ATE212733T1 - Vibrationsstabilisator für emissionsmikroskop - Google Patents
Vibrationsstabilisator für emissionsmikroskopInfo
- Publication number
- ATE212733T1 ATE212733T1 AT97922535T AT97922535T ATE212733T1 AT E212733 T1 ATE212733 T1 AT E212733T1 AT 97922535 T AT97922535 T AT 97922535T AT 97922535 T AT97922535 T AT 97922535T AT E212733 T1 ATE212733 T1 AT E212733T1
- Authority
- AT
- Austria
- Prior art keywords
- chip
- microscope
- camera
- rubber boot
- cylinder
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
- G01R31/307—Contactless testing using electron beams of integrated circuits
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/638,638 US5764409A (en) | 1996-04-26 | 1996-04-26 | Elimination of vibration by vibration coupling in microscopy applications |
PCT/US1997/007169 WO1997041479A1 (en) | 1996-04-26 | 1997-04-28 | Anti-vibration stabilizer for a portable emission microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE212733T1 true ATE212733T1 (de) | 2002-02-15 |
Family
ID=24560847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT97922535T ATE212733T1 (de) | 1996-04-26 | 1997-04-28 | Vibrationsstabilisator für emissionsmikroskop |
Country Status (7)
Country | Link |
---|---|
US (1) | US5764409A (de) |
EP (1) | EP0895607B1 (de) |
JP (1) | JP2000510606A (de) |
AT (1) | ATE212733T1 (de) |
AU (1) | AU2817997A (de) |
DE (1) | DE69710185T2 (de) |
WO (1) | WO1997041479A1 (de) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6134365A (en) * | 1998-06-01 | 2000-10-17 | Colvin; James Barry | Coherent illumination system and method |
US6112004A (en) * | 1998-06-01 | 2000-08-29 | Colvin; James Barry | Emission microscopy system and method |
CA2243090A1 (en) | 1998-07-10 | 2000-01-10 | Timothy M. Richardson | Inverted darkfield contrast microscope and method |
US6271042B1 (en) * | 1998-08-26 | 2001-08-07 | Alpha Innotech Corporation | Biochip detection system |
US6731327B1 (en) | 1999-02-12 | 2004-05-04 | Hypervision, Inc. | Dynamic structural coupling mechanism for reducing optical degradation in vibrating environments |
JP3660561B2 (ja) * | 1999-11-10 | 2005-06-15 | 株式会社東芝 | 半導体集積回路の故障解析装置 |
US6628459B2 (en) * | 2000-04-19 | 2003-09-30 | Olympus Optical Co., Ltd. | Focus stabilizing apparatus |
JP4914537B2 (ja) * | 2000-04-19 | 2012-04-11 | オリンパス株式会社 | 倒立型顕微鏡に適用される試料支持装置 |
FR2808888B1 (fr) * | 2000-05-15 | 2003-06-20 | Trophos | Dispositif d'observation sequentielle d'echantillons et procedes l'utilisant |
WO2001090761A2 (en) * | 2000-05-19 | 2001-11-29 | Imago Scientific Instruments | Methods of sampling specimens for microanalysis |
US6567212B1 (en) | 2000-08-16 | 2003-05-20 | Leica Microsystems Heidelberg Gmbh | Vibration damping device for microscopes and microscope with a vibration damping device |
US6266183B1 (en) * | 2000-09-18 | 2001-07-24 | Veeco Instruments Inc. | Self-centering crash protection mechanism for interference microscope objective |
FR2833718A1 (fr) * | 2001-12-13 | 2003-06-20 | Commissariat Energie Atomique | Dispositif d'observation d'objets, notamment pour plaques de microtitration |
JP4084061B2 (ja) * | 2002-03-18 | 2008-04-30 | 独立行政法人科学技術振興機構 | 高安定性光学顕微鏡 |
FR2842628B1 (fr) * | 2002-07-18 | 2004-09-24 | Mauna Kea Technologies | "procede de traitement d'une image acquise au moyen d'un guide compose d'une pluralite de fibres optiques" |
US6823582B1 (en) | 2002-08-02 | 2004-11-30 | National Semiconductor Corporation | Apparatus and method for force mounting semiconductor packages to printed circuit boards |
US8988091B2 (en) * | 2004-05-21 | 2015-03-24 | Microprobe, Inc. | Multiple contact probes |
JP2005331888A (ja) * | 2004-05-21 | 2005-12-02 | Keyence Corp | 蛍光顕微鏡 |
US7759949B2 (en) * | 2004-05-21 | 2010-07-20 | Microprobe, Inc. | Probes with self-cleaning blunt skates for contacting conductive pads |
US9097740B2 (en) * | 2004-05-21 | 2015-08-04 | Formfactor, Inc. | Layered probes with core |
US7733101B2 (en) * | 2004-05-21 | 2010-06-08 | Microprobe, Inc. | Knee probe having increased scrub motion |
US9476911B2 (en) | 2004-05-21 | 2016-10-25 | Microprobe, Inc. | Probes with high current carrying capability and laser machining methods |
US7659739B2 (en) * | 2006-09-14 | 2010-02-09 | Micro Porbe, Inc. | Knee probe having reduced thickness section for control of scrub motion |
USRE43503E1 (en) | 2006-06-29 | 2012-07-10 | Microprobe, Inc. | Probe skates for electrical testing of convex pad topologies |
JP4624725B2 (ja) * | 2004-05-28 | 2011-02-02 | オリンパス株式会社 | 顕微鏡観察システムおよび顕微鏡観察方法 |
DE102005018239B3 (de) * | 2005-04-19 | 2006-10-12 | Carl Mahr Holding Gmbh | Optische Messeinrichtung mit reduzierter Schwingungsempfindlichkeit |
US7649367B2 (en) * | 2005-12-07 | 2010-01-19 | Microprobe, Inc. | Low profile probe having improved mechanical scrub and reduced contact inductance |
US7312617B2 (en) | 2006-03-20 | 2007-12-25 | Microprobe, Inc. | Space transformers employing wire bonds for interconnections with fine pitch contacts |
JP5530051B2 (ja) * | 2006-08-25 | 2014-06-25 | オリンパス株式会社 | 対物レンズ用ガイド装置および対物レンズユニット |
JP4932384B2 (ja) | 2006-08-25 | 2012-05-16 | オリンパス株式会社 | 生体観察装置 |
US7786740B2 (en) * | 2006-10-11 | 2010-08-31 | Astria Semiconductor Holdings, Inc. | Probe cards employing probes having retaining portions for potting in a potting region |
US8907689B2 (en) | 2006-10-11 | 2014-12-09 | Microprobe, Inc. | Probe retention arrangement |
CN101201371B (zh) * | 2006-12-15 | 2011-12-21 | 鸿富锦精密工业(深圳)有限公司 | 印刷电路检测装置和方法 |
US7514948B2 (en) | 2007-04-10 | 2009-04-07 | Microprobe, Inc. | Vertical probe array arranged to provide space transformation |
US8444124B2 (en) * | 2007-08-15 | 2013-05-21 | Honda Motor Co., Ltd. | Engine natural vibration frequency detection method, active vibration isolation support device control method, engine natural vibration frequency detection apparatus, active vibration isolation support device control apparatus, active vibration isolation support device, and vibration frequency detection apparatus for vibrating body |
US7671610B2 (en) * | 2007-10-19 | 2010-03-02 | Microprobe, Inc. | Vertical guided probe array providing sideways scrub motion |
US8723546B2 (en) * | 2007-10-19 | 2014-05-13 | Microprobe, Inc. | Vertical guided layered probe |
US8230593B2 (en) * | 2008-05-29 | 2012-07-31 | Microprobe, Inc. | Probe bonding method having improved control of bonding material |
US8073019B2 (en) * | 2009-03-02 | 2011-12-06 | Jian Liu | 810 nm ultra-short pulsed fiber laser |
CN102436062B (zh) * | 2010-09-29 | 2015-08-05 | 鸿富锦精密工业(深圳)有限公司 | 显微镜装置 |
TWI494596B (zh) * | 2013-08-21 | 2015-08-01 | Miruc Optical Co Ltd | 顯微鏡用可攜式終端轉接器和使用可攜式終端轉接器的顯微鏡拍攝方法 |
CN104076500A (zh) * | 2014-06-27 | 2014-10-01 | 苏州科德溯源仪器有限公司 | 一种显微镜用快捷调焦装置 |
WO2017087381A1 (en) * | 2015-11-17 | 2017-05-26 | The Research Institute At Nationwide Children's Hospital | Portable image diagnostic apparatus and system |
US10191108B2 (en) * | 2015-11-19 | 2019-01-29 | Globalfoundries Inc. | On-chip sensor for monitoring active circuits on integrated circuit (IC) chips |
JP6546672B1 (ja) * | 2018-02-22 | 2019-07-17 | 陽程科技股▲ふん▼有限公司 | 光路検出装置の検出方法 |
