DE69711520T2 - Mehrdrahtsäge - Google Patents

Mehrdrahtsäge

Info

Publication number
DE69711520T2
DE69711520T2 DE1997611520 DE69711520T DE69711520T2 DE 69711520 T2 DE69711520 T2 DE 69711520T2 DE 1997611520 DE1997611520 DE 1997611520 DE 69711520 T DE69711520 T DE 69711520T DE 69711520 T2 DE69711520 T2 DE 69711520T2
Authority
DE
Germany
Prior art keywords
wire saw
saw
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1997611520
Other languages
English (en)
Other versions
DE69711520D1 (de
Inventor
Junzou Wakuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE69711520D1 publication Critical patent/DE69711520D1/de
Application granted granted Critical
Publication of DE69711520T2 publication Critical patent/DE69711520T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/929—Tool or tool with support
    • Y10T83/9292—Wire tool

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE1997611520 1996-09-06 1997-07-24 Mehrdrahtsäge Expired - Lifetime DE69711520T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23603696A JP3273163B2 (ja) 1996-09-06 1996-09-06 マルチワイヤソー

Publications (2)

Publication Number Publication Date
DE69711520D1 DE69711520D1 (de) 2002-05-08
DE69711520T2 true DE69711520T2 (de) 2002-10-31

Family

ID=16994818

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1997611520 Expired - Lifetime DE69711520T2 (de) 1996-09-06 1997-07-24 Mehrdrahtsäge

Country Status (6)

Country Link
US (1) US5906192A (de)
EP (1) EP0827798B1 (de)
JP (1) JP3273163B2 (de)
KR (1) KR100253946B1 (de)
DE (1) DE69711520T2 (de)
TW (1) TW434093B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6357433B1 (en) * 2000-06-01 2002-03-19 Motorola, Inc. Machine for cutting brittle materials
DE10237247B4 (de) * 2002-08-14 2004-09-09 Siltronic Ag Verfahren zur Herstellung einer Halbleiterscheibe aus Silicium
WO2008121001A1 (en) * 2007-04-02 2008-10-09 Thorvald Abel Engh A saw wire apparatus
DE102007019566B4 (de) * 2007-04-25 2012-11-29 Siltronic Ag Drahtführungsrolle für Drahtsäge
JP2010253621A (ja) * 2009-04-27 2010-11-11 Ihi Compressor & Machinery Co Ltd ワイヤソーのクーラント管理方法及び装置
CN103144208A (zh) * 2013-02-17 2013-06-12 英利集团有限公司 一种线锯切割方法
KR101289185B1 (ko) * 2013-03-04 2013-08-07 백무윤 와이어소의 롤러
CN105142836A (zh) * 2013-05-17 2015-12-09 梅耶博格公司 包括有槽滑轮的线锯
ES2652516B1 (es) * 2014-11-03 2019-01-22 Pedrini Spa Ad Unico Socio Máquina multihilo para cortar bloques de piedra y dispositivo tensor de hilo.
CN107097362B (zh) * 2016-02-19 2020-04-17 友达晶材股份有限公司 晶圆切片机及其轮组结构与晶圆切片的方法
KR102044722B1 (ko) * 2018-04-03 2019-11-15 에스앤씨 주식회사 자리바꿈 메인롤러가 별도로 구비되는 멀티 와이어를 이용한 와이어 쏘우장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7308102A (de) * 1973-06-12 1974-12-16
JP2562597B2 (ja) * 1987-03-27 1996-12-11 京セラ株式会社 ワイヤソ−
JP2840491B2 (ja) * 1991-11-29 1998-12-24 信越半導体株式会社 ワイヤソー用溝付きローラ及びその取換方法
JPH07276219A (ja) * 1994-04-11 1995-10-24 Tokyo Seimitsu Co Ltd ワイヤソーの溝付きローラ温度制御装置
JPH07299729A (ja) * 1994-04-26 1995-11-14 Tokyo Seimitsu Co Ltd ワイヤソーのガイドローラ摩耗検知装置
JPH07308918A (ja) * 1994-05-16 1995-11-28 Tokyo Seimitsu Co Ltd ワイヤーソーのワイヤー洗浄装置
JP2755907B2 (ja) * 1994-06-28 1998-05-25 信越半導体株式会社 ワイヤソー用溝ローラ
EP0716910B1 (de) * 1994-12-15 2002-03-27 Sharp Kabushiki Kaisha Drahtgittersäge und Sägeverfahren
US5564409A (en) * 1995-06-06 1996-10-15 Corning Incorporated Apparatus and method for wire cutting glass-ceramic wafers
CH691037A5 (fr) * 1996-02-06 2001-04-12 Hct Shaping Systems Sa Dispositif de sciage par fil.

Also Published As

Publication number Publication date
JPH1080855A (ja) 1998-03-31
KR19980024142A (ko) 1998-07-06
KR100253946B1 (ko) 2000-04-15
DE69711520D1 (de) 2002-05-08
JP3273163B2 (ja) 2002-04-08
TW434093B (en) 2001-05-16
EP0827798A1 (de) 1998-03-11
US5906192A (en) 1999-05-25
EP0827798B1 (de) 2002-04-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition