IT1241922B - Procedimento per realizzare rivestimenti di carburo di silicio - Google Patents

Procedimento per realizzare rivestimenti di carburo di silicio

Info

Publication number
IT1241922B
IT1241922B IT19627A IT1962790A IT1241922B IT 1241922 B IT1241922 B IT 1241922B IT 19627 A IT19627 A IT 19627A IT 1962790 A IT1962790 A IT 1962790A IT 1241922 B IT1241922 B IT 1241922B
Authority
IT
Italy
Prior art keywords
procedure
silicon carbide
making silicon
carbide coatings
coatings
Prior art date
Application number
IT19627A
Other languages
English (en)
Other versions
IT9019627A1 (it
IT9019627A0 (it
Inventor
Valerio Adoncecchi
Emilia Cappelli
Giuseppe Giunta
Antonio Parretta
Original Assignee
Eniricerche Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eniricerche Spa filed Critical Eniricerche Spa
Priority to IT19627A priority Critical patent/IT1241922B/it
Publication of IT9019627A0 publication Critical patent/IT9019627A0/it
Priority to US07/664,926 priority patent/US5141613A/en
Priority to EP91200480A priority patent/EP0446988A1/en
Priority to JP3067762A priority patent/JPH04221074A/ja
Publication of IT9019627A1 publication Critical patent/IT9019627A1/it
Application granted granted Critical
Publication of IT1241922B publication Critical patent/IT1241922B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
IT19627A 1990-03-09 1990-03-09 Procedimento per realizzare rivestimenti di carburo di silicio IT1241922B (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT19627A IT1241922B (it) 1990-03-09 1990-03-09 Procedimento per realizzare rivestimenti di carburo di silicio
US07/664,926 US5141613A (en) 1990-03-09 1991-03-05 Silicon carbide coatings
EP91200480A EP0446988A1 (en) 1990-03-09 1991-03-06 Silicon carbide coatings
JP3067762A JPH04221074A (ja) 1990-03-09 1991-03-08 炭化ケイ素コーティングの形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT19627A IT1241922B (it) 1990-03-09 1990-03-09 Procedimento per realizzare rivestimenti di carburo di silicio

Publications (3)

Publication Number Publication Date
IT9019627A0 IT9019627A0 (it) 1990-03-09
IT9019627A1 IT9019627A1 (it) 1991-09-09
IT1241922B true IT1241922B (it) 1994-02-01

Family

ID=11159842

Family Applications (1)

Application Number Title Priority Date Filing Date
IT19627A IT1241922B (it) 1990-03-09 1990-03-09 Procedimento per realizzare rivestimenti di carburo di silicio

Country Status (4)

Country Link
US (1) US5141613A (it)
EP (1) EP0446988A1 (it)
JP (1) JPH04221074A (it)
IT (1) IT1241922B (it)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2692598B1 (fr) * 1992-06-17 1995-02-10 Air Liquide Procédé de dépôt d'un film contenant du silicium à la surface d'un substrat métallique et procédé de traitement anti-corrosion.
JPH0649645A (ja) * 1992-07-31 1994-02-22 Yoshida Kogyo Kk <Ykk> 硬質多層膜形成体およびその製造方法
US5403458A (en) * 1993-08-05 1995-04-04 Guardian Industries Corp. Sputter-coating target and method of use
WO1995034092A1 (en) * 1994-06-03 1995-12-14 Materials Research Corporation A method of nitridization of titanium thin films
FR2721622B1 (fr) * 1994-06-24 1997-11-21 Inst Francais Du Petrole Méthode de passivation de pièces métalliques en super-alliage à base de nickel et de fer.
SE9500325D0 (sv) * 1995-01-31 1995-01-31 Abb Research Ltd Device for heat shielding when SiC is grown by CVD
KR0164149B1 (ko) * 1995-03-28 1999-02-01 김주용 타이타늄 카보 나이트라이드층의 개질 방법
US5972790A (en) * 1995-06-09 1999-10-26 Tokyo Electron Limited Method for forming salicides
FR2736361B1 (fr) * 1995-07-03 1997-09-19 Aerospatiale Couche mince complexe, piece a faible coefficient de frottement revetue d'une telle couche et procede de realisation d'une telle piece
EP0776991B1 (en) * 1995-12-05 2002-02-06 Applied Materials, Inc. Plasma annealing of thin films
WO1997047784A1 (en) * 1996-06-13 1997-12-18 Siemens Aktiengesellschaft Article with a protective coating system comprising an improved anchoring layer and its manufacture
US6872429B1 (en) 1997-06-30 2005-03-29 Applied Materials, Inc. Deposition of tungsten nitride using plasma pretreatment in a chemical vapor deposition chamber
US6432479B2 (en) 1997-12-02 2002-08-13 Applied Materials, Inc. Method for in-situ, post deposition surface passivation of a chemical vapor deposited film
US6319728B1 (en) 1998-06-05 2001-11-20 Applied Materials, Inc. Method for treating a deposited film for resistivity reduction
JP2000239827A (ja) 1998-12-22 2000-09-05 Bridgestone Corp 積層構造体及びその製造方法
JP3830123B2 (ja) * 1999-09-17 2006-10-04 日本コーティングセンター株式会社 表面被覆超硬合金およびその製造方法
US20050255329A1 (en) * 2004-05-12 2005-11-17 General Electric Company Superalloy article having corrosion resistant coating thereon
US8802493B2 (en) 2011-09-13 2014-08-12 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of oxide semiconductor device
EP3183225A1 (en) * 2014-08-22 2017-06-28 Patrick E. Hopkins Method of forming a thermal barrier coating

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053721B2 (ja) * 1979-06-18 1985-11-27 三菱マテリアル株式会社 切削工具用複合焼結部材
US4399168A (en) * 1980-01-21 1983-08-16 Santrade Ltd. Method of preparing coated cemented carbide product
GB2107742A (en) * 1981-08-07 1983-05-05 Maschf Augsburg Nuernberg Ag Coating nickel containing alloys with titanium compounds
JPS60177179A (ja) * 1984-02-23 1985-09-11 Toshiba Corp 黒色装飾品
JPS60238481A (ja) * 1984-05-14 1985-11-27 Sumitomo Electric Ind Ltd 多重層被覆超硬合金
JPS60251274A (ja) * 1984-05-28 1985-12-11 Toyota Central Res & Dev Lab Inc 窒化物被覆方法
KR890002162B1 (ko) * 1985-11-28 1989-06-21 가부시키가이샤 도시바 세라믹스가 코팅된 슬라이딩 부재와 그의 제조 방법
US4946712A (en) * 1986-08-28 1990-08-07 Libbey-Owens-Ford Co. Glass coating method and resulting article
AT387988B (de) * 1987-08-31 1989-04-10 Plansee Tizit Gmbh Verfahren zur herstellung mehrlagig beschichteter hartmetallteile
US4869929A (en) * 1987-11-10 1989-09-26 Air Products And Chemicals, Inc. Process for preparing sic protective films on metallic or metal impregnated substrates

Also Published As

Publication number Publication date
EP0446988A1 (en) 1991-09-18
JPH04221074A (ja) 1992-08-11
IT9019627A1 (it) 1991-09-09
US5141613A (en) 1992-08-25
IT9019627A0 (it) 1990-03-09

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970313