DE69710185D1 - Vibrationsstabilisator für emissionsmikroskop - Google Patents

Vibrationsstabilisator für emissionsmikroskop

Info

Publication number
DE69710185D1
DE69710185D1 DE69710185T DE69710185T DE69710185D1 DE 69710185 D1 DE69710185 D1 DE 69710185D1 DE 69710185 T DE69710185 T DE 69710185T DE 69710185 T DE69710185 T DE 69710185T DE 69710185 D1 DE69710185 D1 DE 69710185D1
Authority
DE
Germany
Prior art keywords
chip
microscope
camera
rubber boot
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69710185T
Other languages
English (en)
Other versions
DE69710185T2 (de
Inventor
Barry Colvin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micromanipulator Co Inc
Original Assignee
Alpha Innotech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alpha Innotech Corp filed Critical Alpha Innotech Corp
Publication of DE69710185D1 publication Critical patent/DE69710185D1/de
Application granted granted Critical
Publication of DE69710185T2 publication Critical patent/DE69710185T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G01R31/307—Contactless testing using electron beams of integrated circuits
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
DE69710185T 1996-04-26 1997-04-28 Vibrationsstabilisator für emissionsmikroskop Expired - Fee Related DE69710185T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/638,638 US5764409A (en) 1996-04-26 1996-04-26 Elimination of vibration by vibration coupling in microscopy applications
PCT/US1997/007169 WO1997041479A1 (en) 1996-04-26 1997-04-28 Anti-vibration stabilizer for a portable emission microscope

Publications (2)

Publication Number Publication Date
DE69710185D1 true DE69710185D1 (de) 2002-03-14
DE69710185T2 DE69710185T2 (de) 2002-06-27

Family

ID=24560847

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69710185T Expired - Fee Related DE69710185T2 (de) 1996-04-26 1997-04-28 Vibrationsstabilisator für emissionsmikroskop

Country Status (7)

Country Link
US (1) US5764409A (de)
EP (1) EP0895607B1 (de)
JP (1) JP2000510606A (de)
AT (1) ATE212733T1 (de)
AU (1) AU2817997A (de)
DE (1) DE69710185T2 (de)
WO (1) WO1997041479A1 (de)