US11125815B2 (en) * | 2019-09-27 | 2021-09-21 | Advanced Micro Devices, Inc. | Electro-optic waveform analysis process |
CN111722409B (zh) * | 2020-07-14 | 2022-06-14 | 东南大学 | 一种超长焦镜头与工业相机稳定连接辅助装置 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1889794A (en) * | 1931-01-03 | 1932-12-06 | Bausch & Lomb | Microscope objective |
NL6906141A (de) * | 1969-04-21 | 1970-10-23 | ||
US4025171A (en) * | 1976-02-17 | 1977-05-24 | Bausch & Lomb Incorporated | Apparatus for parfocalizing objectives |
DE2655041C2 (de) * | 1976-12-04 | 1982-04-15 | Fa. Carl Zeiss, 7920 Heidenheim | Immersionsobjektiv zum Gebrauch mit mehreren optisch verschiedenen Immersionsmitteln |
US4164461A (en) * | 1977-01-03 | 1979-08-14 | Raytheon Company | Semiconductor integrated circuit structures and manufacturing methods |
US4357203A (en) * | 1981-12-30 | 1982-11-02 | Rca Corporation | Plasma etching of polyimide |
US4556317A (en) * | 1984-02-22 | 1985-12-03 | Kla Instruments Corporation | X-Y Stage for a patterned wafer automatic inspection system |
US4618938A (en) * | 1984-02-22 | 1986-10-21 | Kla Instruments Corporation | Method and apparatus for automatic wafer inspection |
US4680635A (en) * | 1986-04-01 | 1987-07-14 | Intel Corporation | Emission microscope |
US4722298A (en) * | 1986-05-19 | 1988-02-02 | Machine Technology, Inc. | Modular processing apparatus for processing semiconductor wafers |
US4772846A (en) * | 1986-12-29 | 1988-09-20 | Hughes Aircraft Company | Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy |
US4755874A (en) * | 1987-08-31 | 1988-07-05 | Kla Instruments Corporation | Emission microscopy system |
US4811090A (en) * | 1988-01-04 | 1989-03-07 | Hypervision | Image emission microscope with improved image processing capability |
JPH0259710A (ja) * | 1988-08-25 | 1990-02-28 | Mitsuhiko Yamada | 実物光学顕微鏡 |
JP2815196B2 (ja) * | 1989-10-02 | 1998-10-27 | オリンパス光学工業株式会社 | 微細表面形状計測装置 |
US5035768A (en) * | 1989-11-14 | 1991-07-30 | Intel Corporation | Novel etch back process for tungsten contact/via filling |
US5059785A (en) * | 1990-05-30 | 1991-10-22 | The United States Of America As Represented By The United States Department Of Energy | Backscattering spectrometry device for identifying unknown elements present in a workpiece |
US5301006A (en) * | 1992-01-28 | 1994-04-05 | Advanced Micro Devices, Inc. | Emission microscope |
US5239416A (en) * | 1992-06-29 | 1993-08-24 | Optical Designs, Inc. | Variable power zoom stand magnifier |
US5497267A (en) * | 1993-05-21 | 1996-03-05 | Mitsubishi Chemical Corporation | Video microscope |
US5475316A (en) * | 1993-12-27 | 1995-12-12 | Hypervision, Inc. | Transportable image emission microscope |
-
1996
- 1996-04-26 US US08/638,638 patent/US5764409A/en not_active Expired - Fee Related
-
1997
- 1997-04-28 WO PCT/US1997/007169 patent/WO1997041479A1/en active IP Right Grant
- 1997-04-28 AT AT97922535T patent/ATE212733T1/de not_active IP Right Cessation
- 1997-04-28 JP JP09539158A patent/JP2000510606A/ja active Pending
- 1997-04-28 EP EP97922535A patent/EP0895607B1/de not_active Expired - Lifetime
- 1997-04-28 DE DE69710185T patent/DE69710185T2/de not_active Expired - Fee Related
- 1997-04-28 AU AU28179/97A patent/AU2817997A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
DE69710185D1 (de) | 2002-03-14 |
WO1997041479A1 (en) | 1997-11-06 |
EP0895607B1 (de) | 2002-01-30 |
US5764409A (en) | 1998-06-09 |
AU2817997A (en) | 1997-11-19 |
EP0895607A1 (de) | 1999-02-10 |
DE69710185T2 (de) | 2002-06-27 |
JP2000510606A (ja) | 2000-08-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |