DE69716866D1 - Beschichtungsstruktur einer Scheibe zum chemisch-mechanischen Polieren und Verfahren - Google Patents

Beschichtungsstruktur einer Scheibe zum chemisch-mechanischen Polieren und Verfahren

Info

Publication number
DE69716866D1
DE69716866D1 DE69716866T DE69716866T DE69716866D1 DE 69716866 D1 DE69716866 D1 DE 69716866D1 DE 69716866 T DE69716866 T DE 69716866T DE 69716866 T DE69716866 T DE 69716866T DE 69716866 D1 DE69716866 D1 DE 69716866D1
Authority
DE
Germany
Prior art keywords
disk
processing
mechanical polishing
chemical mechanical
coating structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69716866T
Other languages
English (en)
Other versions
DE69716866T2 (de
Inventor
James F Vannell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of DE69716866D1 publication Critical patent/DE69716866D1/de
Publication of DE69716866T2 publication Critical patent/DE69716866T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE69716866T 1996-12-02 1997-11-12 Beschichtungsstruktur einer Scheibe zum chemisch-mechanischen Polieren und Verfahren Expired - Lifetime DE69716866T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/755,870 US5743788A (en) 1996-12-02 1996-12-02 Platen coating structure for chemical mechanical polishing and method

Publications (2)

Publication Number Publication Date
DE69716866D1 true DE69716866D1 (de) 2002-12-12
DE69716866T2 DE69716866T2 (de) 2003-03-27

Family

ID=25041012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69716866T Expired - Lifetime DE69716866T2 (de) 1996-12-02 1997-11-12 Beschichtungsstruktur einer Scheibe zum chemisch-mechanischen Polieren und Verfahren

Country Status (7)

Country Link
US (1) US5743788A (de)
EP (1) EP0850725B1 (de)
JP (1) JPH10156709A (de)
KR (1) KR100501961B1 (de)
CN (1) CN1161211C (de)
DE (1) DE69716866T2 (de)
TW (1) TW351835B (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5964413A (en) * 1997-11-05 1999-10-12 Mok; Peter Apparatus for dispensing slurry
JPH11333703A (ja) * 1998-05-28 1999-12-07 Speedfam-Ipec Co Ltd ポリッシング加工機
JPH11347921A (ja) * 1998-06-05 1999-12-21 Memc Kk シリコンウェーハの研磨方法
US6036586A (en) * 1998-07-29 2000-03-14 Micron Technology, Inc. Apparatus and method for reducing removal forces for CMP pads
US6220942B1 (en) * 1999-04-02 2001-04-24 Applied Materials, Inc. CMP platen with patterned surface
US20040053566A1 (en) * 2001-01-12 2004-03-18 Applied Materials, Inc. CMP platen with patterned surface
FR2791917B1 (fr) * 1999-04-06 2001-06-22 Prec Machines Outils Procede de realisation d'une machine a rectifier de precision du type comprenant un bati et machine a rectifier de precision correspondante
US6468135B1 (en) 1999-04-30 2002-10-22 International Business Machines Corporation Method and apparatus for multiphase chemical mechanical polishing
US6363599B1 (en) 1999-08-04 2002-04-02 Komag, Inc. Method for manufacturing a magnetic disk including a glass substrate
AU7851000A (en) * 1999-10-08 2001-04-23 Speed-Fam-Ipec Corporation Optimal offset, pad size and pad shape for cmp buffing and polishing
US6793561B2 (en) 1999-10-14 2004-09-21 International Business Machines Corporation Removable/disposable platen top
US6422921B1 (en) 1999-10-22 2002-07-23 Applied Materials, Inc. Heat activated detachable polishing pad
US6203417B1 (en) * 1999-11-05 2001-03-20 Speedfam-Ipec Corporation Chemical mechanical polishing tool components with improved corrosion resistance
US6264536B1 (en) * 2000-02-01 2001-07-24 Lucent Technologies Inc. Reducing polish platen corrosion during integrated circuit fabrication
US6599175B2 (en) 2001-08-06 2003-07-29 Speedfam-Ipeca Corporation Apparatus for distributing a fluid through a polishing pad
US7040957B2 (en) * 2002-08-14 2006-05-09 Novellus Systems Inc. Platen and manifold for polishing workpieces
US6951504B2 (en) * 2003-03-20 2005-10-04 3M Innovative Properties Company Abrasive article with agglomerates and method of use
KR100810893B1 (ko) 2003-12-31 2008-03-07 동부일렉트로닉스 주식회사 씨엠피 장비용 평면 코팅 장치
JP5065574B2 (ja) * 2005-01-12 2012-11-07 住友電気工業株式会社 ＧａＮ基板の研磨方法
CN102380818A (zh) * 2010-09-01 2012-03-21 无锡华润上华半导体有限公司 化学机械研磨方法和研磨设备
GB201110476D0 (en) * 2011-06-21 2011-08-03 Spp Process Technology Systems Uk Ltd A method of supporting a workpiece during physical vapour deposition
US9719166B2 (en) 2011-06-21 2017-08-01 Spts Technologies Limited Method of supporting a workpiece during physical vapour deposition
CN103659576A (zh) * 2012-09-20 2014-03-26 苏州赫瑞特电子专用设备科技有限公司 一种单面研磨抛光机的研磨抛光盘
CN103276214B (zh) * 2013-05-30 2014-11-19 上海交通大学 利用电镀废水制备防腐蚀涂层的方法
US11397139B2 (en) * 2017-02-27 2022-07-26 Leco Corporation Metallographic grinder and components thereof
WO2018175758A1 (en) * 2017-03-24 2018-09-27 Axus Technology, Llc Atmospheric plasma in wafer processing system optimization
CN113874167B (zh) * 2019-05-31 2024-05-07 应用材料公司 抛光台板及抛光台板制造方法
CN115488754A (zh) * 2022-09-30 2022-12-20 上海芯物科技有限公司 Cmp自动贴膜装置及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855562A (ja) * 1981-09-28 1983-04-01 Hitachi Ltd 研磨皿とその製造方法
GB9010833D0 (en) * 1990-05-15 1990-07-04 Electrotech Research Limited Workpiece support
US6083083A (en) * 1994-04-22 2000-07-04 Kabushiki Kaisha Toshiba Separation type grinding surface plate and grinding apparatus using same
US5558717A (en) * 1994-11-30 1996-09-24 Applied Materials CVD Processing chamber
US5533923A (en) * 1995-04-10 1996-07-09 Applied Materials, Inc. Chemical-mechanical polishing pad providing polishing unformity

Also Published As

Publication number Publication date
EP0850725A3 (de) 1999-01-13
DE69716866T2 (de) 2003-03-27
KR19980063880A (ko) 1998-10-07
CN1184019A (zh) 1998-06-10
US5743788A (en) 1998-04-28
EP0850725B1 (de) 2002-11-06
TW351835B (en) 1999-02-01
EP0850725A2 (de) 1998-07-01
KR100501961B1 (ko) 2005-10-06
CN1161211C (zh) 2004-08-11
JPH10156709A (ja) 1998-06-16

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