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US6134365A (en) * 1998-06-01 2000-10-17 Colvin; James Barry Coherent illumination system and method
US6112004A (en) * 1998-06-01 2000-08-29 Colvin; James Barry Emission microscopy system and method
CA2243090A1 (en) 1998-07-10 2000-01-10 Timothy M. Richardson Inverted darkfield contrast microscope and method
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US6731327B1 (en) 1999-02-12 2004-05-04 Hypervision, Inc. Dynamic structural coupling mechanism for reducing optical degradation in vibrating environments
JP3660561B2 (ja) * 1999-11-10 2005-06-15 株式会社東芝 半導体集積回路の故障解析装置
JP4914537B2 (ja) * 2000-04-19 2012-04-11 オリンパス株式会社 倒立型顕微鏡に適用される試料支持装置
US6628459B2 (en) * 2000-04-19 2003-09-30 Olympus Optical Co., Ltd. Focus stabilizing apparatus
FR2808888B1 (fr) * 2000-05-15 2003-06-20 Trophos Dispositif d'observation sequentielle d'echantillons et procedes l'utilisant
AU2001263285A1 (en) 2000-05-19 2001-12-03 Imago Scientific Instruments Methods of sampling specimens for microanalysis
US6567212B1 (en) 2000-08-16 2003-05-20 Leica Microsystems Heidelberg Gmbh Vibration damping device for microscopes and microscope with a vibration damping device
US6266183B1 (en) * 2000-09-18 2001-07-24 Veeco Instruments Inc. Self-centering crash protection mechanism for interference microscope objective
FR2833718A1 (fr) * 2001-12-13 2003-06-20 Commissariat Energie Atomique Dispositif d'observation d'objets, notamment pour plaques de microtitration
JP4084061B2 (ja) * 2002-03-18 2008-04-30 独立行政法人科学技術振興機構 高安定性光学顕微鏡
FR2842628B1 (fr) * 2002-07-18 2004-09-24 Mauna Kea Technologies "procede de traitement d'une image acquise au moyen d'un guide compose d'une pluralite de fibres optiques"
US6823582B1 (en) 2002-08-02 2004-11-30 National Semiconductor Corporation Apparatus and method for force mounting semiconductor packages to printed circuit boards
US7759949B2 (en) * 2004-05-21 2010-07-20 Microprobe, Inc. Probes with self-cleaning blunt skates for contacting conductive pads
US7733101B2 (en) * 2004-05-21 2010-06-08 Microprobe, Inc. Knee probe having increased scrub motion
US9097740B2 (en) * 2004-05-21 2015-08-04 Formfactor, Inc. Layered probes with core
USRE43503E1 (en) 2006-06-29 2012-07-10 Microprobe, Inc. Probe skates for electrical testing of convex pad topologies
JP2005331888A (ja) * 2004-05-21 2005-12-02 Keyence Corp 蛍光顕微鏡
US9476911B2 (en) 2004-05-21 2016-10-25 Microprobe, Inc. Probes with high current carrying capability and laser machining methods
US8988091B2 (en) 2004-05-21 2015-03-24 Microprobe, Inc. Multiple contact probes
US7659739B2 (en) * 2006-09-14 2010-02-09 Micro Porbe, Inc. Knee probe having reduced thickness section for control of scrub motion
JP4624725B2 (ja) * 2004-05-28 2011-02-02 オリンパス株式会社 顕微鏡観察システムおよび顕微鏡観察方法
DE102005018239B3 (de) * 2005-04-19 2006-10-12 Carl Mahr Holding Gmbh Optische Messeinrichtung mit reduzierter Schwingungsempfindlichkeit
US7649367B2 (en) * 2005-12-07 2010-01-19 Microprobe, Inc. Low profile probe having improved mechanical scrub and reduced contact inductance
US7312617B2 (en) 2006-03-20 2007-12-25 Microprobe, Inc. Space transformers employing wire bonds for interconnections with fine pitch contacts
JP4932384B2 (ja) * 2006-08-25 2012-05-16 オリンパス株式会社 生体観察装置
JP5530051B2 (ja) * 2006-08-25 2014-06-25 オリンパス株式会社 対物レンズ用ガイド装置および対物レンズユニット
US8907689B2 (en) * 2006-10-11 2014-12-09 Microprobe, Inc. Probe retention arrangement
US7786740B2 (en) * 2006-10-11 2010-08-31 Astria Semiconductor Holdings, Inc. Probe cards employing probes having retaining portions for potting in a potting region
CN101201371B (zh) * 2006-12-15 2011-12-21 鸿富锦精密工业（深圳）有限公司 印刷电路检测装置和方法
US7514948B2 (en) * 2007-04-10 2009-04-07 Microprobe, Inc. Vertical probe array arranged to provide space transformation
US8444124B2 (en) * 2007-08-15 2013-05-21 Honda Motor Co., Ltd. Engine natural vibration frequency detection method, active vibration isolation support device control method, engine natural vibration frequency detection apparatus, active vibration isolation support device control apparatus, active vibration isolation support device, and vibration frequency detection apparatus for vibrating body
US8723546B2 (en) * 2007-10-19 2014-05-13 Microprobe, Inc. Vertical guided layered probe
US7671610B2 (en) * 2007-10-19 2010-03-02 Microprobe, Inc. Vertical guided probe array providing sideways scrub motion
US8230593B2 (en) * 2008-05-29 2012-07-31 Microprobe, Inc. Probe bonding method having improved control of bonding material
US8073019B2 (en) * 2009-03-02 2011-12-06 Jian Liu 810 nm ultra-short pulsed fiber laser
CN102436062B (zh) * 2010-09-29 2015-08-05 鸿富锦精密工业（深圳）有限公司 显微镜装置
TWI494596B (zh) * 2013-08-21 2015-08-01 Miruc Optical Co Ltd 顯微鏡用可攜式終端轉接器和使用可攜式終端轉接器的顯微鏡拍攝方法
CN104076500A (zh) * 2014-06-27 2014-10-01 苏州科德溯源仪器有限公司 一种显微镜用快捷调焦装置
US10571782B2 (en) 2015-11-17 2020-02-25 Research Institute At Nationwide Children's Hospital Portable image diagnostic apparatus and system
US10191108B2 (en) * 2015-11-19 2019-01-29 Globalfoundries Inc. On-chip sensor for monitoring active circuits on integrated circuit (IC) chips
JP6546672B1 (ja) * 2018-02-22 2019-07-17 陽程科技股▲ふん▼有限公司 光路検出装置の検出方法
US11125815B2 (en) * 2019-09-27 2021-09-21 Advanced Micro Devices, Inc. Electro-optic waveform analysis process
CN111722409B (zh) * 2020-07-14 2022-06-14 东南大学 一种超长焦镜头与工业相机稳定连接辅助装置

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US1889794A (en) * 1931-01-03 1932-12-06 Bausch & Lomb Microscope objective
NL6906141A (de) * 1969-04-21 1970-10-23
US4025171A (en) * 1976-02-17 1977-05-24 Bausch & Lomb Incorporated Apparatus for parfocalizing objectives
DE2655041C2 (de) * 1976-12-04 1982-04-15 Fa. Carl Zeiss, 7920 Heidenheim Immersionsobjektiv zum Gebrauch mit mehreren optisch verschiedenen Immersionsmitteln
US4164461A (en) * 1977-01-03 1979-08-14 Raytheon Company Semiconductor integrated circuit structures and manufacturing methods
US4357203A (en) * 1981-12-30 1982-11-02 Rca Corporation Plasma etching of polyimide
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US4556317A (en) * 1984-02-22 1985-12-03 Kla Instruments Corporation X-Y Stage for a patterned wafer automatic inspection system
US4680635A (en) * 1986-04-01 1987-07-14 Intel Corporation Emission microscope
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US4772846A (en) * 1986-12-29 1988-09-20 Hughes Aircraft Company Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy
US4755874A (en) * 1987-08-31 1988-07-05 Kla Instruments Corporation Emission microscopy system
US4811090A (en) * 1988-01-04 1989-03-07 Hypervision Image emission microscope with improved image processing capability
JPH0259710A (ja) * 1988-08-25 1990-02-28 Mitsuhiko Yamada 実物光学顕微鏡
JP2815196B2 (ja) * 1989-10-02 1998-10-27 オリンパス光学工業株式会社 微細表面形状計測装置
US5035768A (en) * 1989-11-14 1991-07-30 Intel Corporation Novel etch back process for tungsten contact/via filling
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US5301006A (en) * 1992-01-28 1994-04-05 Advanced Micro Devices, Inc. Emission microscope
US5239416A (en) * 1992-06-29 1993-08-24 Optical Designs, Inc. Variable power zoom stand magnifier
US5497267A (en) * 1993-05-21 1996-03-05 Mitsubishi Chemical Corporation Video microscope
US5475316A (en) * 1993-12-27 1995-12-12 Hypervision, Inc. Transportable image emission microscope

Also Published As

Publication number Publication date
ATE212733T1 (de) 2002-02-15
JP2000510606A (ja) 2000-08-15
EP0895607A1 (de) 1999-02-10
DE69710185T2 (de) 2002-06-27
US5764409A (en) 1998-06-09
WO1997041479A1 (en) 1997-11-06
EP0895607B1 (de) 2002-01-30
AU2817997A (en) 1997-11-19

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: THE MICROMANIPULATOR CO. INC., CARSON CITY, NEV.,

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee