DE69715186D1 - Substrate mit einer extrem harten beschictung, die bor und stickstoff enhaltet,und verfahren zu deren herstellung. - Google Patents

Substrate mit einer extrem harten beschictung, die bor und stickstoff enhaltet,und verfahren zu deren herstellung.

Info

Publication number
DE69715186D1
DE69715186D1 DE1997615186 DE69715186A DE69715186D1 DE 69715186 D1 DE69715186 D1 DE 69715186D1 DE 1997615186 DE1997615186 DE 1997615186 DE 69715186 A DE69715186 A DE 69715186A DE 69715186 D1 DE69715186 D1 DE 69715186D1
Authority
DE
Germany
Prior art keywords
adhesion layer
nitrogen
substrates
production
containing boron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1997615186
Other languages
English (en)
Other versions
DE69715186T2 (de
DE69715186T8 (de
Inventor
Aharon Inspektor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kennametal Inc
Original Assignee
Kennametal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kennametal Inc filed Critical Kennametal Inc
Application granted granted Critical
Publication of DE69715186D1 publication Critical patent/DE69715186D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0647—Boron nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
DE1997615186 1996-04-04 1997-01-15 Substrate mit einer extrem harten beschictung, die bor und stickstoff enhaltet,und verfahren zu deren herstellung. Expired - Fee Related DE69715186D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/627,464 US5976716A (en) 1996-04-04 1996-04-04 Substrate with a superhard coating containing boron and nitrogen and method of making the same
PCT/US1997/000838 WO1997038151A1 (en) 1996-04-04 1997-01-15 Substrate with a superhard coating containing boron and nitrogen and method of making the same

Publications (1)

Publication Number Publication Date
DE69715186D1 true DE69715186D1 (de) 2002-10-10

Family

ID=24514746

Family Applications (3)

Application Number Title Priority Date Filing Date
DE1997615186 Expired - Fee Related DE69715186D1 (de) 1996-04-04 1997-01-15 Substrate mit einer extrem harten beschictung, die bor und stickstoff enhaltet,und verfahren zu deren herstellung.
DE1997903006 Pending DE900287T1 (de) 1996-04-04 1997-01-15 Substrate mit einer extrem harten beschictung, die bor und stickstoff enhaltet,und verfahren zu deren herstellung.
DE1997615186 Active DE69715186T8 (de) 1996-04-04 1997-01-15 Substrate mit einer extrem harten beschichtung, die bor und stickstoff enthält, und verfahren zu deren herstellung.

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE1997903006 Pending DE900287T1 (de) 1996-04-04 1997-01-15 Substrate mit einer extrem harten beschictung, die bor und stickstoff enhaltet,und verfahren zu deren herstellung.
DE1997615186 Active DE69715186T8 (de) 1996-04-04 1997-01-15 Substrate mit einer extrem harten beschichtung, die bor und stickstoff enthält, und verfahren zu deren herstellung.

Country Status (12)

Country Link
US (3) US5976716A (de)
EP (1) EP0900287B1 (de)
JP (1) JP2000508377A (de)
KR (1) KR20000005021A (de)
CN (1) CN1215437A (de)
AT (1) ATE223517T1 (de)
AU (1) AU706148B2 (de)
BR (1) BR9708499A (de)
CA (1) CA2248692A1 (de)
DE (3) DE69715186D1 (de)
WO (1) WO1997038151A1 (de)
ZA (1) ZA971602B (de)

