DE69714275D1 - Verfahren zum herstellen rissfreier diffusionskomponenten aus siliziumcarbid - Google Patents

Verfahren zum herstellen rissfreier diffusionskomponenten aus siliziumcarbid

Info

Publication number
DE69714275D1
DE69714275D1 DE69714275T DE69714275T DE69714275D1 DE 69714275 D1 DE69714275 D1 DE 69714275D1 DE 69714275 T DE69714275 T DE 69714275T DE 69714275 T DE69714275 T DE 69714275T DE 69714275 D1 DE69714275 D1 DE 69714275D1
Authority
DE
Germany
Prior art keywords
silicon carbide
free diffusion
diffusion components
producing risk
risk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69714275T
Other languages
English (en)
Other versions
DE69714275T2 (de
Inventor
Stephen Dynan
Jack Shindle
John Vayda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Ceramics and Plastics Inc
Original Assignee
Saint Gobain Ceramics and Plastics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Ceramics and Plastics Inc filed Critical Saint Gobain Ceramics and Plastics Inc
Publication of DE69714275D1 publication Critical patent/DE69714275D1/de
Application granted granted Critical
Publication of DE69714275T2 publication Critical patent/DE69714275T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/90Carbides
    • C01B32/914Carbides of single elements
    • C01B32/956Silicon carbide
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605Treating the starting powders individually or as mixtures
    • C04B35/62625Wet mixtures
    • C04B35/6263Wet mixtures characterised by their solids loadings, i.e. the percentage of solids
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/632Organic additives
    • C04B35/634Polymers
    • C04B35/63404Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • C04B35/63424Polyacrylates; Polymethacrylates
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/61Micrometer sized, i.e. from 1-100 micrometer
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3418Silicon oxide, silicic acids, or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38Non-oxide ceramic constituents or additives
    • C04B2235/3817Carbides
    • C04B2235/3826Silicon carbides
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/422Carbon
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/422Carbon
    • C04B2235/425Graphite
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54Particle size related information
    • C04B2235/5409Particle size related information expressed by specific surface values
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54Particle size related information
    • C04B2235/5418Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5427Particle size related information expressed by the size of the particles or aggregates thereof millimeter or submillimeter sized, i.e. larger than 0,1 mm
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54Particle size related information
    • C04B2235/5418Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54Particle size related information
    • C04B2235/5463Particle size distributions
    • C04B2235/5472Bimodal, multi-modal or multi-fraction
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602Making the green bodies or pre-forms by moulding
    • C04B2235/6027Slip casting
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/608Green bodies or pre-forms with well-defined density
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/61Mechanical properties, e.g. fracture toughness, hardness, Young's modulus or strength
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6562Heating rate
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658Atmosphere during thermal treatment
    • C04B2235/6581Total pressure below 1 atmosphere, e.g. vacuum
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74Physical characteristics
    • C04B2235/77Density
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)
DE69714275T 1996-10-04 1997-10-03 Verfahren zum herstellen rissfreier diffusionskomponenten aus siliziumcarbid Expired - Lifetime DE69714275T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/725,717 US5702997A (en) 1996-10-04 1996-10-04 Process for making crack-free silicon carbide diffusion components
PCT/US1997/018033 WO1998014411A1 (en) 1996-10-04 1997-10-03 Process for making crack-free silicon carbide diffusion components

Publications (2)

Publication Number Publication Date
DE69714275D1 true DE69714275D1 (de) 2002-08-29
DE69714275T2 DE69714275T2 (de) 2003-03-20

Family

ID=24915690

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714275T Expired - Lifetime DE69714275T2 (de) 1996-10-04 1997-10-03 Verfahren zum herstellen rissfreier diffusionskomponenten aus siliziumcarbid

Country Status (9)

Country Link
US (4) US5702997A (de)
EP (1) EP0931033B1 (de)
JP (1) JP3237760B2 (de)
KR (1) KR100306353B1 (de)
CN (1) CN1068861C (de)
AU (1) AU4608197A (de)
CA (1) CA2267854C (de)
DE (1) DE69714275T2 (de)
WO (1) WO1998014411A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5702997A (en) * 1996-10-04 1997-12-30 Saint-Gobain/Norton Industrial Ceramics Corp. Process for making crack-free silicon carbide diffusion components
AT408153B (de) * 1998-09-02 2001-09-25 Electrovac Metall-matrix-composite- (mmc-) bauteil
US7115535B1 (en) * 1999-08-02 2006-10-03 The Procter & Gamble Company Personal care articles comprising batting
JP4589491B2 (ja) * 1999-08-24 2010-12-01 株式会社ブリヂストン 炭化ケイ素粉末、グリーン体の製造方法、及び炭化ケイ素焼結体の製造方法
DE10111225A1 (de) * 2001-03-08 2002-09-19 Wacker Chemie Gmbh Verbundwerkstoff auf der Basis von Siliciumcarbid und Kohlenstoff, Verfahren zu seiner Herstellung sowie seine Verwendung
US6774073B2 (en) 2002-07-29 2004-08-10 Coorstek, Inc. Graphite loaded silicon carbide and methods for making
US6591892B1 (en) * 2002-11-12 2003-07-15 Saint-Gobain Ceramics & Plastics, Inc. Method and apparatus for casting coarse grain siliconized silicon carbide parts
US20040173597A1 (en) * 2003-03-03 2004-09-09 Manoj Agrawal Apparatus for contacting gases at high temperature
US20040188319A1 (en) * 2003-03-28 2004-09-30 Saint-Gobain Ceramics & Plastics, Inc. Wafer carrier having improved processing characteristics
DE10331049B4 (de) * 2003-07-09 2010-04-08 Saint-Gobain Industriekeramik Rödental GmbH Verfahren zur Herstellung eines porösen Keramikkörpers, danach hergestellter poröser Keramikkörper und dessen Verwendung
US20080265471A1 (en) * 2005-11-07 2008-10-30 Colopy Curtis M Polycrystalline Sic Electrical Devices and Methods for Fabricating the Same
WO2012071353A1 (en) 2010-11-22 2012-05-31 Saint-Gobain Ceramics & Plastics, Inc. Infiltrated silicon carbide bodies and methods of making
TW201321331A (zh) * 2011-11-16 2013-06-01 Tse Jie Entpr Ltd 陶瓷散熱基材的製造方法
EP3046893B1 (de) * 2013-09-19 2018-11-21 United Technologies Corporation Verfahren zur herstellung eines keramikartikels
US9676631B2 (en) 2014-07-21 2017-06-13 Lori Bracamonte Reaction bonded silicon carbide bodies made from high purity carbonaceous preforms
US9951952B2 (en) 2014-10-15 2018-04-24 Specialized Component Parts Limited, Inc. Hot surface igniters and methods of making same
CN112960983B (zh) * 2021-03-23 2022-10-21 中钢集团洛阳耐火材料研究院有限公司 一种碳化硅陶瓷复合制品的制备方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3951587A (en) * 1974-12-06 1976-04-20 Norton Company Silicon carbide diffusion furnace components
US4295890A (en) * 1975-12-03 1981-10-20 Ppg Industries, Inc. Submicron beta silicon carbide powder and sintered articles of high density prepared therefrom
US4238434A (en) * 1978-02-16 1980-12-09 Ibigawa Electric Industry Co., Ltd. Method of producing a silicon carbide sintered body
JPS54122312A (en) * 1978-03-15 1979-09-21 Hiroshige Suzuki Silicon carbide powder for sintering use and preparation thereof
DE2910059C2 (de) * 1978-03-15 1982-05-19 Suzuki, Hiroshige, Tokyo Verfahren zur Herstellung von feinteiligem Siliziumkarbid sowie dessen Verwendung zur Herstellung von hochdichten Sinterkörpern
JPS59102872A (ja) * 1982-12-06 1984-06-14 日本特殊陶業株式会社 炭化珪素.黒鉛複合焼結体の製造方法
JPS59207873A (ja) * 1983-05-10 1984-11-26 ティーディーケイ株式会社 高密度炭化ケイ素焼結体の製造方法
US4525461A (en) * 1983-12-14 1985-06-25 Kennecott Corporation Sintered silicon carbide/graphite/carbon composite ceramic body having ultrafine grain microstructure
EP0147478B1 (de) * 1983-12-23 1987-05-06 Hoechst CeramTec Aktiengesellschaft Schlickergiessmasse zur Herstellung von Formkörpern als aus Siliciumcarbid
JPS60138913A (ja) * 1983-12-26 1985-07-23 Toshiba Ceramics Co Ltd 半導体拡散炉管の製造方法
JPS60200861A (ja) * 1984-03-26 1985-10-11 住友化学工業株式会社 高強度炭化珪素焼結体の製造方法
JPS60246264A (ja) * 1984-05-23 1985-12-05 東芝セラミツクス株式会社 炭化珪素質材料の製造方法
US4771021A (en) * 1985-07-01 1988-09-13 Teruyasu Tamamizu Semi-conductor diffusion furnace components
JPS6212666A (ja) * 1985-07-09 1987-01-21 東芝セラミツクス株式会社 半導体用炉芯管の製造方法
US4987103A (en) * 1986-04-09 1991-01-22 Nippon Pillar Packing Co., Ltd. Slider composed of a high-density silicon carbide sintered compact
US4693988A (en) * 1986-07-01 1987-09-15 Kennecott Corporation Single phase silicon carbide refractory
JP2548949B2 (ja) * 1987-09-01 1996-10-30 東芝セラミックス株式会社 半導体製造用構成部材
DE3736660A1 (de) * 1987-10-29 1989-05-11 Mtu Muenchen Gmbh Verfahren zur herstellung eines poroesen formkoerpers
KR910002578B1 (ko) * 1988-01-19 1991-04-27 닙폰 가이시 카부시키카이샤 고밀도 SiC 소결체의 제조방법
US4998879A (en) * 1988-04-29 1991-03-12 Norton Company High purity diffusion furnace components
US4999228A (en) * 1988-05-06 1991-03-12 Shin-Etsu Chemical Co., Ltd. Silicon carbide diffusion tube for semi-conductor
DE3832876A1 (de) * 1988-09-28 1990-04-05 Hoechst Ceram Tec Ag Bauteile aus silizium-infiltriertem siliziumcarbid mit poroeser oberflaeche und verfahren zu ihrer herstellung
US5094985A (en) * 1989-01-30 1992-03-10 Kazunori Kijima Kyoto Sintered silicon carbide body with high thermal conductivity and process of producing the same
DE69131247T2 (de) * 1990-11-20 1999-09-23 Asahi Glass Co Ltd Wärmebehandlungsapparate für Halbleiter und hochreine Siliciumcarbidteile für die Apparate und Verfahren zu ihrer Herstellung
US5422322A (en) * 1993-02-10 1995-06-06 The Stackpole Corporation Dense, self-sintered silicon carbide/carbon-graphite composite and process for producing same
US5486496A (en) * 1994-06-10 1996-01-23 Alumina Ceramics Co. (Aci) Graphite-loaded silicon carbide
CN1147806A (zh) * 1995-03-01 1997-04-16 圣戈本/诺顿工业搪瓷有限公司 新颖的碳化硅仿真晶片
US5702997A (en) * 1996-10-04 1997-12-30 Saint-Gobain/Norton Industrial Ceramics Corp. Process for making crack-free silicon carbide diffusion components

Also Published As

Publication number Publication date
JP2000503970A (ja) 2000-04-04
CN1068861C (zh) 2001-07-25
WO1998014411A1 (en) 1998-04-09
US5702997A (en) 1997-12-30
KR20000048896A (ko) 2000-07-25
AU4608197A (en) 1998-04-24
KR100306353B1 (ko) 2001-09-13
US5972818A (en) 1999-10-26
JP3237760B2 (ja) 2001-12-10
CA2267854A1 (en) 1998-04-09
CA2267854C (en) 2002-02-19
CN1232440A (zh) 1999-10-20
US5840639A (en) 1998-11-24
US5902760A (en) 1999-05-11
EP0931033A1 (de) 1999-07-28
DE69714275T2 (de) 2003-03-20
EP0931033B1 (de) 2002-07-24

Similar Documents

Publication Publication Date Title
DE69714275D1 (de) Verfahren zum herstellen rissfreier diffusionskomponenten aus siliziumcarbid
DE69711416D1 (de) Verfahren zum herstellen von aethylacetat
DE69707219T2 (de) Verfahren zum Herstellen von Silizium-Halbleiter Einzelsubstrat
DE69730109D1 (de) Verfahren und Vorrichtung zum Herstellen von Wasserzeichen
DE59503388D1 (de) Verfahren zum herstellen von mit bor dotiertem, einkristallinem siliciumcarbid
DE69507607D1 (de) Verfahren zum herstellen von diamantfilmen
DE69504196T2 (de) Verfahren zur herstellung von siliciumcarbid
DE69940275D1 (de) Fotoresiste und verfahren für die microlithographie
DE69521530T2 (de) Verbessertes verfahren zum herstellen von verbundwerkstoffen
DE69722700D1 (de) Verfahren und Vorrichtung zum Herstellen von Siliciumschichten
DE69923278D1 (de) Verfahren zum herstellen von zusammenhängenden beuteln
ATE222828T1 (de) Verfahren zum herstellen von sägebändern
DE69825397D1 (de) Einkristalliner siliziumkarbid und verfahren zu dessen herstellung
DE59813943D1 (de) Verfahren zum Herstellen von elektronischen Elementen
DE59505870D1 (de) Verfahren zum Herstellen von keramischen Bauteilen aus Siliziumcarbid
DE59602288D1 (de) Verfahren zum herstellen von siliciumcarbid-einkristallen
DE69930349D1 (de) Verfahren zum Mahlen von Silizium
DE59914127D1 (de) Verfahren zum herstellen von halbleiterbauelementen
DE68904851D1 (de) Verfahren zum verbinden poroeser siliciumcarbidkoerper.
ATA73994A (de) Verfahren zum herstellen einr eisenschmelze
DE69830946D1 (de) Verfahren zur Abbildung Halbleiteranordnungen
DE69722454D1 (de) Verfahren zum feinen von silicium
DE69513474D1 (de) Verfahren zur Auswertung von Siliziumscheiben
ATA66195A (de) Verfahren zum herstellen von gehäusen
DE69919017D1 (de) Verfahren zum herstellen von photopolymerisierbaren halofluorierten acrylaten

Legal Events

Date Code Title Description
8364 No opposition during term of opposition