DE69706850T2 - Artikel mit schutzschicht, enthaltend eine verbesserte verankerungsschicht und seine herstellung - Google Patents
Artikel mit schutzschicht, enthaltend eine verbesserte verankerungsschicht und seine herstellungInfo
- Publication number
- DE69706850T2 DE69706850T2 DE69706850T DE69706850T DE69706850T2 DE 69706850 T2 DE69706850 T2 DE 69706850T2 DE 69706850 T DE69706850 T DE 69706850T DE 69706850 T DE69706850 T DE 69706850T DE 69706850 T2 DE69706850 T2 DE 69706850T2
- Authority
- DE
- Germany
- Prior art keywords
- article
- production
- improved anchor
- protective layer
- layer containing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011241 protective layer Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
- C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12611—Oxide-containing component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12944—Ni-base component
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Turbine Rotor Nozzle Sealing (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP96109537 | 1996-06-13 | ||
PCT/EP1997/002861 WO1997047784A1 (en) | 1996-06-13 | 1997-06-02 | Article with a protective coating system comprising an improved anchoring layer and its manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69706850D1 DE69706850D1 (de) | 2001-10-25 |
DE69706850T2 true DE69706850T2 (de) | 2002-05-16 |
Family
ID=8222895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69706850T Expired - Fee Related DE69706850T2 (de) | 1996-06-13 | 1997-06-02 | Artikel mit schutzschicht, enthaltend eine verbesserte verankerungsschicht und seine herstellung |
Country Status (5)
Country | Link |
---|---|
US (2) | US6528189B1 (de) |
EP (1) | EP0904426B1 (de) |
JP (1) | JP2000511974A (de) |
DE (1) | DE69706850T2 (de) |
WO (1) | WO1997047784A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10225453A1 (de) * | 2002-06-08 | 2004-01-15 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Hochtemperaturbeständiges Bimaterialelement |
DE102019110642A1 (de) * | 2019-04-25 | 2020-10-29 | Vtd Vakuumtechnik Dresden Gmbh | Anode für PVD-Prozesse |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69706850T2 (de) * | 1996-06-13 | 2002-05-16 | Siemens Ag | Artikel mit schutzschicht, enthaltend eine verbesserte verankerungsschicht und seine herstellung |
US5891267A (en) * | 1997-01-16 | 1999-04-06 | General Electric Company | Thermal barrier coating system and method therefor |
EP1029114B1 (de) * | 1997-11-03 | 2001-12-19 | Siemens Aktiengesellschaft | Für eine heissgasbeaufschlagung ausgelegtes erzeugnis und verfahren zur herstellung einer beschichtung für dieses erzeugnis |
DE60033867T2 (de) * | 1999-09-03 | 2007-11-22 | Delphi Technologies, Inc., Troy | Einspritzdüse |
CN101250680B (zh) * | 2000-12-12 | 2013-06-26 | 东京毅力科创株式会社 | 等离子体处理容器内部件以及等离子体处理装置 |
JP3811042B2 (ja) * | 2001-10-04 | 2006-08-16 | アルプス電気株式会社 | 歪みセンサおよびその製造方法 |
FR2840839B1 (fr) * | 2002-06-14 | 2005-01-14 | Snecma Moteurs | Materiau metallique susceptible d'etre use par abrasion; pieces, carter; procede d'elaboration dudit materiau |
US6833203B2 (en) † | 2002-08-05 | 2004-12-21 | United Technologies Corporation | Thermal barrier coating utilizing a dispersion strengthened metallic bond coat |
DE602004001193T2 (de) * | 2003-10-07 | 2007-04-19 | General Electric Co. | Verfahren zur Herstellung eines beschichtetes Substrats aus Superlegierung stabilisiert gegen die Bildung einer sekundären Reaktionszone |
US6933052B2 (en) * | 2003-10-08 | 2005-08-23 | General Electric Company | Diffusion barrier and protective coating for turbine engine component and method for forming |
JP4299152B2 (ja) * | 2004-01-08 | 2009-07-22 | 日本碍子株式会社 | 電磁波シールドケースおよびその製造方法 |
US20050255329A1 (en) * | 2004-05-12 | 2005-11-17 | General Electric Company | Superalloy article having corrosion resistant coating thereon |
EP1645652A1 (de) * | 2004-10-07 | 2006-04-12 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines Schichtsystems |
US7207374B2 (en) * | 2004-10-26 | 2007-04-24 | United Technologies Corporation | Non-oxidizable coating |
DE102007005755A1 (de) * | 2007-02-06 | 2008-08-07 | Mtu Aero Engines Gmbh | Vorrichtung zum Schutz von Bauteilen mit brennbarer Titanlegierung vor Titanfeuer und Verfahren zu deren Herstellung |
US7858205B2 (en) | 2007-09-19 | 2010-12-28 | Siemens Energy, Inc. | Bimetallic bond layer for thermal barrier coating on superalloy |
US8951644B2 (en) | 2007-09-19 | 2015-02-10 | Siemens Energy, Inc. | Thermally protective multiphase precipitant coating |
US20100025500A1 (en) * | 2008-07-31 | 2010-02-04 | Caterpillar Inc. | Materials for fuel injector components |
US20100104773A1 (en) * | 2008-10-24 | 2010-04-29 | Neal James W | Method for use in a coating process |
US8506243B2 (en) * | 2009-11-19 | 2013-08-13 | United Technologies Corporation | Segmented thermally insulating coating |
US9051652B2 (en) * | 2009-12-07 | 2015-06-09 | United Technologies Corporation | Article having thermal barrier coating |
US8347636B2 (en) | 2010-09-24 | 2013-01-08 | General Electric Company | Turbomachine including a ceramic matrix composite (CMC) bridge |
KR101283184B1 (ko) * | 2011-10-19 | 2013-07-05 | 엘지이노텍 주식회사 | 핫플레이트 및 핫플레이트 제조 방법 |
WO2015006329A1 (en) | 2013-07-10 | 2015-01-15 | United Technologies Corporation | Abrasive flow media fixture with end contour |
US9737970B2 (en) | 2013-07-10 | 2017-08-22 | United Technologies Corporation | Vibratory mass media fixture with tip protector |
US9243511B2 (en) | 2014-02-25 | 2016-01-26 | Siemens Aktiengesellschaft | Turbine abradable layer with zig zag groove pattern |
WO2016133987A2 (en) | 2015-02-18 | 2016-08-25 | Siemens Aktiengesellschaft | Forming cooling passages in combustion turbine superalloy castings |
US8939706B1 (en) | 2014-02-25 | 2015-01-27 | Siemens Energy, Inc. | Turbine abradable layer with progressive wear zone having a frangible or pixelated nib surface |
WO2015130527A2 (en) | 2014-02-25 | 2015-09-03 | Siemens Aktiengesellschaft | Turbine component thermal barrier coating with depth-varying material properties |
US9151175B2 (en) | 2014-02-25 | 2015-10-06 | Siemens Aktiengesellschaft | Turbine abradable layer with progressive wear zone multi level ridge arrays |
US11098399B2 (en) | 2014-08-06 | 2021-08-24 | Raytheon Technologies Corporation | Ceramic coating system and method |
US9834835B2 (en) * | 2015-02-18 | 2017-12-05 | United Technologies Corporation | Fire containment coating system for titanium |
WO2016133583A1 (en) | 2015-02-18 | 2016-08-25 | Siemens Aktiengesellschaft | Turbine shroud with abradable layer having ridges with holes |
DE102015222808A1 (de) * | 2015-11-19 | 2017-05-24 | Siemens Aktiengesellschaft | Segmentiertes zweilagiges Schichtsystem |
US10914183B2 (en) * | 2017-10-16 | 2021-02-09 | Onesubsea Ip Uk Limited | Erosion resistant blades for compressors |
CN112218975A (zh) * | 2018-06-07 | 2021-01-12 | 朗姆研究公司 | 减少跨膜界面的扩散 |
JP7258598B2 (ja) * | 2019-02-27 | 2023-04-17 | 三井化学株式会社 | 接合構造体および金属部材 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3837894A (en) * | 1972-05-22 | 1974-09-24 | Union Carbide Corp | Process for producing a corrosion resistant duplex coating |
US4055705A (en) | 1976-05-14 | 1977-10-25 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Thermal barrier coating system |
US4321310A (en) * | 1980-01-07 | 1982-03-23 | United Technologies Corporation | Columnar grain ceramic thermal barrier coatings on polished substrates |
US4321311A (en) | 1980-01-07 | 1982-03-23 | United Technologies Corporation | Columnar grain ceramic thermal barrier coatings |
DE3513882A1 (de) * | 1985-04-17 | 1986-10-23 | Plasmainvent AG, Zug | Schutzschicht |
US5262245A (en) | 1988-08-12 | 1993-11-16 | United Technologies Corporation | Advanced thermal barrier coated superalloy components |
US5273712A (en) | 1989-08-10 | 1993-12-28 | Siemens Aktiengesellschaft | Highly corrosion and/or oxidation-resistant protective coating containing rhenium |
US5268238A (en) | 1989-08-10 | 1993-12-07 | Siemens Aktiengesellschaft | Highly corrosion and/or oxidation-resistant protective coating containing rhenium applied to gas turbine component surface and method thereof |
JPH03157349A (ja) | 1989-11-14 | 1991-07-05 | Lion Corp | 乳化組成物 |
US5087477A (en) | 1990-02-05 | 1992-02-11 | United Technologies Corporation | Eb-pvd method for applying ceramic coatings |
IT1241922B (it) * | 1990-03-09 | 1994-02-01 | Eniricerche Spa | Procedimento per realizzare rivestimenti di carburo di silicio |
US5238752A (en) * | 1990-05-07 | 1993-08-24 | General Electric Company | Thermal barrier coating system with intermetallic overlay bond coat |
US5401307A (en) | 1990-08-10 | 1995-03-28 | Siemens Aktiengesellschaft | High temperature-resistant corrosion protection coating on a component, in particular a gas turbine component |
FR2721622B1 (fr) * | 1994-06-24 | 1997-11-21 | Inst Francais Du Petrole | Méthode de passivation de pièces métalliques en super-alliage à base de nickel et de fer. |
US5484263A (en) | 1994-10-17 | 1996-01-16 | General Electric Company | Non-degrading reflective coating system for high temperature heat shields and a method therefor |
IN187185B (de) * | 1995-04-25 | 2002-02-23 | Siemens Ag | |
DE69706850T2 (de) * | 1996-06-13 | 2002-05-16 | Siemens Ag | Artikel mit schutzschicht, enthaltend eine verbesserte verankerungsschicht und seine herstellung |
-
1997
- 1997-06-02 DE DE69706850T patent/DE69706850T2/de not_active Expired - Fee Related
- 1997-06-02 WO PCT/EP1997/002861 patent/WO1997047784A1/en active IP Right Grant
- 1997-06-02 EP EP97925977A patent/EP0904426B1/de not_active Expired - Lifetime
- 1997-06-02 JP JP10501141A patent/JP2000511974A/ja not_active Ceased
-
1998
- 1998-12-14 US US09/211,109 patent/US6528189B1/en not_active Expired - Fee Related
-
2002
- 2002-10-25 US US10/281,030 patent/US6821578B2/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10225453A1 (de) * | 2002-06-08 | 2004-01-15 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Hochtemperaturbeständiges Bimaterialelement |
DE10225453B4 (de) * | 2002-06-08 | 2004-07-15 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Hochtemperaturbeständiges Bimaterialelement |
DE102019110642A1 (de) * | 2019-04-25 | 2020-10-29 | Vtd Vakuumtechnik Dresden Gmbh | Anode für PVD-Prozesse |
Also Published As
Publication number | Publication date |
---|---|
US20030054108A1 (en) | 2003-03-20 |
EP0904426B1 (de) | 2001-09-19 |
US6821578B2 (en) | 2004-11-23 |
JP2000511974A (ja) | 2000-09-12 |
US6528189B1 (en) | 2003-03-04 |
EP0904426A1 (de) | 1999-03-31 |
DE69706850D1 (de) | 2001-10-25 |
WO1997047784A1 (en) | 1997-12-18 |
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