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT1239U1 (de) * 1996-03-27 1997-01-27 Plansee Ag Verfahren zur herstellung eines verbundwerkstoffes
US6827976B2 (en) * 1998-04-29 2004-12-07 Unaxis Trading Ag Method to increase wear resistance of a tool or other machine component
US6214473B1 (en) * 1998-05-13 2001-04-10 Andrew Tye Hunt Corrosion-resistant multilayer coatings
SE519005C2 (sv) * 1999-03-26 2002-12-17 Sandvik Ab Belagt hårdmetallskär
US6623791B2 (en) 1999-07-30 2003-09-23 Ppg Industries Ohio, Inc. Coating compositions having improved adhesion, coated substrates and methods related thereto
US6432480B1 (en) * 1999-09-27 2002-08-13 Caterpillar Inc. Modified boron containing coating for improved wear and pitting resistance
US6593015B1 (en) 1999-11-18 2003-07-15 Kennametal Pc Inc. Tool with a hard coating containing an aluminum-nitrogen compound and a boron-nitrogen compound and method of making the same
US6779951B1 (en) * 2000-02-16 2004-08-24 U.S. Synthetic Corporation Drill insert using a sandwiched polycrystalline diamond compact and method of making the same
AU2001261365A1 (en) * 2000-05-08 2001-11-20 Brigham Young University Friction stir weldin of metal matrix composites, ferrous alloys, non-ferrous alloys, and superalloys using superabrasive tool
US6607782B1 (en) * 2000-06-29 2003-08-19 Board Of Trustees Of The University Of Arkansas Methods of making and using cubic boron nitride composition, coating and articles made therefrom
US20030168539A1 (en) * 2000-07-06 2003-09-11 Ulrich Schoof Refiner and method for treating the surface of a tool of a refiner of this type
JP3637882B2 (ja) * 2000-08-31 2005-04-13 住友電気工業株式会社 表面被覆窒化硼素焼結体工具
US6988858B2 (en) * 2001-02-28 2006-01-24 Kennametal Inc. Oxidation-resistant cutting assembly
JPWO2002087812A1 (ja) * 2001-04-27 2004-10-07 Thk株式会社 長尺焼入れ鋼材の切削加工方法および切削加工装置
US6592998B2 (en) 2001-07-31 2003-07-15 Ppg Industries Ohio, Inc. Multi-layer composites formed from compositions having improved adhesion, coating compositions, and methods related thereto
US6592999B1 (en) * 2001-07-31 2003-07-15 Ppg Industries Ohio, Inc. Multi-layer composites formed from compositions having improved adhesion, coating compositions, and methods related thereto
US6641923B2 (en) 2001-07-31 2003-11-04 Ppg Industries Ohio, Inc. Weldable coating compositions having improved intercoat adhesion
EP1434897A1 (de) * 2001-10-08 2004-07-07 Aixtron AG Verfahren und vorrichtung zum abscheiden einer vielzahl von schichten auf einem substrat
KR20030052469A (ko) * 2001-12-21 2003-06-27 한국야금 주식회사 내마모성 및 인성이 향상된 피복 초경합금 절삭공구의제조방법
US6742970B2 (en) 2002-06-12 2004-06-01 Kennametal Inc. Cutting tool
CN1304632C (zh) * 2002-09-17 2007-03-14 湘潭大学 氮化硼复合涂层切削刀具及其制备方法
WO2004105983A1 (en) * 2003-06-03 2004-12-09 Sandvik Ab Indexable cutting inserts and methods for producing the same
US7374642B2 (en) * 2004-01-30 2008-05-20 Deutchman Arnold H Treatment process for improving the mechanical, catalytic, chemical, and biological activity of surfaces and articles treated therewith
US10543094B2 (en) 2004-01-30 2020-01-28 Beamalloy Reconstructive Medical Products, Llc Orthopaedic implants having self-lubricated articulating surfaces designed to reduce wear, corrosion, and ion leaching
US9523144B2 (en) * 2004-01-30 2016-12-20 Beamalloy Reconstructive Medical Products, Llc Orthopaedic implants having self-lubricated articulating surfaces designed to reduce wear, corrosion, and ion leaching
DE102004028112B4 (de) 2004-06-09 2019-12-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Werkzeugsubstrat mit borhaltigem Schichtsystem, bestehend aus einer Borcarbid-, einer B-C-N und einer kohlenstoffmodifizierten kubischen Bornitridschicht sowie Verfahren zur Herstellung eines solchen Schichtsystems und Verwendung
DE102004042407A1 (de) * 2004-09-02 2006-03-23 Forschungszentrum Karlsruhe Gmbh Schichtverbund mit kubischen Bornitrid
US8227031B2 (en) * 2004-09-02 2012-07-24 Karlsruher Institut Fuer Technologie Method of producing a layered composite including cubic boron nitride
EP1805338B1 (de) * 2004-10-29 2017-05-03 SECO TOOLS AB (publ) Gesintertes hartmetall
US7651758B2 (en) * 2005-10-18 2010-01-26 Endres Machining Innovations Llc System for improving the wearability of a surface and related method
CN101395335B (zh) * 2006-01-26 2013-04-17 犹他大学研究基金会 多晶磨料复合切削工具
WO2007103578A1 (en) * 2006-03-09 2007-09-13 Cabot Microelectronics Corporation Method of polishing a tungsten carbide surface
US8727673B2 (en) 2007-01-18 2014-05-20 Kennametal Inc. Cutting insert with internal coolant delivery and surface feature for enhanced coolant flow
US7963729B2 (en) 2007-01-18 2011-06-21 Kennametal Inc. Milling cutter and milling insert with coolant delivery
US7625157B2 (en) * 2007-01-18 2009-12-01 Kennametal Inc. Milling cutter and milling insert with coolant delivery
US8439608B2 (en) * 2007-01-18 2013-05-14 Kennametal Inc. Shim for a cutting insert and cutting insert-shim assembly with internal coolant delivery
US8328471B2 (en) 2007-01-18 2012-12-11 Kennametal Inc. Cutting insert with internal coolant delivery and cutting assembly using the same
US7883299B2 (en) * 2007-01-18 2011-02-08 Kennametal Inc. Metal cutting system for effective coolant delivery
US8454274B2 (en) 2007-01-18 2013-06-04 Kennametal Inc. Cutting inserts
US9101985B2 (en) 2007-01-18 2015-08-11 Kennametal Inc. Cutting insert assembly and components thereof
US20080175679A1 (en) * 2007-01-18 2008-07-24 Paul Dehnhardt Prichard Milling cutter and milling insert with core and coolant delivery
GB0805493D0 (en) 2008-03-26 2008-04-30 Sun Chemical Bv A jet ink and ink jet printing process
CA2685668A1 (en) * 2008-11-24 2010-05-24 Smith International, Inc. A cutting element and a method of manufacturing a cutting element
US7955032B2 (en) * 2009-01-06 2011-06-07 Kennametal Inc. Cutting insert with coolant delivery and method of making the cutting insert
WO2011109016A1 (en) * 2009-03-03 2011-09-09 Diamond Innovations, Inc. Thick thermal barrier coating for superabrasive tool
JP2011051060A (ja) * 2009-09-02 2011-03-17 Mitsubishi Materials Corp 表面被覆切削工具
US8451921B2 (en) * 2009-10-28 2013-05-28 Qualcomm Incorporated Method and an apparatus for adaptively learning a sparse impulse response of a continuous channel
KR100991770B1 (ko) * 2010-03-15 2010-11-03 한국과학기술연구원 입방정계 질화붕소 박막의 증착 방법
US8734062B2 (en) 2010-09-02 2014-05-27 Kennametal Inc. Cutting insert assembly and components thereof
US8827599B2 (en) 2010-09-02 2014-09-09 Kennametal Inc. Cutting insert assembly and components thereof
US10639768B2 (en) 2011-05-27 2020-05-05 P&S Global Holdings Llc Multi-layer coating with cubic boron nitride particles
US9428967B2 (en) 2013-03-01 2016-08-30 Baker Hughes Incorporated Polycrystalline compact tables for cutting elements and methods of fabrication
KR101381639B1 (ko) * 2013-06-05 2014-04-04 주식회사 인팩 추력 분산을 갖는 부시
RU2548852C2 (ru) * 2013-07-19 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
DE102014018915A1 (de) * 2014-12-22 2016-06-23 Oerlikon Surface Solutions Ag, Trübbach AlCrN-basierte Beschichtung zur verbesserten Beständigkeit gegen Kolkverschleiß
DE102015222491B4 (de) * 2015-11-13 2023-03-23 Kennametal Inc. Schneidwerkzeug und Verfahren zu dessen Herstellung
RU2622527C1 (ru) * 2015-12-15 2017-06-16 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2659537C1 (ru) * 2017-09-26 2018-07-02 Татьяна Сергеевна Картапова Способ нанесения смешанного углеродно-азотного защитного покрытия для повышения коррозионной стойкости железа
EP3563952A1 (de) * 2018-05-03 2019-11-06 Ceratizit Austria Gesellschaft m.b.H. Schneidvorrichtung
ES2966467T3 (es) * 2018-05-08 2024-04-22 Seco Tools Ab Un método para fabricar un cuerpo sinterizado
US11167375B2 (en) 2018-08-10 2021-11-09 The Research Foundation For The State University Of New York Additive manufacturing processes and additively manufactured products
CN111042745B (zh) * 2018-10-12 2022-09-23 中国石油化工股份有限公司 钻铤
RU2716384C1 (ru) * 2019-09-17 2020-03-11 федеральное государственное бюджетное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
CN110791729A (zh) * 2019-11-21 2020-02-14 金华新亚机械制造有限公司 带pvd涂层的正畸钳及其制备方法
CN114986261A (zh) * 2022-06-02 2022-09-02 上海市轴承技术研究所有限公司 回转曲面硬质合金涂层的超精加工方法

Family Cites Families (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3767371A (en) * 1971-07-01 1973-10-23 Gen Electric Cubic boron nitride/sintered carbide abrasive bodies
US4035541A (en) * 1975-11-17 1977-07-12 Kennametal Inc. Sintered cemented carbide body coated with three layers
CH632944A5 (fr) * 1978-06-22 1982-11-15 Stellram Sa Piece d'usure en metal dur.
US4282289A (en) * 1980-04-16 1981-08-04 Sandvik Aktiebolag Method of preparing coated cemented carbide product and resulting product
US4399168A (en) * 1980-01-21 1983-08-16 Santrade Ltd. Method of preparing coated cemented carbide product
US4717632A (en) * 1983-08-22 1988-01-05 Ovonic Synthetic-Materials Company, Inc. Adhesion and composite wear resistant coating and method
US4594294A (en) * 1983-09-23 1986-06-10 Energy Conversion Devices, Inc. Multilayer coating including disordered, wear resistant boron carbon external coating
JPS60234961A (ja) * 1984-05-08 1985-11-21 Mitsubishi Metal Corp 耐摩耗性のすぐれた表面被覆工具部材
JPS60243273A (ja) * 1984-05-16 1985-12-03 Sumitomo Electric Ind Ltd 硬質被覆部品
US4619865A (en) * 1984-07-02 1986-10-28 Energy Conversion Devices, Inc. Multilayer coating and method
US4643951A (en) * 1984-07-02 1987-02-17 Ovonic Synthetic Materials Company, Inc. Multilayer protective coating and method
US4724169A (en) * 1984-10-09 1988-02-09 Ovonic Synthetic Materials Company, Inc. Method of producing multilayer coatings on a substrate
US4919773A (en) * 1984-11-19 1990-04-24 Avco Corporation Method for imparting erosion-resistance to metallic substrates
JPS6221778A (ja) * 1985-07-17 1987-01-30 東芝タンガロイ株式会社 立方晶窒化ホウ素被覆体及びその製造方法
JPS6258050A (ja) * 1985-09-05 1987-03-13 Toyota Motor Corp ピストンリング
JPS6326349A (ja) * 1986-07-18 1988-02-03 Kobe Steel Ltd 立方晶窒化硼素被膜の形成方法
US5310603A (en) * 1986-10-01 1994-05-10 Canon Kabushiki Kaisha Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
US5433988A (en) * 1986-10-01 1995-07-18 Canon Kabushiki Kaisha Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
US4751109A (en) * 1987-01-20 1988-06-14 Gte Laboratories Incorporated A process for depositing a composite ceramic coating on a hard ceramic substrate
JPS63205562A (ja) * 1987-02-20 1988-08-25 Nippon Oil & Fats Co Ltd クロマトグラフイ−用充填剤
JPS63239103A (ja) * 1987-03-27 1988-10-05 Ulvac Corp 立方晶窒化硼素被覆体およびその製造法
US4807402A (en) * 1988-02-12 1989-02-28 General Electric Company Diamond and cubic boron nitride
JPH0225562A (ja) * 1988-07-14 1990-01-29 Mitsubishi Heavy Ind Ltd 立方晶窒化ホウ素被覆超硬合金
US5389587A (en) * 1988-11-10 1995-02-14 Kabushiki Kaisha Kouransha BN-group ceramics having excellent resistance to loss by dissolving
US5223337A (en) * 1988-12-10 1993-06-29 Fried. Krupp Gmbh Tool produced by a plasma-activated CVD process
JP2745685B2 (ja) * 1989-06-12 1998-04-28 東洋紡績株式会社 熱可塑性樹脂ペレット混合物およびそれを用いた成形体
FR2649974B1 (fr) * 1989-07-21 1991-09-27 Aerospatiale Materiau carbone protege contre l'oxydation par du carbonitrure de bore
DE69021821T2 (de) * 1989-09-20 1996-05-30 Sumitomo Electric Industries Verfahren und Anlage zum Herstellen von Hartstoff.
US5053245A (en) * 1989-10-26 1991-10-01 Sanyo Electric Co., Ltd. Method of improving the quality of an edge surface of a cutting device
US5330611A (en) * 1989-12-06 1994-07-19 General Motors Corporation Cubic boron nitride carbide films
EP0439135B1 (de) * 1990-01-23 1996-05-22 Sumitomo Electric Industries, Ltd. Verfahren zum Herstellen eines Bornitridfilms
DE4006127A1 (de) * 1990-02-27 1991-08-29 Bayer Ag Modifizierte ethylen/vinylacetat-copolymerisat mit erhoehter flexibilitaet bei niedriger temperatur
JPH03260054A (ja) * 1990-03-09 1991-11-20 Masao Murakawa 耐剥離性にすぐれたｃＢＮ被覆部材及びその製作法
JPH04228572A (ja) * 1990-08-10 1992-08-18 Sumitomo Electric Ind Ltd 硬質窒化ホウ素合成法
JPH04124272A (ja) * 1990-09-17 1992-04-24 Sumitomo Electric Ind Ltd 立方晶窒化ホウ素被覆部材及びその製造方法
US5266388A (en) * 1990-09-17 1993-11-30 Kennametal Inc. Binder enriched coated cutting tool
JPH04168263A (ja) * 1990-10-31 1992-06-16 Kobe Steel Ltd 窒化硼素被覆複合材料
US5203977A (en) * 1991-03-11 1993-04-20 Regents Of The University Of California Magnetron sputtered boron films and TI/B multilayer structures
US5670252A (en) * 1991-03-11 1997-09-23 Regents Of The University Of California Boron containing multilayer coatings and method of fabrication
DE69203633T2 (de) * 1991-03-18 1996-01-25 Gen Motors Corp Filme aus kohlenstofflegiertem, kubischem Bornitrid.
JP2909248B2 (ja) * 1991-05-15 1999-06-23 三菱重工業株式会社 窒化硼素被覆部材
JP3133388B2 (ja) * 1991-05-27 2001-02-05 三洋電機株式会社 ステンレス鋼の耐食性改善方法
DE4126851A1 (de) * 1991-08-14 1993-02-18 Krupp Widia Gmbh Werkzeug mit verschleissfester schneide aus kubischem bornitrid oder polykristallinem kubischem bornitrid, verfahren zu dessen herstellung sowie dessen verwendung
JP3169094B2 (ja) * 1991-11-28 2001-05-21 いすゞ自動車株式会社 車両用電源装置
JPH0554594A (ja) * 1992-02-05 1993-03-05 Konica Corp ビデオテープカセツトの製造方法
CA2089288A1 (en) * 1992-03-20 1993-09-21 David E. Slutz Multilayer cvd diamond films
JP3199127B2 (ja) * 1992-04-06 2001-08-13 日本特殊陶業株式会社 ダイヤモンド含有複合体被覆部材およびその製造方法
JP3380294B2 (ja) * 1992-06-30 2003-02-24 京セラ株式会社 超硬質膜付工具及びその製造方法
US5441817A (en) * 1992-10-21 1995-08-15 Smith International, Inc. Diamond and CBN cutting tools
US5372873A (en) * 1992-10-22 1994-12-13 Mitsubishi Materials Corporation Multilayer coated hard alloy cutting tool
US5374471A (en) * 1992-11-27 1994-12-20 Mitsubishi Materials Corporation Multilayer coated hard alloy cutting tool
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition
US5597625A (en) * 1993-02-10 1997-01-28 California Institute Of Technology Low pressure growth of cubic boron nitride films
JP3309507B2 (ja) * 1993-06-30 2002-07-29 三菱マテリアル株式会社 硬質被覆層がすぐれた密着性を有する表面被覆立方晶窒化ほう素基セラミックス製切削工具
US5618509A (en) * 1993-07-09 1997-04-08 Showa Denko K.K. Method for producing cubic boron nitride
US5483920A (en) * 1993-08-05 1996-01-16 Board Of Governors Of Wayne State University Method of forming cubic boron nitride films
US5398639A (en) * 1993-11-12 1995-03-21 General Motors Corporation Solid state conversion of hexagonal to cubic-like boron nitride
DE4407274C1 (de) * 1994-03-04 1995-03-30 Fraunhofer Ges Forschung Verfahren zur Herstellung von verschleißfesten Schichten aus kubischem Bornitrid und ihre Anwendung
JP3175483B2 (ja) * 1994-06-30 2001-06-11 日本鋼管株式会社 窒化ホウ素含有材料およびその製造方法
US5691260A (en) * 1994-12-30 1997-11-25 Denki Kagaku Kogyo Kabushiki Kaisha Cubic system boron nitride sintered body for a cutting tool
US5928771A (en) * 1995-05-12 1999-07-27 Diamond Black Technologies, Inc. Disordered coating with cubic boron nitride dispersed therein
US5639285A (en) * 1995-05-15 1997-06-17 Smith International, Inc. Polycrystallline cubic boron nitride cutting tool

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US5976716A (en) 1999-11-02
DE69715186T2 (de) 2009-09-17
KR20000005021A (ko) 2000-01-25
ZA971602B (en) 1997-08-29
US6054185A (en) 2000-04-25
AU706148B2 (en) 1999-06-10
CA2248692A1 (en) 1997-10-16
DE900287T1 (de) 1999-08-19
EP0900287B1 (de) 2002-09-04
BR9708499A (pt) 1999-08-03
WO1997038151A1 (en) 1997-10-16
CN1215437A (zh) 1999-04-28
ATE223517T1 (de) 2002-09-15
DE69715186T8 (de) 2010-06-02
AU1704297A (en) 1997-10-29
EP0900287A1 (de) 1999-03-10
JP2000508377A (ja) 2000-07-04
US6117533A (en) 2000-09-12

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