DE69714275D1 - Verfahren zum herstellen rissfreier diffusionskomponenten aus siliziumcarbid - Google Patents
Verfahren zum herstellen rissfreier diffusionskomponenten aus siliziumcarbidInfo
- Publication number
- DE69714275D1 DE69714275D1 DE69714275T DE69714275T DE69714275D1 DE 69714275 D1 DE69714275 D1 DE 69714275D1 DE 69714275 T DE69714275 T DE 69714275T DE 69714275 T DE69714275 T DE 69714275T DE 69714275 D1 DE69714275 D1 DE 69714275D1
- Authority
- DE
- Germany
- Prior art keywords
- silicon carbide
- free diffusion
- diffusion components
- producing risk
- risk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62625—Wet mixtures
- C04B35/6263—Wet mixtures characterised by their solids loadings, i.e. the percentage of solids
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/632—Organic additives
- C04B35/634—Polymers
- C04B35/63404—Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
- C04B35/63424—Polyacrylates; Polymethacrylates
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- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3418—Silicon oxide, silicic acids, or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
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- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
- C04B2235/3826—Silicon carbides
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- C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
- C04B2235/422—Carbon
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- C04B2235/425—Graphite
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5409—Particle size related information expressed by specific surface values
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
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- C04B2235/5472—Bimodal, multi-modal or multi-fraction
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- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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- C04B2235/658—Atmosphere during thermal treatment
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- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/725,717 US5702997A (en) | 1996-10-04 | 1996-10-04 | Process for making crack-free silicon carbide diffusion components |
PCT/US1997/018033 WO1998014411A1 (en) | 1996-10-04 | 1997-10-03 | Process for making crack-free silicon carbide diffusion components |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69714275D1 true DE69714275D1 (de) | 2002-08-29 |
DE69714275T2 DE69714275T2 (de) | 2003-03-20 |
Family
ID=24915690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69714275T Expired - Lifetime DE69714275T2 (de) | 1996-10-04 | 1997-10-03 | Verfahren zum herstellen rissfreier diffusionskomponenten aus siliziumcarbid |
Country Status (9)
Country | Link |
---|---|
US (4) | US5702997A (de) |
EP (1) | EP0931033B1 (de) |
JP (1) | JP3237760B2 (de) |
KR (1) | KR100306353B1 (de) |
CN (1) | CN1068861C (de) |
AU (1) | AU4608197A (de) |
CA (1) | CA2267854C (de) |
DE (1) | DE69714275T2 (de) |
WO (1) | WO1998014411A1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5702997A (en) * | 1996-10-04 | 1997-12-30 | Saint-Gobain/Norton Industrial Ceramics Corp. | Process for making crack-free silicon carbide diffusion components |
AT408153B (de) * | 1998-09-02 | 2001-09-25 | Electrovac | Metall-matrix-composite- (mmc-) bauteil |
US7115535B1 (en) * | 1999-08-02 | 2006-10-03 | The Procter & Gamble Company | Personal care articles comprising batting |
JP4589491B2 (ja) * | 1999-08-24 | 2010-12-01 | 株式会社ブリヂストン | 炭化ケイ素粉末、グリーン体の製造方法、及び炭化ケイ素焼結体の製造方法 |
DE10111225A1 (de) * | 2001-03-08 | 2002-09-19 | Wacker Chemie Gmbh | Verbundwerkstoff auf der Basis von Siliciumcarbid und Kohlenstoff, Verfahren zu seiner Herstellung sowie seine Verwendung |
US6774073B2 (en) | 2002-07-29 | 2004-08-10 | Coorstek, Inc. | Graphite loaded silicon carbide and methods for making |
US6591892B1 (en) * | 2002-11-12 | 2003-07-15 | Saint-Gobain Ceramics & Plastics, Inc. | Method and apparatus for casting coarse grain siliconized silicon carbide parts |
US20040173597A1 (en) * | 2003-03-03 | 2004-09-09 | Manoj Agrawal | Apparatus for contacting gases at high temperature |
US20040188319A1 (en) * | 2003-03-28 | 2004-09-30 | Saint-Gobain Ceramics & Plastics, Inc. | Wafer carrier having improved processing characteristics |
DE10331049B4 (de) * | 2003-07-09 | 2010-04-08 | Saint-Gobain Industriekeramik Rödental GmbH | Verfahren zur Herstellung eines porösen Keramikkörpers, danach hergestellter poröser Keramikkörper und dessen Verwendung |
US20080265471A1 (en) * | 2005-11-07 | 2008-10-30 | Colopy Curtis M | Polycrystalline Sic Electrical Devices and Methods for Fabricating the Same |
WO2012071353A1 (en) | 2010-11-22 | 2012-05-31 | Saint-Gobain Ceramics & Plastics, Inc. | Infiltrated silicon carbide bodies and methods of making |
TW201321331A (zh) * | 2011-11-16 | 2013-06-01 | Tse Jie Entpr Ltd | 陶瓷散熱基材的製造方法 |
EP3046893B1 (de) * | 2013-09-19 | 2018-11-21 | United Technologies Corporation | Verfahren zur herstellung eines keramikartikels |
US9676631B2 (en) | 2014-07-21 | 2017-06-13 | Lori Bracamonte | Reaction bonded silicon carbide bodies made from high purity carbonaceous preforms |
US9951952B2 (en) | 2014-10-15 | 2018-04-24 | Specialized Component Parts Limited, Inc. | Hot surface igniters and methods of making same |
CN112960983B (zh) * | 2021-03-23 | 2022-10-21 | 中钢集团洛阳耐火材料研究院有限公司 | 一种碳化硅陶瓷复合制品的制备方法 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3951587A (en) * | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
US4295890A (en) * | 1975-12-03 | 1981-10-20 | Ppg Industries, Inc. | Submicron beta silicon carbide powder and sintered articles of high density prepared therefrom |
US4238434A (en) * | 1978-02-16 | 1980-12-09 | Ibigawa Electric Industry Co., Ltd. | Method of producing a silicon carbide sintered body |
JPS54122312A (en) * | 1978-03-15 | 1979-09-21 | Hiroshige Suzuki | Silicon carbide powder for sintering use and preparation thereof |
DE2910059C2 (de) * | 1978-03-15 | 1982-05-19 | Suzuki, Hiroshige, Tokyo | Verfahren zur Herstellung von feinteiligem Siliziumkarbid sowie dessen Verwendung zur Herstellung von hochdichten Sinterkörpern |
JPS59102872A (ja) * | 1982-12-06 | 1984-06-14 | 日本特殊陶業株式会社 | 炭化珪素.黒鉛複合焼結体の製造方法 |
JPS59207873A (ja) * | 1983-05-10 | 1984-11-26 | ティーディーケイ株式会社 | 高密度炭化ケイ素焼結体の製造方法 |
US4525461A (en) * | 1983-12-14 | 1985-06-25 | Kennecott Corporation | Sintered silicon carbide/graphite/carbon composite ceramic body having ultrafine grain microstructure |
EP0147478B1 (de) * | 1983-12-23 | 1987-05-06 | Hoechst CeramTec Aktiengesellschaft | Schlickergiessmasse zur Herstellung von Formkörpern als aus Siliciumcarbid |
JPS60138913A (ja) * | 1983-12-26 | 1985-07-23 | Toshiba Ceramics Co Ltd | 半導体拡散炉管の製造方法 |
JPS60200861A (ja) * | 1984-03-26 | 1985-10-11 | 住友化学工業株式会社 | 高強度炭化珪素焼結体の製造方法 |
JPS60246264A (ja) * | 1984-05-23 | 1985-12-05 | 東芝セラミツクス株式会社 | 炭化珪素質材料の製造方法 |
US4771021A (en) * | 1985-07-01 | 1988-09-13 | Teruyasu Tamamizu | Semi-conductor diffusion furnace components |
JPS6212666A (ja) * | 1985-07-09 | 1987-01-21 | 東芝セラミツクス株式会社 | 半導体用炉芯管の製造方法 |
US4987103A (en) * | 1986-04-09 | 1991-01-22 | Nippon Pillar Packing Co., Ltd. | Slider composed of a high-density silicon carbide sintered compact |
US4693988A (en) * | 1986-07-01 | 1987-09-15 | Kennecott Corporation | Single phase silicon carbide refractory |
JP2548949B2 (ja) * | 1987-09-01 | 1996-10-30 | 東芝セラミックス株式会社 | 半導体製造用構成部材 |
DE3736660A1 (de) * | 1987-10-29 | 1989-05-11 | Mtu Muenchen Gmbh | Verfahren zur herstellung eines poroesen formkoerpers |
KR910002578B1 (ko) * | 1988-01-19 | 1991-04-27 | 닙폰 가이시 카부시키카이샤 | 고밀도 SiC 소결체의 제조방법 |
US4998879A (en) * | 1988-04-29 | 1991-03-12 | Norton Company | High purity diffusion furnace components |
US4999228A (en) * | 1988-05-06 | 1991-03-12 | Shin-Etsu Chemical Co., Ltd. | Silicon carbide diffusion tube for semi-conductor |
DE3832876A1 (de) * | 1988-09-28 | 1990-04-05 | Hoechst Ceram Tec Ag | Bauteile aus silizium-infiltriertem siliziumcarbid mit poroeser oberflaeche und verfahren zu ihrer herstellung |
US5094985A (en) * | 1989-01-30 | 1992-03-10 | Kazunori Kijima Kyoto | Sintered silicon carbide body with high thermal conductivity and process of producing the same |
DE69131247T2 (de) * | 1990-11-20 | 1999-09-23 | Asahi Glass Co Ltd | Wärmebehandlungsapparate für Halbleiter und hochreine Siliciumcarbidteile für die Apparate und Verfahren zu ihrer Herstellung |
US5422322A (en) * | 1993-02-10 | 1995-06-06 | The Stackpole Corporation | Dense, self-sintered silicon carbide/carbon-graphite composite and process for producing same |
US5486496A (en) * | 1994-06-10 | 1996-01-23 | Alumina Ceramics Co. (Aci) | Graphite-loaded silicon carbide |
CN1147806A (zh) * | 1995-03-01 | 1997-04-16 | 圣戈本/诺顿工业搪瓷有限公司 | 新颖的碳化硅仿真晶片 |
US5702997A (en) * | 1996-10-04 | 1997-12-30 | Saint-Gobain/Norton Industrial Ceramics Corp. | Process for making crack-free silicon carbide diffusion components |
-
1996
- 1996-10-04 US US08/725,717 patent/US5702997A/en not_active Expired - Lifetime
-
1997
- 1997-09-10 US US08/926,708 patent/US5840639A/en not_active Expired - Lifetime
- 1997-09-10 US US08/926,640 patent/US5902760A/en not_active Expired - Lifetime
- 1997-10-03 CN CN97198553A patent/CN1068861C/zh not_active Expired - Fee Related
- 1997-10-03 DE DE69714275T patent/DE69714275T2/de not_active Expired - Lifetime
- 1997-10-03 CA CA002267854A patent/CA2267854C/en not_active Expired - Fee Related
- 1997-10-03 AU AU46081/97A patent/AU4608197A/en not_active Abandoned
- 1997-10-03 WO PCT/US1997/018033 patent/WO1998014411A1/en active IP Right Grant
- 1997-10-03 JP JP51695998A patent/JP3237760B2/ja not_active Expired - Lifetime
- 1997-10-03 EP EP97944628A patent/EP0931033B1/de not_active Expired - Lifetime
-
1999
- 1999-03-26 US US09/277,832 patent/US5972818A/en not_active Expired - Lifetime
- 1999-04-03 KR KR1019997002922A patent/KR100306353B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2000503970A (ja) | 2000-04-04 |
CN1068861C (zh) | 2001-07-25 |
WO1998014411A1 (en) | 1998-04-09 |
US5702997A (en) | 1997-12-30 |
KR20000048896A (ko) | 2000-07-25 |
AU4608197A (en) | 1998-04-24 |
KR100306353B1 (ko) | 2001-09-13 |
US5972818A (en) | 1999-10-26 |
JP3237760B2 (ja) | 2001-12-10 |
CA2267854A1 (en) | 1998-04-09 |
CA2267854C (en) | 2002-02-19 |
CN1232440A (zh) | 1999-10-20 |
US5840639A (en) | 1998-11-24 |
US5902760A (en) | 1999-05-11 |
EP0931033A1 (de) | 1999-07-28 |
DE69714275T2 (de) | 2003-03-20 |
EP0931033B1 (de) | 2002-07-24 |
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