A (en) * 1991-08-02 1993-05-11 Hughes Aircraft Company Interferometric ball bearing test station
US5268742A (en) * 1992-06-15 1993-12-07 Hughes Aircraft Company Full aperture interferometry for grazing incidence optics
US5654798A (en) * 1995-01-19 1997-08-05 Tropel Corporation Interferometric measurement of surfaces with diffractive optics at grazing incidence
US5793488A (en) * 1995-07-31 1998-08-11 Tropel Corporation Interferometer with compound optics for measuring cylindrical objects at oblique incidence

Also Published As

Publication number Publication date
EP0892909A1 (de) 1999-01-27
WO1997039307A1 (en) 1997-10-23
ATE278177T1 (de) 2004-10-15
DE69730953T2 (de) 2006-02-23
JP2997551B2 (ja) 2000-01-11
EP0892909B1 (de) 2004-09-29
JPH11509002A (ja) 1999-08-03
US5719676A (en) 1998-02-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee